WO2013073379A1 - Industrial robot - Google Patents

Industrial robot Download PDF

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Publication number
WO2013073379A1
WO2013073379A1 PCT/JP2012/078305 JP2012078305W WO2013073379A1 WO 2013073379 A1 WO2013073379 A1 WO 2013073379A1 JP 2012078305 W JP2012078305 W JP 2012078305W WO 2013073379 A1 WO2013073379 A1 WO 2013073379A1
Authority
WO
WIPO (PCT)
Prior art keywords
fork
arm
cover member
hand
industrial robot
Prior art date
Application number
PCT/JP2012/078305
Other languages
French (fr)
Japanese (ja)
Inventor
矢澤　隆之
真砂 柴
弘登 中島
真志 藤原
Original Assignee
日本電産サンキョー株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2012055523A external-priority patent/JP5959241B2/en
Application filed by 日本電産サンキョー株式会社 filed Critical 日本電産サンキョー株式会社
Priority to CN201280054402.9A priority Critical patent/CN103930243B/en
Priority to KR1020147012782A priority patent/KR101626687B1/en
Priority to US14/358,867 priority patent/US9387584B2/en
Publication of WO2013073379A1 publication Critical patent/WO2013073379A1/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/0009—Constructional details, e.g. manipulator supports, bases
    • B25J9/0012—Constructional details, e.g. manipulator supports, bases making use of synthetic construction materials, e.g. plastics, composites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B35/00—Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms
    • C03B35/14—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands
    • C03B35/20—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands by gripping tongs or supporting frames
    • C03B35/202—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands by gripping tongs or supporting frames by supporting frames
    • C03B35/207—Construction or design of supporting frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Definitions

  • the present invention relates to an industrial robot that transports a predetermined transport object.
  • a robot hand described in Patent Document 1 includes a hand unit that supports an object to be dried through a seat of a heat insulating structure, and a reflector that is disposed on the upper surface of the hand unit and supported by the hand unit through a heat insulating support unit. It has.
  • the robot hand is attached to an arm for taking the robot hand into and out of the chamber via a heat insulating collar.
  • the amount of heat transferred from the robot hand to the arm can be reduced by the action of the receiving seat, the reflector, the heat insulating support member, and the heat insulating collar.
  • an industrial robot that conveys a glass substrate for a liquid crystal display is known (for example, see Patent Document 2).
  • the industrial robot described in Patent Document 2 includes a hand on which a glass substrate is mounted, an arm to which the hand is pivotably connected to a tip side thereof, and a main body portion to which a base end side of the arm is pivotally connected.
  • the arm is composed of a first arm part and a second arm part. A base end side of the first arm part is rotatably connected to the main body part, and a base end side of the second arm part is a first arm. It is rotatably connected to the tip side of the part.
  • a rolling bearing that rotatably supports the first arm portion is disposed at a joint portion that is a connecting portion between the main body portion and the first arm portion, and serves as a connecting portion between the first arm portion and the second arm portion.
  • a rolling bearing that rotatably supports the second arm portion is disposed at the joint portion.
  • the heat-resistant robot hand described in Patent Document 1 is used for the industrial robot described in Patent Document 2, it becomes possible to reduce the amount of heat transferred from the glass substrate to the arm by heat conduction through the hand, As a result, problems such as excessive wear and damage to the bearings arranged at the joints and large deformation of the arms are less likely to occur.
  • the heat-resistant robot hand described in Patent Document 1 is used for an industrial robot that transports a relatively small object such as a semiconductor wafer.
  • a glass substrate for a liquid crystal display is used.
  • specific configurations for suppressing bearing wear and damage due to the effect of heat, and arm deformation due to the effect of heat have been proposed. Not.
  • the problem of the present invention is to suppress the wear and damage of the bearing due to the influence of heat and the deformation of the arm due to the influence of heat even when conveying a relatively large object to be conveyed having a high temperature. It is another object of the present invention to provide an industrial robot capable of reducing the weight of a hand.
  • the industrial robot of the present invention is an industrial robot that transports a transport target, and a hand having a mounting portion on which the transport target is mounted, and an arm that holds the hand on the tip side thereof And a body part that holds the base end side of the arm and a cover member that covers at least the upper surface of the mounting part, the reflectance of the radiant heat in the cover member is higher than the reflectance of the radiant heat in the mounting part, The thermal conductivity is lower than the thermal conductivity of the mounting portion, and the specific gravity of the mounting portion is smaller than the specific gravity of the cover member.
  • the industrial robot of the present invention includes a hand having a mounting portion on which an object to be transported is mounted, and a cover member that covers at least the upper surface of the mounting portion, and the reflectance of the radiant heat in the cover member is the radiant heat in the mounting portion.
  • the thermal conductivity of the cover member is lower than the thermal conductivity of the mounting portion. Therefore, in the present invention, it is possible to reduce the amount of heat transmitted from the object to be transported to the mounting portion by heat radiation (heat radiation) or heat conduction by the cover member, and as a result, by heat conduction through the hand. It is possible to reduce the amount of heat transferred from the conveyance object to the arm. Therefore, in the present invention, it is possible to suppress the wear and damage of the bearing due to the influence of heat and the deformation of the arm due to the influence of heat even when conveying an object to be conveyed having a high temperature. become.
  • the specific gravity of the mounting portion is smaller than the specific gravity of the cover member. Therefore, in the present invention, even if the hand is enlarged in order to convey a relatively large conveyance object, the weight of the hand can be reduced. That is, even if the material constituting the mounting portion is the same material as the material constituting the cover member, it is possible to reduce the amount of heat transferred from the object to be conveyed to the arm by heat conduction through the hand, In this case, when the size of the hand increases in order to transfer a relatively large transfer object, the weight of the hand increases. On the other hand, in the present invention, even if the hand is enlarged to convey a relatively large conveyance object, the weight of the hand can be reduced.
  • the cover member preferably covers the upper surface and side surfaces of the mounting portion. If comprised in this way, it will become possible to reduce effectively the calorie
  • the mounting portion is made of ceramic
  • the cover member is made of a stainless steel plate.
  • the hand includes a plurality of forks and a hand base that is fixed to the base end side of the plurality of forks and held on the tip end side of the arm, and at least the tip end portion of the fork is a mounting portion. It has become.
  • the fork includes a fork tip portion as a mounting portion and a fork base end portion to which a base end side of the fork tip portion is fixed, and at least a part of the fork base end portion is formed in a hollow shape. Preferably it is. If comprised in this way, since the cross-sectional area of at least one part of a fork base end part becomes small, the heat conduction path
  • Patent Document 1 in an industrial robot having a hand having a fork, a specific configuration for suppressing the wear and damage of the bearing due to the influence of heat or suppressing the deformation of the arm due to the influence of heat is proposed. It has not been.
  • the reflectance of the radiant heat at the fork base end is higher than the reflectance of the radiant heat at the fork tip, and the thermal conductivity of the fork base is lower than the heat conductivity of the fork tip.
  • the specific gravity of the part is preferably smaller than the specific gravity of the fork base end.
  • the fork tip is formed of ceramic, and at least a part of the fork base end is formed of a stainless steel pipe.
  • the industrial robot includes a second cover member that covers at least the upper surface of the arm, and the thermal conductivity of the second cover member is preferably lower than the thermal conductivity of the arm. If comprised in this way, it will become possible to reduce with the 2nd cover member the amount of heat transmitted to an arm from a conveyance target object by thermal radiation.
  • Patent Document 1 does not propose a specific configuration for reducing the amount of heat transmitted from the object to be conveyed to the arm by heat radiation.
  • the object to be conveyed is, for example, a glass substrate for a liquid crystal display.
  • the amount of heat possessed by a glass substrate conveyed by an industrial robot has increased, but in the present invention, even if the amount of heat possessed by a glass substrate conveyed is large, It becomes possible to suppress wear and damage and to suppress deformation of the arm due to the influence of heat.
  • the size of the glass substrate to be transported has been increased, but in the present invention, the weight of the hand can be reduced even if the size of the glass substrate to be transported is increased, resulting in an increase in the size of the hand. Become.
  • FIG. (A) is the schematic which shows the peripheral part of the 1st arm part concerning other embodiment of this invention
  • (B) is the periphery of the 2nd arm part concerning other embodiment of this invention It is the schematic which shows a part.
  • FIG. 1 is a plan view of an industrial robot 1 according to an embodiment of the present invention.
  • FIG. 2 is a side view showing the industrial robot 1 from the EE direction of FIG.
  • the industrial robot 1 (hereinafter referred to as “robot 1”) of this embodiment is a robot for transporting a glass substrate 2 for liquid crystal display (hereinafter referred to as “substrate 2”), which is an object to be transported. is there.
  • the robot 1 according to the present embodiment is a large robot particularly suitable for transporting a large substrate 2.
  • the robot 1 transports a rectangular substrate 2 having a side of about 2.5 m.
  • the robot 1 is a robot suitable for transporting the substrate 2 having a relatively high temperature.
  • the robot 1 transports the substrate 2 at about 500 ° C. Further, the robot 1 conveys the substrate 2 in a vacuum.
  • the robot 1 includes two hands 3 and 4 on which a substrate 2 is mounted, an arm 5 to which the hand 3 is rotatably connected to the tip side, and a hand 4.
  • the arm 6 is rotatably connected to the distal end side thereof
  • the main body 7 is rotatably connected to the base ends of the arms 5 and 6, and a lifting mechanism (not shown) for moving the main body 7 up and down.
  • the main body 7 and the elevating mechanism are accommodated in a case 13 formed in a substantially bottomed cylindrical shape.
  • a flange 14 formed in a disk shape is fixed to the upper end of the case 13.
  • the flange 14 is formed with a through hole in which the upper end portion of the main body 7 is disposed.
  • the hands 3, 4 and the arms 5, 6 are arranged on the upper side of the main body 7.
  • the hands 3, 4 and the arms 5, 6 are disposed on the upper side of the flange 14.
  • the robot 1 is a robot for transporting the substrate 2 in a vacuum.
  • the portion of the robot 1 above the lower end surface of the flange 14 is in the vacuum region VR. It is placed inside (in a vacuum).
  • a portion of the robot 1 below the lower end surface of the flange 14 is disposed in the atmospheric region AR (in the atmosphere).
  • the arm 5 includes a first arm portion 16 and a second arm portion 17.
  • the arm 6 includes a first arm portion 16 and a second arm portion 18 that are common to the arm 5.
  • the first arm portion 16 is formed in a bifurcated shape. Specifically, the first arm portion 16 is formed in a substantially V shape.
  • the 1st arm part 16 and the 2nd arm parts 17 and 18 are formed with the aluminum alloy.
  • the proximal end side of the first arm portion 16 is rotatably held by the main body portion 7.
  • a second arm portion 17 is rotatably held on one tip side of the first arm portion 16 formed in a bifurcated shape, and a second arm portion 18 is rotated on the other tip side of the first arm portion 16. It is held movable.
  • the hand 3 is rotatably held at the distal end side of the second arm portion 17, and the hand 4 is rotatably held at the distal end side of the second arm portion 18.
  • the connecting portion between the arms 5 and 6 and the main body portion 7 (that is, the connecting portion between the first arm portion 16 and the main body portion 7) is a first joint portion 20.
  • a magnetic fluid seal (not shown) that prevents air from flowing into the vacuum region VR is disposed at the first joint portion 20.
  • the connecting portion between the first arm portion 16 and the second arm portion 17 is the second joint portion 21, and the connecting portion between the first arm portion 16 and the second arm portion 18 is the second joint portion 22. It has become.
  • the second joint portion 21 is provided with a rolling bearing (not shown) that rotatably supports the second arm portion 17, and the second joint portion 22 rotatably supports the second arm portion 18. Rolling bearings (not shown) are arranged.
  • the second arm portions 17 and 18 are arranged above the first arm portion 16 when viewed from the horizontal direction. Further, the second arm portion 18 is disposed above the second arm portion 17. Further, when viewed from the horizontal direction, the hands 3 and 4 are disposed between the second arm portion 17 and the second arm portion 18. Specifically, the hand 3 is connected to the upper surface side of the second arm portion 17, and the hand 4 is connected to the lower surface side of the second arm portion 18. When viewed from the horizontal direction, the hand 3 is connected to the upper side of the hand 3. A hand 4 is arranged. In addition, when the robot 5 is viewed from the upper side when the arms 5 and 6 are contracted, the hand 3 and the hand 4 overlap each other as shown in FIG.
  • the robot 1 extends the arm 5 and the arm 6, mounts the substrate 2 in a transfer rack (not shown), and then unloads the substrate 2 from the transfer rack while shrinking the arm 5 and the arm 6. Thereafter, the robot 1 changes its direction and carries the substrate 2 into the decompressed high temperature chamber (into a vacuum and high temperature chamber).
  • the hands 3 and 4 have a plurality of (for example, four) forks 25 on which the substrate 2 is mounted, and the proximal ends of the plurality of forks 25 are fixed, and the hands 3 and 4 rotate to the distal ends of the second arm portions 17 and 18. It is comprised from the hand base 26 hold
  • the fork 25 includes a fork distal end portion 27 on which the substrate 2 is mounted and a fork proximal end portion 28 to which the proximal end side of the fork distal end portion 27 is fixed.
  • the fork distal end portion 27 constitutes the distal end side of the fork 25, and the fork base end portion 28 constitutes the proximal end side of the fork 25.
