KR101287360B1 - Substrate surface sealing device and organic el panel fabrication method - Google Patents

Abstract

Industrial Applicability The present invention aims to improve the tact time by reducing the labor of the work, and makes it possible to realize laminate processing in which the performance deterioration of the product is prevented.
As for the film 13 from the film rolls 24a-24d (FIG. 6) of the film unwinding mechanism part 14, the cover film 13a (FIG. 4) is peeled off from the cover film winding-up mechanism part 15, and between boards It is sent to the processing mechanism part 16. In the inter-substrate processing mechanism part 16, as shown in FIG. 9 by the half-cut member 34 and the peeling tape 36 (FIG. 7), the sealing material film 5 'of the film 13 (FIG. 4) The sheet-shaped sealing material 5 (FIG. 3) is formed by peeling by predetermined length at this predetermined space | interval. The film 13 thus processed is sent to the lamination mechanism part 19, the sheet-shaped sealing material 5 is heat-compressed to the substrate 1 from the front chamber 10, cooled in the substrate cooling mechanism part 30, and the base In the film winding-up mechanism part 21, the base film 13b (FIG. 4) of the film 13 peels.

Description

Substrate sealing device and manufacturing method of organic EL panel {SUBSTRATE SURFACE SEALING DEVICE AND ORGANIC EL PANEL FABRICATION METHOD}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the manufacture of organic EL (Electro Luminescence) panels, and in particular, a sealing device and an organic EL on a substrate surface for attaching and sealing a sheet-shaped sealing material to a substrate on which an organic EL element is applied (installed). It relates to a method for producing a panel.

The organic EL panel has a configuration in which a plurality of organic EL elements are vertically and horizontally arranged between two bonded substrates. In manufacturing such an organic EL panel, these organic EL elements are conventionally sealed with a sealing material, respectively.

As a conventional example of the manufacturing method of such an organic electroluminescent panel, the organic EL element is interposed in the organic film with a small water permeability transmittance from the top and bottom, and the part which protruded from the upper and lower surfaces of the organic electroluminescent element of these organic films is thermocompression-bonded. It integrates by doing so, this organic electroluminescent element is sealed by such an organic film, and this organic electroluminescent element is used for an organic electroluminescent panel (for example, refer patent document 1).

Moreover, although it does not concern manufacture of an organic electroluminescent panel, the technique of laminating (adhering) a film in the vacuum atmosphere in a chamber is also proposed (for example, refer patent document 2).

The technique of this patent document 2 laminates a resist film on a base film, a base film is sent in a chamber from the supply roller provided in the outer side of a chamber, and a resist film is also sent in a chamber from the supply roller provided in the outer side of a chamber. The resist film is heated, pressed by the pressure roller, and bonded to this base film. Here, the resist film bonded to a base film is introduce | transduced into a chamber from the introduction port provided with the shutter which can open and close freely.

Japanese Patent Laid-Open No. 2-197075 Japanese Patent Laid-Open No. 2002-52610

However, since the technique of the said patent document 1 laminates so that the whole may cover the whole organic electroluminescent element, and manufactures the organic electroluminescent element laminated one by one organic film in this way, it is used for manufacture of an organic LE element. It is a laborious operation, and such laminating processing is performed in the air, so it may be affected by the surrounding environment, may enter dust, be affected by moisture, etc., and may cause deterioration of characteristics of the EL element.

On the other hand, in the technique of the said patent document 2, since lamination processing is performed in the vacuum atmosphere in a chamber, compared with the case of laminating in air | atmosphere, wrinkles generate | occur | produce a film at the time of lamination, a film (that is, a resist film), and it is Bubble generation between the bonded ones (i.e., the base film) can be suppressed, but since these base films and resist films are continuously introduced into the chamber from the outside, there is a leakage of air from their inlet into the chamber. In addition, there is a problem that the degree of vacuum in the chamber is lowered, and moisture, dust, etc. are also introduced into the chamber together with the leakage of the air, thereby degrading the performance of the product to which the resist film is bonded.

