CN101284601B - Pickup device for substrate in tray - Google Patents

Pickup device for substrate in tray Download PDF

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Publication number
CN101284601B
CN101284601B CN2007100905598A CN200710090559A CN101284601B CN 101284601 B CN101284601 B CN 101284601B CN 2007100905598 A CN2007100905598 A CN 2007100905598A CN 200710090559 A CN200710090559 A CN 200710090559A CN 101284601 B CN101284601 B CN 101284601B
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China
Prior art keywords
swing arm
substrate
pedestal
drive
framework
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CN2007100905598A
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CN101284601A (en
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黄金福
范姜正
郑明昌
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WEIGUANG AUTOMATION SCIENCE AND TECHNOLOGY Co Ltd
Mas Automation Corp
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WEIGUANG AUTOMATION SCIENCE AND TECHNOLOGY Co Ltd
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Priority to CN2007100905598A priority Critical patent/CN101284601B/en
Publication of CN101284601A publication Critical patent/CN101284601A/en
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Abstract

The invention relates to a retrieving device for an internally loaded substrate of a tray. A pedestal is arranged on the side of the tray carrying the substrate; at least a first driver is arranged in the pedestal and an extension frame capable of being driven by the first driver to levelly extend to the bottom of the tray is arranged in sliding manner in the pedestal; at least a second driver is arranged on the extension frame and a plurality of swinging arms are pivotally arranged on the extension frame; a roller is respectively pivoted on one end of each swinging arm, meanwhile, a second driver can drive the swinging arms to swing upward so as to drive the rollers to lift the pedestal in the tray upward and boost, and then directly use the rollers for transmitting the pedestal to move and separate from the tray.

Description

The capture device of substrate in tray
Technical field
The present invention relates to a kind of capture device of substrate in tray, particularly put in the glass substrate that transmits with the display pannel in the pallet, the device technique that captures at a kind of.
Background technology
Press, the glass substrate of display pannel (PANEL), its thickness is equal to or less than 0.7 millimeter mostly, and the width of substrate generally is to be equal to or greater than 1.3 meters, causes the thin thickness of substrate and area wide, is very easy to crooked when carrying and breaks; Therefore, prior art is that substrate level is put in a pallet, causes in the dish substrate can not be subjected to the external force influence when pallet carrying or storehouse and crooked and break.
And know, the bottom of above-mentioned pallet has a plurality of openings, at needs substrate is taken out to add man-hour in pallet, can use a substrate taking-up instrument to insert in the opening, and pallet descended, cause substrate to be put on substrate taking-up instrument and separate, use an absorption arm acquisition simultaneously and transmit substrate on the substrate taking-up instrument to station, following process district with pallet.
Lift the technology that discloses the basal plate transmitting system of No. 1607163 announcements of CN as Chinese patent, promptly the substrate in a plurality of pin shapes of a rest base perpendicular positioning takes out instrument, and the sliding bay-lift of a level of establishing in the bearing, the a plurality of through holes of tool on the bay-lift are through to the bay-lift top for a plurality of substrate taking-up instruments simultaneously; In view of the above, when the pallet that contains substrate is put on bay-lift, a plurality of substrates take out instrument can be separately corresponding to each opening below, utilize this moment bay-lift transfer pallet to descend, cause substrate to be put on a plurality of substrate taking-up instruments, utilize the absorption layer of an absorption arm to adsorb substrate on a plurality of substrate taking-up instruments subsequently, to be passed to station, following process district.
Because above-mentioned substrate takes out the length of instrument, for fear of being set, environmental limit can't significantly increase, therefore when on the substrate taking-up instrument during folded completely empty pallet, must earlier empty pallet be removed, can carry out the running of removal substrate once more, so the too loaded down with trivial details problem of removal substrate program is arranged, is unfavorable for promoting operational paradigm; Simultaneously, use the practice of absorption arm acquisition substrate, need face upward the substrate adsorption plant of high levle precision, capture substrate indirectly, but its capturing program is too loaded down with trivial details, and equipment cost is higher, so imperfect selection.
