KR101293289B1 - Noncontact feed apparatus using vacuum pad - Google Patents
Noncontact feed apparatus using vacuum pad Download PDFInfo
- Publication number
- KR101293289B1 KR101293289B1 KR1020100052817A KR20100052817A KR101293289B1 KR 101293289 B1 KR101293289 B1 KR 101293289B1 KR 1020100052817 A KR1020100052817 A KR 1020100052817A KR 20100052817 A KR20100052817 A KR 20100052817A KR 101293289 B1 KR101293289 B1 KR 101293289B1
- Authority
- KR
- South Korea
- Prior art keywords
- contact
- nozzle
- transfer
- repulsive force
- coupling hole
- Prior art date
Links
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
- B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67712—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrate being handled substantially vertically
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
- B65G2249/04—Arrangements of vacuum systems or suction cups
- B65G2249/045—Details of suction cups suction cups
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Fluid Mechanics (AREA)
- Nonlinear Science (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The present invention is to arrange the attraction and repulsion generating unit in the non-contact plate so that the attraction and repulsive force is generated at the same time to the object to be transported in parallel so that the object is not inclined to one side during the non-contact transfer of the object and At the same time, the present invention relates to a non-contact conveying device capable of safely conveying a conveying object by a fluid discharged from the conveying means without a shaking phenomenon of the conveying object.
That is, the present invention provides a non-contact plate, the bottom surface is installed in parallel with the upper surface of the transfer object; At the same time, the attraction force and the repulsive force are simultaneously generated toward the object to be conveyed by the fluid discharged by being arranged inside the non-contact plate, so that the object to be conveyed can be conveyed in parallel with the non-contact plate without tilting to either side. A manpower generating unit and a repulsive force generating unit; It is installed inside the non-contact plate, so as not to interfere with the attraction of the attraction of the attraction portion and the generation of repulsive force of the repulsive force generation portion is arranged in the arrangement between the arrangement and the arrangement of the attraction force generation portion and the repulsion force is arranged in a non-contact manner by the fluid discharged Transfer means for transferring a transfer object; Characterized in that configured to include.
Description
The present invention is to arrange the attraction and repulsion generating unit in the non-contact plate so that the attraction and repulsive force is generated at the same time to the object to be transported in parallel so that the object is not inclined to one side during the non-contact transfer of the object and At the same time, the present invention relates to a non-contact conveying device capable of safely conveying a conveying object by a fluid discharged from the conveying means without a shaking phenomenon of the conveying object.
In general, in-line FPD automatic optical inspection captures an image of an inspection object using an optical lens and a CCD camera while guiding a display panel such as a TFT LCD panel, a PDP, a color filter, etc. It is a device that detects various defects that a user wants to find by applying an image processing algorithm. The inline inspection equipment is largely divided into a scan section, a review section and an unlaod section for detecting a defect. In order to serve as an inspection system, it is important to accurately determine the location and size of the detected defect, but the role of the conveying means for guiding the carrier from the scanning section to the unloading section is also important. Recently, as a conveying means for guiding a carrier, an air-floating flat panel conveying apparatus configured to convey and convey a flat panel such as LCD, PDP, DLP, FPD, etc. It is put to practical use.
As a related art, Korean Patent Registration No. 10-0876337 discloses `` A lower plate having a chamber formed thereon, a middle plate having a plurality of coupling holes overlapping on the upper surface of the lower plate and communicating with the chamber, and overlapping the upper surface of the middle plate. A non-contact conveying plate having a suction force including a top plate having an air ejection hole communicating with the coupling holes, and an air ejection bolt inserted into and fixed to the air ejection hole and receiving air in the chamber and leading to a gap between the air ejection holes and the air ejection hole. In the upper end of the air ejection bolt is formed with a head so that the air is ejected in the upper oblique direction, the lower surface of the head portion is formed as a diagonal line is formed as it extends upward, the top of the air ejection hole is rounded, Non-contact type having a suction force, characterized in that the concave groove is formed on the upper surface of the air ejection bolt This technology has been posted on the Bar Song plate ".
In addition, as a related technology, Korean Patent Registration No. 10-0913298 discloses that “a vacuum chamber is formed in the longitudinal direction at the center of the upper surface, and a ejection chamber is formed on both sides thereof to apply suction force from an external vacuum pump to the vacuum chamber. A base receiving compressed air from an external compressor; An ejection plate mounted on the ejection chamber, the ejection plate having a plurality of ejection passages communicating with the ejection chamber therein, the ejection plate penetrating upwards to eject compressed air; And a vacuum plate having both sides mounted on the vacuum chamber to be in contact with the jet plate to form a gap, and a plurality of suction paths communicating with the vacuum chamber open to both sides, so that suction force is applied to the gap. The description of the carrier plate, characterized in that it has been published.
In addition, the Republic of Korea Utility Model Registration No. 20-0386532 as a related technology `` In the air-floating flat panel conveying device configured to supply the air sucked through the air suction box in the blower through the filter body to the air blower box, While having a plurality of air injection nozzles along the inclined surface constituting the front side of the air blowing box is provided on the upper side of the air suction box so that a plurality of transfer drive rollers are located on the lower side of the inclined surface, the air spray nozzles Air is supplied to the flat panel by injecting air in a direction perpendicular to each other, the conveying drive roller conveys the air-flat flat panel, characterized in that the central axis has the same inclination angle and the support jaw on the outer peripheral surface The device has been published.
However, a conventional conveying apparatus is a device for conveying a conveying object in a non-contact manner so as to generate a repulsive force in the discharge direction of the fluid to support the conveying object and then not damage the abnormal object. There is a problem in that the transfer of the transfer object is unstable, because the object is injured, the balance of the transfer object is not balanced, or tilting to one side or shaking of the supported transfer object occurs.