Moreover, in the technique of the said patent document 2, the shutter which can open and close is provided in the inlet of a resist film, and it is thought to make it possible to reduce the leakage of the air to a chamber as much as possible by adjusting this opening / closing state, Therefore, when the shutter is brought into contact with the resist film, the resist film is scratched and adversely affects the properties of the laminated product.

An object of the present invention is to solve such a problem, to reduce the labor of the work, improve the tact time, and to realize the laminating processing to prevent the deterioration of the performance of the substrate surface, and the manufacturing method of the organic EL panel. Is to provide.

In order to achieve the said 1st objective, this invention is a large volume chamber which contains the film bonding apparatus which attaches a sheet-shaped sealing material on a board | substrate, and a full chamber whose volume is smaller than the chamber for carrying in the said board | substrate to a chamber. I) and a rear chamber having a smaller volume than the chamber for discharging the substrate with the sheet-shaped sealing material from the chamber in the film bonding apparatus, and the substrate inlet side of the front chamber, the chamber side, and the chamber side of the rear chamber. The gate valves are provided at the side of the substrate and the substrate discharge port, respectively, and the chamber is always kept in a high vacuum state, even when the substrate is loaded and discharged, and the film bonding apparatus transfers the substrate loaded from all chambers at predetermined intervals. A film unwinding mechanism part for unwinding a plurality of films of a predetermined width provided with a cover film and a base film via a conveyance means and a sheet-shaped sealing material, and a film unwinding mechanism The seal which becomes the space | interval of the board | substrate conveyed by a board | substrate conveying means from each of the cover film winding-up mechanism part which peels and winds up a cover film from each of the some film unwound from the plurality of films which the cover film peeled off in the cover film winding-up mechanism part. The tip end portion of the substrate for each substrate to be removed from the entire chamber by the inter-substrate processing mechanism portion that peels a portion of the shape sealing material and forms a plurality of seal shape sealing materials corresponding to each substrate on the base film of each of the plurality of films. And an alignment mechanism portion for positioning the tip of the seal-shaped sealing material corresponding to the substrate of the film from the inter-substrate processing mechanism portion, and a plurality of seals corresponding to the substrates of the plurality of films from the alignment mechanism portion to the substrate conveyed by the substrate transfer means. An attachment mechanism portion for attaching a shape sealing material, It consists of a base film winding-up mechanism part which peels and winds up a base film from each of the several film in which the sheet-shaped sealing material adhered to the board | substrate from an attachment mechanism part, The board | substrate conveying means is a base film winding mechanism part, It is characterized by discharging the board | substrate of the state in which the peeled several sheet-like sealing material adhered to the rear chamber.

The present invention is also characterized in that the front and rear chambers are provided with a vacuum pump for bringing the room from a dry air state to a high vacuum state equivalent to that in the chamber.

Moreover, this invention is the table in which the surface in which the board | substrate processing mechanism mounts a some film was processed by non-adhesiveness, a pair of press board which presses the some film to the surface of a table by the predetermined space | interval at the longitudinal direction, and And a half blade circular blade for cutting the sheet-shaped sealing material between the portions pressed against the surface of the table by a pair of pressing plates of a plurality of films at intervals of the substrate in the longitudinal direction, and for the half cut of the plurality of films. It is comprised by the tape peeling mechanism which peels the said sheet-like sealing material of the part cut | disconnected by the circular blade from the said base film. It is characterized by the above-mentioned.

Moreover, this invention is characterized by providing the board | substrate cooling mechanism part which cools the said board | substrate between an attachment mechanism part and the said base film winding mechanism part.

