KR101352926B1 - Noncontact conveying apparatus - Google Patents

Abstract

A non-contact conveying apparatus is disclosed. The non-contact conveying apparatus of the present invention includes an upper plate having a plurality of air holes in which air is ejected to the upper portion, and one region is tapped, and a lower plate disposed on the lower surface of the upper plate, A conveying plate for conveying the conveyed body in a non-contact manner based on a relatively high pressure compressed air through a plurality of air holes; And a resistance module that is partially coupled to the air hole and changes the high pressure compressed air to a low flow rate at a high pressure to be ejected to the upper portion of the upper plate, but forms a resistance flow path between the inner wall of the air hole.

Description

Non-Contact Transfer Device {NONCONTACT CONVEYING APPARATUS}

The present invention relates to a non-contact conveying apparatus, and more particularly, it is possible to eject a high pressure compressed air at a low flow rate of high pressure, which can significantly reduce the shaking phenomenon when conveying the substrate, and is precise and stable. The present invention relates to a non-contact conveying device that can be conveyed with high accuracy and that relatively low pressure can be used as compared with the conventional art, and in particular, the manufacturing cost can be reduced and the installation and maintenance are easy.

In-line FPD Automatic Optical Inspection generally captures an image of an inspection object by using an optical lens and a CCD camera while guiding a display panel such as a TFT LCD panel, a PDP, a color filter, and the like. It is a device that detects various defects that a user wants to find by applying an image processing algorithm.

Inline inspection equipment is largely divided into a scan section, a review section and an unloading section to detect a defect. In order for these inspection equipments to function as inspection systems, it is important to pinpoint the location and size of the detected defects, but the role of the conveying device to guide the carrier (inspection object) from the scanning section to the unloading section is also an important factor. Works.

Conventionally, as a conveying device has been disclosed a contact conveying device for conveying the conveyed body by the rotational force of the roller (roller), which is carried out by the rotational force of the roller, as well as stains due to scratches and roller rotation to the conveyed body, If the friction force is small or the rotational force is weak, there is a problem that smooth conveyance is difficult because the carrier body slips.

Recently, in order to solve this problem, a non-contact conveying device for supplying compressed air to a plurality of fine air holes and floatingly conveying the air carried body ejected from the air holes has been studied.

However, in the above-mentioned non-contact conveying apparatus, since it is difficult to precisely control the air flow rate ejected for each air hole, a low pressure flow rate can be supplied in part, and as a result, the conveyed body to be conveyed is in contact with the conveying means or the conveying means. There is a problem that the process yield is lowered due to problems such as scratches or breakage caused by adsorption.

In consideration of such a problem, the air hole extends inwardly and vertically inwardly on the lower surface of the upper plate, and extends inwardly of the upper plate at an extended end of the first expansion guide portion, and the first expansion guide portion. A female screw formed on the inner circumferential surface of the inner circumferential surface and having a diameter smaller than the diameter, and the micro guide portion penetrating the upper surface of the upper plate at the extended end of the second extended guide portion, In the guide part, a conveying apparatus has been disclosed in which a resistance means for ejecting a high pressure compressed air to a low flow rate of a high pressure is inserted into the fine guide part.

However, in the case of the above-mentioned conveying apparatus, when the thread is formed in the first extension guide part, the thread is not necessarily formed due to the limitation of thread processing, but the screw is not fastened to the part where the thread is not formed. As a result, a space is formed in the lower part of the microguide, and if the space is large, the pressure of the space should be increased when the height of the support between the substrate and the upper plate is lowered by disturbance. There is a problem and there is a problem that can be used to supply a considerably high pressure or to increase the flow resistance of the fine guide portion to solve this problem.

Therefore, it is required to develop a new type of non-contact conveying device in consideration of such a problem, but if the manufacturing cost is high or installation and maintenance are not easy, it may be a problem for practical use. Is required.

Korea Patent Office Registered Patent Publication No. 10-0650290

Therefore, the technical problem to be achieved by the present invention is that it is possible to eject the high pressure compressed air at a low flow rate of the high pressure, which can significantly reduce the shaking phenomenon when transporting the substrate, as well as enable accurate, stable, and highly accurate conveyance. Rather, it is possible to use a relatively low pressure compared to the prior art, and in particular, to provide a non-contact conveying device that is easy to install and maintain while reducing manufacturing costs.