The present invention has been invented to solve the above problems, by arranging the manpower generating unit and the repulsive force generating unit in the non-contact plate to cause the attraction and repulsive force to occur at the same time the transfer object is a non-contact transfer of the transfer object It is an object of the present invention to provide a non-contact conveying apparatus which allows the conveying object to be safely transported by the fluid discharged from the conveying means without parallelism and at the same time without the inclination of the conveying object.
In addition, it is an object to solve the problem to provide a non-contact transfer device to install a non-contact transfer device inclined to significantly reduce the installation space of the non-contact transfer device.
In addition, a vertical section formed of a vertical plane perpendicular to the bottom surface of the non-contact plate parallel to the object to be transported to form a closed curved surface when in contact with one surface of the object to be conveyed and an arc surface connecting between the bottom surface and the vertical section of the non-contact plate. A coupling hole consisting of an arc section, a fluid supply path perforated inside the non-contact plate to communicate with the coupling hole, and is installed in the coupling hole, the circumference is installed opposite to the arc section and the fluid supplied from the fluid supply passage passes through Non-contact conveying apparatus capable of generating a human attraction by arranging a manpower generating unit formed in the non-contact plate, including a nozzle unit for forming a Coanda nozzle and a nozzle member consisting of a nozzle neck extending upwardly from the nozzle unit To solve what is provided It is zero.
In addition, a vertical section formed of a vertical plane perpendicular to the bottom surface of the non-contact plate parallel to the object to be transported to form a closed curved surface in contact with one surface of the object to be transferred and the width of the inner diameter is narrower toward the upper side toward the bottom of the non-contact plate A coupling hole formed of an acute inclined section formed of an acute inclined surface that forms an acute angle with a high center line, and an arc section consisting of an arc surface connecting between the acute inclined section and the bottom surface of the non-contact plate, and a perforation inside the non-contact plate to communicate with the coupling hole And a nozzle portion which is inserted into the coupling hole, the circumference of which is installed opposite to the circular arc section and forms a coanda nozzle through which the fluid supplied from the fluid supply passage passes, and extends upwardly from the nozzle portion. It includes a nozzle member consisting of a nozzle neck And a problem to be solved is to provide a non-contact transfer device to generate a force by disposing the internal contact plate force generating unit is configured open.
In addition, the object of the present invention is to provide a non-contact transfer device provided with a screw head in the upper part of the nozzle neck and a screw part corresponding to the screw hole formed in the upper part of the coupling hole directly below it so that the nozzle member can be easily fastened. do.
In addition, it is an object of the present invention to provide a non-contact conveying device which can be fastened to the nozzle member by forming a screw portion which is coupled from the upper surface of the non-contact plate by the fastening nut while being fastened.
In addition, it is an object to solve the problem to provide a non-contact transfer device that the end of the nozzle portion is in close contact with the inner wall of the coupling hole to adjust the flow rate of the fluid through the space area between the tooth and the tooth. .
In addition, to solve the problem of providing a non-contact transfer device in which one end of the nozzle neck is provided with a support part whose outer end is in close contact with the inner wall of the coupling hole so that the nozzle member is installed at the center of the coupling hole. Let's do the task.
In addition, at the outer periphery of the support, a non-contact conveying device is formed so that the end is in close contact with the inner wall of the coupling hole to install the nozzle member at the center of the coupling hole and to control the flow rate of the fluid through the space area between the teeth and the teeth. The task is to solve the problem.
In addition, the object of the present invention is to provide a non-contact transfer device in which a coupling portion extending downward from an upper portion of the coupling hole is formed in the center of the coupling hole so that the nozzle neck of the nozzle member can be easily coupled inside the coupling portion. .
In addition, to solve the problem to provide a non-contact conveying device configured to generate a repulsive force by discharging the fluid to the conveying object by forming a repulsive force generating portion with a pinhole or repulsive force forming unit.
Further, the repulsive force forming portion has a bottom flat portion that is parallel to the conveying direction of the conveying object and forms a non-contact gap with the conveying object, and has an upper periphery formed by a rounded portion, the outer periphery of the coanda bar above the round portion of the coanda bar. It is composed of a nozzle block to be discharged to the object to be transported along the round portion of the coanda bar through the Koanda nozzle is formed by being installed in close proximity along the coanda nozzle to generate a repulsive force to the object It is an object of the present invention to provide a non-contact transfer device.
The conveying means may further include a conveying block having an input end formed in a normal direction with respect to the conveying direction of the conveying object, the lower part of which is formed as a round part over the entire section, and a coanda nozzle of a normal with respect to the conveying direction of the conveying object. The lower end is formed closer to the input end than the bottom of the transfer block and discharges the fluid through the Coanda nozzle in contact with the outer side of the input end to induce fluid to flow to the bottom of the transfer block along the round part of the input end. An object of the present invention is to provide a non-contact conveying device configured to simultaneously convey a conveying object in a flow direction of a fluid, comprising a nozzle block for simultaneously applying repulsive force and a conveying force to a conveying object opposite to the block.
The present invention to solve the above technical problem, the bottom surface is a non-contact plate is installed in parallel with the upper surface of the transfer object; At the same time, the attraction force and the repulsive force are simultaneously generated toward the object to be conveyed by the fluid discharged by being arranged inside the non-contact plate, so that the object to be conveyed can be conveyed in parallel with the non-contact plate without tilting to either side. A manpower generating unit and a repulsive force generating unit; It is installed inside the non-contact plate, so as not to interfere with the attraction of the attraction of the attraction portion and the generation of repulsive force of the repulsive force generation portion is arranged in the arrangement between the arrangement and the arrangement of the attraction force generation portion and the repulsion force is arranged in a non-contact manner by the fluid discharged Transfer means for transferring a transfer object; The contactless transfer device, characterized in that configured to include as a solution to the problem.
