KR101209655B1 - Noncontact conveying apparatus - Google Patents

Abstract

A non-contact conveying apparatus is disclosed. The non-contact conveying apparatus of the present invention includes an upper plate having a plurality of air holes through which air is ejected and a plurality of vacuum holes for sucking the ejected air, and a lower plate disposed on a lower surface of the upper plate, A conveying plate for conveying the conveyed body in a non-contact manner based on a relatively high pressure compressed air through a plurality of air holes; And a compressed air supply unit for supplying a high pressure compressed air to the conveying plate, wherein the vacuum guide line connected to the plurality of vacuum holes is provided with a plurality of vacuum guide ducts which communicate with each of the plurality of vacuum holes. It is provided by, the air guide line connected to the plurality of air holes is characterized in that provided between the plurality of vacuum guide duct. According to the present invention, the high-pressure compressed air can be ejected at a low flow rate at a high pressure, which can significantly reduce the shaking phenomenon when conveying the substrate, as well as enable accurate and stable conveyance with high accuracy. Since the air guide line and the vacuum guide line can be provided in two separate plates, the number of plates required can be further reduced, and the vibration phenomenon during transportation can be further reduced.

Description

Non-Contact Transfer Device {NONCONTACT CONVEYING APPARATUS}

The present invention relates to a non-contact conveying apparatus, and more particularly, it is possible to eject a high pressure compressed air at a low flow rate of a high pressure, which can significantly reduce the shaking phenomenon when conveying a substrate, as well as being precise and stable. In addition, high-precision conveying is possible, and above all, the air guide line and the vacuum guide line can be provided on two separate plates, thereby reducing the number of plates required, while reducing contact during the non-contact. It relates to a conveying device.

In-line FPD Automatic Optical Inspection generally captures an image of an inspection object by using an optical lens and a CCD camera while guiding a display panel such as a TFT LCD panel, a PDP, a color filter, and the like. It is a device that detects various defects that a user wants to find by applying an image processing algorithm.

Inline inspection equipment is largely divided into a scan section, a review section and an unloading section to detect a defect. In order for these inspection equipments to function as inspection systems, it is important to pinpoint the location and size of the detected defects, but the role of the conveying device to guide the carrier (inspection object) from the scanning section to the unloading section is also an important factor. Works.

Conventionally, as a conveying device has been disclosed a contact conveying device for conveying the conveyed body by the rotational force of the roller (roller), which is carried out by the rotational force of the roller, as well as stains due to scratches and roller rotation to the conveyed body, If the friction force is small or the rotational force is weak, there is a problem that smooth conveyance is difficult because the carrier body slips.

Recently, in order to solve this problem, a non-contact conveying device for supplying compressed air to a plurality of fine air holes and floatingly conveying the air carried body ejected from the air holes has been studied.

However, in the above-mentioned non-contact conveying apparatus, since it is difficult to precisely control the air flow rate ejected for each air hole, a low pressure flow rate can be supplied in part, and as a result, the conveyed body to be conveyed is in contact with the conveying means or the conveying means. There is a problem that the process yield is lowered due to problems such as scratches or breakage caused by adsorption.

On the other hand, when the substrate is floating (floating), it is known that if the vacuum is properly applied to the substrate with a separate vacuum guide line, the stiffness is improved and vibrations can be significantly reduced than before.

However, in the prior art in which the vacuum guide line is formed, after providing three separate plates, the air guide line and the vacuum guide line are separated between the first plate and the second plate, and between the second plate and the third plate. Since the lines are connected to the air holes and the vacuum holes in some complexity, three separate plates are required to form a vacuum guide line separately from the air guide line.

An object of the present invention is to eject a high pressure compressed air at a low flow rate of a high pressure to significantly reduce the shaking phenomenon when transporting the substrate, as well as to be precise and stable as well as to convey a high accuracy It is possible to provide an air guide line and a vacuum guide line in two separate plates to provide a non-contact conveying device that can further reduce the shaking phenomenon during conveyance while reducing the number of plates required.