  • the fork tip portion 27 of this embodiment is a mounting portion on which the substrate 2 that is a conveyance target is mounted.
  • a cover member 30 that covers the upper surface and the side surface of the fork tip 27 is attached to the fork tip 27.
  • specific configurations of the hand 3 and the cover member 30 will be described. Since the hand 4 is configured in the same manner as the hand 3, a description of a specific configuration of the hand 4 is omitted. 1 and 2, the cover member 30 is not shown.
  • FIG. 3 is a plan view of the hand 3 shown in FIG. 4A is an enlarged view of a portion F in FIG. 3, and FIG. 4B is a cross-sectional view taken along a line GG in FIG.
  • FIG. 5 is a cross-sectional view taken along the line HH in FIG.
  • FIG. 6 is a cross-sectional view taken along the line JJ of FIG.
  • the hand 3 includes the fork 25 and the hand base 26, and the fork 25 includes the fork tip 27 and the fork base 28.
  • the fork tip 27 is made of ceramic.
  • the fork tip 27 is made of solid ceramic, and no space is formed in the fork tip 27.
  • the fork tip portion 27 is formed in an elongated substantially quadrangular prism shape.
  • a plurality of convex portions 27 a are formed on the upper surface of the fork tip portion 27 so as to protrude upward.
  • the plurality of convex portions 27 a are formed at a predetermined pitch in the longitudinal direction of the fork 25. Further, the plurality of convex portions 27 a are formed in the entire region of the fork tip portion 27 in the longitudinal direction of the fork 25.
  • a positioning convex portion 27 c for positioning the substrate 2 in the longitudinal direction of the fork 25 is formed on the upper surface of the base end side of the fork distal end portion 27 so as to protrude upward.
  • FIG. 3 only some of the convex portions 27a among the plurality of convex portions 27a are illustrated.
  • the shape of the convex portion 27 a when viewed from above is a substantially rectangular shape that is long in the longitudinal direction of the fork 25.
  • the upper surface 27b of the convex portion 27a is formed in a planar shape. Further, the upper surface 27 b is disposed on the upper side of the upper surface of an upper surface portion 30 a described later constituting the cover member 30.
  • the upper surface 27b is a mounting surface on which the substrate 2 is mounted, and the lower surface of the substrate 2 is in contact with the upper surface 27b.
  • the positioning convex portion 27c is formed in a step shape so that the lower surface of the substrate 2 and the end portion of the substrate 2 are in contact with each other.
  • the convex portion 27 a and the positioning convex portion 27 c may be formed separately from the fork tip portion 27 and fixed to the fork tip portion 27.
  • the fork base end portion 28 connects the first fixing portion 28a to which the fork tip end portion 27 is fixed, the second fixing portion 28b to be fixed to the hand base portion 26, and the first fixing portion 28a and the second fixing portion 28b. It is comprised from the connection part 28c, and is formed in the substantially square pillar shape as a whole.
  • the length of the fork base end portion 28 is shorter than the length of the fork tip end portion 27.
  • the fork base end portion 28 is thicker than the fork tip end portion 27, and the fork base end portion 28 is wider than the fork tip end portion 27.
  • the connecting portion 28c is formed of a stainless steel pipe and is formed in a hollow shape having a space therein.
  • the thickness of the connecting portion 28c is thin.
  • the thickness of the connecting portion 28c is about 4 mm.
  • the first fixing portion 28 a and the second fixing portion 28 b are formed of stainless steel and are formed in a substantially rectangular parallelepiped block shape according to the outer shape of the fork 25.
  • the first fixing portion 28a and the connecting portion 28c are fixed to each other by welding, and the second fixing portion 28b and the connecting portion 28c are fixed to each other by welding.
  • the first fixing part 28a and the connecting part 28c may be fixed to each other by a method other than welding.
  • first fixing portion 28a and the connecting portion 28c may be fixed to each other by bonding, or may be fixed using a bolt or the like.
  • second fixing portion 28b and the connecting portion 28c may be fixed to each other by a method other than welding.
  • the second fixing portion 28b and the connecting portion 28c may be fixed to each other by bonding, or may be fixed using a bolt or the like.
  • a recess 28d is formed on the lower surface of the first fixed portion 28a, and the proximal end portion of the fork distal end portion 27 is formed. Is fixed to the first fixing portion 28a in a state of being disposed in the recess 28d.
  • the second fixing portion 28b is formed with a through hole 28e connected to the space inside the connecting portion 28c.
  • the second fixing portion 28 b is fixed to the hand base 26 in a state where it is disposed in a recess 26 a formed on the lower surface of the hand base 26.
  • the hand base 26 is made of an aluminum alloy or stainless steel.
  • the cover member 30 is formed of a thin stainless steel plate.
  • the cover member 30 is formed by bending a stainless steel plate into a substantially square groove shape, and includes an upper surface portion 30 a that covers the upper surface of the fork tip portion 27 and two side surface portions 30 b that cover the side surfaces of the fork tip portion 27. And has.
  • the upper surface portion 30 a is bent so that the inner portion of the upper surface portion 30 a in the direction orthogonal to the longitudinal direction of the fork 25 is disposed slightly below the both end portions.
  • the two side surface portions 30b are formed so as to be connected to both ends of the upper surface portion 30a in the direction orthogonal to the longitudinal direction of the fork 25.
  • a plurality of arrangement holes 30c in which the convex portions 27a of the fork tip portion 27 are arranged are formed in the upper surface portion 30a.
  • the plurality of arrangement holes 30 c are formed at a predetermined pitch in the longitudinal direction of the fork 25.
  • the arrangement hole 30c is formed so as to penetrate the upper surface portion 30a, and the upper end side of the convex portion 27a protrudes above the upper surface portion 30a.
  • the shape of the arrangement hole 30 c when viewed from above is a substantially rectangular shape that is long in the longitudinal direction of the fork 25.
  • the width of the arrangement hole 30 c in the longitudinal direction of the fork 25 is wider than the width of the convex portion 27 a in the longitudinal direction of the fork 25.
  • a plurality of through holes 30d for attaching the cover member 30 to the fork tip portion 27 are formed in the upper surface portion 30a.
  • the plurality of through holes 30 d are formed at a predetermined pitch in the longitudinal direction of the fork 25.
  • the through hole 30d is formed so as to penetrate the upper surface portion 30a.
  • the shape of the through-hole 30 d when viewed from above is an oval shape that is long in the longitudinal direction of the fork 25.
  • the cover member 30 is attached to the fork tip 27 by a collar 32, a spacer 33, and a countersunk screw 34.
  • the collar 32 is formed in a substantially cylindrical shape with a flat collar having a collar 32a and a cylinder 32b.
  • the spacer 33 is formed in a flat cylindrical shape.
  • the cylindrical portion 32 b is disposed in the through hole 30 d of the cover member 30, and the lower end thereof is in contact with the upper surface of the fork distal end portion 27.
  • the flange portion 32a is disposed on the upper side of the upper surface portion 30a.
  • the spacer 33 is disposed on the outer peripheral side of the cylindrical portion 32b so that the lower surface thereof is in contact with the upper surface of the fork tip portion 27 and the upper surface thereof is in contact with the lower surface of the upper surface portion 30a.
  • the inner peripheral surface of the collar 32 is an inclined surface that engages with the head of the countersunk screw 34, and the countersunk screw 34 is screwed into a screw hole formed in the upper surface of the fork tip 27, thereby covering the cover member 30. Is fixed to the fork tip 27.
  • the lower surface of the flange portion 32a is lightly in contact with the upper surface of the upper surface portion 30a, or a slight gap is formed between the lower surface of the flange portion 32a and the upper surface of the upper surface portion 30a.
  • the upper surface of the fork tip portion 27 and the lower surface of the upper surface portion 30a are A gap is formed between them. Further, the width of the upper surface portion 30a in the direction orthogonal to the longitudinal direction of the fork 25 is wider than the width of the fork tip portion 27 in this direction, and between the side surface of the fork tip portion 27 and the side surface portion 30b. A gap is formed.
  • the width of the side surface portion 30 b in the vertical direction is substantially equal to the thickness of the fork tip portion 27 in the vertical direction, and the side surface portion 30 b covers almost the entire side surface of the fork tip portion 27. Further, the upper surface portion 30a covers almost the entire upper surface of the fork tip portion 27 excluding the convex portion 27a and the positioning convex portion 27c.
  • the reflectance of the radiant heat at the cover member 30 and the reflectance of the radiant heat at the fork base end portion 28 are higher than the reflectance of the radiant heat at the fork tip portion 27.
  • the cover member 30 and the fork base end portion 28 are made of stainless steel, and the fork tip end portion 27 is made of ceramic, and the thermal conductivity of the cover member 30 and the heat of the fork base end portion 28 are formed. The conductivity is lower than the thermal conductivity of the fork tip portion 27.
  • the specific gravity of the fork distal end portion 27 is smaller than the specific gravity of the cover member 30 and the specific gravity of the fork base end portion 28.
  • the reflectance of the radiant heat in the cover member 30 is higher than the reflectance of the radiant heat in the fork tip 27, and the thermal conductivity of the cover member 30 is the fork tip.
  • the thermal conductivity is lower than 27. Therefore, in this embodiment, it is possible to reduce the amount of heat transferred from the substrate 2 to the fork tip portion 27 by the heat radiation by the cover member 30.
  • the cover member 30 covers almost the entire side surface of the fork tip portion 27 in addition to the upper surface of the fork tip portion 27, so that the amount of heat transferred from the substrate 2 to the fork tip portion 27 by heat radiation is reduced. It can be effectively reduced.
  • a gap is formed between the upper surface of the fork tip portion 27 and the lower surface of the upper surface portion 30a, and a gap is formed between the side surface of the fork tip portion 27 and the side surface portion 30b. Since the heat conduction path from the cover member 30 to the fork tip 27 is the collar 32 and the spacer 33, the heat transmitted from the substrate 2 to the cover member 30 by heat radiation is transferred to the fork tip 27 by heat conduction. Can be suppressed.
  • this embodiment it is possible to reduce the amount of heat transferred from the substrate 2 to the arms 5 and 6 by heat conduction through the hands 3 and 4. As a result, in this embodiment, even when the substrate 2 having a large amount of heat is transported, the rolling bearings disposed in the second joint portions 21 and 22 are prevented from being worn or damaged by the influence of heat. In addition, the deformation of the arms 5 and 6 due to the influence of heat can be suppressed.
  • the connecting portion 28c of the fork base end portion 28 is formed in a hollow shape, and the cross-sectional area of the connecting portion 28c is small. That is, in this embodiment, the heat conduction path in the connecting portion 28c is narrow. Therefore, in this embodiment, it is possible to effectively reduce the amount of heat transferred from the fork tip 27 to the hand base 26 by heat conduction, and as a result, the hands 3, 4 to the arms 5, 6 by heat conduction. It becomes possible to effectively reduce the amount of heat transferred.
  • the reflectance of the radiant heat at the fork base end portion 28 is higher than the reflectance of the radiant heat at the fork tip end portion 27, and the heat conductivity of the fork base end portion 28 is equal to the fork tip end portion.
  • the thermal conductivity is lower than 27. Therefore, even if the fork base end portion 28 is not covered by the cover member 30, it is possible to reduce the amount of heat transferred from the substrate 2 to the hand base portion 26 by heat radiation. It is possible to effectively reduce the amount of heat transferred from the substrate 2 to the arms 5 and 6 by the heat conduction.
  • the specific gravity of the fork tip 27 is smaller than the specific gravity of the cover member 30. For this reason, in this embodiment, even if the hands 3 and 4 are enlarged in order to transport the relatively large substrate 2, the weight of the hands 3 and 4 can be reduced. In other words, even when the fork tip 27 is formed of the same stainless steel as the cover member 30, the amount of heat transferred from the substrate 2 to the arms 5 and 6 by heat conduction through the hands 3 and 4 is reduced. In this case, if the hands 3 and 4 are increased in size to transport the relatively large substrate 2, the weights of the hands 3 and 4 are increased. On the other hand, in this embodiment, even if the hands 3 and 4 are enlarged, the weight of the hands 3 and 4 can be reduced.
  • the linear expansion coefficient of stainless steel is larger than that of ceramic, when the fork tip portion 27 is formed of stainless steel, the fork tip portion 27 is easily thermally deformed. Then, since the fork tip 27 is made of ceramic, it is possible to suppress thermal deformation of the fork tip 27.
  • the connecting portion 28c of the fork base end portion 28 is formed of a stainless steel pipe. Therefore, in this embodiment, it is possible to ensure the rigidity of the connecting portion 28c while reducing the weight of the connecting portion 28c.
  • the width of the arrangement hole 30c of the cover member 30 in the longitudinal direction of the fork 25 is wider than the width of the convex portion 27a of the fork tip 27 in the longitudinal direction of the fork 25.
  • the lower surface of the flange portion 32a is lightly in contact with the upper surface of the upper surface portion 30a, or a slight gap is formed between the lower surface of the flange portion 32a and the upper surface of the upper surface portion 30a. For this reason, in this embodiment, even if the linear expansion coefficient of the fork tip 27 and the linear expansion coefficient of the cover member 30 are different, the fork tip 27 and the cover 30 when the substrate 2 having a relatively high temperature is mounted. It becomes possible to suppress thermal deformation.
  • the cover member 30 covers almost the entire side surface of the fork tip portion 27.