According to an aspect of the present invention, there is provided an upper plate in which a plurality of air holes in which air is ejected to an upper portion of which one tap is formed, and a lower plate disposed on a lower surface of the upper plate, And a conveying plate for conveying the conveyed body in a non-contact manner based on relatively high pressure compressed air through the plurality of air holes. And a resistance module partially coupled to the air hole and changing the high pressure compressed air to a low flow rate at a high pressure so as to be ejected to an upper portion of the upper plate, and forming a resistance flow path between an inner wall of the air hole. A non-contact conveying apparatus may be provided.

The air hole may include: a first air hole formed in the upper plate along a direction in which the upper and lower plates are stacked from a lower end of the upper plate, and having a screw portion formed on a sidewall thereof; And a second air hole having a diameter smaller than the diameter of the first air hole and communicating with the first air hole and formed from a point where the first air hole ends to an upper end of the upper plate.

The resistor module may be a pin type pin type resistor module in which at least one region is inserted into the air hole.

The pin type resistor module may include: a gripping module body supported at a lower end of the upper plate; And a module shaft connected to the gripping module body and inserted into the first air hole to generate the resistance flow path.

The gripping module body may have a circular ring shape or a triangular ring shape.

The resistance flow path may be provided by a space between the inner wall screw portion of the first air hole and the module shaft, and the inner wall of the second air hole may form a smooth surface without a thread.

One side of the gripping module body may be disposed at a lower end of the upper plate, and a module body rotation constraining groove may be further formed to restrict rotation of the gripping module body.

The lower plate may further include a release blocking unit supporting the gripping module body together with the module body rotation restraint groove to prevent the pin type resistance module from being separated.

The upper plate may further include a plurality of vacuum holes for sucking the blown air, and a plurality of vacuum guide holes connected to the plurality of vacuum holes may be formed to communicate with the plurality of vacuum holes, respectively. It may be provided by a plurality of vacuum guide duct, the air guide line connected to the plurality of air holes may be provided between the plurality of vacuum guide duct.

The air guide line may be formed by a plurality of grooves recessed along the thickness direction of the lower plate on the upper surface of the plurality of vacuum guide ducts.

A compressed air supply unit for supplying the compressed air of the high pressure to the conveying plate may be further included, the plurality of grooves may be further formed with a coupling portion coupled to the compressed air supply.

The air guide line and the vacuum guide line may be provided on the same plane of the lower plate.

The plurality of air holes and the plurality of vacuum holes may be disposed coaxially along at least one of the longitudinal direction of the upper plate and the direction crossing the longitudinal direction.

A plurality of gasket seating grooves may be further formed on a surface of any one of the upper plate and the lower plate, in which a gasket is disposed and sealed.

The resistance module may be a porous type resistance module having at least one region inserted into the air hole and made of a porous material.

According to the present invention, the compressed air of high pressure can be ejected at a low flow rate of high pressure, which can significantly reduce the shaking phenomenon when conveying the substrate, as well as being accurate, stable, and highly accurate in conveying, as well as relative to the conventional art. Low pressure can be used, and in particular, the manufacturing cost can be reduced while being easy to install and maintain.

1 is a schematic side structure diagram of a non-contact conveying apparatus according to a first embodiment of the present invention.
2 is an exploded perspective view of FIG.
3 is an enlarged view of the upper surface of the lower plate.
4 is a partially enlarged cross-sectional view of FIG. 1.
5 is an exploded view of Fig.
FIG. 6 is an enlarged view of area A of FIG. 4.
FIG. 7 is an enlarged view of region B of FIG. 5.
8 is a perspective view of a resistance module applied to the non-contact conveying apparatus according to the second embodiment of the present invention.
FIG. 9 is a structural diagram illustrating a rear surface of an upper plate to which the resistance module of FIG. 8 is coupled.
10 is a partial cross-sectional exploded view of a non-contact conveying apparatus according to a third embodiment of the present invention.