The object is, according to the present invention, the air plate is provided with a plurality of air holes and the upper plate is formed with a plurality of vacuum holes for sucking the air is ejected, and a lower plate disposed on the lower surface of the upper plate And a conveying plate for conveying the conveyed body in a non-contact manner based on relatively high pressure compressed air through the plurality of air holes; And a compressed air supply unit supplying the compressed air of the high pressure to the conveying plate, wherein the vacuum guide line connected to the plurality of vacuum holes is provided with a plurality of vacuum guide holes respectively connected to the plurality of vacuum holes. Provided by the vacuum guide duct of the air guide line is connected to the plurality of air holes is achieved by a non-contact conveying device, characterized in that provided between the plurality of vacuum guide ducts.

Here, the air guide line may be formed by a plurality of grooves recessed along the thickness direction of the lower plate on the upper surface of the plurality of vacuum guide ducts.

The plurality of grooves may be further formed with a coupling portion to which the compressed air supply unit is coupled.

The air guide line and the vacuum guide line may be provided on the same plane of the lower plate.

The vacuum guideline can be individually controlled individually.

The plurality of air holes and the plurality of vacuum holes may be disposed coaxially along at least one of the longitudinal direction of the upper plate and the direction crossing the longitudinal direction.

The plurality of air holes may be disposed along the circumference of the outer side with one vacuum hole interposed therebetween.

The number of the air holes disposed in the outermost region of the upper plate may be greater than the number of the air holes disposed inside thereof.

A plurality of gasket seating grooves may be further formed on a surface of any one of the upper plate and the lower plate, in which a gasket is disposed and sealed.

The air hole may include a first air hole formed in the upper plate in a direction in which the upper and lower plates are stacked from a lower end of the upper plate; And a second air hole having a diameter smaller than a diameter of the first air hole and communicating with the first air hole and formed from a point where the first air hole ends to an upper end portion of the upper plate. The hole may include: a first vacuum hole formed in the upper plate along a direction in which the upper and lower plates are stacked from a lower end of the upper plate; And a second vacuum hole having a diameter smaller than the diameter of the first vacuum hole and communicating with the first vacuum hole and formed from a point where the first vacuum hole ends to an upper end of the upper plate. The diameter of the second air hole may be smaller than the diameter of the second vacuum hole.

A resistor coupled to the first air hole to change the compressed air of the high pressure to a low flow rate of the high pressure to be ejected into the second air hole, and to form a resistance flow path between the inner wall surface of the first air hole; And a change passage connecting the resistance passage and the second air hole.

The resistor may be an air flower screw having a screw portion formed on an outer circumferential surface, and the resistance flow path may be provided by a space between an inner wall surface of the first air hole and a screw portion of the air floor screw.

The change flow path may include: a first change flow path connected to the resistance flow path and formed in the resistor along a radial direction of the resistor; And a second change channel connecting the first change channel and the second air hole to cross the first change channel.

The inner wall surface of the first air hole may form a smooth surface on which no thread is formed.

A portion where the first air hole and the second air hole are connected may have a round shape or a straight shape, and an end region of the resistor adjacent to the second air hole may have a round shape or a straight shape.

The resistor may be fitted to the first air hole, and may further include a support member installed in the first air hole to prevent the resistor from being separated from the first air hole.

The support member may be a cross-shaped press-fit spring.

According to the present invention, the high-pressure compressed air can be ejected at a low flow rate at a high pressure, which can significantly reduce the shaking phenomenon when transporting the substrate, as well as enable accurate and stable conveyance with high accuracy. Since the air guide line and the vacuum guide line can be provided in two separate plates, the number of plates required can be further reduced, and the vibration phenomenon during transportation can be further reduced.