  • the cover member 30 may cover a part of the side surface of the fork tip portion 27, or may cover only the upper surface of the fork tip portion 27 and not the side surface of the fork tip portion 27. Also good.
  • the cover member 30 may be configured to cover the lower surface of the fork tip portion 27.
  • the cover member 30 is attached to the fork tip portion 27 using the spacer 33, but the cover member 30 may be attached to the fork tip portion 27 without using the spacer 33. In this case, the lower surface of the upper surface portion 30 a of the cover member 30 contacts the upper surface of the fork tip portion 27.
  • the upper surface and the lower surface of the first arm portion 16 are covered with the cover member 40 as the second cover member having a lower thermal conductivity than the first arm portion 16 as shown in FIG. It may be broken.
  • the upper surface and the lower surface of the first arm portion 16 may be covered with two cover members 40 that are formed of a stainless steel plate and are disposed so as to sandwich the first arm portion 16 from above and below.
  • the upper and lower surfaces of the second arm portions 17 and 18 are, as shown in FIG. 7B, a cover member 41 as a second cover member having a lower thermal conductivity than the second arm portions 17 and 18. It may be covered with.
  • the upper and lower surfaces of the second arm portions 17 and 18 may be formed of stainless steel plates and covered with two cover members 41 that are arranged so as to sandwich the second arm portions 17 and 18 from above and below. good.
  • the cover members 40 and 41 the amount of heat transferred from the substrate 2 to the arms 5 and 6 by heat radiation can be reduced by the cover members 40 and 41.
  • a gap is formed between the cover members 40 and 41 and the arms 5 and 6 in order to suppress heat transfer from the cover members 40 and 41 to the arms 5 and 6 due to heat conduction.
  • the cover members 40 and 41 may cover part of the side surfaces of the first arm portion 16 and the second arm portions 17 and 18 as shown in FIG. The entire side surfaces of the portion 16 and the second arm portions 17 and 18 may be covered. Further, the cover members 40 and 41 may not cover the side surfaces of the first arm portion 16 and the second arm portions 17 and 18. Moreover, the 1st arm part 16 and the 2nd arm parts 17 and 18 may be covered with the one cover members 40 and 41 from the upper side.
  • the fork tip portion 27 constituting the tip side of the fork 25 is a mounting portion on which the substrate 2 that is the object to be transported is mounted.
  • the entire fork 25 may be a mounting portion on which the substrate 2 that is the object to be transported is mounted.
  • the entire fork 25 is formed of solid ceramic, and the entire fork 25 is covered with the cover member 30.
  • the fork tip 27 is formed of ceramic, and the cover member 30 is formed of a stainless steel plate.
  • the reflectance of the radiant heat in the cover member 30 is higher than the reflectance of the radiant heat in the fork tip 27, and the thermal conductivity of the cover member 30 is lower than the thermal conductivity of the fork tip 27.
  • the specific gravity of the fork tip 27 is smaller than the specific gravity of the cover member 30, the fork tip 27 may be made of a material other than ceramic, and the cover member 30 You may form with materials other than stainless steel.
  • the fork tip portion 27 may be formed of a resin containing carbon fibers. When the fork tip portion 27 is formed of a resin containing carbon fiber, the fork tip portion 27 is formed in a hollow shape, for example.
  • the connecting portion 28c which is a part of the fork base end portion 28, is formed in a hollow shape, but the entire fork base end portion 28 may be formed in a hollow shape. Further, the entire fork base end portion 28 may be solid.
  • the reflectance of the radiant heat at the fork base end portion 28 is higher than the reflectance of the radiant heat at the fork tip end portion 27, but the reflectance of the radiant heat at the fork base end portion 28 is The reflectance of the radiant heat at the portion 27 may be lower, or the reflectance of the radiant heat at the fork tip portion 27 may be the same.
  • the thermal conductivity of the fork base end portion 28 is lower than the thermal conductivity of the fork tip end portion 27, but the thermal conductivity of the fork base end portion 28 is higher than that of the fork tip end portion 27.
  • the thermal conductivity of the fork tip 27 may be the same.
  • the specific gravity of the fork base end portion 28 is larger than the specific gravity of the fork tip end portion 27, but the specific gravity of the fork base end portion 28 may be smaller than the specific gravity of the fork tip end portion 27, or the fork tip end portion. It may be the same as the specific gravity of 27.
  • the hands 3 and 4 include the fork 25, but the hands 3 and 4 may not include the fork 25.
  • the hands 3 and 4 may be formed so that the shape when viewed from the upper side is substantially Y-shaped, or when viewed from the upper side as in the hand portion disclosed in Patent Document 1 described above. It may be formed so that the shape is substantially rectangular.
  • each of the hands 3 and 4 includes a hand distal end portion that constitutes the distal end side of the hands 3 and 4 and a hand proximal end portion that constitutes the proximal end side of the hands 3 and 4.
  • the portion may be formed of a solid ceramic or the like, and the hand base end may be formed of a hollow stainless steel tube or the like.
  • the arm 6 is configured by the first arm portion 16 and the second arm portion 18 that are common to the arm 5, but the arm 6 is provided separately from the first arm portion 16. You may be comprised by the arm part and the 2nd arm part 18.
  • FIG. in the above-described form, the arms 5 and 6 are constituted by two arm portions, ie, the first arm portion 16 and the second arm portions 17 and 18, but the arms 5 and 6 are one arm. It may be constituted by a part or may be constituted by three or more arm parts.
  • the object to be transported by the robot 1 is the substrate 2, but the object to be transported by the robot 1 may be a semiconductor wafer or the like.
  • the robot 1 transports the substrate 2 in a vacuum, but the robot 1 may transport the substrate 2 in the atmosphere.

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Abstract

The present application provides an industrial robot that, even when transporting a high-temperature, relatively large transportation subject, can suppress wear and damage to a bearing resulting from the effects of heat, suppress deformation of an arm resulting from the effects of heat, and lighten the weight of a hand. The industrial robot is provided, for example, with: a hand (3) having a carrying section (27) at which a transportation subject is carried; an arm that holds the hand (3) at the tip end thereof; a main body section that holds the base end of the arm; and a cover member (30) that covers at least the upper surface of the carrying section (27). Also, by means of the carrying section (27) being formed from a ceramic and the cover member (30) being formed from stainless steel, the radiant heat reflection rate of the cover member (30) is higher than the radiant heat reflection rate of the carrying section (27), the heat transmission rate of the cover member (30) is lower than the heat transmission rate of the carrying section (27), and the specific gravity of the carrying section (27) is less than the specific gravity of the cover member (30).

Description

産業用ロボットIndustrial robot
　本発明は、所定の搬送対象物を搬送する産業用ロボットに関する。 The present invention relates to an industrial robot that transports a predetermined transport object.
　従来、半導体製造装置等において、減圧された高温のチャンバー等に対して半導体ウエハ等の被乾燥物を出し入れするための耐熱ロボットハンドが知られている（たとえば、特許文献１参照）。特許文献１に記載のロボットハンドは、断熱構造の受け座を介して被乾燥物を支持するハンド部と、ハンド部の上面に配置され断熱支持手段を介してハンド部に支持される反射板とを備えている。また、このロボットハンドは、ロボットハンドをチャンバーに出し入れするためのアームに断熱カラーを介して取り付けられている。特許文献１に記載のロボットハンドでは、受け座、反射板、断熱支持部材および断熱カラーの作用によって、ロボットハンドからアームへ伝達される熱量を低減することが可能となっている。 Conventionally, in a semiconductor manufacturing apparatus or the like, there has been known a heat-resistant robot hand for taking in and out an object to be dried such as a semiconductor wafer with respect to a decompressed high-temperature chamber or the like (see, for example, Patent Document 1). A robot hand described in Patent Document 1 includes a hand unit that supports an object to be dried through a seat of a heat insulating structure, and a reflector that is disposed on the upper surface of the hand unit and supported by the hand unit through a heat insulating support unit. It has. The robot hand is attached to an arm for taking the robot hand into and out of the chamber via a heat insulating collar. In the robot hand described in Patent Document 1, the amount of heat transferred from the robot hand to the arm can be reduced by the action of the receiving seat, the reflector, the heat insulating support member, and the heat insulating collar.
　また、従来、液晶ディスプレイ用のガラス基板を搬送する産業用ロボットが知られている（たとえば、特許文献２参照）。特許文献２に記載の産業用ロボットは、ガラス基板が搭載されるハンドと、その先端側にハンドが回動可能に連結されるアームと、アームの基端側が回動可能に連結される本体部とを備えている。アームは、第１アーム部と第２アーム部とによって構成されており、第１アーム部の基端側は本体部に回動可能に連結され、第２アーム部の基端側は第１アーム部の先端側に回動可能に連結されている。本体部と第１アーム部との連結部となる関節部には、第１アーム部を回動可能に支持する転がり軸受が配置され、第１アーム部と第２アーム部との連結部となる関節部には、第２アーム部を回動可能に支持する転がり軸受が配置されている。 Further, conventionally, an industrial robot that conveys a glass substrate for a liquid crystal display is known (for example, see Patent Document 2). The industrial robot described in Patent Document 2 includes a hand on which a glass substrate is mounted, an arm to which the hand is pivotably connected to a tip side thereof, and a main body portion to which a base end side of the arm is pivotally connected. And. The arm is composed of a first arm part and a second arm part. A base end side of the first arm part is rotatably connected to the main body part, and a base end side of the second arm part is a first arm. It is rotatably connected to the tip side of the part. A rolling bearing that rotatably supports the first arm portion is disposed at a joint portion that is a connecting portion between the main body portion and the first arm portion, and serves as a connecting portion between the first arm portion and the second arm portion. A rolling bearing that rotatably supports the second arm portion is disposed at the joint portion.
特開平６－２０４３１６号公報JP-A-6-204316 特開２０１０－２３１９５号公報JP 2010-23195 A
　近年、特許文献２に記載の産業用ロボットで搬送されるガラス基板は大型化しており、かつ、搬送時におけるガラス基板の温度が高くなる傾向にあるため、搬送されるガラス基板が持つ熱量が大きくなってきている。ハンドを介した熱伝導によってガラス基板からアームへ高い熱が伝わって、関節部に配置される軸受に高い熱がかかると、焼入れされている軸受の硬度が低下したり、軸受内のグリースの粘度が低下して油膜が切れるおそれがあるため、軸受が摩耗しやすくなったり、損傷しやすくなったりするおそれがある。また、ハンドを介した熱伝導によってガラス基板からアームに高い熱が伝わると、アームが大きく変形するおそれがあり、その結果、ガラス基板の搬送精度が低下するおそれがある。 In recent years, the glass substrate transported by the industrial robot described in Patent Document 2 has become larger, and the temperature of the glass substrate during transport tends to increase, so the amount of heat possessed by the transported glass substrate is large. It has become to. If high heat is transferred from the glass substrate to the arm due to heat conduction through the hand and high heat is applied to the bearings arranged in the joints, the hardness of the hardened bearings decreases and the viscosity of the grease in the bearings May decrease and the oil film may be cut, so that the bearing may be easily worn or damaged. Further, when high heat is transferred from the glass substrate to the arm by heat conduction through the hand, the arm may be greatly deformed, and as a result, the conveyance accuracy of the glass substrate may be lowered.
　特許文献１に記載の耐熱ロボットハンドの構成を特許文献２に記載の産業用ロボットに用いれば、ハンドを介した熱伝導によってガラス基板からアームに伝達される熱量を低減することが可能になり、その結果、関節部に配置される軸受が過度に摩耗、損傷したり、アームが大きく変形するといった問題は生じにくくなる。しかしながら、特許文献１に記載の耐熱ロボットハンドは、半導体ウエハのような比較的小型の搬送対象物を搬送する産業用ロボットに用いられるものであり、特許文献１では、液晶ディスプレイ用のガラス基板のように比較的大型の搬送対象物を搬送する産業用ロボットにおいて、熱の影響による軸受の摩耗や損傷を抑制したり、熱の影響によるアームの変形を抑制するための具体的な構成は提案されていない。 If the configuration of the heat-resistant robot hand described in Patent Document 1 is used for the industrial robot described in Patent Document 2, it becomes possible to reduce the amount of heat transferred from the glass substrate to the arm by heat conduction through the hand, As a result, problems such as excessive wear and damage to the bearings arranged at the joints and large deformation of the arms are less likely to occur. However, the heat-resistant robot hand described in Patent Document 1 is used for an industrial robot that transports a relatively small object such as a semiconductor wafer. In Patent Document 1, a glass substrate for a liquid crystal display is used. In particular, in industrial robots that transport relatively large objects to be transported, specific configurations for suppressing bearing wear and damage due to the effect of heat, and arm deformation due to the effect of heat have been proposed. Not.
　そこで、本発明の課題は、温度の高い比較的大型の搬送対象物を搬送する場合であっても、熱の影響による軸受の摩耗や損傷を抑制すること、熱の影響によるアームの変形を抑制すること、および、ハンドの重量を軽減することが可能な産業用ロボットを提供することにある。 Therefore, the problem of the present invention is to suppress the wear and damage of the bearing due to the influence of heat and the deformation of the arm due to the influence of heat even when conveying a relatively large object to be conveyed having a high temperature. It is another object of the present invention to provide an industrial robot capable of reducing the weight of a hand.