In order to achieve the above object, in the method for producing an organic EL panel according to the present invention, a sealing agent is applied in a frame shape, and a plurality of EL elements are provided inside the frame of the sealing agent at a substrate inlet of a full chamber with a small volume. A carrying-in step of opening the installed first gate valve and bringing it into the entire chamber, a vacuuming step of bringing the substrate into the entire chamber from the substrate inlet and closing the first gate valve to bring the interior of the chamber into a high vacuum state, and in a high vacuum state. A conveying step of opening the second gate valve provided between the one chamber and the large volume chamber maintained in the high vacuum state to convey the substrate from the entire chamber into the chamber, and closing the second gate valve after the substrate is transferred to the chamber; In the chamber, the sealant attaching step of attaching the sheet-shaped sealant to the frame of the sealing agent of the substrate, and the rear chamber having a small volume in a high vacuum state, The third gate valve provided between the chamber and the rear chamber is opened to transfer the substrate with the sheet sealing material from the chamber to the rear chamber, and the third gate valve provided at the substrate outlet of the rear chamber is closed to open the fourth gate. The inside of the rear chamber is made into a standby state, and a discharge step of discharging the substrate with the sheet-shaped sealing material in the rear chamber is discharged from the substrate discharge port. The sealing material attaching step includes a step of sequentially conveying the substrate loaded from the front chamber at predetermined intervals; , A step of unwinding a plurality of films of a predetermined width provided with a cover film and a base film through a sheet-shaped sealing material, a step of peeling and winding a cover film from each of the plurality of unwinded films, and a plurality of peeled cover films From each film, the part of the seal sealing material used as the space | interval of the board | substrate conveyed is peeled off, and a plurality of A step of forming a plurality of seal-shaped sealing material corresponding to each substrate on the base film of each film of the film, and for positioning the front end of the substrate and the tip of the seal-shaped sealing material corresponding to the substrate of the film for each substrate brought in from the front chamber The process, The process of attaching the several seal shape sealing material corresponding to the board | substrate of a some film to the board | substrate conveyed, The process of cooling the board | substrate with which the some seal shape sealing material adhered, The sheet shape sealing material adheres to the cooled board | substrate. It is characterized by consisting of the process of peeling and winding up a base film from each of the plurality of films which were carried out.

According to the present invention, since the sheet-shaped sealing material having a predetermined width is simultaneously conveyed in an atmosphere of a reduced pressure (vacuum) or an inert gas and bonded to the element glass substrate, it is possible to prevent adhesion of bubbles, generation of bubbles, wrinkles, and the like. The tension of the film can be kept constant by the film take-up mechanism part, the cover film take-up mechanism part, and the base film take-up mechanism part, and the adhesion accuracy of the sheet-shaped sealing material to the element glass substrate and the quality of the element glass substrate with the sheet-shaped sealing material are attached. It can increase.

In addition, since the pressure reduction and the atmospheric pressure are changed in the front chamber and the rear chamber of which the volume is smaller than this chamber in the chamber, the inside of the large volume chamber can be always maintained in the reduced pressure or inert gas atmosphere. The time required for changing the atmosphere state can be shortened, and the tact time can be improved.

BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows schematic structure of one Embodiment of the sealing apparatus of the substrate surface which concerns on this invention, and the manufacturing method of an organic EL panel.
2 is a schematic configuration diagram showing one specific example of the organic EL panel produced by the present invention.
3 is a schematic explanatory diagram of a sealing device for a substrate surface and a method for producing an organic EL panel according to the present invention.
4 is a partial cross-sectional view showing the configuration of the film in FIG. 1.
FIG. 5: is a perspective view which shows the whole structure of one specific example of the sealing material bonding apparatus 8 in FIG.
It is a block diagram which expands and shows the film unwinding mechanism part and cover film winding-up mechanism part in FIG.
FIG. 7: is the block diagram which expands and shows the inter-substrate processing mechanism part in FIG.
FIG. 8: is explanatory drawing about the sheet-like sealing material space | interval part formed by the inter-substrate processing mechanism part in FIG.
It is a figure which shows the operation | movement which the peeling apparatus in FIG. 7 peels the sealing film of the sheet-like sealing material space | part from a film.
FIG. 10 is an enlarged view illustrating the lamination mechanism in FIG. 5.
FIG. 11 is an enlarged view of the substrate cooling mechanism and the base film winding mechanism in FIG. 5.