1 is a schematic side structure diagram of a non-contact conveying apparatus according to a first embodiment of the present invention.
2 is an exploded perspective view of FIG.
3 is an enlarged view of the upper surface of the lower plate.
4 is a partially enlarged cross-sectional view of the upper plate.
5 is an enlarged structural diagram of an air hole and a vacuum hole.
FIG. 6 is an enlarged view of area A of FIG. 4.
FIG. 7 is a cross-sectional view of FIG. 6 at a different angle.
8 is a cross-sectional structural view of the resistor region in the non-contact conveying apparatus according to the second embodiment of the present invention.
9 is a cross-sectional structural view of the resistor region in the non-contact conveying apparatus according to the third embodiment of the present invention.
10 is a cross-sectional structural view of the resistor region in the non-contact conveying apparatus according to the fourth embodiment of the present invention.
11 is a cross-sectional structural view of the resistor region in the non-contact conveying apparatus according to the fifth embodiment of the present invention.
12 is a partially enlarged cross-sectional view of the upper plate in the non-contact conveying apparatus according to the sixth embodiment of the present invention.

In order to fully understand the present invention, operational advantages of the present invention, and objects achieved by the practice of the present invention, reference should be made to the accompanying drawings and the accompanying drawings which illustrate preferred embodiments of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Like reference symbols in the drawings denote like elements.

Prior to the description of the drawings, the carrier body is a flat panel display device such as a plasma display panel (PDP), a liquid crystal display (LCD), and an organic light emitting display (OLED). A display panel such as an FPD, a flat panel display, a color filter, a wafer for semiconductors, a glass for a photo mask, and the like may be referred to. .

1 is a schematic side view of a non-contact conveying apparatus according to a first embodiment of the present invention, Figure 2 is an exploded perspective view of Figure 1, Figure 3 is an enlarged top surface of the lower plate, Figure 4 is a top plate 5 is an enlarged structural view of an air hole and a vacuum hole, FIG. 6 is an enlarged view of region A of FIG. 4, and FIG. 7 is a cross-sectional view of FIG.

As shown in these figures, the non-contact conveying apparatus of this embodiment includes a conveying plate for conveying a substrate in a non-contact manner on the basis of a relatively high-pressure compressed air having upper and lower plates 110 and 130 which are in contact with each other in the vertical direction. 100 and a compressed air supply unit (not shown) for supplying a high pressure compressed air to the conveying plate 100 so that the substrate can be floated and transported to the upper portion of the conveying plate 100 as shown in FIG. 1.

Referring to the upper and lower plates 110 and 130 constituting the conveying plate 100, first, the upper plate 110 sucks a plurality of air holes 111 through which air is ejected to the upper part and air that flows back against the substrate. A plurality of vacuum holes 113 are formed along the thickness direction thereof.

As will be described in detail below, the air holes 111 are connected by a plurality of air guide lines 131, and the vacuum holes 113 are connected by a vacuum guide line 136. In particular, the air guide line 131 and the vacuum guide line 136 is provided on the same plane. Therefore, it is not necessary to use three or more plates as in the prior art, thereby simplifying the structure and further reducing the shaking phenomenon during transportation. A plurality of fastening bosses 115 for coupling with the lower plate 130 are formed between the air holes 111 and the vacuum holes 113.

As shown in FIG. 2, the air holes 111 and the vacuum holes 113 are arranged coaxially with each other along the X axis direction that is the longitudinal direction of the upper plate 110 and the Y axis direction that crosses the X axis direction. do. The air holes 111 and the vacuum holes 113 are not arranged at equal intervals but are arranged with constant regularity, so that the transport control of the substrate can be precisely performed.

The number of the air holes 111 and the vacuum holes 113 need not all be the same, and the number of the air holes 111 is relatively larger than that of the vacuum holes 113. That is, the air holes 111 are disposed along the circumference of the air hole 111 with one vacuum hole 113 interposed therebetween.