　上記の課題を解決するため、本発明の産業用ロボットは、搬送対象物を搬送する産業用ロボットにおいて、搬送対象物が搭載される搭載部を有するハンドと、その先端側でハンドを保持するアームと、アームの基端側を保持する本体部と、搭載部の少なくとも上面を覆うカバー部材とを備え、カバー部材における輻射熱の反射率は、搭載部における輻射熱の反射率よりも高く、カバー部材の熱伝導率は、搭載部の熱伝導率よりも低く、搭載部の比重は、カバー部材の比重よりも小さいことを特徴とする。 In order to solve the above problems, the industrial robot of the present invention is an industrial robot that transports a transport target, and a hand having a mounting portion on which the transport target is mounted, and an arm that holds the hand on the tip side thereof And a body part that holds the base end side of the arm and a cover member that covers at least the upper surface of the mounting part, the reflectance of the radiant heat in the cover member is higher than the reflectance of the radiant heat in the mounting part, The thermal conductivity is lower than the thermal conductivity of the mounting portion, and the specific gravity of the mounting portion is smaller than the specific gravity of the cover member.
　本発明の産業用ロボットは、搬送対象物が搭載される搭載部を有するハンドと、搭載部の少なくとも上面を覆うカバー部材とを備えており、カバー部材における輻射熱の反射率は、搭載部における輻射熱の反射率よりも高く、かつ、カバー部材の熱伝導率は、搭載部の熱伝導率よりも低くなっている。そのため、本発明では、熱放射（熱輻射）や熱伝導によって搬送対象物から搭載部へ伝達される熱量を、カバー部材によって低減することが可能になり、その結果、ハンドを介した熱伝導によって搬送対象物からアームに伝達される熱量を低減することが可能になる。したがって、本発明では、温度の高い搬送対象物を搬送する場合であっても、熱の影響による軸受の摩耗や損傷を抑制すること、および、熱の影響によるアームの変形を抑制することが可能になる。 The industrial robot of the present invention includes a hand having a mounting portion on which an object to be transported is mounted, and a cover member that covers at least the upper surface of the mounting portion, and the reflectance of the radiant heat in the cover member is the radiant heat in the mounting portion. The thermal conductivity of the cover member is lower than the thermal conductivity of the mounting portion. Therefore, in the present invention, it is possible to reduce the amount of heat transmitted from the object to be transported to the mounting portion by heat radiation (heat radiation) or heat conduction by the cover member, and as a result, by heat conduction through the hand. It is possible to reduce the amount of heat transferred from the conveyance object to the arm. Therefore, in the present invention, it is possible to suppress the wear and damage of the bearing due to the influence of heat and the deformation of the arm due to the influence of heat even when conveying an object to be conveyed having a high temperature. become.
　また、本発明では、搭載部の比重は、カバー部材の比重よりも小さくなっている。したがって、本発明では、比較的大型の搬送対象物を搬送するためにハンドが大型化しても、ハンドの重量を軽減することが可能になる。すなわち、搭載部を構成する材料がカバー部材を構成する材料と同じ材料であっても、ハンドを介した熱伝導によって搬送対象物からアームに伝達される熱量を低減することは可能になるが、この場合、比較的大型の搬送対象物を搬送するためにハンドが大型化すると、ハンドの重量が重くなる。これに対して、本発明では、比較的大型の搬送対象物を搬送するためにハンドが大型化しても、ハンドの重量を軽減することが可能になる。 In the present invention, the specific gravity of the mounting portion is smaller than the specific gravity of the cover member. Therefore, in the present invention, even if the hand is enlarged in order to convey a relatively large conveyance object, the weight of the hand can be reduced. That is, even if the material constituting the mounting portion is the same material as the material constituting the cover member, it is possible to reduce the amount of heat transferred from the object to be conveyed to the arm by heat conduction through the hand, In this case, when the size of the hand increases in order to transfer a relatively large transfer object, the weight of the hand increases. On the other hand, in the present invention, even if the hand is enlarged to convey a relatively large conveyance object, the weight of the hand can be reduced.
　本発明において、カバー部材は、搭載部の上面および側面を覆っていることが好ましい。このように構成すると、熱放射によって搬送対象物から搭載部へ伝達される熱量を効果的に低減することが可能になる。 In the present invention, the cover member preferably covers the upper surface and side surfaces of the mounting portion. If comprised in this way, it will become possible to reduce effectively the calorie | heat amount transmitted to a mounting part from a conveyance target object by thermal radiation.
　本発明において、たとえば、搭載部は、セラミックで形成され、カバー部材は、ステンレス鋼板で形成されている。また、本発明において、たとえば、ハンドは、複数のフォークと、複数のフォークの基端側が固定されるとともにアームの先端側に保持されるハンド基部とを備え、フォークの少なくとも先端側部分が搭載部となっている。 In the present invention, for example, the mounting portion is made of ceramic, and the cover member is made of a stainless steel plate. Further, in the present invention, for example, the hand includes a plurality of forks and a hand base that is fixed to the base end side of the plurality of forks and held on the tip end side of the arm, and at least the tip end portion of the fork is a mounting portion. It has become.
　本発明において、フォークは、搭載部としてのフォーク先端部と、フォーク先端部の基端側が固定されるフォーク基端部とを備え、フォーク基端部の少なくとも一部は、中空状に形成されていることが好ましい。このように構成すると、フォーク基端部の少なくとも一部の断面積が小さくなるため、フォーク基端部の少なくとも一部における熱伝導経路が狭くなる。したがって、搬送対象物が搭載されるフォーク先端部からアームの先端側に保持されるハンド基部へ熱伝導によって伝達される熱量を効果的に低減することが可能になり、その結果、熱伝導によってハンドからアームに伝達される熱量を効果的に低減することが可能になる。また、このように構成すると、フォーク基端部の重量を軽減しつつ、フォーク基端部の強度を確保することが可能になる。なお、特許文献１では、フォークを有するハンドを備える産業用ロボットにおいて、熱の影響による軸受の摩耗や損傷を抑制したり、熱の影響によるアームの変形を抑制するための具体的な構成は提案されていない。 In the present invention, the fork includes a fork tip portion as a mounting portion and a fork base end portion to which a base end side of the fork tip portion is fixed, and at least a part of the fork base end portion is formed in a hollow shape. Preferably it is. If comprised in this way, since the cross-sectional area of at least one part of a fork base end part becomes small, the heat conduction path | route in at least one part of a fork base end part becomes narrow. Therefore, it is possible to effectively reduce the amount of heat transferred by heat conduction from the fork tip portion on which the object to be transported is mounted to the hand base held on the tip side of the arm. It is possible to effectively reduce the amount of heat transferred from the arm to the arm. Moreover, if comprised in this way, it will become possible to ensure the intensity | strength of a fork base end part, reducing the weight of a fork base end part. In Patent Document 1, in an industrial robot having a hand having a fork, a specific configuration for suppressing the wear and damage of the bearing due to the influence of heat or suppressing the deformation of the arm due to the influence of heat is proposed. It has not been.
　本発明において、フォーク基端部における輻射熱の反射率は、フォーク先端部における輻射熱の反射率よりも高く、フォーク基端部の熱伝導率は、フォーク先端部の熱伝導率よりも低く、フォーク先端部の比重は、フォーク基端部の比重よりも小さいことが好ましい。このように構成すると、カバー部材によってフォーク基端部が覆われていなくても、熱放射や熱伝導によって搬送対象物からハンド基部へ伝達される熱量を低減することが可能になり、その結果、ハンドを介した熱伝導によって搬送対象物からアームに伝達される熱量を効果的に低減することが可能になる。 In the present invention, the reflectance of the radiant heat at the fork base end is higher than the reflectance of the radiant heat at the fork tip, and the thermal conductivity of the fork base is lower than the heat conductivity of the fork tip. The specific gravity of the part is preferably smaller than the specific gravity of the fork base end. When configured in this way, even if the fork base end is not covered by the cover member, it becomes possible to reduce the amount of heat transferred from the object to be transported to the hand base by heat radiation or heat conduction. It is possible to effectively reduce the amount of heat transferred from the object to be transported to the arm by heat conduction through the hand.
　本発明において、たとえば、フォーク先端部は、セラミックで形成され、フォーク基端部の少なくとも一部は、ステンレス鋼管で形成されている。 In the present invention, for example, the fork tip is formed of ceramic, and at least a part of the fork base end is formed of a stainless steel pipe.
　本発明において、産業用ロボットは、アームの少なくとも上面を覆う第２のカバー部材を備え、第２のカバー部材の熱伝導率は、アームの熱伝導率よりも低くなっていることが好ましい。このように構成すると、熱放射によって搬送対象物からアームに伝達される熱量を、第２のカバー部材によって低減することが可能になる。なお、特許文献１では、熱放射によって搬送対象物からアームに伝達される熱量を低減するための具体的な構成は提案されていない。 In the present invention, the industrial robot includes a second cover member that covers at least the upper surface of the arm, and the thermal conductivity of the second cover member is preferably lower than the thermal conductivity of the arm. If comprised in this way, it will become possible to reduce with the 2nd cover member the amount of heat transmitted to an arm from a conveyance target object by thermal radiation. Note that Patent Document 1 does not propose a specific configuration for reducing the amount of heat transmitted from the object to be conveyed to the arm by heat radiation.
　本発明において、搬送対象物は、たとえば、液晶ディスプレイ用のガラス基板である。上述のように、近年、産業用ロボットで搬送されるガラス基板が持つ熱量が大きくなってきているが、本発明では、搬送されるガラス基板が持つ熱量が大きくても、熱の影響による軸受の摩耗や損傷を抑制すること、および、熱の影響によるアームの変形を抑制することが可能になる。また、近年、搬送されるガラス基板は大型化しているが、本発明では、搬送されるガラス基板が大型化して、その結果、ハンドが大型化しても、ハンドの重量を軽減することが可能になる。 In the present invention, the object to be conveyed is, for example, a glass substrate for a liquid crystal display. As described above, in recent years, the amount of heat possessed by a glass substrate conveyed by an industrial robot has increased, but in the present invention, even if the amount of heat possessed by a glass substrate conveyed is large, It becomes possible to suppress wear and damage and to suppress deformation of the arm due to the influence of heat. Further, in recent years, the size of the glass substrate to be transported has been increased, but in the present invention, the weight of the hand can be reduced even if the size of the glass substrate to be transported is increased, resulting in an increase in the size of the hand. Become.
　以上のように、本発明の産業用ロボットでは、温度の高い比較的大型の搬送対象物を搬送する場合であっても、熱の影響による軸受の摩耗や損傷を抑制すること、熱の影響によるアームの変形を抑制すること、および、ハンドの重量を軽減することが可能になる。 As described above, in the industrial robot of the present invention, even when a relatively large transport object having a high temperature is transported, the wear and damage of the bearing due to the influence of heat are suppressed, and the influence of heat. It becomes possible to suppress the deformation of the arm and reduce the weight of the hand.
本発明の実施の形態にかかる産業用ロボットの平面図である。It is a top view of the industrial robot concerning an embodiment of the invention. 図１（Ｂ）のＥ－Ｅ方向から産業用ロボットを示す側面図である。It is a side view which shows an industrial robot from the EE direction of FIG. 1 (B). 図１に示すハンドの平面図である。It is a top view of the hand shown in FIG. （Ａ）は、図３のＦ部の拡大図であり、（Ｂ）は、図３のＧ－Ｇ断面の断面図である。(A) is an enlarged view of a portion F in FIG. 3, and (B) is a cross-sectional view taken along the line GG in FIG. 図４（Ａ）のＨ－Ｈ断面の断面図である。FIG. 5 is a cross-sectional view taken along the line HH in FIG. 図４（Ａ）のＪ－Ｊ断面の断面図である。FIG. 5 is a cross-sectional view taken along the line JJ in FIG. （Ａ）は、本発明の他の実施の形態にかかる第１アーム部の周辺部を示す概略図であり、（Ｂ）は、本発明の他の実施の形態にかかる第２アーム部の周辺部を示す概略図である。(A) is the schematic which shows the peripheral part of the 1st arm part concerning other embodiment of this invention, (B) is the periphery of the 2nd arm part concerning other embodiment of this invention It is the schematic which shows a part.
　以下、図面を参照しながら、本発明の実施の形態を説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
　（産業用ロボットの概略構成）
　図１は、本発明の実施の形態にかかる産業用ロボット１の平面図である。図２は、図１（Ｂ）のＥ－Ｅ方向から産業用ロボット１を示す側面図である。 (Schematic configuration of industrial robot)
FIG. 1 is a plan view of an industrial robot 1 according to an embodiment of the present invention. FIG. 2 is a side view showing the industrial robot 1 from the EE direction of FIG.
　本形態の産業用ロボット１（以下、「ロボット１」とする。）は、搬送対象物である液晶ディスプレイ用のガラス基板２（以下、「基板２」とする。）を搬送するためのロボットである。本形態のロボット１は、特に大型の基板２の搬送に適した大型のロボットであり、たとえば、１辺が２．５ｍ程度の矩形状の基板２を搬送する。また、ロボット１は、比較的温度の高い基板２の搬送に適したロボットであり、たとえば、５００℃程度の基板２を搬送する。また、ロボット１は、真空中で基板２を搬送する。 The industrial robot 1 (hereinafter referred to as “robot 1”) of this embodiment is a robot for transporting a glass substrate 2 for liquid crystal display (hereinafter referred to as “substrate 2”), which is an object to be transported. is there. The robot 1 according to the present embodiment is a large robot particularly suitable for transporting a large substrate 2. For example, the robot 1 transports a rectangular substrate 2 having a side of about 2.5 m. The robot 1 is a robot suitable for transporting the substrate 2 having a relatively high temperature. For example, the robot 1 transports the substrate 2 at about 500 ° C. Further, the robot 1 conveys the substrate 2 in a vacuum.