In addition, the manpower generating unit and the repulsive force generating unit is arranged alternately, at least one or more of the same type of manpower generating unit or repulsive force generating unit is repeatedly installed, and both the manpower generating unit and the repulsive force generating unit at both ends of the manpower generating unit or repulsive force generating unit The non-contact transfer apparatus, characterized in that the same type is installed corresponding to each other as a solution to the problem.
In addition, the non-contact conveying device, the upper surface of the non-contact plate is installed at an inclination inclined to either of the left, right so as to form an acute angle with the horizontal ground, the object to be transported by the attraction force generated in the manpower generating unit and the repulsive force generated in the repulsive force generating unit While maintaining the inclined state from the bottom of the non-contact plate and simultaneously discharging the fluid from the conveying means to transfer the conveyed object in the fluid ejection direction, and to support the lower surface of the conveyed object while supporting the lower surface of the conveyed object. A non-contact transfer device characterized in that the feed roller is provided as a means for solving the problem.
In addition, the attraction unit, the vertical section is formed with a vertical plane perpendicular to the bottom surface of the non-contact plate parallel to the transfer object to form a closed curved surface in contact with one surface of the transfer object, between the bottom surface and the vertical section of the non-contact plate Coupling hole consisting of an arc section consisting of an arc surface for connecting the; A fluid supply passage drilled inside the non-contact plate to communicate with the coupling hole; Inserted into the coupling hole, the circumference is installed in the circumferentially opposed to the arc section and the nozzle portion for forming a Coanda nozzle through which the fluid supplied from the fluid supply passage passes, and the nozzle neck extending upward from the nozzle portion Nozzle member; The contactless transfer device, characterized in that configured to include as a solution to the problem.
In addition, the attraction force unit, the vertical section is formed in a vertical plane perpendicular to the bottom surface of the non-contact plate parallel to the transfer object to form a closed curved surface in contact with one surface of the transfer object, and upwards with respect to the bottom surface of the non-contact plate An engaging hole consisting of an arcuate section formed of an acute inclined section formed of an acute inclined surface that forms an acute angle with a center line and a circular arc section connecting an acute inclined section and a bottom surface of a non-contact plate; A fluid supply passage drilled inside the non-contact plate to communicate with the coupling hole; Inserted into the coupling hole, the circumference is installed in the circumferentially opposed to the arc section and the nozzle portion for forming a Coanda nozzle through which the fluid supplied from the fluid supply passage passes, and the nozzle neck extending upward from the nozzle portion Nozzle member; The contactless transfer device, characterized in that configured to include as a solution to the problem.
In addition, the non-contact transfer device, characterized in that the screw head is provided on the nozzle neck and a screw portion corresponding to the screw hole formed in the upper portion of the coupling hole directly below it is formed as a solution for the problem.
In addition, the non-contact conveying device, characterized in that the upper portion of the nozzle neck is protruded from the upper surface of the non-contact plate is coupled by the fastening nut is formed as a solution to the problem.
In addition, a non-contact conveying device, characterized in that the tooth is formed in the peripheral edge of the nozzle portion in close contact with the inner wall of the coupling hole as a means for solving the problem.
In addition, one end of the nozzle neck is a non-contact conveying device, characterized in that the outer peripheral end is in close contact with the inner wall of the coupling hole is installed so that the nozzle member is installed in the center of the coupling hole as a means for solving the problem.
In addition, a non-contact transfer device, characterized in that the teeth are formed on the outer circumference of the support portion is in close contact with the inner wall of the coupling hole as a means for solving the problem.
In addition, a non-contact conveying apparatus characterized in that the nozzle neck of the nozzle member to be coupled to the inside of the coupling hole to form a coupling portion extending downward from the upper portion of the coupling hole to solve the problem. .
In addition, the repulsive force generating unit, a non-contact conveying device, characterized in that consisting of a pinhole or repulsive force forming unit to discharge the fluid to the transfer object to generate a repulsive force as a means for solving the problem.
In addition, the repulsive force forming portion, having a bottom flat portion parallel to the conveying direction of the conveying object and forming a non-contact interval with the conveying object, the lower periphery is formed with a round portion; A nozzle for allowing fluid supplied to a coanda nozzle formed by being installed closer to the outer periphery of the coanda bar than above the round portion of the coanda bar to be discharged to the object to be transferred along the round portion of the coanda bar through the coanda nozzle. Blocks; The contactless transfer device, characterized in that configured to include as a solution to the problem.
The conveying means may further include: a conveying block having an input end formed in a normal direction with respect to a conveying direction of the object to be conveyed, and a lower portion of the input end formed as a round part over the entire section; The lower end is formed along the input end above the bottom of the transfer block so as to form a normal coanda nozzle with respect to the transfer direction of the object to be transferred, and the fluid is discharged in a direction in contact with the outer surface of the input end through the coanda nozzle. A nozzle block for simultaneously applying repulsive force and a transfer force to a transfer object opposite to the transfer block by inducing it to flow to the bottom of the transfer block along the round portion of the input end; The contactless transfer device, characterized in that configured to include as a solution to the problem.
The non-contact conveying apparatus according to the present invention is arranged so that the attraction and repulsive force is generated at the same time by arranging the attraction and retraction force in the non-contact plate without causing the object to be inclined to one side during non-contact transfer of the object to be conveyed. At the same time, it is possible to safely transport the object to be transported by the fluid discharged from the conveying means without the shaking of the object to be conveyed.