In the present exemplary embodiment, the number of air holes 111 disposed along the outermost region of the upper plate 110, that is, the circumferential surface of the plurality of air holes 111 is disposed inside thereof. More than the number of the air holes 111 to be, it is possible to reduce the occurrence of scratch failure in the substrate to be transported or transported by this structural feature.

Of course, this matter is only an example, and the air holes 111 may be arranged at equal intervals on the entire surface of the upper plate 110, and the air holes 111 and the vacuum holes 113 may be disposed. The number may be the same.

As will be described in detail later, as shown in FIG. 5, each of the air holes 111 has a diameter of the first air hole 111 a and the first air hole 111 a formed along the thickness direction of the upper plate 110. The second air hole 111b has a smaller diameter and communicates with the first air hole 111a and is formed from the end point of the first air hole 111a to the upper end of the upper plate 110.

The vacuum holes 113 also have the same structure as the air holes 111. That is, the vacuum hole 113 includes a first vacuum hole 113a and a first vacuum hole formed in the upper plate 110 along a direction in which the upper and lower plates 110 and 130 are stacked from the lower end of the upper plate 110. And a second vacuum hole 113b having a diameter smaller than the diameter of 113a and communicating with the first vacuum hole 113a and formed from a point where the first vacuum hole 113a ends to an upper end of the upper plate 110. .

In the structure of the air hole 111 and the vacuum hole 113 as shown in FIG. 5, the diameter D1 of the second air hole 111b of the air hole 111 is the second vacuum hole ( It is formed smaller than the diameter D2 of 113b). This has a structural feature that the non-contact conveying device of the present embodiment can eject the high pressure compressed air at a low flow rate of high pressure, thereby forming a large diameter D1 of the second air hole 111b of the air hole 111. Because there is no need to do.

The lower plate 130 is disposed on the lower surface of the upper plate 110 in the up and down direction as shown in FIGS. 1 and 2 to be coupled to the upper plate 110. As schematically shown in FIG. 1, a gasket 105 is interposed between the upper plate 110 and the lower plate 130 to seal the bonding area therebetween from the outside.

As shown in FIG. 3, the gasket 105 is disposed on the surface of the lower plate 130 to form a gasket seat groove 107 as a means for doubling the sealing efficiency. That is, in this embodiment, in order to increase the sealing efficiency of the air guide line 131 and the vacuum guide line 136, a gasket seat groove 107 is formed on the surface of the lower plate 130, and the gasket seat groove 107 The sealing efficiency is improved by starting the structure in which the gasket 105 is in close contact. In this case, it serves as an advantage of reducing the number of fixing bolts between the upper and lower plates (110,130).

Meanwhile, as shown in FIG. 2, the air guide line 131 connected to the plurality of air holes 111 and the vacuum guide line connected to the plurality of vacuum holes 113 on the surface of the lower plate 130. 136 is formed. That is, some of the air holes 111 may be connected by the plurality of air guide lines 131, and the vacuum holes 113 may be connected by the vacuum guide lines 136.

The vacuum guide line 136 sucks air from the plurality of vacuum holes 113 at a time to discharge the outside of the conveying plate 100, the air guide line 131 is a plurality of air holes 111 They supply compressed air at once.

As such, in the present exemplary embodiment, the air guide line 131 and the vacuum guide line 136 are not separately provided while using three or more plates, and the surface of the lower plate 130 may be separated. That is, since the air guide line 131 and the vacuum guide line 136 are provided on the same plane, the structure is simpler than before, and there is an advantage of further reducing the shaking phenomenon during transportation.

In the present embodiment, a plurality of air guide lines 131 and vacuum guide lines 136 are provided on the lower plate 130. In particular, a plurality of vacuum guide lines 136 may be individually controlled or may be simultaneously controlled as a whole. If controlled individually, it may be possible to control the height of injury differently in each horizontal row so as to reduce the waff phenomenon (a phenomenon in which the height of an injury is increased).