　図１、図２に示すように、ロボット１は、基板２が搭載される２個のハンド３、４と、ハンド３がその先端側に回動可能に連結されるアーム５と、ハンド４がその先端側に回動可能に連結されるアーム６と、アーム５、６の基端側が回動可能に連結される本体部７と、本体部７を昇降させる昇降機構（図示省略）とを備えている。本体部７および昇降機構は、略有底円筒状に形成されたケース１３の中に収容されている。ケース１３の上端には、円板状に形成されたフランジ１４が固定されている。フランジ１４には、本体部７の上端側部分が配置される貫通孔が形成されている。 As shown in FIG. 1 and FIG. 2, the robot 1 includes two hands 3 and 4 on which a substrate 2 is mounted, an arm 5 to which the hand 3 is rotatably connected to the tip side, and a hand 4. The arm 6 is rotatably connected to the distal end side thereof, the main body 7 is rotatably connected to the base ends of the arms 5 and 6, and a lifting mechanism (not shown) for moving the main body 7 up and down. ing. The main body 7 and the elevating mechanism are accommodated in a case 13 formed in a substantially bottomed cylindrical shape. A flange 14 formed in a disk shape is fixed to the upper end of the case 13. The flange 14 is formed with a through hole in which the upper end portion of the main body 7 is disposed.
　ハンド３、４およびアーム５、６は、本体部７の上側に配置されている。また、ハンド３、４およびアーム５、６は、フランジ１４の上側に配置されている。ロボット１は、上述のように、真空中で基板２を搬送するためのロボットであり、図２に示すように、ロボット１の、フランジ１４の下端面よりも上側の部分は、真空領域ＶＲの中（真空中）に配置されている。一方、ロボット１の、フランジ１４の下端面よりも下側の部分は、大気領域ＡＲの中（大気中）に配置されている。 The hands 3, 4 and the arms 5, 6 are arranged on the upper side of the main body 7. The hands 3, 4 and the arms 5, 6 are disposed on the upper side of the flange 14. As described above, the robot 1 is a robot for transporting the substrate 2 in a vacuum. As shown in FIG. 2, the portion of the robot 1 above the lower end surface of the flange 14 is in the vacuum region VR. It is placed inside (in a vacuum). On the other hand, a portion of the robot 1 below the lower end surface of the flange 14 is disposed in the atmospheric region AR (in the atmosphere).
　アーム５は、第１アーム部１６と第２アーム部１７とによって構成されている。また、アーム６は、アーム５と共通の第１アーム部１６と第２アーム部１８とによって構成されている。第１アーム部１６は、二股状に形成されている。具体的には、第１アーム部１６は、略Ｖ形状に形成されている。第１アーム部１６および第２アーム部１７、１８は、アルミニウム合金で形成されている。 The arm 5 includes a first arm portion 16 and a second arm portion 17. The arm 6 includes a first arm portion 16 and a second arm portion 18 that are common to the arm 5. The first arm portion 16 is formed in a bifurcated shape. Specifically, the first arm portion 16 is formed in a substantially V shape. The 1st arm part 16 and the 2nd arm parts 17 and 18 are formed with the aluminum alloy.
　第１アーム部１６の基端側は、本体部７に回動可能に保持されている。二股状に形成される第１アーム部１６の一方の先端側に、第２アーム部１７が回動可能に保持され、第１アーム部１６の他方の先端側に、第２アーム部１８が回動可能に保持されている。第２アーム部１７の先端側には、ハンド３が回動可能に保持され、第２アーム部１８の先端側には、ハンド４が回動可能に保持されている。 The proximal end side of the first arm portion 16 is rotatably held by the main body portion 7. A second arm portion 17 is rotatably held on one tip side of the first arm portion 16 formed in a bifurcated shape, and a second arm portion 18 is rotated on the other tip side of the first arm portion 16. It is held movable. The hand 3 is rotatably held at the distal end side of the second arm portion 17, and the hand 4 is rotatably held at the distal end side of the second arm portion 18.
　アーム５、６と本体部７との連結部（すなわち、第１アーム部１６と本体部７との連結部）は、第１関節部２０となっている。第１関節部２０には、真空領域ＶＲへの空気の流入を防ぐ磁性流体シール（図示省略）が配置されている。第１アーム部１６と第２アーム部１７との連結部は、第２関節部２１となっており、第１アーム部１６と第２アーム部１８との連結部は、第２関節部２２となっている。第２関節部２１には、第２アーム部１７を回動可能に支持する転がり軸受（図示省略）が配置され、第２関節部２２には、第２アーム部１８を回動可能に支持する転がり軸受（図示省略）が配置されている。 The connecting portion between the arms 5 and 6 and the main body portion 7 (that is, the connecting portion between the first arm portion 16 and the main body portion 7) is a first joint portion 20. A magnetic fluid seal (not shown) that prevents air from flowing into the vacuum region VR is disposed at the first joint portion 20. The connecting portion between the first arm portion 16 and the second arm portion 17 is the second joint portion 21, and the connecting portion between the first arm portion 16 and the second arm portion 18 is the second joint portion 22. It has become. The second joint portion 21 is provided with a rolling bearing (not shown) that rotatably supports the second arm portion 17, and the second joint portion 22 rotatably supports the second arm portion 18. Rolling bearings (not shown) are arranged.
　本形態では、図２に示すように、水平方向から見たときに、第２アーム部１７、１８は、第１アーム部１６よりも上側に配置されている。また、第２アーム部１８は、第２アーム部１７よりも上側に配置されている。また、水平方向から見たときに、ハンド３、４は、第２アーム部１７と第２アーム部１８との間に配置されている。具体的には、第２アーム部１７の上面側にハンド３が連結され、第２アーム部１８の下面側にハンド４が連結されており、水平方向から見たときに、ハンド３の上側にハンド４が配置されている。なお、アーム５、６が縮んでいるときに、ロボット１を上側から見ると、図１（Ｂ）に示すように、ハンド３とハンド４とが重なっている。 In this embodiment, as shown in FIG. 2, the second arm portions 17 and 18 are arranged above the first arm portion 16 when viewed from the horizontal direction. Further, the second arm portion 18 is disposed above the second arm portion 17. Further, when viewed from the horizontal direction, the hands 3 and 4 are disposed between the second arm portion 17 and the second arm portion 18. Specifically, the hand 3 is connected to the upper surface side of the second arm portion 17, and the hand 4 is connected to the lower surface side of the second arm portion 18. When viewed from the horizontal direction, the hand 3 is connected to the upper side of the hand 3. A hand 4 is arranged. In addition, when the robot 5 is viewed from the upper side when the arms 5 and 6 are contracted, the hand 3 and the hand 4 overlap each other as shown in FIG.
　ロボット１は、アーム５やアーム６を伸ばして、図示を省略する搬送用ラック内で基板２を搭載し、その後、アーム５やアーム６を縮めながら、搬送用ラックから基板２を搬出する。また、その後、ロボット１は、その方向を変えて、減圧された高温のチャンバー内へ（真空かつ高温のチャンバー内へ）基板２を搬入する。 The robot 1 extends the arm 5 and the arm 6, mounts the substrate 2 in a transfer rack (not shown), and then unloads the substrate 2 from the transfer rack while shrinking the arm 5 and the arm 6. Thereafter, the robot 1 changes its direction and carries the substrate 2 into the decompressed high temperature chamber (into a vacuum and high temperature chamber).
　ハンド３、４は、基板２を搭載するための複数（たとえば、４本）のフォーク２５と、複数のフォーク２５の基端側が固定されるとともに第２アーム部１７、１８の先端側に回動可能に保持されるハンド基部２６とから構成されている。フォーク２５は、基板２が搭載されるフォーク先端部２７と、フォーク先端部２７の基端側が固定されるフォーク基端部２８とから構成されている。フォーク先端部２７は、フォーク２５の先端側を構成し、フォーク基端部２８は、フォーク２５の基端側を構成している。本形態のフォーク先端部２７は、搬送対象物である基板２が搭載される搭載部である。 The hands 3 and 4 have a plurality of (for example, four) forks 25 on which the substrate 2 is mounted, and the proximal ends of the plurality of forks 25 are fixed, and the hands 3 and 4 rotate to the distal ends of the second arm portions 17 and 18. It is comprised from the hand base 26 hold | maintained possible. The fork 25 includes a fork distal end portion 27 on which the substrate 2 is mounted and a fork proximal end portion 28 to which the proximal end side of the fork distal end portion 27 is fixed. The fork distal end portion 27 constitutes the distal end side of the fork 25, and the fork base end portion 28 constitutes the proximal end side of the fork 25. The fork tip portion 27 of this embodiment is a mounting portion on which the substrate 2 that is a conveyance target is mounted.
　フォーク先端部２７には、図３～図６に示すように、フォーク先端部２７の上面および側面を覆うカバー部材３０が取り付けられている。以下、ハンド３およびカバー部材３０の具体的な構成を説明する。なお、ハンド４は、ハンド３と同様に構成されているため、ハンド４の具体的な構成の説明は省略する。また、図１、図２では、カバー部材３０の図示を省略している。 As shown in FIGS. 3 to 6, a cover member 30 that covers the upper surface and the side surface of the fork tip 27 is attached to the fork tip 27. Hereinafter, specific configurations of the hand 3 and the cover member 30 will be described. Since the hand 4 is configured in the same manner as the hand 3, a description of a specific configuration of the hand 4 is omitted. 1 and 2, the cover member 30 is not shown.
　（ハンドおよびカバー部材の構成）
　図３は、図１に示すハンド３の平面図である。図４（Ａ）は、図３のＦ部の拡大図であり、図４（Ｂ）は、図３のＧ－Ｇ断面の断面図である。図５は、図４（Ａ）のＨ－Ｈ断面の断面図である。図６は、図４（Ａ）のＪ－Ｊ断面の断面図である。 (Configuration of hand and cover member)
FIG. 3 is a plan view of the hand 3 shown in FIG. 4A is an enlarged view of a portion F in FIG. 3, and FIG. 4B is a cross-sectional view taken along a line GG in FIG. FIG. 5 is a cross-sectional view taken along the line HH in FIG. FIG. 6 is a cross-sectional view taken along the line JJ of FIG.
　上述のように、ハンド３は、フォーク２５とハンド基部２６とから構成され、フォーク２５は、フォーク先端部２７とフォーク基端部２８とから構成されている。 As described above, the hand 3 includes the fork 25 and the hand base 26, and the fork 25 includes the fork tip 27 and the fork base 28.
　フォーク先端部２７は、セラミックで形成されている。このフォーク先端部２７は、中実のセラミックで形成されており、その内部には、空間が形成されていない。また、フォーク先端部２７は、細長い略四角柱状に形成されている。フォーク先端部２７の上面には、複数の凸部２７ａが上側に突出するように形成されている。複数の凸部２７ａは、フォーク２５の長手方向において所定のピッチで形成されている。また、複数の凸部２７ａは、フォーク２５の長手方向においてフォーク先端部２７の全域に形成されている。また、フォーク先端部２７の基端側の上面には、フォーク２５の長手方向において基板２を位置決めするための位置決め用凸部２７ｃが上側に突出するように形成されている。なお、図３では、複数の凸部２７ａのうちの一部の凸部２７ａのみを図示している。 The fork tip 27 is made of ceramic. The fork tip 27 is made of solid ceramic, and no space is formed in the fork tip 27. Further, the fork tip portion 27 is formed in an elongated substantially quadrangular prism shape. A plurality of convex portions 27 a are formed on the upper surface of the fork tip portion 27 so as to protrude upward. The plurality of convex portions 27 a are formed at a predetermined pitch in the longitudinal direction of the fork 25. Further, the plurality of convex portions 27 a are formed in the entire region of the fork tip portion 27 in the longitudinal direction of the fork 25. Further, a positioning convex portion 27 c for positioning the substrate 2 in the longitudinal direction of the fork 25 is formed on the upper surface of the base end side of the fork distal end portion 27 so as to protrude upward. In FIG. 3, only some of the convex portions 27a among the plurality of convex portions 27a are illustrated.
　上側から見たときの凸部２７ａの形状は、フォーク２５の長手方向に長い略長方形状となっている。凸部２７ａの上面２７ｂは、平面状に形成されている。また、上面２７ｂは、カバー部材３０を構成する後述の上面部３０ａの上面よりも上側に配置されている。この上面２７ｂは、基板２が搭載される搭載面となっており、上面２７ｂには、基板２の下面が当接する。位置決め用凸部２７ｃは、基板２の下面および基板２の端部が当接するように、階段状に形成されている。なお、凸部２７ａおよび位置決め用凸部２７ｃが、フォーク先端部２７と別体で形成されて、フォーク先端部２７に固定されても良い。 The shape of the convex portion 27 a when viewed from above is a substantially rectangular shape that is long in the longitudinal direction of the fork 25. The upper surface 27b of the convex portion 27a is formed in a planar shape. Further, the upper surface 27 b is disposed on the upper side of the upper surface of an upper surface portion 30 a described later constituting the cover member 30. The upper surface 27b is a mounting surface on which the substrate 2 is mounted, and the lower surface of the substrate 2 is in contact with the upper surface 27b. The positioning convex portion 27c is formed in a step shape so that the lower surface of the substrate 2 and the end portion of the substrate 2 are in contact with each other. The convex portion 27 a and the positioning convex portion 27 c may be formed separately from the fork tip portion 27 and fixed to the fork tip portion 27.