In addition, by installing the non-contact transfer device inclined, it is possible to significantly reduce the installation space of the non-contact transfer device.
In addition, a vertical section formed of a vertical plane perpendicular to the bottom surface of the non-contact plate parallel to the object to be transported to form a closed curved surface when in contact with one surface of the object to be conveyed and an arc surface connecting between the bottom surface and the vertical section of the non-contact plate. A coupling hole consisting of an arc section, a fluid supply path perforated inside the non-contact plate to communicate with the coupling hole, and is installed in the coupling hole, the circumference is installed opposite to the arc section and the fluid supplied from the fluid supply passage passes through The attraction force can be generated by arranging the attraction force generating portion, which includes a nozzle portion that forms a Coanda nozzle and a nozzle member formed of a nozzle neck extending upwardly from the nozzle portion, inside the non-contact plate.
In addition, a vertical section formed of a vertical plane perpendicular to the bottom surface of the non-contact plate parallel to the object to be transported to form a closed curved surface in contact with one surface of the object to be transferred and the width of the inner diameter is narrower toward the upper side toward the bottom of the non-contact plate A coupling hole formed of an acute inclined section formed of an acute inclined surface that forms an acute angle with a high center line, and an arc section consisting of an arc surface connecting between the acute inclined section and the bottom surface of the non-contact plate, and a perforation inside the non-contact plate to communicate with the coupling hole And a nozzle portion which is inserted into the coupling hole, the circumference of which is installed opposite to the circular arc section and forms a coanda nozzle through which the fluid supplied from the fluid supply passage passes, and extends upwardly from the nozzle portion. It includes a nozzle member consisting of a nozzle neck W by arranging installed inside the non-contact plate force generating unit is configured can produce the force.
In addition, a screw head is provided on the upper part of the nozzle neck, and a screw part corresponding to the threaded hole formed on the upper part of the coupling hole is directly formed below the nozzle neck, so that the nozzle member can be easily fastened.
In addition, the upper part of the nozzle neck protrudes from the upper surface of the non-contact plate to form a screw portion that is coupled by the fastening nut, so that the nozzle member can be easily fastened. The space area between the teeth and the teeth can regulate the flow rate of the fluid.
In addition, one end of the nozzle neck may be installed in the center of the coupling hole by installing a support portion in which the outer peripheral end is in close contact with the inner wall of the coupling hole so that the nozzle member is installed in the center of the coupling hole.
In addition, the outer periphery of the support to form a tooth that the end is in close contact with the inner wall of the coupling hole to install the nozzle member in the center of the coupling hole, as well as to control the flow rate of the fluid through the space area between the tooth and the tooth.
In addition, in the center of the coupling hole to form a coupling extending downward from the upper portion of the coupling hole can easily couple the nozzle neck of the nozzle member in the coupling portion, by forming a repulsive force generating portion with a pinhole or repulsive force forming portion to the transfer object Repulsive forces can be generated by discharging the fluid.
Further, the repulsive force forming portion has a bottom flat portion that is parallel to the conveying direction of the conveying object and forms a non-contact interval with the conveying object, and has a coanda bar having an upper circumference formed by a round portion, and coda above the round portion of the coanda bar. Fluid supplied to the Coanda nozzle formed by being installed along the outer periphery of the bar is composed of a nozzle block which is discharged to the object to be transported along the round part of the Coanda Bar through this Coanda nozzle to generate a repulsive force on the object to be transported. Can be.
In addition, the conveying means includes a conveying block having an input end formed in a normal direction with respect to the conveying direction of the conveying object, the lower part of the input end being formed into a rounded portion over the entire section, and a coordinating direction of the normal with respect to the conveying direction of the conveying object. The lower end is formed closer to the input end than the bottom of the transfer block to form a nozzle, and the fluid is discharged in a direction contacting the outer surface of the input end through the Coanda nozzle to induce the fluid to flow to the bottom of the transfer block along the round part of the input end. As a result, it is composed of a nozzle block for imparting repulsive force and a conveying force to the conveying object opposite to the conveying block at the same time to convey the conveying object in the flow direction of the fluid.
1 is a bottom perspective view according to an embodiment of the present invention.
2 is a side cross-sectional view according to an embodiment of the present invention.
3 is a block diagram according to another embodiment of the present invention.
4 is a first embodiment of the attraction force generating unit of FIGS.
5 is a second embodiment of the attraction force generating unit of FIGS.
6 is a third embodiment of the attraction force generating unit of FIGS.
7 is a fourth embodiment of the attraction force generating unit of FIGS.
8 is a fifth embodiment of the attraction force generating unit of FIGS.
9 is a sixth embodiment of the attraction force generation unit of FIGS.
10 is a perspective view of the support according to FIG. 9;
11 is a seventh embodiment of the attraction force generation unit of FIGS.
12 is a first embodiment of the repulsive force generation unit of FIGS.
13 is a second embodiment of the repulsive force generation unit of FIGS.
14 is an enlarged cross-sectional view of the conveying means of FIGS.
15 is a perspective view of the conveying means according to FIG. 14;
The present invention provides a non-contact plate, the bottom surface of which is installed in parallel with the upper surface of the transfer object; At the same time, the attraction force and the repulsive force are simultaneously generated toward the object to be conveyed by the fluid discharged by being arranged inside the non-contact plate, so that the object to be conveyed can be conveyed in parallel with the non-contact plate without tilting to either side. A manpower generating unit and a repulsive force generating unit; It is installed inside the non-contact plate, so as not to interfere with the attraction of the attraction of the attraction portion and the generation of repulsive force of the repulsive force generation portion is arranged in the arrangement between the arrangement and the arrangement of the attraction force generation portion and the repulsion force is arranged in a non-contact manner by the fluid discharged Transfer means for transferring a transfer object; The non-contact transfer device, characterized in that configured to include a feature of the technical configuration.
