TWM511495U - Transportation jig for transporting a flat plate - Google Patents

Transportation jig for transporting a flat plate Download PDF

Info

Publication number
TWM511495U
TWM511495U TW104211272U TW104211272U TWM511495U TW M511495 U TWM511495 U TW M511495U TW 104211272 U TW104211272 U TW 104211272U TW 104211272 U TW104211272 U TW 104211272U TW M511495 U TWM511495 U TW M511495U
Authority
TW
Taiwan
Prior art keywords
base
hollow chamber
side plate
structures
concave cup
Prior art date
Application number
TW104211272U
Other languages
Chinese (zh)
Inventor
Cheng-Yi Huang
Original Assignee
Mirle Automation Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mirle Automation Corp filed Critical Mirle Automation Corp
Publication of TWM511495U publication Critical patent/TWM511495U/en

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Handcart (AREA)
  • Manipulator (AREA)
  • Air-Conditioning For Vehicles (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)

Abstract

A transportation jig includes a base, an injecting nozzle, a plurality of outlets and a plurality of flowing channels. The base has a hollow chamber formed therein. A flat plate is placed above the base. The injecting nozzle, the plurality of outlets and the plurality of flowing channels are all disposed on the base and communicate with the hollow chamber. The injecting nozzle is for injecting an air flow into the hollow chamber. A part of the air flow injected into the hollow chamber is injected out via the plurality of outlets, so as to lift the flat plate above the base. The plurality of flowing channels guide another part of the air flow injected into the hollow chamber out along a direction not perpendicular to the flat plate.

Description

用來運送平板構件之輸送載具Transport vehicle for transporting flat members

本創作關於一種輸送載具,尤指一種用來運送平板構件之輸送載具。The present invention relates to a transport vehicle, and more particularly to a transport vehicle for transporting flat members.

近來,顯示器的玻璃基材朝向大型化及薄型化的方向發展,於生產製造時,習知的滾輪輸送系統利用滾輪作為支撐及輸送玻璃基材的媒介,會在輸送過程中因滾輪與玻璃基材接觸而造成玻璃基材表面的損傷(例如刮傷、撞傷等),進而影響產品良率。因此,如何設計不會對玻璃基材表面造成損傷且可保持輸送穩定性的輸送載具便成為業界所需努力的課題。Recently, the glass substrate of the display has been developed in the direction of enlargement and thinning. In the production and manufacturing, the conventional roller conveying system uses the roller as a medium for supporting and conveying the glass substrate, and the roller and the glass base are used in the conveying process. Contact with the material causes damage to the surface of the glass substrate (such as scratches, bumps, etc.), which in turn affects product yield. Therefore, how to design a transporting vehicle that does not damage the surface of the glass substrate and maintains the transport stability has become an issue that the industry has to work hard.

因此,本創作提供一種不會對玻璃基材表面造成損傷且可保持輸送穩定性的輸送載具,以解決上述問題。Therefore, the present invention provides a transport carrier that does not cause damage to the surface of the glass substrate and maintains transport stability to solve the above problems.

為了達成上述目的,本創作揭露一種用來運送一平板構件之輸送載具,其包含有一基座、一進氣嘴結構、複數個氣孔結構以及複數個流道結構,該基座內形成有一中空腔室,該平板構件放置於該基座上方,該進氣嘴結構設置於該基座上且連通於該中空腔室,該進氣嘴結構用以噴射一氣流進入該中空腔室,該複數個氣孔結構形成於該基座上且連通於該中空腔室,部分進入該中空腔室之該氣流經由該複數個氣孔結構噴出,以推昇該平板構件於該基座上方,該複數個流道結構形成於該基座上且連通於該中空腔室,該 複數個流道結構分別導引另一部分進入該中空腔室之該氣流沿不垂直於該平板構件的方向噴出。In order to achieve the above object, the present invention discloses a transport carrier for transporting a flat member, which comprises a base, a gas inlet structure, a plurality of pore structures, and a plurality of flow passage structures, wherein a hollow is formed in the base. a chamber, the plate member is placed above the base, the air inlet structure is disposed on the base and communicates with the hollow chamber, the air nozzle structure is configured to inject a gas flow into the hollow chamber, the plurality a vent structure is formed on the pedestal and communicates with the hollow chamber, and the airflow partially entering the hollow chamber is ejected through the plurality of vent structures to push the plate member above the pedestal, the plurality of streams a track structure formed on the base and communicating with the hollow chamber, the A plurality of flow channel structures respectively direct another portion of the airflow entering the hollow chamber to be ejected in a direction that is not perpendicular to the plate member.