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described using drawing.

Fig. 2 is a schematic configuration diagram showing one specific example of the organic EL panel manufactured by the present invention, in which a diagram (a) is an exploded view and a diagram (b) is an enlarged view of a portion A of the diagram (a). (C) is the total sectional view of the dividing line BB of the same figure (b), (1) is an element glass substrate, (2) is a sealing glass substrate, (3) is a sealing compound, (4) Organic EL element (5) is a sheet-shaped sealing material.

In (a) of FIG. 2, the sealing compound 3 (FIG. 2 (b)) is formed in the element glass board | substrate 1 in the frame shape along the periphery in the surface, and the A plurality of organic EL elements 4 are vertically and horizontally arranged in the inner region of the frame, and these organic EL elements are sealed by the sheet-shaped sealing material 5. The sealing glass substrate overlaps with the element glass substrate 1 from the side in which the sealing agent 3 was provided, and it pressurizes and bonds with this sealing agent 3, and an organic electroluminescent panel is formed.

In FIGS. 2B and 2C, although the organic EL element 4 is not shown, the anode (anode) is provided on one side of the upper and lower surfaces of the organic light emitting layer, and the cathode (cathode) is provided on the other side. These anodes and cathodes are connected to signal lines or the like provided on the surface of the element glass substrate 1, and the organic EL element 4 is provided on an insulating film (not shown) provided on such signal lines or the like. When the organic EL element 4 is a passive organic EL element, the scanning line and the signal line are laid on the surface of the element glass substrate 1 vertically and horizontally. The anode of the organic EL element 4 is placed on the scanning line and the cathode is It is connected to the signal line, respectively. In addition, when the organic EL element 4 is an active matrix organic EL element, scanning lines and signal lines are laid on the surface of the element glass substrate 1 in the vertical and horizontal directions, and TFTs (Thin Film Transistors) are formed at the intersections of these scanning lines and the signal lines. An active element such as a thin film transistor, a gate electrode and a source electrode of the TFT are respectively connected to the scan line and the signal line, and an anode of the organic EL element 4 is connected to the drain electrode thereof.

The sheet-shaped sealing material 5 is made of a thermosetting resin such as an epoxy resin, and is attached and cured to cover the organic EL element 4 except for the terminal portion of the electrode lead-out line of the anode or cathode of the organic EL element 4. have. The sealing glass substrate 2 is bonded to the element glass substrate 1 by the sealing agent 3 in a state where the sealing glass substrate 2 is in close contact with the cured sheet-like sealing material 5.

Moreover, it does not specifically limit as resin which comprises the sheet-like sealing material 5, It is thermoplastic, thermosetting resins, such as an epoxy resin (resin which hardens and can be processed when heated, but if it continues heating, it produces a chemical reaction and hardens). The kind of back surface resin is not limited. Moreover, you may also provide other functions, such as a desiccant, to the sheet-like sealing material 5.

Fig. 3 is a schematic explanatory diagram of a sealing device for a substrate surface and a method for producing an organic EL panel according to the present invention, (6) is a roll, (7) is an organic EL panel, and the same reference numerals are used for parts corresponding to Fig. 2. To omit duplicate explanations.

In the same figure, the element glass substrate 1 is provided with a plurality of organic EL elements 4 (FIG. 2) arranged in a previous step not shown in almost the entire area of the surface thereof, so as to surround the entire region. The sealing compound 3 (FIG. 2) as an adhesive agent is apply | coated in frame shape. This element glass substrate 1 is conveyed into a chamber (not shown).