　フォーク基端部２８は、フォーク先端部２７が固定される第１固定部２８ａと、ハンド基部２６に固定される第２固定部２８ｂと、第１固定部２８ａと第２固定部２８ｂとを繋ぐ連結部２８ｃとから構成されており、全体として、略四角柱状に形成されている。フォーク基端部２８の長さは、フォーク先端部２７の長さよりも短くなっている。また、フォーク基端部２８の厚さは、フォーク先端部２７の厚さよりも厚くなっており、フォーク基端部２８の幅は、フォーク先端部２７の幅よりも広くなっている。 The fork base end portion 28 connects the first fixing portion 28a to which the fork tip end portion 27 is fixed, the second fixing portion 28b to be fixed to the hand base portion 26, and the first fixing portion 28a and the second fixing portion 28b. It is comprised from the connection part 28c, and is formed in the substantially square pillar shape as a whole. The length of the fork base end portion 28 is shorter than the length of the fork tip end portion 27. The fork base end portion 28 is thicker than the fork tip end portion 27, and the fork base end portion 28 is wider than the fork tip end portion 27.
　連結部２８ｃは、ステンレス鋼管で形成されており、その内部に空間を有する中空状に形成されている。連結部２８ｃの肉厚は、薄くなっており、たとえば、連結部２８ｃの肉厚は、４ｍｍ程度である。第１固定部２８ａおよび第２固定部２８ｂは、ステンレス鋼で形成されるとともに、フォーク２５の外形に合わせて、略直方体のブロック状に形成されている。第１固定部２８ａと連結部２８ｃとは、互いに溶接で固定され、第２固定部２８ｂと連結部２８ｃとは、互いに溶接で固定されている。なお、第１固定部２８ａと連結部２８ｃとは溶接以外の方法で互いに固定されても良い。たとえば、第１固定部２８ａと連結部２８ｃとは互いに接着で固定されても良いし、ボルト等を用いて固定されても良い。同様に、第２固定部２８ｂと連結部２８ｃとは溶接以外の方法で互いに固定されても良い。たとえば、第２固定部２８ｂと連結部２８ｃとは互いに接着で固定されても良いし、ボルト等を用いて固定されても良い。 The connecting portion 28c is formed of a stainless steel pipe and is formed in a hollow shape having a space therein. The thickness of the connecting portion 28c is thin. For example, the thickness of the connecting portion 28c is about 4 mm. The first fixing portion 28 a and the second fixing portion 28 b are formed of stainless steel and are formed in a substantially rectangular parallelepiped block shape according to the outer shape of the fork 25. The first fixing portion 28a and the connecting portion 28c are fixed to each other by welding, and the second fixing portion 28b and the connecting portion 28c are fixed to each other by welding. The first fixing part 28a and the connecting part 28c may be fixed to each other by a method other than welding. For example, the first fixing portion 28a and the connecting portion 28c may be fixed to each other by bonding, or may be fixed using a bolt or the like. Similarly, the second fixing portion 28b and the connecting portion 28c may be fixed to each other by a method other than welding. For example, the second fixing portion 28b and the connecting portion 28c may be fixed to each other by bonding, or may be fixed using a bolt or the like.
　第１固定部２８ａの下面には、図４（Ｂ）に示すように、フォーク先端部２７の基端側部分が配置される凹部２８ｄが形成されており、フォーク先端部２７の基端側部分は、凹部２８ｄの中に配置された状態で、第１固定部２８ａに固定されている。第２固定部２８ｂには、連結部２８ｃの内側の空間に繋がる貫通孔２８ｅが形成されている。第２固定部２８ｂは、ハンド基部２６の下面に形成される凹部２６ａの中に配置された状態で、ハンド基部２６に固定されている。ハンド基部２６は、アルミニウム合金またはステンレス鋼で形成されている。 As shown in FIG. 4B, a recess 28d is formed on the lower surface of the first fixed portion 28a, and the proximal end portion of the fork distal end portion 27 is formed. Is fixed to the first fixing portion 28a in a state of being disposed in the recess 28d. The second fixing portion 28b is formed with a through hole 28e connected to the space inside the connecting portion 28c. The second fixing portion 28 b is fixed to the hand base 26 in a state where it is disposed in a recess 26 a formed on the lower surface of the hand base 26. The hand base 26 is made of an aluminum alloy or stainless steel.
　カバー部材３０は、薄いステンレス鋼板で形成されている。また、カバー部材３０は、ステンレス鋼板を略四角溝状に折り曲げることで形成されており、フォーク先端部２７の上面を覆う上面部３０ａと、フォーク先端部２７の側面を覆う２個の側面部３０ｂとを備えている。上面部３０ａは、図６に示すように、フォーク２５の長手方向に直交する方向における上面部３０ａの内側部分がその両端部よりもわずかに下側に配置されるように、折り曲げられている。２個の側面部３０ｂは、フォーク２５の長手方向に直交する方向における上面部３０ａの両端のそれぞれに繋がるように形成されている。 The cover member 30 is formed of a thin stainless steel plate. The cover member 30 is formed by bending a stainless steel plate into a substantially square groove shape, and includes an upper surface portion 30 a that covers the upper surface of the fork tip portion 27 and two side surface portions 30 b that cover the side surfaces of the fork tip portion 27. And has. As shown in FIG. 6, the upper surface portion 30 a is bent so that the inner portion of the upper surface portion 30 a in the direction orthogonal to the longitudinal direction of the fork 25 is disposed slightly below the both end portions. The two side surface portions 30b are formed so as to be connected to both ends of the upper surface portion 30a in the direction orthogonal to the longitudinal direction of the fork 25.
　上面部３０ａには、フォーク先端部２７の凸部２７ａが配置される複数の配置孔３０ｃが形成されている。複数の配置孔３０ｃは、フォーク２５の長手方向において所定のピッチで形成されている。配置孔３０ｃは、上面部３０ａを貫通するように形成されており、凸部２７ａの上端側は、上面部３０ａよりも上側へ突出している。上側から見たときの配置孔３０ｃの形状は、フォーク２５の長手方向に長い略長方形状となっている。フォーク２５の長手方向における配置孔３０ｃの幅は、フォーク２５の長手方向における凸部２７ａの幅よりも広くなっている。 A plurality of arrangement holes 30c in which the convex portions 27a of the fork tip portion 27 are arranged are formed in the upper surface portion 30a. The plurality of arrangement holes 30 c are formed at a predetermined pitch in the longitudinal direction of the fork 25. The arrangement hole 30c is formed so as to penetrate the upper surface portion 30a, and the upper end side of the convex portion 27a protrudes above the upper surface portion 30a. The shape of the arrangement hole 30 c when viewed from above is a substantially rectangular shape that is long in the longitudinal direction of the fork 25. The width of the arrangement hole 30 c in the longitudinal direction of the fork 25 is wider than the width of the convex portion 27 a in the longitudinal direction of the fork 25.
　また、上面部３０ａには、カバー部材３０をフォーク先端部２７に取り付けるための複数の貫通孔３０ｄが形成されている。複数の貫通孔３０ｄは、フォーク２５の長手方向において所定のピッチで形成されている。貫通孔３０ｄは、上面部３０ａを貫通するように形成されている。上側から見たときの貫通孔３０ｄの形状は、フォーク２５の長手方向に長い長円形状となっている。 Further, a plurality of through holes 30d for attaching the cover member 30 to the fork tip portion 27 are formed in the upper surface portion 30a. The plurality of through holes 30 d are formed at a predetermined pitch in the longitudinal direction of the fork 25. The through hole 30d is formed so as to penetrate the upper surface portion 30a. The shape of the through-hole 30 d when viewed from above is an oval shape that is long in the longitudinal direction of the fork 25.
　カバー部材３０は、図６に示すように、カラー３２と、スペーサ３３と、皿ネジ３４とによって、フォーク先端部２７に取り付けられている。カラー３２は、鍔部３２ａと筒部３２ｂとを有する扁平な鍔付きの略円筒状に形成されている。スペーサ３３は、扁平な円筒状に形成されている。筒部３２ｂは、カバー部材３０の貫通孔３０ｄの中に配置されており、その下端は、フォーク先端部２７の上面に当接している。鍔部３２ａは、上面部３０ａの上側に配置されている。スペーサ３３は、その下面がフォーク先端部２７の上面に当接し、その上面が上面部３０ａの下面に当接するように、筒部３２ｂの外周側に配置されている。カラー３２の内周面は、皿ネジ３４の頭部に係合する傾斜面となっており、フォーク先端部２７の上面に形成されるネジ孔に皿ネジ３４がねじ込まれることで、カバー部材３０は、フォーク先端部２７に固定されている。なお、本形態では、鍔部３２ａの下面が上面部３０ａの上面に軽く接触しているか、または、鍔部３２ａの下面と上面部３０ａの上面との間にわずかな隙間が形成されている。 As shown in FIG. 6, the cover member 30 is attached to the fork tip 27 by a collar 32, a spacer 33, and a countersunk screw 34. The collar 32 is formed in a substantially cylindrical shape with a flat collar having a collar 32a and a cylinder 32b. The spacer 33 is formed in a flat cylindrical shape. The cylindrical portion 32 b is disposed in the through hole 30 d of the cover member 30, and the lower end thereof is in contact with the upper surface of the fork distal end portion 27. The flange portion 32a is disposed on the upper side of the upper surface portion 30a. The spacer 33 is disposed on the outer peripheral side of the cylindrical portion 32b so that the lower surface thereof is in contact with the upper surface of the fork tip portion 27 and the upper surface thereof is in contact with the lower surface of the upper surface portion 30a. The inner peripheral surface of the collar 32 is an inclined surface that engages with the head of the countersunk screw 34, and the countersunk screw 34 is screwed into a screw hole formed in the upper surface of the fork tip 27, thereby covering the cover member 30. Is fixed to the fork tip 27. In this embodiment, the lower surface of the flange portion 32a is lightly in contact with the upper surface of the upper surface portion 30a, or a slight gap is formed between the lower surface of the flange portion 32a and the upper surface of the upper surface portion 30a.
　上述のように、スペーサ３３の下面はフォーク先端部２７の上面に当接し、スペーサ３３の上面は上面部３０ａの下面に当接しているため、フォーク先端部２７の上面と上面部３０ａの下面との間には、隙間が形成されている。また、フォーク２５の長手方向に直交する方向における上面部３０ａの幅は、この方向におけるフォーク先端部２７の幅よりも広くなっており、フォーク先端部２７の側面と側面部３０ｂとの間には、隙間が形成されている。上下方向における側面部３０ｂの幅は、上下方向におけるフォーク先端部２７の厚みと略等しくなっており、側面部３０ｂは、フォーク先端部２７の側面のほぼ全域を覆っている。また、上面部３０ａは、凸部２７ａおよび位置決め用凸部２７ｃを除くフォーク先端部２７の上面のほぼ全域を覆っている。 As described above, since the lower surface of the spacer 33 is in contact with the upper surface of the fork tip portion 27 and the upper surface of the spacer 33 is in contact with the lower surface of the upper surface portion 30a, the upper surface of the fork tip portion 27 and the lower surface of the upper surface portion 30a are A gap is formed between them. Further, the width of the upper surface portion 30a in the direction orthogonal to the longitudinal direction of the fork 25 is wider than the width of the fork tip portion 27 in this direction, and between the side surface of the fork tip portion 27 and the side surface portion 30b. A gap is formed. The width of the side surface portion 30 b in the vertical direction is substantially equal to the thickness of the fork tip portion 27 in the vertical direction, and the side surface portion 30 b covers almost the entire side surface of the fork tip portion 27. Further, the upper surface portion 30a covers almost the entire upper surface of the fork tip portion 27 excluding the convex portion 27a and the positioning convex portion 27c.
　本形態では、カバー部材３０における輻射熱の反射率およびフォーク基端部２８における輻射熱の反射率は、フォーク先端部２７における輻射熱の反射率よりも高くなっている。また、上述のように、カバー部材３０およびフォーク基端部２８はステンレス鋼で形成され、フォーク先端部２７はセラミックで形成されており、カバー部材３０の熱伝導率およびフォーク基端部２８の熱伝導率は、フォーク先端部２７の熱伝導率よりも低くなっている。また、フォーク先端部２７の比重は、カバー部材３０の比重およびフォーク基端部２８の比重よりも小さくなっている。 In this embodiment, the reflectance of the radiant heat at the cover member 30 and the reflectance of the radiant heat at the fork base end portion 28 are higher than the reflectance of the radiant heat at the fork tip portion 27. Further, as described above, the cover member 30 and the fork base end portion 28 are made of stainless steel, and the fork tip end portion 27 is made of ceramic, and the thermal conductivity of the cover member 30 and the heat of the fork base end portion 28 are formed. The conductivity is lower than the thermal conductivity of the fork tip portion 27. Further, the specific gravity of the fork distal end portion 27 is smaller than the specific gravity of the cover member 30 and the specific gravity of the fork base end portion 28.