In order that the air guide line 131 and the vacuum guide line 136 may be provided on the same plane of the lower plate 130, the vacuum guide line 136 is provided with a plurality of vacuums respectively communicating with the plurality of vacuum holes 113. The guide hole 136a is provided by a plurality of vacuum guide ducts 136b, and the air guide line 131 is provided between the plurality of vacuum guide ducts 136b. The vacuum guide line 136 and the air guide line 131 are both provided in plurality, in particular, the plurality of air guide line 131 is a thickness direction of the lower plate 130 on the upper surface of the plurality of vacuum guide duct (136b) It is formed by a plurality of grooves 131 to be recessed along.

As the vacuum guide line 136 has the above structure, the air that flows back against the substrate is sequentially passed through the plurality of vacuum holes 113, the plurality of vacuum guide holes 136a, and the plurality of vacuum guide ducts 136b. It may be discharged to the outside of the lower plate 130.

The air guide line 131 is provided in the form of a plurality of grooves 131, whereas the vacuum guide line 136 is provided in the structure of the plurality of vacuum guide holes 136a and the plurality of vacuum guide ducts 136b.

Looking in detail in Figure 2, not all of the air guide line 131 in the form of the groove 131 is connected, some are connected to each other and the rest are separated. This is a method for controlling the usage of compressed air and does not need to be the same as the drawing.

At this time, each of the air guide line 131 is further provided with a coupling portion 138 for supplying compressed air to the corresponding air guide line 131, that is, a compressed air supply (not shown) is coupled. Coupling portion 138 is utilized as a place where the nozzle, nipple, etc. on the compressed air supply side. With this structure, when compressed air is supplied through the coupling part 138, the compressed air may be provided toward the plurality of air holes 111 connected to the compressed air through the air guide line 131 at the corresponding position. Will be. Therefore, the structure for supplying the compressed air can be simplified compared to the structure to be installed for each air hole (111).

On the other hand, as shown in Figure 4 to 7, each of the plurality of air holes 111 formed in the upper plate 110, the direction in which the upper and lower plates 110, 130 are stacked from the lower end of the upper plate 110 The first air hole 111a formed in the upper plate 110 along the diameter of the first air hole 111a is smaller than the diameter of the first air hole 111a and communicates with the first air hole 111a. The second air hole 111b is formed from the end point to the upper end of the upper plate 110.

At this time, the portion where the first air hole 111a and the second air hole 111b are connected has a round shape. As this part has a round shape, the vortex of the compressed air may be suppressed to induce a stable and smooth air flow.

The resistor 160 is coupled to the first air hole 111a. The resistor 160 is coupled to the first air hole 111a and serves to eject the high pressure compressed air from the compressed air supply unit (not shown) into a low flow rate at a high pressure to be ejected into the second air hole 111b.

The resistor 160 applied in the present embodiment is provided with an air floor screw 160 having a threaded portion 161 formed on an outer circumferential surface thereof. Since the threaded portion 161 is formed on the outer circumferential surface of the resistor 160 with the peak portion 161a and the valley portion 161b repeatedly formed between the threaded portion 161 and the inner wall surface of the first air hole 111a. This is formed, this space forms a resistance flow path (171).

In order to provide compressed air from the resistance passage 171 in the region of the first air hole 111a to the second air hole 111b, the resistor 160 connects the resistance passage 171 and the second air hole 111b to each other. A change channel 173 is provided. An end region of the resistor 160 adjacent to the second air hole 111b has a round shape to correspond to a portion where the first air hole 111a and the second air hole 111b are connected.

As shown in detail in the cross-sectional view in FIG. 7, the change channel 173 is connected to the resistance channel 171 and the first change channel 173a formed in the resistor 160 along the radial direction of the resistor 160. And a second change passage 173b connecting the first change passage 173a and the second air hole 111b.