In addition, the manpower generating unit and the repulsive force generating unit is arranged alternately, at least one or more of the same type of manpower generating unit or repulsive force generating unit is repeatedly installed, and both the manpower generating unit and the repulsive force generating unit at both ends of the manpower generating unit or repulsive force generating unit Non-contact transfer device, characterized in that the same type is installed among the features of the technical configuration.
In addition, the non-contact conveying device, the upper surface of the non-contact plate is installed at an inclination inclined to either of the left, right so as to form an acute angle with the horizontal ground, the object to be transported by the attraction force generated in the manpower generating unit and the repulsive force generated in the repulsive force generating unit While maintaining the inclined state from the bottom of the non-contact plate and simultaneously discharging the fluid from the conveying means to transfer the conveyed object in the fluid ejection direction, and to support the lower surface of the conveyed object while supporting the lower surface of the conveyed object. A non-contact transfer device characterized in that the feed roller is provided is characterized by a technical configuration.
In addition, the attraction unit, the vertical section is formed with a vertical plane perpendicular to the bottom surface of the non-contact plate parallel to the transfer object to form a closed curved surface in contact with one surface of the transfer object, between the bottom surface and the vertical section of the non-contact plate Coupling hole consisting of an arc section consisting of an arc surface for connecting the; A fluid supply passage drilled inside the non-contact plate to communicate with the coupling hole; Inserted into the coupling hole, the circumference is installed in the circumferentially opposed to the arc section and the nozzle portion for forming a Coanda nozzle through which the fluid supplied from the fluid supply passage passes, and the nozzle neck extending upward from the nozzle portion Nozzle member; The non-contact transfer device, characterized in that configured to include a feature of the technical configuration.
In addition, the attraction force unit, the vertical section is formed in a vertical plane perpendicular to the bottom surface of the non-contact plate parallel to the transfer object to form a closed curved surface in contact with one surface of the transfer object, and upwards with respect to the bottom surface of the non-contact plate An engaging hole consisting of an arcuate section formed of an acute inclined section formed of an acute inclined surface that forms an acute angle with a center line and a circular arc section connecting an acute inclined section and a bottom surface of a non-contact plate; A fluid supply passage drilled inside the non-contact plate to communicate with the coupling hole; A nozzle which is inserted into the coupling hole and has a circumference opposite to the circular arc section, the nozzle part forming a coanda nozzle through which the fluid supplied from the fluid supply passage passes and the nozzle neck extending upward from the nozzle part; Absence; The non-contact transfer device, characterized in that configured to include a feature of the technical configuration.
In addition, the nozzle neck is provided with a screw head and a non-contact conveying device, characterized in that the screw portion corresponding to the screw hole formed in the upper coupling hole is formed directly below it, characterized in that the technical configuration.
In addition, the non-contact conveying device is characterized in that the technical configuration of the nozzle neck is formed on the top of the nozzle neck is protruded from the upper surface of the non-contact plate is coupled by the fastening nut.
In addition, the non-contact conveying device, characterized in that the end of the nozzle is in close contact with the inner wall of the coupling hole is formed around the lower portion of the technical feature.
In addition, one end of the nozzle neck is characterized in that the non-contact conveying device, characterized in that the technical configuration is characterized in that the support portion is installed in close contact with the inner wall of the coupling hole so that the nozzle member is installed in the center of the coupling hole.
In addition, the outer circumference of the support portion is characterized in that the non-contact transfer device characterized in that the tooth is formed in close contact with the inner wall of the coupling hole.
In addition, in the center of the coupling hole is characterized in that the non-contact transfer device characterized in that the coupling portion extending downward from the upper portion of the coupling hole so that the nozzle neck of the nozzle member can be coupled inside the coupling portion. .
In addition, the repulsive force generating unit, characterized in that the non-contact conveying device characterized in that consisting of a pinhole or a repulsive force forming unit to discharge the fluid to the transfer object to generate a repulsive force.
In addition, the repulsive force forming portion, having a bottom flat portion parallel to the conveying direction of the conveying object and forming a non-contact interval with the conveying object, the lower periphery is formed with a round portion; A nozzle for allowing fluid supplied to a coanda nozzle formed by being installed closer to the outer periphery of the coanda bar than above the round portion of the coanda bar to be discharged to the object to be transferred along the round portion of the coanda bar through the coanda nozzle. Blocks; The non-contact transfer device, characterized in that configured to include a feature of the technical configuration.
The conveying means may further include: a conveying block having an input end formed in a normal direction with respect to a conveying direction of the object to be conveyed, and a lower portion of the input end formed as a round part over the entire section; The lower end is formed along the input end above the bottom of the transfer block so as to form a normal coanda nozzle with respect to the transfer direction of the object to be transferred, and the fluid is discharged in a direction in contact with the outer surface of the input end through the coanda nozzle. A nozzle block for simultaneously applying repulsive force and a transfer force to a transfer object opposite to the transfer block by inducing it to flow to the bottom of the transfer block along the round portion of the input end; The non-contact transfer device, characterized in that configured to include a feature of the technical configuration.
Referring to the configuration of the non-contact transfer device according to the present invention with reference to the accompanying drawings in detail as follows.