In the chamber, the whole area | region in which the organic electroluminescent element 4 of the surface of this element glass substrate 1 is provided is covered with the sheet-like sealing material 5 of several rows, and each sheet-shaped sealing material 5 is a plurality of rows of organic. These sheet-shaped sealing materials 5 are pressed to the surface of the element glass substrate 1 with a roll 6 and heated so as to cover the EL element, thereby thermocompression bonding to the surface of the element glass substrate 1. Thereby, the organic electroluminescent element 4 on the surface of the element glass substrate 1 is covered by the some sheet-like sealing material 5, and is sealed. The sheet-shaped sealing material 5 has epoxy resin as a main component, and is adhered on the surface of the element glass substrate 1 by the lamination method in this way.

Here, although not shown, the signal line is provided in the surface of the element glass substrate 1, and although the terminal part of the organic electroluminescent element 4 is connected to this signal line, the sheet-shaped sealing material 5 is organic EL except this terminal part. It adheres by thermocompression so that the whole surface of the element 4 may be covered. The attachment of these sheets of sheet sealing material 5 in multiple rows is performed simultaneously, and the attachment efficiency is aimed at, and the sheet-shaped sealing material 5 is made without generating bubbles by the uneven part by wiring etc. which were arrange | positioned with respect to the organic electroluminescent element 4 In order to cover with, the sheet-shaped sealing material 5 is attached in a vacuum (decompression) or under reduced pressure in the chamber.

Subsequently, the element glass substrate 1 with the sheet-shaped sealing material 5 attached thereto is carried out from the chamber and sealed by the liquid sealing agent 3 (FIG. 2) provided on the surface of the element glass substrate 1. Glass 2 is bonded. Moreover, the organic EL panel 7 is obtained by hardening this sealing compound 3 with an ultraviolet-ray or the like.

BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows schematic structure of one Embodiment of the sealing apparatus of the board | substrate surface, and the manufacturing method of an organic EL panel concerning this invention, (8) is a sealing material bonding apparatus, (9) is a chamber, (10) Silver front chamber, 11 rear chamber, 12a-12d gate valve, 13 film, 14 film unwinding mechanism part, 15 cover film winding mechanism part, 16 is inter-substrate processing mechanism part, Denoted at 17 is a film tension measuring mechanism, 18 at the alignment mechanism, 19 at the lamination mechanism, 20 at the substrate cooling mechanism, and 21 at the base film winding mechanism.

In the same figure, the sealing material bonding apparatus 8 which joins the sheet-like sealing material 5 to the element glass substrate 1 is provided in the chamber 9. Moreover, the front chamber 10 is provided in the inlet side of the chamber 9, and the rear chamber 11 is provided in the outlet side, respectively, and the gate valve 12b is provided between the chamber 9 and the front chamber 10, and the chamber 9 ), The gate valve 12c is provided between the rear chambers 11, respectively. In addition, the gate valve 12a is provided at the inlet of the front chamber 10, and the gate valve 12d is provided at the outlet of the rear chamber 11, respectively.

The element glass substrate in the chamber 9 is always maintained in a reduced pressure (vacuum) atmosphere or in an inert gas atmosphere, and has been treated with an organic EL element or a sealing agent in a previous step (not shown). Although 1) is carried in the chamber 9 through the front chamber 10, when this element glass substrate 1 is conveyed from a previous process, the gate valve 12b of the inlet side of the chamber 9, and the gate of the exit side are carried out. The valve 12c is closed, the chamber 9 is in a sealed state, the gate valve 12a on the inlet side of the front chamber 10 is opened, and the front chamber 10 is in a standby state of dry air. The element glass substrate 1 is carried in the front chamber 10.

Moreover, the path | route to the entrance of the front chamber 10 by which the organic electroluminescent element is provided and the element glass substrate 1 with which the sealing material was apply | coated is conveyed is in the standby state of dry air.