In order to fully understand the present invention, operational advantages of the present invention, and objects achieved by the practice of the present invention, reference should be made to the accompanying drawings and the accompanying drawings which illustrate preferred embodiments of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Like reference symbols in the drawings denote like elements.

Prior to the description of the drawings, the carrier body is a flat panel display device such as a plasma display panel (PDP), a liquid crystal display (LCD), and an organic light emitting display (OLED). A display panel such as an FPD, a flat panel display, a color filter, a wafer for semiconductors, a glass for a photo mask, and the like may be referred to. .

1 is a schematic side structure diagram of a non-contact conveying apparatus according to a first embodiment of the present invention, FIG. 2 is an exploded perspective view of FIG. 1, FIG. 3 is an enlarged view of the upper surface of the lower plate, and FIG. 4 is of FIG. 1. 5 is an exploded view of FIG. 4, FIG. 6 is an enlarged view of region A of FIG. 4, and FIG. 7 is an enlarged view of region B of FIG. 5.

As shown in these figures, the non-contact conveying apparatus of this embodiment includes an upper plate 110 and a lower plate 130 which are in contact with each other in the up and down direction to convey the substrate in a non-contact manner based on a relatively high pressure compressed air. The conveying plate 100, the resistance module 160 coupled to the air hole 111 of the upper plate 110, and the conveying plate so that the substrate can be lifted and transported to the upper portion of the conveying plate 100 as shown in FIG. It may include a compressed air supply unit (not shown) for supplying a high pressure compressed air to (100).

Referring to the upper and lower plates 110 and 130 constituting the conveying plate 100, first, the upper plate 110 sucks a plurality of air holes 111 through which air is ejected to the upper part and air that flows back against the substrate. A plurality of vacuum holes 113 are formed along the thickness direction thereof.

As will be described in detail below, the air holes 111 are connected by a plurality of air guide lines 131, and the vacuum holes 113 are connected by a vacuum guide line 136. In particular, the air guide line 131 and the vacuum guide line 136 is provided on the same plane. Therefore, it is not necessary to use three or more plates as in the prior art, thereby simplifying the structure and further reducing the shaking phenomenon during transportation. A plurality of fastening bosses 115 for coupling with the lower plate 130 are formed between the air holes 111 and the vacuum holes 113.

Referring to FIG. 2, the air holes 111 and the vacuum holes 113 are arranged coaxially with each other along the X axis direction, which is the length direction of the upper plate 110, and the Y axis direction crossing the X axis direction. The air holes 111 and the vacuum holes 113 are not arranged at equal intervals but are arranged with constant regularity, so that the transport control of the substrate can be precisely performed.

The number of the air holes 111 and the vacuum holes 113 need not all be the same, and the number of the air holes 111 is relatively larger than that of the vacuum holes 113. That is, the air holes 111 may be disposed along the circumference of the air hole 111 with one vacuum hole 113 interposed therebetween.

In the present exemplary embodiment, the number of air holes 111 disposed along the outermost region of the upper plate 110, that is, the circumferential surface of the plurality of air holes 111 is disposed inside thereof. More than the number of the air holes 111 to be, it is possible to reduce the occurrence of scratch failure in the substrate to be transported or transported by this structural feature.

Of course, this matter is only an example, and the air holes 111 may be arranged at equal intervals on the entire surface of the upper plate 110, and the air holes 111 and the vacuum holes 113 may be disposed. The number may be the same.

As will be described in detail later with reference to FIG. 7, each of the air holes 111 has a diameter smaller than a diameter of the first air hole 111a and the first air hole 111a formed along the thickness direction of the upper plate 110. And a second air hole 111b which communicates with the first air hole 111a and is formed from a point where the first air hole 111a ends to an upper end of the upper plate 110.

The vacuum holes 113 also have the same structure as the air holes 111. That is, the vacuum hole 113 includes a first vacuum hole 113a and a first vacuum hole formed in the upper plate 110 along a direction in which the upper and lower plates 110 and 130 are stacked from the lower end of the upper plate 110. And a second vacuum hole 113b having a diameter smaller than the diameter of 113a and communicating with the first vacuum hole 113a and formed from a point where the first vacuum hole 113a ends to an upper end of the upper plate 110. .