Summary of the invention
The object of the present invention is to provide a kind of capture device of substrate in tray, especially can horizontal stretching to the tray bottom, and the substrate of upwards praising in the pallet raises up, and the through-coupling substrate moves away pallet, to promote the acquisition efficient of substrate in the pallet.
For putting into practice above-mentioned purpose, the necessary technology of capture device of the present invention comprises:
One pedestal is located at the pallet side that puts substrate, and is provided with one first actuator in the pedestal at least;
One can be slidedly arranged on the pedestal, and at least one second actuator is set on the stretching frame to the stretching frame of tray bottom by horizontal stretching by described first driver drives;
A plurality of swing arms are subjected to second driver drives and last pendulum; And
A plurality of rollers are hubbed at an end of the swing arm of reciprocity quantity, and the swing arm other end is hubbed on the stretching frame, and second actuator can drive in the swing arm and put, and raise up to drive the substrate that each roller upwards praises in the pallet, and move away pallet for substrate on a plurality of rollers.
Aforesaid capture device, second swing arm of one first swing arm and one and first swing arm pivot joint is established in wherein said each swing arm, and be provided with at least one on the stretching frame in order to set firmly the hack lever of second actuator and the described a plurality of rollers that are pivoted, in this hack lever sliding establish equate with described first swing arm or the second swing arm quantity in order to linking and to drive the slide block of second swing arm, and establish the pull bar of an acceptance second driver drives on the hack lever.
Aforesaid capture device, wherein roller shaft disposes a motor in the heart, this motor praise substrate when raising up driving rolls rotate, move away pallet to drive substrate.
Aforesaid capture device, one the 3rd swing arm is established in described each swing arm in addition, the roller side disposes an accessory whorl, be hubbed at the 3rd swing arm one end, the 3rd swing arm other end is hubbed on the stretching frame, and linking between first swing arm and the 3rd swing arm has a coupled arm, goes up pendulum synchronously with interlock the 3rd swing arm and first swing arm, and drives roller and accessory whorl and together upwards praise the interior substrate of pallet and raise up.
Aforesaid capture device, pedestal are provided with a driver, have a plurality of scroll wheels, and driver or pedestal be provided with at least one the 3rd actuator, drive scroll wheel and rotate, and move into driver and drive substrate and shift out driver to drive substrate that pallet shifts out.
Aforesaid capture device also comprises a support body, is located at the pallet side that puts substrate, and pedestal is slidedly arranged on the support body, is provided with one simultaneously in the support body at least in order to drive the 4th actuator of pedestal shift reciprocately.
The utility model provides a kind of capture device of substrate in tray again, comprises:
One pedestal is located at the pallet side that puts substrate, and is provided with one first actuator in the pedestal at least;
One stretching frame, at least one first framework and that is slidedly arranged on the pedestal of being established by mutual cunning can be subjected to first driver drives and second framework of horizontal stretching displacement is formed, and be provided with a actuator between first framework, second framework and pedestal, when first framework stretches displacement, drive the second framework synchronous extension and be moved to the tray bottom, and at least one second actuator is set on second framework;
A plurality of swing arms are subjected to second driver drives and last pendulum; And
A plurality of rollers are hubbed at swing arm one end of reciprocity quantity, and the swing arm other end is hubbed on second framework, and second actuator can drive in the swing arm and put, and raise up to drive the substrate that each roller upwards praises in the pallet, and move away pallet for substrate on a plurality of rollers.
Aforesaid capture device, one first swing arm and one second swing arm are established in wherein said each swing arm, and be provided with at least one on second framework in order to set firmly the hack lever of second actuator and the described a plurality of rollers that are pivoted, in this hack lever sliding establish equate with the described first or second swing arm quantity in order to linking and to drive the slide block of second swing arm, and establish the pull bar of an acceptance second driver drives on the hack lever.
Aforesaid capture device, wherein roller shaft disposes a motor in the heart, this motor in praise substrate when raising up driving rolls rotate, move away pallet to drive substrate.
Aforesaid capture device, one the 3rd swing arm is established in described each swing arm in addition, wherein the roller side disposes an accessory whorl, be hubbed at the 3rd swing arm one end, the 3rd swing arm other end is hubbed on second framework, and linking between the first and the 3rd swing arm has a coupled arm, goes up pendulum synchronously with interlock the 3rd swing arm and first swing arm, and drives roller and accessory whorl and together upwards praise the interior substrate of pallet and raise up.