根據本創作之其中之一實施方式,本創作另揭露該基座具有一第一側板及相反於該第一側板之一第二側板,該平板構件放置於該第一側板上方,該進氣嘴結構設置於該第二側板上,且該複數個氣孔結構及該複數個流道結構分別設置於該第一側板上。According to one embodiment of the present invention, the present invention further discloses that the base has a first side plate and a second side plate opposite to the first side plate, and the plate member is placed above the first side plate, the air inlet nozzle The structure is disposed on the second side plate, and the plurality of air hole structures and the plurality of flow path structures are respectively disposed on the first side plate.

根據本創作之其中之一實施方式,本創作另揭露該複數個流道結構分別包含有一凹杯結構以及一導流結構,該凹杯結構設置於該第一側板且朝該第二側板凹陷,該凹杯結構具有一凹杯側壁及一凹杯底壁,該凹杯底壁上形成有一透氣孔,該凹杯側壁相對該第一側板傾斜,該導流結構,其設置於該凹杯結構內且具有一導流側壁,該導流側壁平行於該凹杯側壁且與該凹杯側壁間具有一間隙,該另一部分進入該中空腔室之該氣流經由該間隙沿不垂直於該平板構件之方向噴出。According to one embodiment of the present invention, the present disclosure further discloses that the plurality of flow channel structures respectively include a concave cup structure and a flow guiding structure, and the concave cup structure is disposed on the first side plate and is recessed toward the second side plate. The concave cup structure has a concave cup side wall and a concave cup bottom wall, and a bottom wall of the concave cup is formed with a venting hole, the concave cup side wall is inclined with respect to the first side plate, and the guiding structure is disposed on the concave cup structure And having a flow guiding sidewall parallel to the sidewall of the concave cup and having a gap between the sidewall of the concave cup, and the other portion entering the hollow chamber via the gap is not perpendicular to the plate member The direction is ejected.

根據本創作之其中之一實施方式,本創作另揭露該間隙小於各氣孔結構的孔徑。According to one of the embodiments of the present invention, the present invention further discloses that the gap is smaller than the aperture of each of the pore structures.

根據本創作之其中之一實施方式,本創作另揭露該複數個氣孔結構的一開口法線方向實質上垂直於該平板構件。According to one embodiment of the present invention, the present disclosure further discloses that an opening normal direction of the plurality of pore structures is substantially perpendicular to the plate member.

根據本創作之其中之一實施方式,本創作另揭露該輸送載具另包含有一氣流裝置,其耦接於該進氣嘴結構,用以提供該氣流至該進氣嘴結構。According to one embodiment of the present invention, the present invention further discloses that the transport vehicle further includes an air flow device coupled to the air intake structure for providing the air flow to the air intake structure.

根據本創作之其中之一實施方式,本創作另揭露該氣流裝置為一風機鼓風機或一空氣清淨機。According to one of the embodiments of the present invention, the present invention further discloses that the airflow device is a fan blower or an air cleaner.

綜上所述,本創作的輸送載具利用複數個氣孔結構使部分進入該中空腔室之該氣流經由該複數個氣孔結構噴出而對平板構件產生一抬升力,如此平板構件便不會與基座接觸,以防止平板構件與基座接觸而造成平板構件表面的損傷(例如刮傷、撞傷等),進而提升平板構件的產品良率。此外,本創作的輸送載具另利用複數個流道結構分別導引另一部分進入中空腔室之氣流沿不垂直於平板構件的方向噴出而對平板構件的上下兩側造成一壓力差,亦即本創作的輸送載具分別利用複數個氣孔結構與複數個流道結構分別對平板構件產生抬升力與下壓力,進而使平板構件與基座間保持穩定的間距,以便平板構件進行後續製程(例如高速翻動或180度翻轉等)而仍能將平板構件穩定維持於基座上方。有關本創作之前述及其他技術內容、特點與功效,在以下配合參考圖式之實施例的詳細說明中,將可清楚的呈現。In summary, the transport carrier of the present invention utilizes a plurality of venting structures to cause a portion of the airflow entering the hollow chamber to be ejected through the plurality of venting structures to generate a lifting force on the flat member, so that the flat member does not The seat is contacted to prevent damage to the surface of the flat member (such as scratches, bruises, etc.) by contacting the flat member with the base, thereby improving the product yield of the flat member. In addition, the transport carrier of the present invention uses a plurality of flow channel structures to respectively guide another portion of the airflow entering the hollow chamber to be ejected in a direction not perpendicular to the flat member, thereby causing a pressure difference between the upper and lower sides of the flat member, that is, The transporting carrier of the present invention uses a plurality of venting structures and a plurality of flow channel structures respectively to generate lifting force and downward pressure on the plate member, thereby maintaining a stable spacing between the plate member and the pedestal, so that the plate member can be subjected to subsequent processes (for example, high speed). Flip or 180 degree flip, etc.) while still maintaining the plate member stably above the base. The foregoing and other technical contents, features, and advantages of the present invention will be apparent from the following detailed description of the embodiments of the invention.