In the structure of the air hole 111 and the vacuum hole 113 as shown in FIG. 7, the diameter of the second air hole 111b of the air hole 111 is the diameter of the second vacuum hole 113b of the vacuum hole 113. The diameter of the second air hole 111b of the air hole 111 may be smaller because the non-contact conveying device of the present embodiment has a structural feature capable of ejecting a high pressure compressed air at a low flow rate of a high pressure. This is because it is not necessary to form large. However, the scope of rights of the present invention need not be limited to these matters.

In particular, the vacuum hole 113 has the same structure as the air hole 111, the resistance module 160 may be coupled to the vacuum hole 113. However, in the present embodiment, the resistance module 160 is omitted in the vacuum hole 113.

The lower plate 130 is disposed on the lower surface of the upper plate 110 in the up and down direction as shown in FIGS. 1 and 2 to be coupled to the upper plate 110. As schematically shown in FIG. 1, a gasket 105 is interposed between the upper plate 110 and the lower plate 130 to seal the bonding area therebetween from the outside.

As shown in FIG. 3, the gasket 105 is disposed on the surface of the lower plate 130 to form a gasket seat groove 107 as a means for doubling the sealing efficiency. That is, in this embodiment, in order to increase the sealing efficiency of the air guide line 131 and the vacuum guide line 136, a gasket seat groove 107 is formed on the surface of the lower plate 130, and the gasket seat groove 107 The sealing efficiency is improved by starting the structure in which the gasket 105 is in close contact. In this case, it serves as an advantage of reducing the number of fixing bolts between the upper and lower plates (110,130).

Meanwhile, as shown in FIG. 2, the air guide line 131 connected to the plurality of air holes 111 and the vacuum guide line connected to the plurality of vacuum holes 113 on the surface of the lower plate 130. 136 is formed. That is, some of the air holes 111 may be connected by the plurality of air guide lines 131, and the vacuum holes 113 may be connected by the vacuum guide lines 136.

The vacuum guide line 136 sucks air from the plurality of vacuum holes 113 at a time to discharge the outside of the conveying plate 100, the air guide line 131 is a plurality of air holes 111 They supply compressed air at once.

As such, in the present exemplary embodiment, the air guide line 131 and the vacuum guide line 136 are not separately provided while using three or more plates, and the surface of the lower plate 130 may be separated. That is, since the air guide line 131 and the vacuum guide line 136 are provided on the same plane, the structure is simpler than before, and there is an advantage of further reducing the shaking phenomenon during transportation.

In the present embodiment, a plurality of air guide lines 131 and vacuum guide lines 136 are provided on the lower plate 130. In particular, a plurality of vacuum guide lines 136 may be individually controlled or may be simultaneously controlled as a whole. If controlled individually, it may be possible to control the height of injury differently in each horizontal row so as to reduce the waff phenomenon (a phenomenon in which the height of an injury is increased).

In order that the air guide line 131 and the vacuum guide line 136 may be provided on the same plane of the lower plate 130, the vacuum guide line 136 is provided with a plurality of vacuums respectively communicating with the plurality of vacuum holes 113. The guide hole 136a is provided by a plurality of vacuum guide ducts 136b, and the air guide line 131 is provided between the plurality of vacuum guide ducts 136b. The vacuum guide line 136 and the air guide line 131 are both provided in plurality, in particular, the plurality of air guide line 131 is a thickness direction of the lower plate 130 on the upper surface of the plurality of vacuum guide duct (136b) It is formed by a plurality of grooves 131 to be recessed along.

As the vacuum guide line 136 has the above structure, the air that flows back against the substrate is sequentially passed through the plurality of vacuum holes 113, the plurality of vacuum guide holes 136a, and the plurality of vacuum guide ducts 136b. It may be discharged to the outside of the lower plate 130.

The air guide line 131 is provided in the form of a plurality of grooves 131, whereas the vacuum guide line 136 is provided in the structure of the plurality of vacuum guide holes 136a and the plurality of vacuum guide ducts 136b.

Looking in detail in Figure 2, not all of the air guide line 131 in the form of the groove 131 is connected, some are connected to each other and the rest are separated. This is a method for controlling the usage of compressed air and does not need to be the same as the drawing.

