KR101296928B1 - 워크피스 캐리어 장치 - Google Patents

워크피스 캐리어 장치 Download PDF

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Publication number
KR101296928B1
KR101296928B1 KR1020087004733A KR20087004733A KR101296928B1 KR 101296928 B1 KR101296928 B1 KR 101296928B1 KR 1020087004733 A KR1020087004733 A KR 1020087004733A KR 20087004733 A KR20087004733 A KR 20087004733A KR 101296928 B1 KR101296928 B1 KR 101296928B1
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KR
South Korea
Prior art keywords
workpiece
drive
holder
frame
carrier device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020087004733A
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English (en)
Korean (ko)
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KR20080038185A (ko
Inventor
스테판 에세르
Original Assignee
오를리콘 트레이딩 아크티엔게젤샤프트, 트뤼프바흐
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=37037467&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=KR101296928(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority claimed from CH00122/06A external-priority patent/CH698143B1/de
Application filed by 오를리콘 트레이딩 아크티엔게젤샤프트, 트뤼프바흐 filed Critical 오를리콘 트레이딩 아크티엔게젤샤프트, 트뤼프바흐
Publication of KR20080038185A publication Critical patent/KR20080038185A/ko
Application granted granted Critical
Publication of KR101296928B1 publication Critical patent/KR101296928B1/ko
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M13/00—Other supports for positioning apparatus or articles; Means for steadying hand-held apparatus or articles
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S269/00—Work holders
    • Y10S269/90—Supporting structure having work holder receiving apertures or projections

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Retarders (AREA)
  • Feeding Of Workpieces (AREA)
  • Physical Vapour Deposition (AREA)
  • Automatic Assembly (AREA)
  • Turning (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Chain Conveyers (AREA)
  • Jigs For Machine Tools (AREA)
KR1020087004733A 2005-08-29 2006-07-24 워크피스 캐리어 장치 Active KR101296928B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
DE102005041016.2 2005-08-29
DE102005041016 2005-08-29
CH00122/06A CH698143B1 (de) 2006-01-25 2006-01-25 Werkstückträgereinrichtung.
CH122/06 2006-01-25
PCT/CH2006/000387 WO2007025397A1 (de) 2005-08-29 2006-07-24 Werkstückträgereinrichtung

Publications (2)

Publication Number Publication Date
KR20080038185A KR20080038185A (ko) 2008-05-02
KR101296928B1 true KR101296928B1 (ko) 2013-08-20

Family

ID=37037467

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020087004733A Active KR101296928B1 (ko) 2005-08-29 2006-07-24 워크피스 캐리어 장치

Country Status (15)

Country Link
US (1) US7588640B2 (https=)
EP (1) EP1917380B9 (https=)
JP (1) JP5313673B2 (https=)
KR (1) KR101296928B1 (https=)
CN (1) CN101253281B (https=)
AT (1) ATE426691T1 (https=)
BR (1) BRPI0615301B1 (https=)
CA (1) CA2620417C (https=)
DE (1) DE502006003280D1 (https=)
ES (1) ES2324493T3 (https=)
MX (1) MX2008002382A (https=)
PL (1) PL1917380T3 (https=)
PT (1) PT1917380E (https=)
SI (1) SI1917380T1 (https=)
WO (1) WO2007025397A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210080477A (ko) * 2018-10-26 2021-06-30 오를리콘 서피스 솔루션스 아크티엔게젤샤프트, 페피콘 작업편 캐리어 디바이스 및 코팅 배열

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8361290B2 (en) * 2006-09-05 2013-01-29 Oerlikon Trading, Ag, Trubbach Coating removal installation and method of operating it
MX349614B (es) * 2006-10-19 2017-07-26 Nanomech Inc Metodos y aparatos para elaborar recubrimientos utilizando deposicion de rocio ultrasonico.
PL2336387T3 (pl) * 2007-10-08 2014-01-31 Oerlikon Trading Ag Urządzenie nośne do przedmiotów obrabianych
ITBS20080210A1 (it) * 2008-11-20 2010-05-21 Abl Automazione S P A Struttura di supporto per articoli destinati ad un procedimento di lavorazione, ad esempio una metallizzazione pvd o sputtering
DE102010001218A1 (de) * 2010-01-26 2011-07-28 Esser, Stefan, Dr.-Ing., 52072 Substratteller und Beschichtungsanlage zum Beschichten von Substraten
US9545861B2 (en) * 2010-12-02 2017-01-17 C. Rob. Hammerstein Gmbh & Co. Kg Method and device for producing a locking device and locking device for a longitudinal adjustment mechanism of a vehicle seat
DE102011113563A1 (de) * 2011-09-19 2013-03-21 Oerlikon Trading Ag, Trübbach Karussellschlitten für Vakuumbehandlungsanlage
RU2507306C1 (ru) * 2012-09-04 2014-02-20 Открытое акционерное общество "Концерн "Центральный научно-исследовательский институт "Электроприбор" Установка для напыления покрытий на прецизионные детали узлов гироприборов
CN105734519B (zh) * 2014-12-09 2018-03-06 宜昌后皇真空科技有限公司 一种刀具pvd镀膜自转转架
WO2018149548A1 (en) * 2017-02-16 2018-08-23 Oerlikon Surface Solutions Ag, Pfäffikon Tool fixture for multiple process steps
USD881242S1 (en) * 2018-01-29 2020-04-14 Oerlikon Surface Solutions Ag, Pfaffikon Tool holder
DE102019110158A1 (de) * 2019-04-17 2020-10-22 Oerlikon Surface Solutions Ag, Pfäffikon Werkstückträgereinrichtung
CN110760810B (zh) * 2019-11-27 2022-04-08 中山凯旋真空科技股份有限公司 转架及具有其的镀膜设备
DE102020116888A1 (de) 2020-06-26 2022-01-13 Oerlikon Surface Solutions Ag, Pfäffikon Vereinzelungsvorrichtung zum zuführen und vereinzeln von werkstücken und beladungssystem mit einer vereinzelungsvorrichtung und einer zufuhrvorrichtung
CN114102474B (zh) * 2021-12-02 2024-04-05 重庆恒伟林汽车零部件有限公司 一种可满足不同型号新能源汽车减速器试验用安装装置
CN116443330A (zh) * 2023-02-09 2023-07-18 江苏华曼复合材料科技有限公司 一种聚氨酯smc成品塑膜封装机构