Aforesaid capture device, wherein clutch comprises:
One first guide wheel is hubbed on first framework;
One first driving band is surrounded on first guide wheel, and an end is fixed on second framework, and the other end is fixed on the pedestal;
One second guide wheel is hubbed at first guide wheel the place ahead on first framework; And
One second driving band is surrounded on second guide wheel, and an end is fixed in the first driving band bearing rear on second framework, and the other end is fixed in the first driving band bearing rear on the pedestal.
Aforesaid capture device, pedestal are provided with a driver, have a plurality of scroll wheels, and driver or pedestal be provided with at least one the 3rd actuator, drive scroll wheel and rotate, and move into driver and drive substrate and shift out driver to drive substrate that pallet shifts out.
Aforesaid capture device also comprises a support body, is located at the pallet side that puts substrate, and pedestal is slidedly arranged on the support body, is provided with one simultaneously in the support body at least in order to drive the 4th actuator of pedestal shift reciprocately.
By adopting technique scheme, the present invention has integration and simplifies the advantage of substrate capturing program, therefore can promote the acquisition efficient of substrate in the pallet.
For in detail the present invention being described in detail more, enumerate preferred embodiment and description of drawings as back:
Description of drawings
Fig. 1: the configuration schematic diagram that discloses first embodiment of the invention.
Fig. 2: the dynamic schematic diagram that discloses Fig. 1.
Fig. 3: the partial enlarged drawing that discloses hack lever of the present invention.
Fig. 4: the birds-eye view that discloses Fig. 3.
Fig. 5: the dynamic schematic diagram that discloses Fig. 3.
Fig. 6: the birds-eye view that discloses stretching frame of the present invention.
Fig. 7: the configuration schematic diagram that discloses second embodiment of the invention.
Fig. 8: the birds-eye view that discloses Fig. 7.
Fig. 9: the lateral plan that discloses Fig. 7.
Figure 10: the partial enlarged drawing that discloses Fig. 9.
Figure 11 and Figure 11 a: the configuration schematic diagram that discloses clutch of the present invention.
Figure 12: the dynamic schematic diagram that discloses Figure 11.
Figure 12 a: the dynamic schematic diagram that discloses Figure 11 a.
Figure 13: disclose the dynamic schematic diagram between pedestal of the present invention and stretching frame.
Figure 14: another dynamic schematic diagram that discloses Figure 13.
Figure 15: the another dynamic schematic diagram that discloses Figure 13.
Figure 16: the dynamic schematic diagram that discloses Fig. 7.
The primary clustering nomenclature
1: pedestal; 11: the first actuators; 111,41: motor; 112: gear; 113,92: chain; 12,212: slide rail; 13: the side seat; 14,211,221: slide block; 2: 21: the first frameworks of stretching frame; 22: the second frameworks; 23: tooth bar; 24: cross bar; 3: hack lever 31:; Second actuator; 32: pull bar; 33: slide block; 331: the stroke groove; 4: roller; 40: accessory whorl; Swing arm in 5: the first; 50: coupled arm; Swing arm in 51: the second; Swing arm in 52: the three; 6: clutch; 61: the first guide wheels; 62: the second guide wheels; 63: the first driving bands; 64: the second driving bands; 7: support body; 71: the first slide rails; 72: the second slide rails; 73: increase the weight of assembly; 74: the top layer pulley; 75: the bottom pulley; 76: the four actuators; 77,78,84,85: belt; 8,80: driver; 81: guide rod; 82: scroll wheel; 83: the three actuators; 9: substrate; 90: pallet; 91: opening.