3000‧‧‧輸送載具3000‧‧‧Transportation vehicle

1‧‧‧平板構件1‧‧‧Table components

2‧‧‧基座2‧‧‧Base

20‧‧‧中空腔室20‧‧‧ hollow room

21‧‧‧第一側板21‧‧‧First side panel

22‧‧‧第二側板22‧‧‧ second side panel

3‧‧‧進氣嘴結構3‧‧‧ Inlet structure

4‧‧‧氣孔結構4‧‧‧ vent structure

40‧‧‧開口法線方向40‧‧‧Open normal direction

5‧‧‧流道結構5‧‧‧Flow structure

50‧‧‧凹杯結構50‧‧‧ concave cup structure

501‧‧‧凹杯側壁501‧‧‧ concave wall

502‧‧‧凹杯底壁502‧‧‧ concave cup bottom wall

503‧‧‧透氣孔503‧‧‧ venting holes

51‧‧‧導流結構51‧‧‧Guide structure

510‧‧‧導流側壁510‧‧ ‧ diversion sidewall

6‧‧‧氣流裝置6‧‧‧Airflow device

F、F1、F2‧‧‧氣流F, F1, F2‧‧‧ airflow

G‧‧‧間隙G‧‧‧ gap

A-A、B-B‧‧‧剖面線A-A, B-B‧‧‧ hatching

第1圖為本創作實施例輸送載具的側視示意圖。Figure 1 is a side elevational view of the transport vehicle of the present embodiment.

第2圖為本創作實施例輸送載具的俯視示意圖。Figure 2 is a top plan view of the transport vehicle of the present embodiment.

第3圖為第2圖所示的輸送載具沿剖面線A-A的部分剖面示意圖。Figure 3 is a partial cross-sectional view of the transport carrier shown in Figure 2 taken along section line A-A.

第4圖為第2圖所示的輸送載具沿剖面線B-B的部分剖面示意圖。Figure 4 is a partial cross-sectional view of the transport carrier shown in Figure 2 taken along section line B-B.

以下實施例中所提到的方向用語,例如:上、下、左、右、前或後等,僅是參考附加圖式的方向。因此,使用的方向用語是用來說明並非用來限制本創作。請參閱第1圖以及第2圖,第1圖為本創作實施例一輸送載具3000的側視示意圖,第2圖為本創作實施例輸送載具3000的俯視示意圖。如第1圖以及第2圖所示,輸送載具3000用來運送一平板構件1,於此實施 例中,平板構件1可為一顯示器(未繪示於圖中)的玻璃基材,但本創作不受此限。The directional terms mentioned in the following embodiments, such as up, down, left, right, front or back, etc., are only directions referring to the additional drawings. Therefore, the directional terminology used is used to illustrate that it is not intended to limit the creation. Please refer to FIG. 1 and FIG. 2 . FIG. 1 is a schematic side view of a transport vehicle 3000 according to an embodiment of the present invention. FIG. 2 is a schematic plan view of the transport carrier 3000 according to the present embodiment. As shown in FIGS. 1 and 2, the transport carrier 3000 is used to transport a flat member 1, and is implemented here. In the example, the plate member 1 can be a glass substrate of a display (not shown), but the creation is not limited thereto.

請參閱第1圖至第4圖,第3圖為第2圖所示的輸送載具3000沿剖面線A-A的部分剖面示意圖,第4圖為第2圖所示的輸送載具3000沿剖面線B-B的部分剖面示意圖。如第1圖至第4圖所示,輸送載具3000包含有一基座2、一進氣嘴結構3、複數個氣孔結構4、複數個流道結構5以及一氣流裝置6,基座2內形成有一中空腔室20,且平板構件1放置於基座2上方,進氣嘴結構3設置於基座2上且連通於中空腔室20,氣流裝置6耦接於進氣嘴結構3且用以提供一氣流F至進氣嘴結構3,以使進氣嘴結構3可用以噴射氣流F進入中空腔室20。於此實施例中,氣流裝置6可為一風機鼓風機或一空氣清淨機,但本創作不受此限。Please refer to FIG. 1 to FIG. 4 . FIG. 3 is a partial cross-sectional view of the transport carrier 3000 along the section line AA shown in FIG. 2 , and FIG. 4 is a cross-sectional view of the transport carrier 3000 shown in FIG. 2 . A partial cross-sectional view of the BB. As shown in FIG. 1 to FIG. 4 , the transport carrier 3000 includes a base 2 , an air intake structure 3 , a plurality of air hole structures 4 , a plurality of flow path structures 5 , and an air flow device 6 . A hollow chamber 20 is formed, and the plate member 1 is placed above the base 2. The air intake structure 3 is disposed on the base 2 and communicates with the hollow chamber 20. The air flow device 6 is coupled to the air intake structure 3 and used An air flow F is provided to the intake nozzle structure 3 such that the intake nozzle structure 3 can be used to inject the air flow F into the hollow chamber 20. In this embodiment, the airflow device 6 can be a fan blower or an air cleaner, but the creation is not limited thereto.