As shown in FIGS. 1 and 2, the non-contact conveying apparatus according to the present invention includes a
Looking at the configuration in more detail, the
The attraction
In addition, the transfer means 40 of the attraction
Here, the attraction
As described above, in the non-contact transfer apparatus according to the present invention, since the attraction
In addition, in arranging the attraction
As such, when the same type of the attraction
The non-contact transfer device according to the present invention simultaneously generates a attraction force and a repulsive force by the attraction
Here, when the transfer means 40 is installed in the same arrangement of the attraction
3 is a block diagram according to another embodiment of the present invention. As shown in FIG. 1, the attraction
That is, the
At this time, since the force acts intensively on the lower surface of the
4 is a first embodiment of the attraction force generating unit of FIGS. As shown in the drawing, the first embodiment of the attraction
That is, the
In addition, the
On the other hand, the Coanda effect (coanda effect) is the
In addition, the
The fluid supplied to the
The coanda effect refers to an effect that the fluid flows along the curved surface, and the
When the fluid supplied from the
The non-contact transfer device according to the present invention, by using the fluid injected through the
5 is a second embodiment of the attraction force generating unit of FIGS. As shown, the second embodiment of the attraction
That is, in the second embodiment of the
More specifically, the
The
An acute
6 is a third embodiment of the attraction force generating unit of FIGS. 1 to 3; As shown in the drawing, the third embodiment of the attraction
That is, the
At this time, a spot facing corresponding to the
7 is a fourth exemplary embodiment of the attraction force generating unit of FIGS. 1 to 3. As shown in the drawing, the fourth embodiment of the
That is, the
8 is a fifth embodiment of the attraction force generating unit of FIGS. 1 to 3. As shown in FIG. 5, the fifth embodiment of the attraction
On the contrary, a
FIG. 9 is a sixth embodiment of the attraction force generating part of FIGS. 1 to 3, and FIG. 10 is a perspective view of the supporting part according to FIG. 9. As shown in the drawing, a
The
In addition, a tooth 241 is formed on the outer circumference of the
FIG. 11 is a seventh embodiment of the attraction force generating unit of FIGS. 1 to 3; As shown in the upper portion of the
Coupling
In the case of the first type of
Secondly, in the case of the
Particularly, in the case of the
On the other hand, in the case of a
12 illustrates a first embodiment of the repulsive force generating unit of FIGS. 1 to 3. As shown in the drawing, the first embodiment of the repulsive force generating unit has a pinhole shape and discharges the fluid supplied through the pinhole to one surface of the
13 is a second embodiment of the repulsive force generating unit of FIGS. As shown in FIG. 2, the second embodiment of the repulsive
Therefore, the supplied fluid flows along the
14 is an enlarged view of the conveying means of FIGS. 1 to 3, and FIG. 15 is a perspective view of the conveying means according to FIG. 14. As shown, the conveying
The
The
That is, the
Therefore, the fluid discharged through the
Although not shown in the drawing, a bottom surface of the
As described above, in the non-contact transfer apparatus according to the present invention, the attraction
As shown in FIGS. 1 and 2, the non-contact transfer device according to the present invention is lifted because the attraction and repulsion are simultaneously generated by the
That is, the
In addition, since the
3 is a side cross-sectional view according to an embodiment of the present invention. As shown in the drawing, when the fluid is supplied to the attractive
At the same time, the fluid is discharged from the conveying means 40 to convey the conveying
4 is a first embodiment of the attraction force generating unit of FIGS. As shown, when the fluid is supplied into the
5 is a second embodiment of the attraction force generating unit of FIGS. As shown, when the fluid is supplied into the
6 is a third embodiment of the attraction force generating unit of FIGS. 1 to 3; As shown in FIG. 1, the attraction force to pull the
As such, when the
After coupling the
7 is a fourth exemplary embodiment of the attraction force generating unit of FIGS. 1 to 3. As shown in FIG. 1, the coupling hole is formed by drilling a through hole communicating with the
8 is a fifth embodiment of the attraction force generating unit of FIGS. 1 to 3. As shown in the figure, a
FIG. 9 is a sixth embodiment of the attraction force generating part of FIGS. 1 to 3, and FIG. 10 is a perspective view of the supporting part according to FIG. 9. As shown in the drawing, in order for the
Therefore, in order to solve this technical problem, the
In addition, the teeth 241 are formed on the outer circumference of the
FIG. 11 is a seventh embodiment of the attraction force generating unit of FIGS. 1 to 3; As shown, the
The coupling method of the
12 is a first embodiment of the repulsive force generation unit of FIGS. 1 to 3. As shown in the drawing, the repulsive
13 is a second embodiment of the repulsive force generating unit of FIGS. As shown, the repulsive
That is, when the fluid is supplied into the repulsive force forming portion, the supplied fluid passes through the
14 is an enlarged view of the conveying means of FIGS. 1 to 3, and FIG. 15 is a perspective view of the conveying means according to FIG. 14. When the fluid is supplied to the transfer means 40 as shown, the fluid flows through the
As the fluid flows, the
10: Non-contact plate 11: Bottom 12: Top
20: manpower generator 21: coupling hole 22: fluid supply passage
23: nozzle member 24: support portion 30: repulsion generating portion
31: Coanda Bar 32: Nozzle Block 40: Transportation
41: transfer block 42: nozzle block 50: transfer object
60: Feed roller 70: Fluid injection hose 211: Vertical section
212: arc section 213: acute inclined section 214: coupling part
231: Nozzle part 232: Coanda nozzle 233: Nozzles
234: screw 235: screw 236: toothed
241: tooth 311: bottom flat portion 312: round
322: Coanda nozzle 411: Input stage 412: Round part
422: Coanda nozzle
Claims (14)
At the same time, the attraction force and the repulsive force are simultaneously generated toward the object to be conveyed by the fluid discharged by being arranged inside the non-contact plate, so that the object to be conveyed can be conveyed in parallel with the non-contact plate without tilting to either side. A manpower generating unit and a repulsive force generating unit;
It is installed inside the non-contact plate, so as not to interfere with the attraction of the attraction of the attraction portion and the generation of repulsive force of the repulsive force generation portion is arranged in the arrangement between the arrangement and the arrangement of the attraction force generation portion and the repulsion force is arranged in a non-contact manner by the fluid discharged Transfer means for transferring a transfer object; Non-contact transfer device, characterized in that configured to include.