　（本形態の主な効果）
　以上説明したように、本形態では、カバー部材３０における輻射熱の反射率は、フォーク先端部２７における輻射熱の反射率よりも高くなっており、かつ、カバー部材３０の熱伝導率は、フォーク先端部２７の熱伝導率よりも低くなっている。そのため、本形態では、熱放射によって基板２からフォーク先端部２７に伝達される熱量をカバー部材３０によって低減することが可能になる。特に本形態では、カバー部材３０が、フォーク先端部２７の上面に加え、フォーク先端部２７の側面のほぼ全域を覆っているため、熱放射によって基板２からフォーク先端部２７に伝達される熱量を効果的に低減することが可能になる。また、本形態では、フォーク先端部２７の上面と上面部３０ａの下面との間に隙間が形成されるとともに、フォーク先端部２７の側面と側面部３０ｂとの間に隙間が形成されており、カバー部材３０からフォーク先端部２７への熱伝導経路がカラー３２およびスペーサ３３となっているため、熱放射によって基板２からカバー部材３０に伝達された熱が熱伝導によってフォーク先端部２７に伝達されるのを抑制することが可能になる。 (Main effects of this form)
As described above, in this embodiment, the reflectance of the radiant heat in the cover member 30 is higher than the reflectance of the radiant heat in the fork tip 27, and the thermal conductivity of the cover member 30 is the fork tip. The thermal conductivity is lower than 27. Therefore, in this embodiment, it is possible to reduce the amount of heat transferred from the substrate 2 to the fork tip portion 27 by the heat radiation by the cover member 30. In particular, in this embodiment, the cover member 30 covers almost the entire side surface of the fork tip portion 27 in addition to the upper surface of the fork tip portion 27, so that the amount of heat transferred from the substrate 2 to the fork tip portion 27 by heat radiation is reduced. It can be effectively reduced. In this embodiment, a gap is formed between the upper surface of the fork tip portion 27 and the lower surface of the upper surface portion 30a, and a gap is formed between the side surface of the fork tip portion 27 and the side surface portion 30b. Since the heat conduction path from the cover member 30 to the fork tip 27 is the collar 32 and the spacer 33, the heat transmitted from the substrate 2 to the cover member 30 by heat radiation is transferred to the fork tip 27 by heat conduction. Can be suppressed.
　したがって、本形態では、ハンド３、４を介した熱伝導によって基板２からアーム５、６に伝達される熱量を低減することが可能になる。その結果、本形態では、熱量の大きな基板２を搬送する場合であっても、第２関節部２１、２２に配置される転がり軸受が熱の影響によって摩耗したり損傷したりするのを抑制することが可能になり、また、熱の影響によるアーム５、６の変形を抑制することが可能になる。 Therefore, in this embodiment, it is possible to reduce the amount of heat transferred from the substrate 2 to the arms 5 and 6 by heat conduction through the hands 3 and 4. As a result, in this embodiment, even when the substrate 2 having a large amount of heat is transported, the rolling bearings disposed in the second joint portions 21 and 22 are prevented from being worn or damaged by the influence of heat. In addition, the deformation of the arms 5 and 6 due to the influence of heat can be suppressed.
　本形態では、フォーク基端部２８の連結部２８ｃは、中空状に形成されており、連結部２８ｃの断面積が小さくなっている。すなわち、本形態では、連結部２８ｃにおける熱伝導経路が狭くなっている。そのため、本形態では、フォーク先端部２７からハンド基部２６へ熱伝導によって伝達される熱量を効果的に低減することが可能になり、その結果、熱伝導によってハンド３、４からアーム５、６に伝達される熱量を効果的に低減することが可能になる。 In this embodiment, the connecting portion 28c of the fork base end portion 28 is formed in a hollow shape, and the cross-sectional area of the connecting portion 28c is small. That is, in this embodiment, the heat conduction path in the connecting portion 28c is narrow. Therefore, in this embodiment, it is possible to effectively reduce the amount of heat transferred from the fork tip 27 to the hand base 26 by heat conduction, and as a result, the hands 3, 4 to the arms 5, 6 by heat conduction. It becomes possible to effectively reduce the amount of heat transferred.
　また、本形態では、フォーク基端部２８における輻射熱の反射率は、フォーク先端部２７における輻射熱の反射率よりも高くなっており、かつ、フォーク基端部２８の熱伝導率は、フォーク先端部２７の熱伝導率よりも低くなっている。そのため、カバー部材３０によってフォーク基端部２８が覆われていなくても、熱放射によって基板２からハンド基部２６へ伝達される熱量を低減することが可能になり、その結果、ハンド３、４を介した熱伝導によって基板２からアーム５、６に伝達される熱量を効果的に低減することが可能になる。 In this embodiment, the reflectance of the radiant heat at the fork base end portion 28 is higher than the reflectance of the radiant heat at the fork tip end portion 27, and the heat conductivity of the fork base end portion 28 is equal to the fork tip end portion. The thermal conductivity is lower than 27. Therefore, even if the fork base end portion 28 is not covered by the cover member 30, it is possible to reduce the amount of heat transferred from the substrate 2 to the hand base portion 26 by heat radiation. It is possible to effectively reduce the amount of heat transferred from the substrate 2 to the arms 5 and 6 by the heat conduction.
　本形態では、フォーク先端部２７の比重は、カバー部材３０の比重よりも小さくなっている。そのため、本形態では、比較的大型の基板２を搬送するためにハンド３、４が大型化しても、ハンド３、４の重量を軽減することが可能になる。すなわち、カバー部材３０と同じステンレス鋼でフォーク先端部２７が形成されている場合であっても、ハンド３、４を介した熱伝導によって基板２からアーム５、６に伝達される熱量を低減することが可能になるが、この場合、比較的大型の基板２を搬送するためにハンド３、４が大型化すると、ハンド３、４の重量が重くなる。これに対して、本形態では、ハンド３、４が大型化しても、ハンド３、４の重量を軽減することが可能になる。また、ステンレス鋼の線膨張率は、セラミックの線膨張率よりも大きいため、フォーク先端部２７がステンレス鋼で形成されている場合には、フォーク先端部２７が熱変形しやすくなるが、本形態では、フォーク先端部２７がセラミックで形成されているため、フォーク先端部２７の熱変形を抑制することが可能になる。 In this embodiment, the specific gravity of the fork tip 27 is smaller than the specific gravity of the cover member 30. For this reason, in this embodiment, even if the hands 3 and 4 are enlarged in order to transport the relatively large substrate 2, the weight of the hands 3 and 4 can be reduced. In other words, even when the fork tip 27 is formed of the same stainless steel as the cover member 30, the amount of heat transferred from the substrate 2 to the arms 5 and 6 by heat conduction through the hands 3 and 4 is reduced. In this case, if the hands 3 and 4 are increased in size to transport the relatively large substrate 2, the weights of the hands 3 and 4 are increased. On the other hand, in this embodiment, even if the hands 3 and 4 are enlarged, the weight of the hands 3 and 4 can be reduced. Further, since the linear expansion coefficient of stainless steel is larger than that of ceramic, when the fork tip portion 27 is formed of stainless steel, the fork tip portion 27 is easily thermally deformed. Then, since the fork tip 27 is made of ceramic, it is possible to suppress thermal deformation of the fork tip 27.
　本形態では、フォーク基端部２８の連結部２８ｃは、ステンレス鋼管で形成されている。そのため、本形態では、連結部２８ｃの重量を軽減しつつ、連結部２８ｃの剛性を確保することが可能になる。 In this embodiment, the connecting portion 28c of the fork base end portion 28 is formed of a stainless steel pipe. Therefore, in this embodiment, it is possible to ensure the rigidity of the connecting portion 28c while reducing the weight of the connecting portion 28c.
　本形態では、フォーク２５の長手方向におけるカバー部材３０の配置孔３０ｃの幅は、フォーク２５の長手方向におけるフォーク先端部２７の凸部２７ａの幅よりも広くなっている。また、本形態では、鍔部３２ａの下面が上面部３０ａの上面に軽く接触しているか、または、鍔部３２ａの下面と上面部３０ａの上面との間にわずかな隙間が形成されている。そのため、本形態では、フォーク先端部２７の線膨張率とカバー部材３０の線膨張率とが異なっていても、比較的温度の高い基板２が搭載されたときのフォーク先端部２７およびカバー３０の熱変形を抑制することが可能になる。 In this embodiment, the width of the arrangement hole 30c of the cover member 30 in the longitudinal direction of the fork 25 is wider than the width of the convex portion 27a of the fork tip 27 in the longitudinal direction of the fork 25. In this embodiment, the lower surface of the flange portion 32a is lightly in contact with the upper surface of the upper surface portion 30a, or a slight gap is formed between the lower surface of the flange portion 32a and the upper surface of the upper surface portion 30a. For this reason, in this embodiment, even if the linear expansion coefficient of the fork tip 27 and the linear expansion coefficient of the cover member 30 are different, the fork tip 27 and the cover 30 when the substrate 2 having a relatively high temperature is mounted. It becomes possible to suppress thermal deformation.
　（他の実施の形態）
　上述した形態は、本発明の好適な形態の一例ではあるが、これに限定されるものではなく本発明の要旨を変更しない範囲において種々変形実施が可能である。 (Other embodiments)
The above-described embodiment is an example of a preferred embodiment of the present invention, but is not limited to this, and various modifications can be made without departing from the scope of the present invention.
　上述した形態では、カバー部材３０は、フォーク先端部２７の側面のほぼ全域を覆っている。この他にもたとえば、カバー部材３０は、フォーク先端部２７の側面の一部を覆っていても良いし、フォーク先端部２７の上面のみを覆って、フォーク先端部２７の側面を覆っていなくても良い。また、フォーク先端部２７の下面を覆うようにカバー部材３０が構成されても良い。また、上述した形態では、スペーサ３３を用いて、フォーク先端部２７にカバー部材３０が取り付けられているが、スペーサ３３を使わずに、フォーク先端部２７にカバー部材３０が取り付けられても良い。この場合には、カバー部材３０の上面部３０ａの下面は、フォーク先端部２７の上面に当接する。 In the embodiment described above, the cover member 30 covers almost the entire side surface of the fork tip portion 27. In addition to this, for example, the cover member 30 may cover a part of the side surface of the fork tip portion 27, or may cover only the upper surface of the fork tip portion 27 and not the side surface of the fork tip portion 27. Also good. Further, the cover member 30 may be configured to cover the lower surface of the fork tip portion 27. In the above-described embodiment, the cover member 30 is attached to the fork tip portion 27 using the spacer 33, but the cover member 30 may be attached to the fork tip portion 27 without using the spacer 33. In this case, the lower surface of the upper surface portion 30 a of the cover member 30 contacts the upper surface of the fork tip portion 27.
　上述した形態において、第１アーム部１６の上面および下面は、図７（Ａ）に示すように、第１アーム部１６よりも熱伝導率の低い第２のカバー部材としてのカバー部材４０に覆われても良い。たとえば、第１アーム部１６の上面および下面は、ステンレス鋼板で形成されるとともに上下方向から第１アーム部１６を挟むように配置される２個のカバー部材４０に覆われても良い。同様に、第２アーム部１７、１８の上面および下面は、図７（Ｂ）に示すように、第２アーム部１７、１８よりも熱伝導率の低い第２のカバー部材としてのカバー部材４１に覆われても良い。たとえば、第２アーム部１７、１８の上面および下面は、ステンレス鋼板で形成されるとともに上下方向から第２アーム部１７、１８を挟むように配置される２個のカバー部材４１に覆われても良い。この場合には、熱放射によって基板２からアーム５、６に伝達される熱量を、カバー部材４０、４１によって低減することが可能になる。 In the embodiment described above, the upper surface and the lower surface of the first arm portion 16 are covered with the cover member 40 as the second cover member having a lower thermal conductivity than the first arm portion 16 as shown in FIG. It may be broken. For example, the upper surface and the lower surface of the first arm portion 16 may be covered with two cover members 40 that are formed of a stainless steel plate and are disposed so as to sandwich the first arm portion 16 from above and below. Similarly, the upper and lower surfaces of the second arm portions 17 and 18 are, as shown in FIG. 7B, a cover member 41 as a second cover member having a lower thermal conductivity than the second arm portions 17 and 18. It may be covered with. For example, the upper and lower surfaces of the second arm portions 17 and 18 may be formed of stainless steel plates and covered with two cover members 41 that are arranged so as to sandwich the second arm portions 17 and 18 from above and below. good. In this case, the amount of heat transferred from the substrate 2 to the arms 5 and 6 by heat radiation can be reduced by the cover members 40 and 41.
　なお、この場合には、熱伝導によるカバー部材４０、４１からアーム５、６への熱の伝達を抑制するため、カバー部材４０、４１とアーム５、６との間に隙間が形成されていることが好ましい。また、この場合には、カバー部材４０、４１は、図７に示すように、第１アーム部１６や第２アーム部１７、１８の側面の一部を覆っていても良いし、第１アーム部１６や第２アーム部１７、１８の側面の全体を覆っていても良い。また、カバー部材４０、４１は、第１アーム部１６や第２アーム部１７、１８の側面を覆っていなくても良い。また、第１アーム部１６や第２アーム部１７、１８は、その上側から１個のカバー部材４０、４１に覆われても良い。 In this case, a gap is formed between the cover members 40 and 41 and the arms 5 and 6 in order to suppress heat transfer from the cover members 40 and 41 to the arms 5 and 6 due to heat conduction. It is preferable. In this case, the cover members 40 and 41 may cover part of the side surfaces of the first arm portion 16 and the second arm portions 17 and 18 as shown in FIG. The entire side surfaces of the portion 16 and the second arm portions 17 and 18 may be covered. Further, the cover members 40 and 41 may not cover the side surfaces of the first arm portion 16 and the second arm portions 17 and 18. Moreover, the 1st arm part 16 and the 2nd arm parts 17 and 18 may be covered with the one cover members 40 and 41 from the upper side.