When this element glass substrate 1 is carried in the front chamber 10, the gate valve 12a is closed and the inside of the front chamber 10 is sealed, and dry air is discharged | emitted by the vacuum pump etc. which the room is installed in this. It changes to the state of atmosphere of pressure reduction or an inert gas. When the inside of the front chamber 10 is in the same atmosphere as the chamber 9, the gate valve 12b on the inlet side of the chamber 9 is opened, and the element glass substrate 1 is loaded into the chamber 9. When this carry-in is completed, the gate valve 12b is closed and the gate valve 12a is opened, and the front chamber 10 waits for the next element glass substrate 1 to be carried in.

In the sealing material bonding apparatus 8 in the chamber 9, the attachment work of the sheet-like sealing material 5 to the element glass substrate 1 carried in is performed, and when this operation is complete | finished, the gate valve of the exit side of the chamber 9 ( 12c) is opened. At this time, the gate valve 12d on the outlet side of the rear chamber 11 is in a closed state, and the rear chamber 11 is in the same high vacuum atmosphere as in the chamber 9 by a vacuum pump or the like installed therein, and the seat The element glass substrate 1 in which attachment of the shape sealing material 5 is completed is conveyed from the chamber 9 into the rear chamber 11. Moreover, when this conveyance is completed, the gate valve 12c of the chamber 9 side will be closed, the gate valve 12d of the exit side will be opened, and the rear chamber 11 will be made into the dry air standby state, and the element after that The glass substrate 1 is carried out from the rear chamber 11 and conveyed to the subsequent process for bonding of the sealing glass substrate 2 (FIG. 2, FIG. 3), etc.

From the previous process, the element glass substrate 1 in which the installation of the organic EL element and the application of the sealing agent were applied is conveyed to the front chamber 10 in order, and the adhesion processing of the sheet-shaped sealing material 5 is performed in order.

In addition, when manufacturing an organic electroluminescent element, in order to prevent the performance deterioration of an organic electroluminescent element in a manufacturing process, it manufactures in an atmosphere of reduced pressure or an inert gas. Similarly, in order to prevent the performance of an organic EL element from deteriorating during the bonding of the sheet-shaped sealing material 5, the sealing material bonding apparatus 8 is installed in the chamber 9, and the inside of this chamber 9 is made into a pressure-reducing or inert gas. I am in an atmosphere state.

In the sealing material bonding apparatus 8, the film 13 of the sheet-shaped sealing material 5 is taken out from the film winding-up mechanism part 14, the cover film winding-up mechanism part 15, the board | substrate processing mechanism part 16, and the film tension measuring mechanism part ( 17) It is sent to the lamination mechanism part 19 via the alignment mechanism part 18, and the sheet-shaped sealing material 5 is attached to the element glass substrate 1 carried in from the front chamber 10 in this lamination mechanism part 19. As shown in FIG.

The film 13 unwound from the film unwinding mechanism part 14 forms a continuous strip shape, and as shown in FIG. 4, the base film 13b is formed on one side of the sealing material film 5 'and the cover film is located on the other side. Each of 13a has a three-layer structure attached to each other so as to be peeled off. As described later, this sealing material film 5 'is divided into the inter-substrate processing mechanism portions 16 for each of the element glass substrates 1 to form the sheet-like sealing material 5 of the element glass substrate 1.

In addition, it is difficult for the film 13 including the sheet-shaped sealing material 5 to have a moisture-proof function, and in order to remove the moisture of the moisture-absorbing sheet-shaped sealing material, the film 13 is removed under a reduced pressure or an atmosphere of an inert gas. The treatment must be performed for a long time. For this reason, in the process before being used for the bonding in the sealing material bonding apparatus 8, the film 13 makes it move around the room where the environment of dry air (open air temperature = -20 degrees C or less) or an inert gas is maintained. The sealing material bonding apparatus 8 which joins the sheet | seat shape sealing material 5 separated as mentioned later in this film 13 to the element glass substrate 1 also has the environment of the reduced pressure or inert gas atmosphere in the chamber 9. The film 13 is in the chamber 9 from the film unwinding mechanism part 14 until the sheet-shaped sealing material 5 is bonded to the element glass substrate 1 and carried out from the chamber 9.