At this time, each of the air guide line 131 is further provided with a coupling portion 138 for supplying compressed air to the corresponding air guide line 131, that is, a compressed air supply (not shown) is coupled. Coupling portion 138 is utilized as a place where the nozzle, nipple, etc. on the compressed air supply side. With this structure, when compressed air is supplied through the coupling part 138, the compressed air may be provided toward the plurality of air holes 111 connected to the compressed air through the air guide line 131 at the corresponding position. Will be. Therefore, the structure for supplying the compressed air can be simplified compared to the structure to be installed for each air hole (111).

Meanwhile, each of the plurality of air holes 111 formed in the upper plate 110 has a direction in which the upper and lower plates 110 and 130 are stacked from the lower end of the upper plate 110 as illustrated in FIGS. 4 to 7. The first air hole 111a formed in the upper plate 110 along the diameter of the first air hole 111a is smaller than the diameter of the first air hole 111a and communicates with the first air hole 111a. The second air hole 111b is formed from the end point to the upper end of the upper plate 110.

At this time, the portion where the first air hole 111a and the second air hole 111b are connected has a round shape. As this part has a round shape, the vortex of the compressed air may be suppressed to induce a stable and smooth air flow.

However, the scope of the present invention is not limited thereto, and a portion where the first air hole 111a and the second air hole 111b are connected may be inclined.

The first air hole 111a is tap processed. That is, the threaded portion 111c is formed on the sidewall of the first air hole 111a in which the valley and the mountain are continuously repeated. On the contrary, the inner wall of the second air hole 111b forms a smooth surface on which no thread is formed. Instead, as described above, the diameter of the second air hole 111b is smaller than that of the first air hole 111a.

On the other hand, in the non-contact conveying apparatus of the present embodiment, the resistance module 160 is coupled to the area of the first air hole 111a.

The resistance module 160 is coupled to be partially inserted into the area of the first air hole 111a to change the high pressure compressed air into a low flow rate of the high pressure to be ejected to the upper portion of the upper plate 110, but the first air hole A resistance flow path L1 is formed between the inner wall of 111a.

In the present embodiment, the resistor module 160 is applied as a pin type resistor module 160 having a pin type in which at least one region is inserted into the first air hole 111a.

The pin type resistor module 160 may be made of a metal material, but may be made of plastic having high rigidity in some cases. Unlike the related art, as the pin type resistor module 160 having a simple structure is applied, it is possible to reduce the manufacturing cost and provide an effect of easy installation and maintenance.

The pin type resistor module 160 is connected to the gripping module body 161 supported at the lower end of the upper plate 110 and the gripping module body 161, and the first air is formed to generate the resistance flow path L1. The module shaft 162 is inserted into the hole 111a.

The gripping module body 161 may have a circular ring shape and is supported at the lower end of the upper plate 110, that is, between the upper plate 110 and the lower plate 130. The gripping module body 161 having a circular ring shape may be used as a handle when mounting or detaching the resistance module 160.

In this embodiment, the gripping module body 161 is manufactured in a circular ring shape, but the gripping module body 161 may be a triangular ring shape or a polygonal ring shape. In addition, the holding module body 161 may be a twisted shape, or may be a spring shape twisted two or more times.

The module shaft 162 is inserted into the first air hole 111 a to form a resistance flow path L1 between the first air hole 111 a.

When the module shaft 162 of the pin type resistance module 160 is inserted into the first air hole 111a as shown in FIG. 6, a space is formed between the threaded portion 111c of the first air hole 111a and the module shaft 162. This space is a resistance flow path L1, and a flow of air is formed through the resistance flow path L1 to float the substrate.

When such a flow of air through the resistance flow path (L1) is generated, even if the amount of air supply is diarrhea, it is possible to provide a desired compressed air for floating the substrate without the shaking phenomenon is advantageous for the conveyance of the substrate. In particular, the resistance flow path L1 is located in the space between the threaded portion 111c of the first air hole 111a and the module shaft 162, that is, the threaded portion of the first air hole 111a in which the valley and the acid are continuously repeated. Since it is formed in the space between 111c) and the module shaft 162, there is an advantage that can float the substrate with a desired strength compared to the straight air.