The specific embodiment
First sight is shown in Figure 1, discloses the configuration schematic diagram of first embodiment of the invention, and the necessary structure technology of the capture device of substrate in tray of the present invention is described, comprises:
One pedestal 1 is located at pallet 90 sides that put substrate 9, and is provided with one first actuator 11 in the pedestal 1 at least;
One stretching frame 2 is slidedly arranged on the pedestal 1, can by first actuator 11 drive and horizontal stretching to pallet 90 bottoms, and at least one hack lever 3 is set on the stretching frame 2, at least one second actuator 31 (cooperating Fig. 3 and shown in Figure 4) is set on the hack lever 3 simultaneously; And
A plurality of rollers 4, be hubbed at first swing arm, 5 one ends (cooperating Fig. 3 and shown in Figure 4) of reciprocity quantity, first swing arm, 5 other ends are hubbed on the hack lever 3, and one second swing arm 51 is pivoted in first swing arm 5, and cunning is established the slide block 33 (cooperating shown in Figure 5) that equates with first swing arm 5 or second swing arm, 51 quantity in hack lever 3, to link second swing arm 51, and slidingly on hack lever 3 establish one and can accept the pull bar 32 that second actuator 31 drives, link mutually with each slide block 33, dispose a motor 41 (as shown in Figure 4) on each roller 4 axle center simultaneously, can drive each roller 4 and rotate.
In more concrete enforcement, the present invention also comprises:
Described first actuator 11 comprises that a motor 111 and is hubbed at the gear 112 (as shown in Figure 1) on the pedestal 1, and a sheathed chain 113 between motor 111 and the gear 112, rotates with driven wheel 112;
Described stretching frame 2 bottoms are provided with a tooth bar 23, are meshing with each other with gear 112, drive stretching frame 2 to accept gear 112 drivings and move;
Described hack lever 3 is a plurality of, is located at separately on a plurality of cross bars 24 of stretching frame 2 (as shown in Figure 6);
Described second actuator 31 is an air cylinder, and its cylinder bar and pull bar 32 link (as Fig. 3 and shown in Figure 6) mutually;
Described roller 4 sides dispose an accessory whorl 40 (as Fig. 4 and shown in Figure 5), be hubbed at one the 3rd swing arm, 52 1 ends, the 3rd swing arm 52 other ends are hubbed in the one stroke groove 331 of slide block 33, when slide block 33 moves, can in stroke groove 331, slide, and binding has a coupled arm 50 between first swing arm 5 and the 3rd swing arm 52.
Composition by above-mentioned member, can be for implementing the present invention according to this, particularly when the pallet 90 that puts substrate 9 is moved to pedestal 1 side (as shown in Figure 1), first actuator 11 can drive stretching frame 2 horizontal stretchings to pallet 90 bottoms (as shown in Figure 2), and drives each hack lever 3 horizontal stretching to pallet 90 bottoms; At this moment, second actuator, 31 meeting drive stay 32 (cooperating shown in Figure 5), drive second swing arm 51 via slide block 33, to drive pendulum in first swing arm 5, and pendulum is gone up in coupled arm 50 meeting interlock the 3rd swing arms 52 and first swing arm 5 synchronously, and drive roller 4 and accessory whorl 40 1 the same pendulum, and cause and respectively organize roller 4 and together extend upwardly in a plurality of openings 91 of pallet 90 (as shown in Figure 2) with accessory whorl 40, raise up with the substrates 9 of together praising in the pallet 90; Subsequently, motor 41 can rotate by driving rolls 4, moves away pallet 90 to drive substrate 9.Together upwards praise after substrate 9 pallet 90 in raises up in above-mentioned roller 4 and the accessory whorl 40 respectively organized, therefore promptly removable empty pallet 90 can not have storehouse empty pallet 90 in the prior art and influence the problem of the operational paradigm that captures substrate 9 once more; Promote the operational paradigm of acquisition substrate 9 according to this.