In FIG. 1, in the cover film winding mechanism part 15, the cover film 13a joined to the upper side of the sealing material film 5 'from the film 13 unwound from the film unwinding mechanism part 14 is peeled off, and a board | substrate is peeled off, In the inter-processing mechanism part 16, the exposed sealing film 5 'of the film 13 from which the cover film 13a was peeled is divided into one by one element glass substrate, and becomes the sheet-shaped sealing material 5, and the sheet-shaped sealing material The upper and lower surfaces are inverted and conveyed to the lamination mechanism unit 19 so that 5 is downward.

Here, the tension of the film 13 is measured by the film tension measuring mechanism unit 17, the tension of the film 13 is adjusted, and the sheet-shaped sealing material 5 separated in the film 13 by the alignment mechanism unit 19. ) Is precisely aligned to the element glass substrate 1 to which it is bonded.

Thus, in the film 13 of the sheet-like sealing material 5 which was positioned, the sheet-like sealing material 5 heats the surface of the element glass substrate 1 in the lamination mechanism part 19 as demonstrated in FIG. It is crimped | bonded and the element glass substrate 1 heated by thermocompression bonding at the board | substrate cooling mechanism part 20 is cooled. This cooling causes the sheet-shaped sealing material 5 to be firmly attached to the surface of the element glass substrate 1. Then, the base film 13b of the film 13 is peeled off from the base film winding-up mechanism part 21, and it becomes the element glass substrate 1 by which the sheet-shaped sealing material 5 was bonded one by one. In this way, whenever the element glass substrate 1 to which the sheet-shaped sealing material 5 was bonded is conveyed to the exit of the chamber 9, the gate valve 12c is opened and conveyed to the rear chamber 11.

In addition, although the one film 13 was demonstrated here, the some film 13 is similarly processed simultaneously and the several sheet-like sealing material 5 is affixed simultaneously to the element glass substrate 1 as mentioned above.

Thus, the surface of the element glass substrate 1 is provided by installing the sealing material bonding apparatus 8 which joins the sheet-like sealing material 5 to the element glass substrate 1 in the chamber 9 in the atmosphere of pressure_reduction | reduced_pressure or inert gas. The performance deterioration by the moisture absorption of the organic electroluminescent element 4 (FIG. 2) provided in the inside can be prevented, and the sheet-shaped sealing material 5 is also attached to the element glass substrate 1 from when it is unwound from the film unwinding mechanism part 14. In the chamber under a reduced pressure or inert gas atmosphere during the joining operation until it is carried out from the chamber 9 to the rear chamber 11, so that moisture can be discharged and the intrusion thereof can be prevented. Hygroscopicity can also be prevented, and performance deterioration by the moisture absorption of the sheet-like sealing material 5 can be prevented. In addition, since the air and the true dust are discharged in the chamber 9 and the invasion thereof can also be prevented, the generation of bubbles and the infiltration of the true dust between the organic EL elements 4 and the sheet-shaped sealing material 5 to be joined together are minimized. It can suppress and the performance deterioration of the organic EL panel 7 (FIG. 3) can also be prevented.

In the chamber 9, the front chamber 10 is provided at the inlet side and the rear chamber 11 at the outlet side, and the front chamber 10 in which the element glass substrate 1 from the previous process is in the standby state. When carried in, the inside of the front chamber 10 is brought into the same atmosphere as that in the chamber 9 from the standby state in the state where the gate valves 12a and 12b are closed, and then the gate valve 12b is opened to open the chamber 9. ), The gate valve 12b is closed again, and the rear chamber 11 is brought into the same atmosphere as the inside of the chamber 9 from the standby state, and then the gate valve 12c is opened to open the inside of the chamber 9. The element glass substrate 1 with the sheet-shaped sealing material 5 attached thereto is taken out into the rear chamber 11, and then the gate valve 12c is closed to bring the inside of the rear chamber 11 into the standby state, and the gate valve 12d is opened. Since the inside of the chamber 9 is discharged to the outside, the inside of the chamber 9 is in a reduced pressure or inert gas atmosphere. It is possible to maintain and shorten the operation time of means such as a vacuum pump for maintaining such an atmosphere, and the front chamber 10 and the rear chamber 11 can take out and store the element glass substrate 1. Since the gate valves 12a and 12b need only have a capacity capable of opening and closing the gate valves 12a and 12b, they can be made small enough to be about 1/5 to 1/10 times their volume in the chamber 9, thereby The time required for changing from the atmospheric state to the reduced pressure or the atmosphere of the inert gas or vice versa can be made significantly shorter than the case where such a state change is performed in the chamber 9. The bonding work time of the sheet-shaped sealing material to the element glass substrate per piece can be shortened significantly.