In this case, the first change channel 173a and the second change channel 173b are disposed to cross each other, and a round is formed at the crossed portion for smooth flow of the compressed air. For reference, the first change channel 173a may be formed at a quarter point in the overall length of the resistor 160, but this may be changed depending on the thickness of the upper plate 110.

On the other hand, in the present embodiment, unlike the prior art, the inner wall surface of the first air hole 111a to which the resistor 160 as the air floor screw 160 is coupled forms a smooth surface without a thread. That is, when the thread is formed in the first air hole 111a, a portion where the thread is not formed due to the thread processing is inevitably generated, and the resistor 160 is not fastened to the portion where the thread is not formed, and thus the second air hole is eventually formed. Since a space is formed in the lower portion of the lower portion 111b and a damping role may occur, a shaking phenomenon may occur when transporting the substrate. In this embodiment, the inner wall surface of the first air hole 111a is not threaded. To form a smooth surface.

However, since the resistor 160 may block the second air hole 111b when the resistor 160 is forcibly fitted to the first air hole 111a because there is no thread in the first air hole 111a, in the present embodiment, the resistor The first change passage 173a and the second change passage 173b are provided at 160. Accordingly, the compressed air flowing into the first air hole 111a rises along the resistance flow path 171 formed between the threaded portion 161 of the resistor 160 and the inner wall surface of the first air hole 111a. At the upper end of the 160, the first change channel 173a and the second change channel 173b are introduced into the second air hole 111b, and can be ejected toward the substrate. It is possible to eject the high-pressure compressed air at a low flow rate of high pressure to significantly reduce the shaking phenomenon when conveying the substrate can be precise and stable as well.

As described above, the resistor 160 may be fitted to the first air hole 111a. In this case, the resistor 160 is supported in the first air hole 111a to prevent the resistor 160 from being separated from the first air hole 111a. The member 180 is coupled.

In more detail, in the present embodiment, since the thread is not formed in the first air hole 111a, the resistor 160 must be fitted to the first air hole 111a. Although the resistor 160 may not be detached from the first air hole 111a by the interference fit, the support member 180 may be moved to the first air hole 111a to more reliably prevent the resistor 160 from being separated. Is being installed on. In the present embodiment, the support member 180 is applied as a cross-shaped indentation spring 180 for contact support of the resistor 160 at the lower end of the resistor 160.

The reason why the press-fit spring 180 is cross-shaped is that compressed air must flow into the resistance flow path 171. Therefore, the press-fit spring 180 does not necessarily have to be cross-shaped, and any shape may be applied as long as it is not a disk shape completely blocked like a coin.

Looking at the operation of the non-contact conveying device having such a configuration as follows.

When compressed air is supplied from the compressed air supply unit, which is not shown, to the air guide line 131 through the coupling unit 138, the compressed air is spread along the air guide line 131 and connected to the corresponding air guide line 131. 1 Head toward the air hole 111a.

Then, the air flows into the first air hole 111a along the empty space of the press-fit spring 180, and the compressed air introduced into the first air hole 111a is the threaded portion 161 and the first air of the resistor 160. Along the resistance flow path 171 formed between the inner wall surface of the hole (111a).

The compressed air rising along the resistance passage 171 is moved in the radial direction of the resistor 160 through the first change passage 173a at the upper end of the resistor 160, and again the first change passage 173a and the second change. At the point where the flow path 173b crosses, the direction is changed to the second air hole 111b through the second change flow path 173b.

Therefore, the substrate placed on the upper portion of the transfer plate 100 may be lifted and transported by the compressed air ejected through the second air hole 111b. At this time, the air hitting the substrate again toward the conveying plate 100 is introduced through the plurality of vacuum holes 113 and introduced into the lower plate 130 through the vacuum guide holes 136a as the vacuum guide line 136 to vacuum It is discharged to the outside of the conveyance plate 100 via the guide line 136.