See also Fig. 7, disclose the configuration schematic diagram of second embodiment of the invention, stretching frame 2 of the present invention is described, form (cooperating Fig. 8, Fig. 9 and shown in Figure 10) by at least one first framework 21 and one second framework 22 that mutual cunning is established, and above-mentioned a plurality of hack lever 3 is arranged at separately on a plurality of cross bars 24 of second framework 22; These first framework, 21 bottoms are provided with a plurality of slide blocks 211, on a plurality of slide rails 12 that are slidedly arranged on pedestal 1 top, second framework, 22 bottoms also are provided with a plurality of slide blocks 221, on a plurality of slide rails 212 that are slidedly arranged on first framework, 21 tops, and above-mentioned tooth bar 23 is located at first framework, 21 bottoms, the gear 112 of accepting first actuator 11 drives, and carries out the horizontal stretching displacement and drive first framework 21 on pedestal 1, is provided with a actuator 6 between first framework 21, second framework 22 and the pedestal 1 simultaneously.This clutch 6 comprises:
One first guide wheel 61 is hubbed at (shown in Figure 11 and Figure 11 a) on first framework 21;
One first driving band 63 is surrounded on first guide wheel 61, and an end is fixed on second framework 22, and the other end is fixed on the pedestal 1;
One second guide wheel 62 is hubbed at first guide wheel, 61 the place aheads on first framework 21; And
One second driving band 64 is surrounded on second guide wheel 62, and an end is fixed in first driving band, the 63 bearing rears on second framework 22, and the other end is fixed in first driving band, the 63 bearing rears on the pedestal 1; Thus,
In first framework 21 on the pedestal 1 during the pallet 90 bottom direction displacements, meeting drives first guide wheel 61 and second guide wheel 62 moves towards pallet 90 bottom direction, make between first guide wheel 61 and first driving band 63 and produce relative displacement, cause first driving band 63 to carry out transmission, and also produce relative displacement between second guide wheel 62 and second driving band 64, impel second driving band 64 and first driving band 63 together to carry out transmission, and then drive second framework, 22 synchronous extension and be moved to pallet 90 bottoms (shown in Figure 12 and Figure 12 a); And in first framework 21 reversing sense reseting period towards pallet 90 bottoms on pedestal 1, first and second guide wheel 61,62 of meeting drive moves towards the reversing sense of pallet 90 bottoms, impel first and second driving band 63,64 together to carry out transmission, and then driving second framework, 22 synchronous resets, all the other members are equal to first embodiment.
Above-mentioned first and second guide wheel 61,62 is gear, and first and second driving band 63,64 is chain; Perhaps, first and second guide wheel 61,62 is pulley, and first and second driving band 63,64 is belt.
In addition, among above-mentioned second embodiment of the present invention, also include a support body 7 (as Fig. 7, Fig. 8 and shown in Figure 9), be located at above-mentioned pallet 90 sides that put substrate 9, bilateral in the support body 7 is respectively equipped with one first slide rail 71 and one second slide rail 72, each first slide rail 71 is corresponding mutually, each second slide rail 72 is corresponding mutually, and pedestal 1 is provided with a side seat 13, side seat 13 is provided with a plurality of slide blocks 14, to be slidedly arranged on first slide rail 71, cause pedestal 1 to be slidedly arranged on first slide rail 71 of support body 7, and slidingly on second slide rail 72 establish one and increase the weight of assembly 73, and a top layer pulley 74 is set in support body 7, one bottom pulley 75 and at least one the 4th actuator 76, sheathed another belt 78 between a sheathed belt 77, the four actuators 76 and the bottom pulley 75 between while top layer pulley 74 and the bottom pulley 75; The 4th actuator 76 is a motor, side seat 13 1 ends are incorporated on the belt 77, and increasing the weight of assembly 73 1 ends also is incorporated on the belt 77, causing the 4th actuator 76 to drive bottom pulley 75 by belt 78 rotates, drive pedestal 1 with drive belt 77 and on first slide rail 71, carry out shift reciprocately, and drive and to increase the weight of assembly 73 and on second slide rail 72, carry out shift reciprocately, this belt 77 loads increasing the weight of assembly 73 can make pedestal 1 have preferable stability when displacement; And
Also be contained in a driver 8 (as Fig. 7, Fig. 8, Fig. 9 and shown in Figure 10) is set on this pedestal 1, has at least one guide rod 81, a plurality of guide rods 81 are set in this enforcement, be pivoted with a plurality of scroll wheels 82 (cooperating shown in Figure 13) on the guide rod 81, and driver 8 or pedestal 1 are provided with at least one the 3rd actuator 83, and in sheathed another belt 85 between a sheathed belt 84, the three actuators 83 and at least one scroll wheel 82 between each scroll wheel 82; The 3rd actuator 83 is a motor, can driving belt 85 transmissions, rotate and drive each belt 84 to drive scroll wheel 82, and then drive each scroll wheel 82 and rotate; The height of pendulum on above-mentioned rollers 4 and the accessory whorl 40 is equal to the height of each scroll wheel 82 of driver 8.