In other words, when the substrate is transported due to the resistance flow path L1, the shaking phenomenon is remarkably reduced, as well as accurate, stable, and accurate conveyance is possible, and a relatively low pressure can be used as compared with the conventional art.

On the other hand, at the lower end of the upper plate 110, one side of the gripping module body 161 is disposed to form a module body rotation restraint groove 119 to restrict the rotation of the gripping module body 161.

The module body rotation restraint groove 119 indicates a groove or notch shaped groove processed at the lower end of the upper plate 110, and one side of the module body 161 for holding is seated in the module body rotation restraint groove 119. As it is disposed, the holding module body 161 may be prevented from rotating arbitrarily.

In this regard, the lower plate 130 is provided with a release stopper 139 supporting the holding module body 161 together with the module body rotation restraint groove 119 to prevent the pin type resistance module 160 from being separated. .

The release blocking part 139 is recessed in the upper end of the lower plate 130 by the volume of the gripping module body 161 to support the release blocking part 139 from below.

Looking at the operation of the non-contact conveying device having such a configuration as follows.

When the compressed air is supplied to the air guide line 131 from the compressed air supply unit (not shown), the air is directed to the plurality of first air holes 111a connected to the air guide line 131 along the air guide line 131.

At this time, the module shaft 162 of the pin type resistance module 160 is inserted into the first air hole 111a having the threaded portion 111c formed on the inner wall, and the threaded portion 111c and the module of the first air hole 111a are inserted. Since the resistance flow path L1 is formed in the space between the shafts 162, the compressed air directed toward the first air hole 111a is raised along the resistance flow path L1.

The compressed air rising along the resistance flow path L1 is ejected to the upper portion of the upper plate 110 after being directed to the second air hole 111b, and the substrate may be floated and transported by the compressed air thus ejected.

At this time, the air hitting the substrate again toward the conveying plate 100 may be introduced through the plurality of vacuum holes 113 and discharged to the outside of the conveying plate 100 via the vacuum guide line 136.

As described above, according to the present embodiment, the high-pressure compressed air can be ejected at a low flow rate at a high pressure, which can significantly reduce the shaking phenomenon when conveying the substrate, as well as enable accurate and stable conveying with high accuracy. It is possible to use a relatively low pressure compared to the prior art, in particular, while reducing the manufacturing cost, there is an effect that the installation and maintenance is easy.

FIG. 8 is a perspective view of a resistance module applied to the non-contact conveying apparatus according to the second embodiment of the present invention, and FIG. 9 is a main structural rear view of the upper plate to which the resistance module of FIG. 8 is coupled.

Referring to these drawings, the pin type resistor module 260 applied to the present embodiment is also connected to the gripping module body 261 and the gripping module body 261 supported by the lower end of the upper plate 210. The module shaft 262 is inserted into the first air hole 211a.

At this time, the gripping module body 261 has a shape wound several times in the form of a coil (coil), unlike the above-described embodiment, the end forms a straight portion 261b bent in the radial direction.

Meanwhile, the module body rotation restraint groove 219 provided at the lower end of the upper plate 210 is provided to correspond to the shape of the pin type resistor module 260 illustrated in FIG. 8. In FIG. 9, the hatched portion is a groove-shaped module body rotation restraint groove 219. The module body rotation restraint groove 219 is formed by placing one side body 261a of the gripping module body 261. And a second rotation restriction recess 219a and a second rotation restriction recess 219b on which the straight portion 261b, which is an end of the gripping module body 261, is disposed.

As such, when the gripping module body 261 is disposed at a plurality of places, there is an advantage in that the phenomenon in which the pin type resistor module 260 is arbitrarily rotated during the use of the device is appropriately prevented.

10 is a partial cross-sectional exploded view of a non-contact conveying apparatus according to a third embodiment of the present invention.

Referring to this drawing, in the non-contact conveying apparatus of the present embodiment, the resistance module 360 is a porous type in which at least one region is inserted into the air hole 111, that is, the first air hole 111 a, and made of a porous material. Applied to the resistance module 360.

The porous material may, for example, be a porous ceramic, which has a uniform pore size and a high surface and excellent chemical resistance to acids or alkalis. It also has high heat resistance while retaining good wear resistance and corrosion resistance. In particular, since it has good dimensional stability, it may be advantageous to fabricate with the porous type resistance module 360 as in the present embodiment. Of course, the porous material does not necessarily need to be ceramic, but may be various metal materials such as aluminum.