進一步地,基座2具有一第一側板21(即基座2的上側板)及相反於第一側板21之一第二側板22(即基座2的下側板),其中平板構件1是放置於第一側板21上方,進氣嘴結構3是設置於第二側板22上,亦即平板構件1與進氣嘴結構3是分別設置於基座2的上下兩側,但本創作不受此限。此外,複數個氣孔結構4與複數個流道結構5分別設置於基座2的第一側板21上,且複數個氣孔結構4與複數個流道結構5分別連通於中空腔室20。Further, the base 2 has a first side plate 21 (ie, an upper side plate of the base 2) and a second side plate 22 opposite to the first side plate 21 (ie, a lower side plate of the base 2), wherein the plate member 1 is placed Above the first side plate 21, the air inlet structure 3 is disposed on the second side plate 22, that is, the plate member 1 and the air inlet structure 3 are respectively disposed on the upper and lower sides of the base 2, but the creation is not affected by this. limit. In addition, a plurality of vent structures 4 and a plurality of flow channel structures 5 are respectively disposed on the first side plate 21 of the susceptor 2, and a plurality of vent structures 4 and a plurality of flow channel structures 5 respectively communicate with the hollow chamber 20.

另外,複數個流道結構5分別包含有一凹杯結構50以及一導流結構51,凹杯結構50設置於基座2的第一側板21且朝第二側板22凹陷,凹杯結構50具有一凹杯側壁501及一凹杯底壁502,凹杯底壁502上形成有一透氣孔503,且凹杯側壁501相對第一側板21傾斜,導流結構51設置於凹杯結構50內且具有一導流側壁510,導流側壁510平行於凹杯側壁501且與凹杯側壁501間具有一間隙G。In addition, the plurality of flow path structures 5 respectively include a concave cup structure 50 and a flow guiding structure 51. The concave cup structure 50 is disposed on the first side plate 21 of the base 2 and is recessed toward the second side plate 22, and the concave cup structure 50 has a a concave cup side wall 501 and a concave cup bottom wall 502 are formed with a venting hole 503, and the concave cup side wall 501 is inclined with respect to the first side plate 21, and the flow guiding structure 51 is disposed in the concave cup structure 50 and has a The flow guiding sidewall 510 has a flow gap 510 parallel to the concave cup sidewall 501 and a gap G between the concave cup sidewall 501.

如第1圖至第4圖所示,當欲利用輸送載具3000運送平板構件1時,氣流裝置6可提供氣流F至進氣嘴結構3,以使進氣嘴結構3噴射氣流F進入基座2的中空腔室20且使中空腔室20被氣流F充滿。當進氣嘴結構3持續噴射氣流F進入中空腔室20時,部分進入中空腔室20之氣流F1可經由複數個氣孔結構4噴出,此時氣流F1便可推昇平板構件1於基座2上方,使平板構件1懸浮於基座2的第一側板21上方,如此平板構件1便不會與基座2的第一側板21接觸,以防止平板構件1與基座2的第一側板21接觸而造成平板構件1表面的損傷(例如刮傷、撞傷等),進而提升平板構件1的產品良率。於此實施例中,氣孔結構4的一開口法線方向40可實質上垂直於平板構件1,以使氣流F1沿垂直於平板構件1的方向(即開口法線方向40)噴向平板構件1,進而有效提供平板構件1一抬升力。As shown in FIGS. 1 to 4, when the flat member 1 is to be transported by the transport carrier 3000, the airflow device 6 can supply the airflow F to the intake nozzle structure 3, so that the air intake structure F of the intake nozzle structure 3 enters the base. The hollow chamber 20 of the seat 2 and the hollow chamber 20 are filled with the air flow F. When the air intake structure 3 continues to inject the airflow F into the hollow chamber 20, the airflow F1 partially entering the hollow chamber 20 can be ejected through the plurality of air venting structures 4, and the airflow F1 can push the flat member 1 to the base 2 Above, the plate member 1 is suspended above the first side plate 21 of the base 2 such that the plate member 1 does not come into contact with the first side plate 21 of the base 2 to prevent the plate member 1 from the first side plate 21 of the base 2 The contact causes damage to the surface of the flat member 1 (for example, scratches, bruises, etc.), thereby improving the product yield of the flat member 1. In this embodiment, an opening normal direction 40 of the vent structure 4 may be substantially perpendicular to the plate member 1 such that the airflow F1 is sprayed toward the plate member 1 in a direction perpendicular to the plate member 1 (ie, the opening normal direction 40). Further, the plate member 1 is effectively provided with a lifting force.