As described above, according to the present embodiment, the compressed air of the high pressure can be ejected at a low flow rate of the high pressure, which can significantly reduce the shaking phenomenon when conveying the substrate, as well as enable accurate and stable conveyance with high accuracy. First of all, the air guide line 131 and the vacuum guide line 136 may be provided on the two separate upper and lower plates 110 and 130 to further reduce the number of plates required, while further reducing the shaking during conveyance. Can be reduced.

8 is a cross-sectional structural view of the resistor area in the non-contact conveying apparatus according to the second embodiment of the present invention, and FIG. 9 is a cross-sectional structural view of the resistor area in the non-contact conveying apparatus according to the third embodiment of the present invention.

FIG. 8 corresponds to a case where a portion where the first air hole 111a and the second air hole 111b are connected has a straight line shape, and FIG. 9 illustrates the first air hole 111a and the second air hole 111b. This corresponds to the case where both the portion to which the) is connected and the upper end of the resistor 160a form a straight line shape.

Even if the structure of FIG. 8 and FIG. 9 is applied, the high-pressure compressed air can be ejected at a low flow rate at a high pressure, which can significantly reduce the shaking phenomenon when conveying the substrate, as well as enable accurate and stable conveyance with high accuracy. And, above all, the vacuum guide line 136 may be provided on the two separate upper and lower plates 110 and 130, thereby reducing the number of plates required and reducing the vibration during transportation.

10 is a cross-sectional structural view of the resistor region in the non-contact conveying apparatus according to the fourth embodiment of the present invention.

In the present exemplary embodiment, the plurality of change passages 273 include a plurality of first change passages 273a and a plurality of first change passages 273a which are provided in the resistor 160 at equiangular intervals along the circumferential direction of the resistor 160b. A second change passage 273b connecting the 273a and the second air hole 111b is provided.

The number of first change passages 273a may vary from two to three or more. Although the first change passages 273a do not necessarily have an isometric interval, it may be preferable that the first change passages 273a form an equiangular interval therebetween in order to induce a smooth air flow.

In this case, the plurality of first change passages 273a and the second change passages 273b may be inclined to communicate with each other in order to smoothly induce the air flow, and the plurality of first change passages 273a and the second change passages ( The area where 273b abuts may be rounded.

Even if the structure of the present embodiment is applied, the compressed air of high pressure can be ejected at a low flow rate of high pressure, which can significantly reduce the shaking phenomenon when conveying the substrate, as well as precise, stable, high-precision conveying as well as conventionally. In comparison, a relatively low pressure can be used.

11 is a cross-sectional structural view of the resistor region in the non-contact conveying apparatus according to the fifth embodiment of the present invention.

In the present embodiment, the change channel 373 is formed in at least one groove 373 recessed along the longitudinal direction of the resistor 160c in the end region of the resistor 160c adjacent to the second air hole 111b. The compressed air rising along the resistance flow path 171 may be directed to the second air hole 111b through the change flow path 373 at the upper end of the resistor 160c even if such a structure is applied. There is nothing wrong with it.

12 is a partially enlarged cross-sectional view of the upper plate in the non-contact conveying apparatus according to the sixth embodiment of the present invention.

In the above-described embodiment, the support member 180 (refer to FIG. 3) is applied as a cross-shaped indentation spring 180 contacting and supporting the resistor 160 at the lower end of the resistor 160, but the support member 180a is one side as shown in FIG. 12. This open donut-shaped circular ring 180a may be used. In this case, the open gap 180b of the circular ring 180a may be used as a space in which air flows.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. Accordingly, such modifications or variations are intended to fall within the scope of the appended claims.