In addition, above-mentioned support body 7 sides are provided with a plurality of chains 92, to hang a plurality of pallets 90 that put substrate 9, and each pallet 90 of transfer is moved to pedestal 1 side one by one, the side on support body 7 upper stratas is provided with another driver 80 simultaneously, and (cooperating Fig. 7, shown in Figure 16) is connected with the station, following process district of substrate 9.
In view of the above, first actuator 11 can drive first framework 21, to pallet 90 bottoms (as Fig. 7 and shown in Figure 13), and the substrates 9 that utilize second actuator 31 (cooperating shown in Figure 8) driving rolls 4 and accessory whorl 40 together upwards to praise in the pallet 90 raise up (as shown in figure 14) with interlock second framework 22 and each hack lever 3 horizontal stretchings; At this moment, utilize roller 4 to drive substrate 9 and move on each scroll wheel 82 of driver 8, and each scroll wheel 82 rotation of the 3rd actuator 83 meeting drivings, enter on each scroll wheel 82 with transmission substrate 9; This moment, second actuator 31 can driving rollss 4 with accessory whorl 40 together the bottom reset, and first actuator 11 can drive first framework 21 interlocks, second frameworks 22 and each hack lever 3 reset (as shown in figure 15); Subsequently, the 4th actuator 76 meeting driving pedestals 1 and driver 8 transfer substrates 9 are to driver 80 sides (as shown in figure 16) on support body 7 upper stratas, and utilize the driver 8 transmission substrates 9 on the pedestal 1 to enter on the driver 80 of support body 7 upper strata sides, process to transmit substrate 9 to station, following process district.
In sum, only be preferable exemplifying embodiment of the present invention, be not in order to limit the present invention; All other do not break away from equivalence of the present invention to be modified or displacement, all should be contained in the scope of the invention.

Claims (13)

1. the capture device of a substrate in tray is characterized in that, comprises:
One pedestal is located at the pallet side that puts substrate, and is provided with one first actuator in the pedestal at least;
One can be slidedly arranged on the pedestal, and at least one second actuator is set on the stretching frame to the stretching frame of tray bottom by horizontal stretching by described first driver drives;
A plurality of swing arms are subjected to second driver drives and last pendulum; And
A plurality of rollers are hubbed at an end of the swing arm of reciprocity quantity, and the swing arm other end is hubbed on the stretching frame.
2. capture device as claimed in claim 1, it is characterized in that, second swing arm of one first swing arm and one and first swing arm pivot joint is established in wherein said each swing arm, and be provided with at least one on the stretching frame in order to set firmly the hack lever of second actuator and the described a plurality of rollers that are pivoted, in this hack lever sliding establish equate with described first swing arm or the second swing arm quantity in order to linking and to drive the slide block of second swing arm, and establish the pull bar of an acceptance second driver drives on the hack lever.
3. capture device as claimed in claim 1 or 2 is characterized in that wherein roller shaft disposes a motor in the heart, this motor praise substrate when raising up driving rolls rotate, move away pallet to drive substrate.
4. capture device as claimed in claim 2, it is characterized in that, one the 3rd swing arm is established in described each swing arm in addition, the roller side disposes an accessory whorl, be hubbed at the 3rd swing arm one end, the 3rd swing arm other end is hubbed on the stretching frame, and binding has a coupled arm between first swing arm and the 3rd swing arm, go up pendulum synchronously with interlock the 3rd swing arm and first swing arm, and drive roller and together upwards praise the interior substrate of pallet with accessory whorl and raise up.
5. capture device as claimed in claim 1 is characterized in that pedestal is provided with a driver, have a plurality of scroll wheels, and driver or pedestal are provided with at least one the 3rd actuator, drive scroll wheel and rotate, and the substrate immigration driver and the drive substrate that shift out with the drive pallet shift out driver.
6. capture device as claimed in claim 1 is characterized in that, also comprises a support body, is located at the pallet side that puts substrate, and pedestal is slidedly arranged on the support body, is provided with one simultaneously in the support body at least in order to drive the 4th actuator of pedestal shift reciprocately.