As such, when the porous type resistive module 360 of the porous material is applied, since a plurality of pores are formed in the porous type resistive module 360 itself, the compressed air of the high pressure can be ejected at a low flow rate of the high pressure. It is expected that the shaking phenomenon can be significantly reduced as well as accurate and stable during conveyance.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. Accordingly, such modifications or variations are intended to fall within the scope of the appended claims.

100: conveying plate 105: gasket
110: upper plate 111: air hole
111a: first air hole 111b: second air hole
111c threaded portion 113 vacuum hole
130: lower plate 131: air guide line
136: vacuum guide line 160: resistor
L1: Resistance Euro

Claims (15)

An air is blown upwards and has an upper plate on which a plurality of air holes are formed in which a tap is formed, and a lower plate disposed on a lower surface of the upper plate, and through the plurality of air holes. A conveying plate for conveying the conveyed body in a non-contact manner based on a relatively high pressure compressed air; And
And a resistance module partially coupled to the air hole to change the compressed air of the high pressure into a low flow rate of the high pressure so as to be ejected to an upper portion of the upper plate, and to form a resistance flow path between the inner wall of the air hole,
A plurality of vacuum holes are formed in the upper plate to suck the blown air, and the vacuum guide lines connected to the plurality of vacuum holes are formed in a plurality of vacuum guide holes respectively communicating with the plurality of vacuum holes. Provided by the duct,
An air guide line connected to the plurality of air holes is provided between the plurality of vacuum guide ducts,
And the air guide line is formed by a plurality of grooves recessed along a thickness direction of the lower plate on the upper surfaces of the plurality of vacuum guide ducts. The method of claim 1,
The air hole,
A first air hole formed in the upper plate along a direction in which the upper and lower plates are stacked from a lower end of the upper plate, and having a screw portion formed on a sidewall thereof; And
And a second air hole having a diameter smaller than the diameter of the first air hole, the second air hole communicating with the first air hole and formed from an end point of the first air hole to an upper end of the upper plate. Device. 3. The method of claim 2,
The resistance module is a non-contact conveying device, characterized in that at least one pin-type pin-type resistance module is inserted into the air hole. The method of claim 3,
The pin type resistor module,
A gripping module body supported at the lower end of the upper plate; And
And a module shaft connected to the gripping module body and inserted into the first air hole to generate the resistance flow path. 5. The method of claim 4,
The gripping module body has a circular ring shape or a triangular ring shape, characterized in that the non-contact conveying device. 5. The method of claim 4,
The resistance flow path is provided by a space between the inner wall screw portion of the first air hole and the module shaft,
The inner wall of the second air hole is a non-contact conveying device, characterized in that for forming a smooth surface without a thread formed. 5. The method of claim 4,
Non-contact conveying apparatus, characterized in that the lower end of the upper plate is further formed a module body rotation constraining groove for restraining the rotation of the gripping module body is disposed one side of the holding module body. The method of claim 7, wherein
The lower plate is a non-contact conveying apparatus characterized in that the release stop portion for supporting the holding the module body for holding together with the module body rotation restraint groove to prevent the separation of the pin-type resistance module is further formed. delete delete The method of claim 1,
Further comprising a compressed air supply for supplying the high pressure compressed air to the conveying plate,
Non-contact conveying apparatus, characterized in that the plurality of grooves further comprises a coupling portion to which the compressed air supply is coupled. The method of claim 1,
And the air guide line and the vacuum guide line are provided on the same plane of the lower plate. The method of claim 1,
And the plurality of air holes and the plurality of vacuum holes are disposed coaxially along at least one of a longitudinal direction of the upper plate and a direction crossing the longitudinal direction. The method of claim 1,
Non-contact conveying apparatus, characterized in that a plurality of gasket seat groove is further formed on the surface of any one of the upper plate and the lower plate is arranged and sealed. The method of claim 1,
The resistance module is a non-contact conveying device, characterized in that at least one region is inserted into the air hole is a porous type resistance module made of a porous (porous) material.

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