100: conveying plate 105: gasket
110: upper plate 111: air hole
111a: first air hole 111b: second air hole
113: vacuum hole 115: tightening boss
130: lower plate 131: air guide line
136: vacuum guide line 160: resistor
171: resistance euro 173: change euro
173a: first changing euro 173b: second changing euro
180: support member

Claims (17)

And an upper plate having a plurality of air holes through which air is blown out and a plurality of vacuum holes for sucking the air blown out, and a lower plate disposed on a lower surface of the upper plate, through the plurality of air holes. A conveying plate for conveying the conveyed body in a non-contact manner based on a relatively high pressure compressed air; And
Compressed air supply unit for supplying the high pressure compressed air to the conveying plate,
The vacuum guide line connected to the plurality of vacuum holes is provided by a plurality of vacuum guide ducts are formed with a plurality of vacuum guide holes respectively communicating with the plurality of vacuum holes,
An air guide line connected to the plurality of air holes is provided between the plurality of vacuum guide ducts,
And the air guide line and the vacuum guide line are provided on the same plane of the lower plate. The method of claim 1,
And the air guide line is formed by a plurality of grooves recessed along a thickness direction of the lower plate on the upper surfaces of the plurality of vacuum guide ducts. The method of claim 2,
Non-contact conveying apparatus, characterized in that the plurality of grooves further comprises a coupling portion to which the compressed air supply is coupled. delete The method of claim 1,
The vacuum guide line is a non-contact conveying device, characterized in that individually controlled. The method of claim 1,
And the plurality of air holes and the plurality of vacuum holes are disposed coaxially along at least one of a longitudinal direction of the upper plate and a direction crossing the longitudinal direction. The method according to claim 6,
The plurality of air holes are non-contact conveying apparatus, characterized in that disposed along the circumference of the outer space with any one vacuum hole therebetween. The method of claim 1,
And the number of the air holes arranged in the outermost region of the upper plate is greater than the number of the air holes arranged inside thereof. The method of claim 1,
Non-contact conveying apparatus, characterized in that a plurality of gasket seat groove is further formed on the surface of any one of the upper plate and the lower plate is arranged and sealed. The method of claim 1,
The air hole,
A first air hole formed in the upper plate along a direction in which the upper and lower plates are stacked from a lower end of the upper plate; And
It has a diameter smaller than the diameter of the first air hole, and includes a second air hole in communication with the first air hole and formed from the end point of the first air hole to the upper end of the upper plate,
The vacuum hole,
A first vacuum hole formed in the upper plate along a direction in which the upper and lower plates are stacked from a lower end of the upper plate; And
It has a diameter smaller than the diameter of the first vacuum hole, and includes a second vacuum hole in communication with the first vacuum hole and formed from the end point of the first vacuum hole to the upper end of the upper plate,
And the diameter of the second air hole is smaller than the diameter of the second vacuum hole. The method of claim 10,
A resistor coupled to the first air hole to change the compressed air of the high pressure to a low flow rate of the high pressure to be ejected into the second air hole, and to form a resistance flow path between the inner wall surface of the first air hole; And
And a change flow passage connecting the resistance flow path and the second air hole. The method of claim 11,
The resistor is an air floor screw (air flower screw) is formed on the outer circumferential surface,
And the resistance flow path is provided by a space between an inner wall surface of the first air hole and a screw portion of the air floor screw. The method of claim 11,
The change flow path,
A first change passage connected to the resistance passage and formed in the resistor along a radial direction of the resistor; And
And a second change flow passage connecting the first change flow passage to the second air hole and intersecting the first change flow passage. The method of claim 10,
The inner wall surface of the first air hole is a non-contact conveying device, characterized in that for forming a smooth surface without a thread. The method of claim 11,
The portion where the first air hole and the second air hole are connected has a round shape or a straight shape,
And the end region of the resistor adjacent to the second air hole has a round shape or a straight shape. The method of claim 11,
The resistor is fitted to the first air hole,
And a support member installed in the first air hole to prevent the resistor from being separated from the first air hole. 17. The method of claim 16,
The support member is a non-contact conveying device, characterized in that the cross-shaped push-in spring.

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