7. the capture device of a substrate in tray is characterized in that, comprises:
One pedestal is located at the pallet side that puts substrate, and is provided with one first actuator in the pedestal at least;
One stretching frame, at least one first framework and that is slidedly arranged on the pedestal of being established by mutual cunning can be subjected to first driver drives and second framework of horizontal stretching displacement is formed, and be provided with a actuator between first framework, second framework and pedestal, when first framework stretches displacement, drive the second framework synchronous extension and be moved to the tray bottom, and at least one second actuator is set on second framework;
A plurality of swing arms are subjected to second driver drives and last pendulum; And
A plurality of rollers are hubbed at swing arm one end of reciprocity quantity, and the swing arm other end is hubbed on second framework, and second actuator can drive in the swing arm and put, and raise up to drive the substrate that each roller upwards praises in the pallet, and move away pallet for substrate on a plurality of rollers.
8. capture device as claimed in claim 7, it is characterized in that, one first swing arm and one second swing arm are established in wherein said each swing arm, and be provided with at least one on second framework in order to set firmly the hack lever of second actuator and the described a plurality of rollers that are pivoted, in this hack lever sliding establish equate with the described first or second swing arm quantity in order to linking and to drive the slide block of second swing arm, and establish the pull bar of an acceptance second driver drives on the hack lever.
9. as claim 7 or 8 described capture devices, it is characterized in that wherein roller shaft disposes a motor in the heart, this motor in praise substrate when raising up driving rolls rotate, move away pallet to drive substrate.
10. capture device as claimed in claim 8, it is characterized in that, one the 3rd swing arm is established in described each swing arm in addition, wherein the roller side disposes an accessory whorl, be hubbed at the 3rd swing arm one end, the 3rd swing arm other end is hubbed on second framework, and binding has a coupled arm between the first and the 3rd swing arm, go up pendulum synchronously with interlock the 3rd swing arm and first swing arm, and drive roller and together upwards praise the interior substrate of pallet with accessory whorl and raise up.
11. capture device as claimed in claim 7 is characterized in that, wherein clutch comprises:
One first guide wheel is hubbed on first framework;
One first driving band is surrounded on first guide wheel, and an end is fixed on second framework, and the other end is fixed on the pedestal;
One second guide wheel is hubbed at first guide wheel the place ahead on first framework; And
One second driving band is surrounded on second guide wheel, and an end is fixed in the first driving band bearing rear on second framework, and the other end is fixed in the first driving band bearing rear on the pedestal.
12. capture device as claimed in claim 7, it is characterized in that, pedestal is provided with a driver, have a plurality of scroll wheels, and driver or pedestal are provided with at least one the 3rd actuator, the driving scroll wheel rotates, and the substrate immigration driver and the drive substrate that shift out with the drive pallet shift out driver.
13. capture device as claimed in claim 7 is characterized in that, also comprises a support body, is located at the pallet side that puts substrate, and pedestal is slidedly arranged on the support body, is provided with one simultaneously in the support body at least in order to drive the 4th actuator of pedestal shift reciprocately.
CN2007100905598A 2007-04-11 2007-04-11 Pickup device for substrate in tray Active CN101284601B (en)

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Application Number Priority Date Filing Date Title
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Application Number Priority Date Filing Date Title
CN2007100905598A CN101284601B (en) 2007-04-11 2007-04-11 Pickup device for substrate in tray

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CN101284601B true CN101284601B (en) 2011-05-04

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Publication number Priority date Publication date Assignee Title
CN109911582A (en) * 2017-12-13 2019-06-21 楚天科技股份有限公司 Charging tray charging/discharging device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001189367A (en) * 2000-01-04 2001-07-10 Ulvac Japan Ltd Substrate-carrying robot
CN1840448A (en) * 2005-03-29 2006-10-04 精工爱普生株式会社 Substrate transfer apparatus, method of transferring substrate, and method of manufacturing electro-optical device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001189367A (en) * 2000-01-04 2001-07-10 Ulvac Japan Ltd Substrate-carrying robot
CN1840448A (en) * 2005-03-29 2006-10-04 精工爱普生株式会社 Substrate transfer apparatus, method of transferring substrate, and method of manufacturing electro-optical device

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