另一方面,當進氣嘴結構3持續噴射氣流F進入中空腔室20時,另一部分進入中空腔室20之氣流F2可經由透氣孔503進入導流結構51的導流側壁510與凹杯結構50的凹杯側壁501間的間隙G,進而使複數個流道結構5利用導流結構51的導流側壁510與凹杯結構50的凹杯側壁501間的間隙G分別導引氣流F2沿不垂直於平板構件1的方向噴出,從而使平板構件1鄰近各流道結構5處與基座2的第一側板21間的空間內形成一負壓,亦即平板構件1鄰近各流道結構5處與基座2的第一側板21間的空間內的空氣會被氣流F2沿不垂直於平板構件1的方向帶出,使得平板構件1鄰近各流道結構5處與基座2的第一側板21間的空間內的壓力小於平板構件1相反於基座2之另一側的壓力,藉此氣流F2便會對平板構件1的上下兩側產生一壓力差而將平板構件1壓往基座2的第一側板21,如此氣流F2對平板構件1的上下兩側所造成的該壓力差便可與氣流F1對平板構件1所提供的該抬升力達成平衡,以使平板構件1與基座2的第一側板21保持穩定的間距。On the other hand, when the air intake structure 3 continues to inject the airflow F into the hollow chamber 20, another portion of the airflow F2 entering the hollow chamber 20 can enter the flow guiding sidewall 510 of the flow guiding structure 51 via the venting opening 503 and the concave cup structure. The gap G between the concave cup side walls 501 of 50, thereby causing the plurality of flow path structures 5 to guide the air flow F2 by the gap G between the flow guiding side wall 510 of the flow guiding structure 51 and the concave cup side wall 501 of the concave cup structure 50, respectively. Discharged perpendicularly to the direction of the plate member 1, so that the plate member 1 forms a negative pressure in the space between the respective channel structures 5 and the first side plate 21 of the base 2, that is, the plate member 1 is adjacent to each of the flow path structures 5. The air in the space between the first side plate 21 and the base 2 is taken up by the air flow F2 in a direction not perpendicular to the plate member 1, so that the plate member 1 is adjacent to each of the flow path structures 5 and the first of the base 2 The pressure in the space between the side plates 21 is smaller than the pressure of the plate member 1 opposite to the other side of the base 2, whereby the air flow F2 causes a pressure difference between the upper and lower sides of the plate member 1 to press the plate member 1 to the base. The first side plate 21 of the seat 2, such that the air flow F2 is on the upper and lower sides of the plate member 1 This pressure difference is balanced with the lift force provided by the plate member 1 by the air flow F1 to maintain the plate member 1 at a stable distance from the first side plate 21 of the base 2.

於此實施例中,導流結構51的導流側壁510與凹杯結構50的凹杯側壁501間的間隙G可小於各氣孔結構4的孔徑,藉此流經間隙G的氣流F2的流速便會大於流經各氣孔結構4的氣流F1的流速,以更快速地將平板構件1鄰近各流道結構5處與基座2的第一側板21間的空間內的空氣沿不垂直於平板構件1的方向帶出,從而更有效地於平板構件1鄰近各流道結構5處與基座2的第一側板21間的空間內形成該負壓。In this embodiment, the gap G between the flow guiding sidewall 510 of the flow guiding structure 51 and the concave cup sidewall 501 of the concave cup structure 50 may be smaller than the diameter of each of the pore structures 4, whereby the flow rate of the airflow F2 flowing through the gap G is The flow rate of the airflow F1 flowing through each of the vent structures 4 is greater than the air velocity in the space between the plate member 1 adjacent to each of the flow channel structures 5 and the first side plate 21 of the susceptor 2 is not perpendicular to the plate member. The direction of 1 is taken out to more effectively form the negative pressure in the space between the plate member 1 adjacent to each of the flow path structures 5 and the first side plate 21 of the susceptor 2.