The manpower generating unit and the repulsive force generating unit are arranged alternately, at least one or more of the same type of manpower generating unit or repulsive force generating unit is repeatedly installed, and both the manpower generating unit and the repulsive force generating unit are arranged at both ends of the manpower generating unit and the repulsive force generating unit. Non-contact transfer device, characterized in that the same type is installed correspondingly.
The non-contact conveying apparatus is installed at an inclination inclined to either of the left and right so that the upper surface of the non-contact plate to form an acute angle with the horizontal ground, the non-contact conveying device is in contact with the object to be conveyed by the attraction force generated in the manpower generating unit and the repulsive force generated in the repulsive force generating unit At the same time as supporting the lower side of the plate and conveying the conveyed object in the fluid ejection direction by discharging the fluid from the conveying means, while supporting the lower surface of the conveyed object while supporting the lower surface of the conveyed object. Non-contact transfer device characterized in that the provided.
The manpower generation unit,
A vertical section formed of a vertical plane perpendicular to the bottom surface of the non-contact plate parallel to the transfer object so as to form a closed curved surface when contacted with one surface of the transfer object, and an arc surface connecting between the bottom surface and the vertical section of the non-contact plate. A coupling hole formed of an arc section;
A fluid supply passage drilled inside the non-contact plate to communicate with the coupling hole;
Inserted into the coupling hole, the circumference is installed in the circumferentially opposed to the arc section and the nozzle portion for forming a Coanda nozzle through which the fluid supplied from the fluid supply passage passes, and the nozzle neck extending upward from the nozzle portion Nozzle member; Non-contact transfer device, characterized in that configured to include.
The manpower generation unit,
The vertical section is formed into a vertical plane perpendicular to the bottom surface of the non-contact plate parallel to the object to be transported to form a closed curved surface in contact with one surface of the object to be transferred, and the width of the inner diameter becomes narrower toward the upper side with respect to the bottom surface of the non-contact plate. A coupling hole formed of an acute inclined section formed of an acute inclined surface forming an acute angle with a center line, and an arc section consisting of an arc surface connecting between the acute inclined section and the bottom surface of the non-contact plate;
A fluid supply passage drilled inside the non-contact plate to communicate with the coupling hole;
Inserted into the coupling hole, the circumference is installed in the circumferentially opposed to the arc section and the nozzle portion for forming a Coanda nozzle through which the fluid supplied from the fluid supply passage passes, and the nozzle neck extending upward from the nozzle portion Nozzle member; Non-contact transfer device, characterized in that configured to include.
The nozzle neck is provided with a screw head on the upper portion of the non-contact transfer device, characterized in that the threaded portion corresponding to the screw hole formed in the upper coupling hole is formed directly below it.
The non-contact transfer device, characterized in that the upper portion of the nozzle neck is formed with a screw portion which is protruded from the upper surface of the non-contact plate coupled by a fastening nut.
Non-contact conveying device, characterized in that the tooth is formed around the lower end of the nozzle is in close contact with the inner wall of the coupling hole.
One end of the nozzle neck is a non-contact transfer device, characterized in that the support is installed so that the outer end is in close contact with the inner wall of the coupling hole so that the nozzle member is installed in the center of the coupling hole.
Non-contact transfer device characterized in that the tooth is formed on the outer periphery of the support portion is in close contact with the inner wall of the coupling hole.
A non-contact transfer device, characterized in that the center of the coupling hole to form a coupling portion extending downward from the upper portion of the coupling hole so that the nozzle neck of the nozzle member can be coupled to the coupling portion.
The repulsive force generating unit is a non-contact conveying apparatus, characterized in that consisting of a pinhole or repulsive force forming portion to discharge the fluid to the transfer object to generate a repulsive force.
The repulsive force forming unit,
A coanda bar having a bottom flat portion parallel to the conveying direction of the conveying object and forming a non-contact gap with the conveying object, the lower periphery being formed as a round portion;
A nozzle for allowing fluid supplied to a coanda nozzle formed by being installed closer to the outer periphery of the coanda bar than above the round portion of the coanda bar to be discharged to the object to be transferred along the round portion of the coanda bar through the coanda nozzle. Blocks; Non-contact transfer device, characterized in that configured to include.