　上述した形態では、フォーク２５の先端側を構成するフォーク先端部２７が、搬送対象物である基板２が搭載される搭載部となっている。この他にもたとえば、フォーク２５の全体が、搬送対象物である基板２が搭載される搭載部となっていても良い。この場合には、たとえば、フォーク２５の全体が中実のセラミックで形成され、フォーク２５の全体がカバー部材３０によって覆われる。 In the above-described form, the fork tip portion 27 constituting the tip side of the fork 25 is a mounting portion on which the substrate 2 that is the object to be transported is mounted. In addition, for example, the entire fork 25 may be a mounting portion on which the substrate 2 that is the object to be transported is mounted. In this case, for example, the entire fork 25 is formed of solid ceramic, and the entire fork 25 is covered with the cover member 30.
　上述した形態では、フォーク先端部２７は、セラミックで形成され、カバー部材３０は、ステンレス鋼板で形成されている。この他にもたとえば、カバー部材３０における輻射熱の反射率がフォーク先端部２７における輻射熱の反射率よりも高くなっており、カバー部材３０の熱伝導率がフォーク先端部２７の熱伝導率よりも低くなっており、かつ、フォーク先端部２７の比重がカバー部材３０の比重よりも小さくなっているのであれば、フォーク先端部２７は、セラミック以外の材料で形成されても良いし、カバー部材３０はステンレス鋼以外の材料で形成されても良い。たとえば、フォーク先端部２７は、カーボン繊維入りの樹脂で形成されても良い。フォーク先端部２７がカーボン繊維入りの樹脂で形成される場合には、フォーク先端部２７は、たとえば、中空状に形成される。 In the embodiment described above, the fork tip 27 is formed of ceramic, and the cover member 30 is formed of a stainless steel plate. In addition to this, for example, the reflectance of the radiant heat in the cover member 30 is higher than the reflectance of the radiant heat in the fork tip 27, and the thermal conductivity of the cover member 30 is lower than the thermal conductivity of the fork tip 27. If the specific gravity of the fork tip 27 is smaller than the specific gravity of the cover member 30, the fork tip 27 may be made of a material other than ceramic, and the cover member 30 You may form with materials other than stainless steel. For example, the fork tip portion 27 may be formed of a resin containing carbon fibers. When the fork tip portion 27 is formed of a resin containing carbon fiber, the fork tip portion 27 is formed in a hollow shape, for example.
　上述した形態では、フォーク基端部２８の一部である連結部２８ｃが中空状に形成されているが、フォーク基端部２８の全体が中空状に形成されても良い。また、フォーク基端部２８の全体が中実となっていても良い。また、上述した形態では、フォーク基端部２８における輻射熱の反射率は、フォーク先端部２７における輻射熱の反射率よりも高くなっているが、フォーク基端部２８における輻射熱の反射率は、フォーク先端部２７における輻射熱の反射率より低くても良いし、フォーク先端部２７における輻射熱の反射率と同じであっても良い。また、フォーク基端部２８の熱伝導率は、フォーク先端部２７の熱伝導率よりも低くなっているが、フォーク基端部２８の熱伝導率は、フォーク先端部２７の熱伝導率より高くても良いし、フォーク先端部２７の熱伝導率と同じであっても良い。さらに、フォーク基端部２８の比重は、フォーク先端部２７の比重よりも大きくなっているが、フォーク基端部２８の比重は、フォーク先端部２７の比重より小さくても良いし、フォーク先端部２７の比重と同じであっても良い。 In the embodiment described above, the connecting portion 28c, which is a part of the fork base end portion 28, is formed in a hollow shape, but the entire fork base end portion 28 may be formed in a hollow shape. Further, the entire fork base end portion 28 may be solid. In the embodiment described above, the reflectance of the radiant heat at the fork base end portion 28 is higher than the reflectance of the radiant heat at the fork tip end portion 27, but the reflectance of the radiant heat at the fork base end portion 28 is The reflectance of the radiant heat at the portion 27 may be lower, or the reflectance of the radiant heat at the fork tip portion 27 may be the same. Further, the thermal conductivity of the fork base end portion 28 is lower than the thermal conductivity of the fork tip end portion 27, but the thermal conductivity of the fork base end portion 28 is higher than that of the fork tip end portion 27. Alternatively, the thermal conductivity of the fork tip 27 may be the same. Further, the specific gravity of the fork base end portion 28 is larger than the specific gravity of the fork tip end portion 27, but the specific gravity of the fork base end portion 28 may be smaller than the specific gravity of the fork tip end portion 27, or the fork tip end portion. It may be the same as the specific gravity of 27.
　上述した形態では、ハンド３、４は、フォーク２５を備えているが、ハンド３、４は、フォーク２５を備えていなくても良い。たとえば、ハンド３、４は、上側から見たときの形状が略Ｙ形状となるように形成されても良いし、上述の特許文献１に開示されたハンド部のように、上側から見たときの形状が略長方形状となるように形成されても良い。この場合には、たとえば、ハンド３、４は、ハンド３、４の先端側を構成するハンド先端部と、ハンド３、４の基端側を構成するハンド基端部とを備えるとともに、ハンド先端部が中実のセラミック等で形成され、ハンド基端部が中空のステンレス鋼管等で形成されても良い。 In the embodiment described above, the hands 3 and 4 include the fork 25, but the hands 3 and 4 may not include the fork 25. For example, the hands 3 and 4 may be formed so that the shape when viewed from the upper side is substantially Y-shaped, or when viewed from the upper side as in the hand portion disclosed in Patent Document 1 described above. It may be formed so that the shape is substantially rectangular. In this case, for example, each of the hands 3 and 4 includes a hand distal end portion that constitutes the distal end side of the hands 3 and 4 and a hand proximal end portion that constitutes the proximal end side of the hands 3 and 4. The portion may be formed of a solid ceramic or the like, and the hand base end may be formed of a hollow stainless steel tube or the like.
　上述した形態では、アーム６は、アーム５と共通の第１アーム部１６と第２アーム部１８とによって構成されているが、アーム６は、第１アーム部１６と別個に設けられた第１アーム部と第２アーム部１８とによって構成されても良い。また、上述した形態では、アーム５、６は、第１アーム部１６と第２アーム部１７、１８との２個のアーム部によって構成されているが、アーム５、６は、１個のアーム部によって構成されても良いし、３個以上のアーム部によって構成されても良い。 In the embodiment described above, the arm 6 is configured by the first arm portion 16 and the second arm portion 18 that are common to the arm 5, but the arm 6 is provided separately from the first arm portion 16. You may be comprised by the arm part and the 2nd arm part 18. FIG. In the above-described form, the arms 5 and 6 are constituted by two arm portions, ie, the first arm portion 16 and the second arm portions 17 and 18, but the arms 5 and 6 are one arm. It may be constituted by a part or may be constituted by three or more arm parts.
　上述した形態では、ロボット１によって搬送される搬送対象物は基板２であるが、ロボット１によって搬送される搬送対象物は半導体ウエハ等であっても良い。また、ロボット１は、真空中で基板２を搬送するが、ロボット１は、大気中で基板２を搬送しても良い。 In the above-described form, the object to be transported by the robot 1 is the substrate 2, but the object to be transported by the robot 1 may be a semiconductor wafer or the like. The robot 1 transports the substrate 2 in a vacuum, but the robot 1 may transport the substrate 2 in the atmosphere.
　１　ロボット（産業用ロボット）
　２　基板（ガラス基板、搬送対象物）
　３、４　ハンド
　５、６　アーム
　７　本体部
　２５　フォーク
　２６　ハンド基部
　２７　フォーク先端部（搭載部）
　２８　フォーク基端部
　３０　カバー部材
　４０、４１　第２のカバー部材 1 Robot (industrial robot)
2 Substrate (glass substrate, transport object)
3, 4 Hand 5, 6 Arm 7 Body 25 Fork 26 Hand base 27 Fork tip (mounting part)
28 Fork base end 30 Cover member 40, 41 Second cover member

Claims (9)

  1. 　搬送対象物を搬送する産業用ロボットにおいて、
    　前記搬送対象物が搭載される搭載部を有するハンドと、その先端側で前記ハンドを保持するアームと、前記アームの基端側を保持する本体部と、前記搭載部の少なくとも上面を覆うカバー部材とを備え、
    　前記カバー部材における輻射熱の反射率は、前記搭載部における輻射熱の反射率よりも高く、
    　前記カバー部材の熱伝導率は、前記搭載部の熱伝導率よりも低く、
    　前記搭載部の比重は、前記カバー部材の比重よりも小さいことを特徴とする産業用ロボット。     In industrial robots that transport objects to be transported,
    A hand having a mounting portion on which the object to be transported is mounted, an arm that holds the hand on the distal end side thereof, a main body portion that holds the proximal end side of the arm, and a cover member that covers at least the upper surface of the mounting portion And
    The reflectance of the radiant heat in the cover member is higher than the reflectance of the radiant heat in the mounting portion,
    The thermal conductivity of the cover member is lower than the thermal conductivity of the mounting part,
    The industrial robot according to claim 1, wherein a specific gravity of the mounting portion is smaller than a specific gravity of the cover member.
  2. 　前記カバー部材は、前記搭載部の上面および側面を覆っていることを特徴とする請求項１記載の産業用ロボット。 The industrial robot according to claim 1, wherein the cover member covers an upper surface and a side surface of the mounting portion.
  3. 　前記搭載部は、セラミックで形成され、前記カバー部材は、ステンレス鋼板で形成されていることを特徴とする請求項１または２記載の産業用ロボット。 The industrial robot according to claim 1 or 2, wherein the mounting portion is made of ceramic, and the cover member is made of a stainless steel plate.
  4. 　前記ハンドは、複数のフォークと、複数の前記フォークの基端側が固定されるとともに前記アームの先端側に保持されるハンド基部とを備え、
    　前記フォークの少なくとも先端側部分が前記搭載部となっていることを特徴とする請求項１から３のいずれかに記載の産業用ロボット。     The hand includes a plurality of forks, and a hand base that is fixed to the distal ends of the arms while fixing the proximal ends of the forks.
    The industrial robot according to claim 1, wherein at least a tip side portion of the fork serves as the mounting portion.
  5. 　前記フォークは、前記搭載部としてのフォーク先端部と、前記フォーク先端部の基端側が固定されるフォーク基端部とを備え、
    　前記フォーク基端部の少なくとも一部は、中空状に形成されていることを特徴とする請求項４記載の産業用ロボット。     The fork includes a fork distal end portion as the mounting portion, and a fork proximal end portion to which a proximal end side of the fork distal end portion is fixed,
    The industrial robot according to claim 4, wherein at least a part of the fork base end is formed in a hollow shape.
  6. 　前記フォーク基端部における輻射熱の反射率は、前記フォーク先端部における輻射熱の反射率よりも高く、
    　前記フォーク基端部の熱伝導率は、前記フォーク先端部の熱伝導率よりも低く、
    　前記フォーク先端部の比重は、前記フォーク基端部の比重よりも小さいことを特徴とする請求項５記載の産業用ロボット。     The radiant heat reflectivity at the fork base end is higher than the radiant heat reflectivity at the fork tip,
    The thermal conductivity of the fork base end is lower than the thermal conductivity of the fork tip,
    The industrial robot according to claim 5, wherein a specific gravity of the fork tip end portion is smaller than a specific gravity of the fork base end portion.
  7. 　前記フォーク先端部は、セラミックで形成され、前記フォーク基端部の少なくとも一部は、ステンレス鋼管で形成されていることを特徴とする請求項５または６記載の産業用ロボット。 The industrial robot according to claim 5 or 6, wherein the tip end of the fork is formed of ceramic, and at least a part of the base end of the fork is formed of a stainless steel pipe.
  8. 　前記アームの少なくとも上面を覆う第２のカバー部材を備え、
    　前記第２のカバー部材の熱伝導率は、前記アームの熱伝導率よりも低くなっていることを特徴とする請求項１から７のいずれかに記載の産業用ロボット。     A second cover member covering at least the upper surface of the arm;
    The industrial robot according to claim 1, wherein the thermal conductivity of the second cover member is lower than the thermal conductivity of the arm.
  9. 　前記搬送対象物は、液晶ディスプレイ用のガラス基板であることを特徴とする請求項１から８のいずれかに記載の産業用ロボット。 The industrial robot according to any one of claims 1 to 8, wherein the transport object is a glass substrate for a liquid crystal display.
PCT/JP2012/078305 2011-11-16 2012-11-01 Industrial robot WO2013073379A1 (en)

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CN201280054402.9A CN103930243B (en) 2011-11-16 2012-11-01 Industrial robot
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US14/358,867 US9387584B2 (en) 2011-11-16 2012-11-01 Industrial robot

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