相較於先前技術,本創作的輸送載具利用複數個氣孔結構使部分進入該中空腔室之該氣流經由該複數個氣孔結構噴出而對平板構件產生一抬升力,如此平板構件便不會與基座接觸,以防止平板構件與基座接觸而造成平板構件表面的損傷(例如刮傷、撞傷等),進而提升平板構件的產品良率。此外,本創作的輸送載具另利用複數個流道結構分別導引另一部分進入中空腔室之氣流沿不垂直於平板構件的方向噴出而對平板構件的上下兩側造成一壓力差,亦即本創作的輸送載具分別利用複數個氣孔結構與複數個流道結構分別對平板構件產生抬升力與下壓力,進而使平板構件與基座間保持穩定的間距,以便平板構件進行後續製程(例如高速翻動或180度翻轉等)而仍能將平板構件穩定維持於基座上方。以上所述僅為本創作之較佳實施例,凡依本創作申請專利範圍所做之均等變化與修飾,皆應屬本創作之涵蓋範圍。Compared with the prior art, the present invention uses a plurality of venting structures to cause a portion of the airflow entering the hollow chamber to be ejected through the plurality of venting structures to generate a lifting force on the plate member, so that the flat member does not The susceptor contacts to prevent the flat member from coming into contact with the pedestal to cause damage to the surface of the flat member (such as scratches, bruises, etc.), thereby improving the product yield of the flat member. In addition, the transport carrier of the present invention uses a plurality of flow channel structures to respectively guide another portion of the airflow entering the hollow chamber to be ejected in a direction not perpendicular to the flat member, thereby causing a pressure difference between the upper and lower sides of the flat member, that is, The transporting carrier of the present invention uses a plurality of venting structures and a plurality of flow channel structures respectively to generate lifting force and downward pressure on the plate member, thereby maintaining a stable spacing between the plate member and the pedestal, so that the plate member can be subjected to subsequent processes (for example, high speed). Flip or 180 degree flip, etc.) while still maintaining the plate member stably above the base. The above descriptions are only preferred embodiments of the present invention, and all changes and modifications made by the scope of the patent application of the present invention should be covered by the present invention.

3000‧‧‧輸送載具3000‧‧‧Transportation vehicle

1‧‧‧平板構件1‧‧‧Table components

2‧‧‧基座2‧‧‧Base

20‧‧‧中空腔室20‧‧‧ hollow room

21‧‧‧第一側板21‧‧‧First side panel

22‧‧‧第二側板22‧‧‧ second side panel

4‧‧‧氣孔結構4‧‧‧ vent structure

40‧‧‧開口法線方向40‧‧‧Open normal direction

5‧‧‧流道結構5‧‧‧Flow structure

50‧‧‧凹杯結構50‧‧‧ concave cup structure

501‧‧‧凹杯側壁501‧‧‧ concave wall

502‧‧‧凹杯底壁502‧‧‧ concave cup bottom wall

503‧‧‧透氣孔503‧‧‧ venting holes

51‧‧‧導流結構51‧‧‧Guide structure

510‧‧‧導流側壁510‧‧ ‧ diversion sidewall

F1、F2‧‧‧氣流F1, F2‧‧‧ airflow

G‧‧‧間隙G‧‧‧ gap

Claims (7)