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19803278A1 (de) * 1998-01-29 1999-08-05 Bosch Gmbh Robert Werkstückträger und Anlagen zur Behandlung und/oder Beschichtung von Werkstücken sowie damit hergestellte Beschichtungen
EP1153155A1 (de) * 1998-12-15 2001-11-14 Balzers Aktiengesellschaft Planetensystem-werkstückträger und verfahren zur oberflächenbehandlung von werkstücken
US6761772B2 (en) 2001-05-08 2004-07-13 Unaxis Balzers Aktiengesellschaft Workpiece support

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0610954Y2 (ja) * 1988-11-30 1994-03-23 株式会社ジューキ 動力伝達装置
DD287164A7 (de) 1989-02-28 1991-02-21 Veb Hochvakuum Dresden,De Substrathalterung mit planetenbewegung
JP2001526953A (ja) * 1997-12-22 2001-12-25 ユナキス・トレーディング・アクチェンゲゼルシャフト 真空処理装置
JP2001286027A (ja) * 2000-03-31 2001-10-12 Taiton Kk スパイラルチューブ及びそのスパッタリング方法
CN1168085C (zh) * 2000-10-11 2004-09-22 财团法人工业技术研究院 光盘承载装置
DE102004027989B4 (de) * 2004-06-09 2007-05-10 Esser, Stefan, Dr.-Ing. Werkstückträgervorrichtung zum Halten von Werkstücken

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19803278A1 (de) * 1998-01-29 1999-08-05 Bosch Gmbh Robert Werkstückträger und Anlagen zur Behandlung und/oder Beschichtung von Werkstücken sowie damit hergestellte Beschichtungen
EP1153155A1 (de) * 1998-12-15 2001-11-14 Balzers Aktiengesellschaft Planetensystem-werkstückträger und verfahren zur oberflächenbehandlung von werkstücken
US6620254B2 (en) 1998-12-15 2003-09-16 Unaxis Balzers Ag Planetary system workpiece support and method for surface treatment of workpieces
US6761772B2 (en) 2001-05-08 2004-07-13 Unaxis Balzers Aktiengesellschaft Workpiece support

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210080477A (ko) * 2018-10-26 2021-06-30 오를리콘 서피스 솔루션스 아크티엔게젤샤프트, 페피콘 작업편 캐리어 디바이스 및 코팅 배열
KR102847186B1 (ko) * 2018-10-26 2025-08-20 오를리콘 서피스 솔루션스 아크티엔게젤샤프트, 페피콘 작업편 캐리어 디바이스 및 코팅 배열

Also Published As

Publication number Publication date
CA2620417C (en) 2014-08-26
ES2324493T3 (es) 2009-08-07
JP5313673B2 (ja) 2013-10-09
US7588640B2 (en) 2009-09-15
PL1917380T3 (pl) 2009-08-31
CN101253281B (zh) 2010-12-08
EP1917380A1 (de) 2008-05-07
EP1917380B9 (de) 2010-02-24
KR20080038185A (ko) 2008-05-02
MX2008002382A (es) 2008-03-18
US20070057138A1 (en) 2007-03-15
ATE426691T1 (de) 2009-04-15
EP1917380B1 (de) 2009-03-25
PT1917380E (pt) 2009-06-25
BRPI0615301B1 (pt) 2019-06-25
CA2620417A1 (en) 2007-03-08
JP2009506214A (ja) 2009-02-12
WO2007025397A1 (de) 2007-03-08
DE502006003280D1 (de) 2009-05-07
CN101253281A (zh) 2008-08-27
SI1917380T1 (sl) 2009-10-31
BRPI0615301A2 (pt) 2011-05-17

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