The conveying means
A transfer block having an input end formed in a normal direction with respect to a conveying direction of the object to be conveyed, and a lower portion of the input end formed as a round part over the entire section;
The lower end is formed along the input end above the bottom of the transfer block so as to form a normal coanda nozzle with respect to the transfer direction of the object to be transferred, and the fluid is discharged in a direction in contact with the outer surface of the input end through the coanda nozzle. A nozzle block for simultaneously applying repulsive force and a transfer force to a transfer object opposite to the transfer block by inducing it to flow to the bottom of the transfer block along the round portion of the input end; Non-contact transfer device, characterized in that configured to include.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020100052817A KR101293289B1 (en) | 2010-06-04 | 2010-06-04 | Noncontact feed apparatus using vacuum pad |
| PCT/KR2010/004314 WO2011152587A1 (en) | 2010-06-04 | 2010-07-02 | Non-contact conveying device using vacuum pad |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020100052817A KR101293289B1 (en) | 2010-06-04 | 2010-06-04 | Noncontact feed apparatus using vacuum pad |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20110133212A KR20110133212A (en) | 2011-12-12 |
| KR101293289B1 true KR101293289B1 (en) | 2013-08-09 |
Family
ID=45066929
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020100052817A KR101293289B1 (en) | 2010-06-04 | 2010-06-04 | Noncontact feed apparatus using vacuum pad |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR101293289B1 (en) |
| WO (1) | WO2011152587A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI825251B (en) * | 2019-12-20 | 2023-12-11 | 由田新技股份有限公司 | A vacuum conveying apparatus with a wheel and optical inspection apparatus, method |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105731068B (en) * | 2014-12-24 | 2019-05-21 | 炭研轴封精工有限公司 | Non-contact transport apparatus and non-contact adhesion disk |
| TWM511495U (en) * | 2015-05-11 | 2015-11-01 | Mirle Automation Corp | Transportation jig for transporting a flat plate |
| TWI562945B (en) * | 2015-11-23 | 2016-12-21 | Mirle Automation Corp | Transportation jig for transporting a plate member |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006264804A (en) * | 2005-03-22 | 2006-10-05 | Daiichi Shisetsu Kogyo Kk | Flotation unit for large flat panel, and non-contact carrying device using the same |
| KR100650290B1 (en) * | 2005-11-23 | 2006-11-27 | (주)넥스트인스트루먼트 | Noncontact conveying plate |
| KR20070109222A (en) * | 2006-05-10 | 2007-11-15 | 이기선 | Pneumatic apparatus for floating and translating plates |
| KR20100058149A (en) * | 2008-11-24 | 2010-06-03 | 주식회사 에스에프에이 | Vertical type apparatus for transferring a substrate |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002047155A1 (en) * | 2000-12-05 | 2002-06-13 | Nippon Pneumatics/Fluidics System Co., Ltd. | Holder |
| KR20070037741A (en) * | 2004-07-09 | 2007-04-06 | 오씨 외를리콘 발처스 악티엔게젤샤프트 | Gas bearing substrate-loading mechanism process |
-
2010
- 2010-06-04 KR KR1020100052817A patent/KR101293289B1/en not_active IP Right Cessation
- 2010-07-02 WO PCT/KR2010/004314 patent/WO2011152587A1/en active Application Filing
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006264804A (en) * | 2005-03-22 | 2006-10-05 | Daiichi Shisetsu Kogyo Kk | Flotation unit for large flat panel, and non-contact carrying device using the same |
| KR100650290B1 (en) * | 2005-11-23 | 2006-11-27 | (주)넥스트인스트루먼트 | Noncontact conveying plate |
| KR20070109222A (en) * | 2006-05-10 | 2007-11-15 | 이기선 | Pneumatic apparatus for floating and translating plates |
| KR20100058149A (en) * | 2008-11-24 | 2010-06-03 | 주식회사 에스에프에이 | Vertical type apparatus for transferring a substrate |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI825251B (en) * | 2019-12-20 | 2023-12-11 | 由田新技股份有限公司 | A vacuum conveying apparatus with a wheel and optical inspection apparatus, method |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20110133212A (en) | 2011-12-12 |
| WO2011152587A1 (en) | 2011-12-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR101293289B1 (en) | Noncontact feed apparatus using vacuum pad | |
| KR101593516B1 (en) | Glass Panel Cycle For Tower Lift Device | |
| KR102006259B1 (en) | Washing device for bottles | |
| WO2009157647A2 (en) | Non-contact type conveyor plate having a suction force | |
| CN202070433U (en) | Device for removing particles on glass sheet | |
| KR101434169B1 (en) | An apparatus for Moving and Floating the Substrate by Air Blowing Type | |
| KR20080085646A (en) | Substrate transfering apparatus | |
| KR20070119398A (en) | Air knife and substrate drying system using it | |
| KR101081885B1 (en) | Substrate coater apparatus | |
| KR100766115B1 (en) | Coating apparatus for substrate of flat panel display | |
| KR20120067117A (en) | Noncontact conveying plate | |
| KR101261313B1 (en) | Apparatus for aligning and pick up transporting of moving object | |
| KR20150136241A (en) | Glass Panel Cycle Print And Dry System | |
| KR200386532Y1 (en) | Aero-levitation style device for transferring flat panel | |
| JP6399588B2 (en) | Cap feeder | |
| KR101190809B1 (en) | Noncontact vacuum pad capable of maintaining nozzle gap | |
| KR101276064B1 (en) | Non-contact Plate Transferring Device | |
| KR101308136B1 (en) | Apparatus for treating substrate | |
| KR20110059121A (en) | Substrate transferring unit and method of transfering substrate using the same | |
| KR20240008591A (en) | Conveying Plate For Inkjet Jetting Of Display Panel | |
| KR101209655B1 (en) | Noncontact conveying apparatus | |
| JP3183619U (en) | Inclined circuit board transfer device | |
| KR101141146B1 (en) | Substrate transfer method | |
| KR101293286B1 (en) | Non-contact Plate Transferring Device | |
| KR100946634B1 (en) | Noncontact conveying plate |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| E902 | Notification of reason for refusal | ||
| E701 | Decision to grant or registration of patent right | ||
| GRNT | Written decision to grant | ||
| LAPS | Lapse due to unpaid annual fee |