一種用來運送一平板構件之輸送載具,其包含有:一基座,其內形成有一中空腔室,該平板構件放置於該基座上方;一進氣嘴結構,其設置於該基座上且連通於該中空腔室,該進氣嘴結構用以噴射一氣流進入該中空腔室;複數個氣孔結構,其形成於該基座上且連通於該中空腔室,部分進入該中空腔室之該氣流經由該複數個氣孔結構噴出,以推昇該平板構件於該基座上方;以及複數個流道結構,其形成於該基座上且連通於該中空腔室,該複數個流道結構分別導引另一部分進入該中空腔室之該氣流沿不垂直於該平板構件的方向噴出。A transport carrier for transporting a plate member, comprising: a base having a hollow chamber formed therein, the plate member being placed above the base; and a gas inlet structure disposed on the base And communicating with the hollow chamber, the air nozzle structure is configured to inject a gas stream into the hollow chamber; a plurality of pore structures formed on the base and communicating with the hollow chamber, partially entering the hollow cavity The gas stream is ejected through the plurality of pore structures to push the plate member above the base; and a plurality of flow channel structures are formed on the base and communicate with the hollow chamber, the plurality of streams The channel structure directs another portion of the gas stream entering the hollow chamber to be ejected in a direction that is not perpendicular to the plate member. 如請求項1所述之輸送載具,其中該基座具有一第一側板及相反於該第一側板之一第二側板,該平板構件放置於該第一側板上方,該進氣嘴結構設置於該第二側板上,且該複數個氣孔結構及該複數個流道結構分別設置於該第一側板上。The transporting vehicle of claim 1, wherein the base has a first side plate and a second side plate opposite to the first side plate, the plate member is placed above the first side plate, the air inlet structure is set And the plurality of air hole structures and the plurality of flow channel structures are respectively disposed on the first side plate. 如請求項2所述之輸送載具,其中該複數個流道結構分別包含有:一凹杯結構,其設置於該第一側板且朝該第二側板凹陷,該凹杯結構具有一凹杯側壁及一凹杯底壁,該凹杯底壁上形成有一透氣孔,該凹杯側壁相對該第一側板傾斜;以及一導流結構,其設置於該凹杯結構內且具有一導流側壁,該導流側壁平行於該凹杯側壁且與該凹杯側壁間具有一間隙,該另一部分進入該中空腔室之該氣流經由該間隙沿不垂直於該平板構件之方向噴出。The conveying carrier of claim 2, wherein the plurality of flow path structures respectively comprise: a concave cup structure disposed on the first side plate and recessed toward the second side plate, the concave cup structure having a concave cup a side wall and a bottom wall of the concave cup, a venting hole is formed in the bottom wall of the concave cup, the concave side wall is inclined with respect to the first side plate; and a flow guiding structure is disposed in the concave cup structure and has a guiding side wall The flow guiding sidewall is parallel to the sidewall of the concave cup and has a gap between the sidewall of the concave cup, and the other portion of the airflow entering the hollow chamber is ejected through the gap in a direction not perpendicular to the flat member. 如請求項3所述之輸送載具,其中該間隙小於各氣孔結構的孔徑。The transport vehicle of claim 3, wherein the gap is smaller than the aperture of each of the vent structures. 如請求項1所述之輸送載具,其中該複數個氣孔結構的一開口法線方向實質上垂直於該平板構件。The transport carrier of claim 1, wherein an opening normal direction of the plurality of vent structures is substantially perpendicular to the plate member. 如請求項1所述之輸送載具,其另包含有:一氣流裝置,其耦接於該進氣嘴結構,用以提供該氣流至該進氣嘴結構。The transport vehicle of claim 1 further comprising: an air flow device coupled to the air intake structure for providing the air flow to the air intake structure. 如請求項6所述之輸送載具,其中該氣流裝置為一風機鼓風機或一空氣清淨機。The transport vehicle of claim 6, wherein the air flow device is a fan blower or an air cleaner.
TW104211272U 2015-05-11 2015-07-13 Transportation jig for transporting a flat plate TWM511495U (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US201562159368P 2015-05-11 2015-05-11

Publications (1)

Publication Number Publication Date
TWM511495U true TWM511495U (en) 2015-11-01

Family

ID=55052879

Family Applications (8)

Application Number Title Priority Date Filing Date
TW104211272U TWM511495U (en) 2015-05-11 2015-07-13 Transportation jig for transporting a flat plate
TW104122459A TWI543918B (en) 2015-05-11 2015-07-13 Transportation jig for transporting a flat plate
TW104127623A TWI545074B (en) 2015-05-11 2015-08-25 Transportation jig for transporting a flat plate
TW104213707U TWM512020U (en) 2015-05-11 2015-08-25 Transportation jig for transporting a flat plate
TW104134466A TWI592351B (en) 2015-05-11 2015-10-21 Transportation jig for transporting a plate member
TW104216807U TWM514990U (en) 2015-05-11 2015-10-21 Transportation jig for transporting a plate member
TW104134467A TWI562947B (en) 2015-05-11 2015-10-21 Transportation jig for transporting a plate member
TW104216817U TWM520531U (en) 2015-05-11 2015-10-21 Transportation jig for transporting a plate member

Family Applications After (7)

Application Number Title Priority Date Filing Date
TW104122459A TWI543918B (en) 2015-05-11 2015-07-13 Transportation jig for transporting a flat plate
TW104127623A TWI545074B (en) 2015-05-11 2015-08-25 Transportation jig for transporting a flat plate
TW104213707U TWM512020U (en) 2015-05-11 2015-08-25 Transportation jig for transporting a flat plate
TW104134466A TWI592351B (en) 2015-05-11 2015-10-21 Transportation jig for transporting a plate member
TW104216807U TWM514990U (en) 2015-05-11 2015-10-21 Transportation jig for transporting a plate member
TW104134467A TWI562947B (en) 2015-05-11 2015-10-21 Transportation jig for transporting a plate member
TW104216817U TWM520531U (en) 2015-05-11 2015-10-21 Transportation jig for transporting a plate member

Country Status (2)

Country Link
CN (3) CN106144593B (en)
TW (8) TWM511495U (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWM511495U (en) * 2015-05-11 2015-11-01 Mirle Automation Corp Transportation jig for transporting a flat plate
CN106564013B (en) * 2016-10-26 2018-08-24 胡妹芳 A kind of processing unit (plant) of photovoltaic welding belt surface pitting
CN107555174A (en) * 2017-09-27 2018-01-09 浙江云峰莫干山家居用品有限公司 Air floating platform

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6336775B1 (en) * 1998-08-20 2002-01-08 Matsushita Electric Industrial Co., Ltd. Gas floating apparatus, gas floating-transporting apparatus, and thermal treatment apparatus
US6781684B1 (en) * 2000-11-07 2004-08-24 Donald L. Ekhoff Workpiece levitation using alternating positive and negative pressure flows
KR101195628B1 (en) * 2004-04-14 2012-10-30 코레플로우 사이언티픽 솔루션스 리미티드 A method for focusing an optical device on a facing surface of a flat object
JP2006008350A (en) * 2004-06-28 2006-01-12 Motoyama:Kk Object floating unit and object floating device
JP2007230738A (en) * 2006-03-02 2007-09-13 Shinko Electric Co Ltd Pneumatic floating unit and method of manufacturing pneumatic floating unit
CN201084722Y (en) * 2007-05-30 2008-07-09 秦彪 Heat pipe type CPU radiator
JP2010073883A (en) * 2008-09-18 2010-04-02 Dainippon Screen Mfg Co Ltd Substrate carrier, substrate positioning method and device
KR101142959B1 (en) * 2009-06-29 2012-05-08 김영태 Precision plate flotation system
KR101293289B1 (en) * 2010-06-04 2013-08-09 김영태 Noncontact feed apparatus using vacuum pad
CN103662835B (en) * 2013-09-03 2015-07-29 浙江大学 Cyclonic air current suspension device
FI126983B (en) * 2013-10-03 2017-09-15 Glaston Finland Oy Method of transporting a glass plate on an air-carrying table in a heating oven
TWM511495U (en) * 2015-05-11 2015-11-01 Mirle Automation Corp Transportation jig for transporting a flat plate
CN204872883U (en) * 2015-05-11 2015-12-16 盟立自动化股份有限公司 Transport carrier for transporting plate members

Also Published As

Publication number Publication date
TW201639763A (en) 2016-11-16
CN204957799U (en) 2016-01-13
TWI545074B (en) 2016-08-11
TW201639765A (en) 2016-11-16
TWM520531U (en) 2016-04-21
TWI562947B (en) 2016-12-21
CN106144593A (en) 2016-11-23
CN106144594B (en) 2018-12-04
TW201639762A (en) 2016-11-16
CN106144593B (en) 2019-11-01
TWM512020U (en) 2015-11-11
CN106144594A (en) 2016-11-23
TWI592351B (en) 2017-07-21
TWI543918B (en) 2016-08-01
TWM514990U (en) 2016-01-01
TW201639764A (en) 2016-11-16

Similar Documents

Publication Publication Date Title
TWI565643B (en) Air plate for flotation
TWI543918B (en) Transportation jig for transporting a flat plate
JP2010241603A (en) Non-contact type suction gripping device, and non-contact type suction gripping frame with the same
KR20110139461A (en) Vacuum sticking apparatus
KR101434169B1 (en) An apparatus for Moving and Floating the Substrate by Air Blowing Type
KR102315301B1 (en) Conveying pad and method for conveying wafer
KR20170013518A (en) Substrate transferring apparatus
KR101261313B1 (en) Apparatus for aligning and pick up transporting of moving object
JP5384305B2 (en) Work transfer device
CN204872883U (en) Transport carrier for transporting plate members
JPWO2011129152A1 (en) Swirl flow forming body and non-contact transfer device
TWI583608B (en) Floating platform for transporting a plate member
KR20120045758A (en) Non contact transport apparatus
TW201639678A (en) Vacuum suction plate
JP5422680B2 (en) Substrate holding device
JPH04282850A (en) Sample holding device
JP2012101897A (en) Conveying device
JP2011219250A (en) Non-contact carrying device
TWI587435B (en) Wet etching device
TW201816910A (en) Wet etching device
TWM540386U (en) Wet etching device
JP2013139338A (en) Levitation transfer unit
TWM547545U (en) Air levitation structure with work-piece correction effect
TWI491547B (en) Handling device
KR20110118749A (en) Float conveying device of substrate