In addition, although not shown, the chamber 9, the front chamber 10, and the rear chamber 11 are installed in the place where the circumference | surroundings are maintained in the atmosphere state of dry air or an inert gas.

FIG. 5: is a perspective view which shows the whole structure of one specific example of the sealing material bonding apparatus 8 in FIG. 1, and (14a-14c), (15a), (15b), (16a), (16b), ( 19a), (20a), (21a), and (2lb) are drive motors, (22) are peeling apparatuses, and (23) are position detectors. Parts corresponding to FIG.

In the same figure, the four films 13 are unwound from the film unwinding mechanism part 14 driven by the drive motors 14a-14c, and run in parallel with each other and at the same predetermined intervals. The travel direction is parallel to the travel direction of the element glass substrate 1, as indicated by the arrow ←, and is reverse to the travel direction. In addition, as for these running of these films 13, these films 13 are unwinding in the film unwinding mechanism part 14, and the cover films 13a (FIG. 4) of these films 13 drive motors 15a and 15b. The base film winding-up mechanism part 21 wound up by the cover film winding-up mechanism part 15 driven by), and the base film 13b (FIG. 4) of these films 13 are driven by drive motors 21a and 2lb. It is done by winding by). In addition, these films 13 run intermittently with the dimension l shown in FIG. 8 in synchronization with carrying in of the element glass substrate 1 from the front chamber 10 as mentioned later.

As for these films 13 which the cover film 13a (FIG. 4) peeled from the cover film winding-up mechanism part 15, the sheet-like sealing material 5 exposed as mentioned above in the inter-substrate processing mechanism part 16 is an element. Each glass substrate is divided, and the sheet-shaped sealing material 5 of predetermined length is peeled so that the boundary of these divisions may be formed. Such peeling is performed by the peeling apparatus 22 driven by the drive motors 16a and 16b.

These films 13 processed by the inter-substrate processing mechanism portion 16 have their traveling direction downward in the film tension measuring mechanism portion 17, that is, in the direction of the traveling path of the element glass substrate 1. At this time, the composite tension of these films 13 is measured by the film tension measuring mechanism part 17, and the drive motors 14a-14c of the film unwinding mechanism part 14 are controlled according to the measurement result, and these films are accordingly controlled. The tension in (13) is adjusted.

The film 13 from the film tension measuring mechanism portion 17 is sent to the alignment mechanism portion 18, and the sheet-shaped sealing material 5 of the film 13 is laminated one by one on the element glass substrate 1 at the lamination mechanism portion 19. In the alignment mechanism part 18, the width direction and the longitudinal direction (traveling direction) of the alignment mechanism part 18 are based on the detection result of the position detector 23 which consists of a CCD camera etc. so that this sheet-like sealing material 5 may be joined. ) Is adjusted. This position adjustment is performed with respect to the element glass substrate 1 stopped at this position, although the element glass substrate 1 carried in from the front chamber 10 (FIG. 1) stops at a predetermined position in front of the lamination mechanism unit 19. The film 13 is moved and set in the width direction and the longitudinal direction so that the head position of the sheet-shaped sealing material 5 in the film 13 becomes a predetermined position. When the alignment mechanism part 18 becomes the predetermined positional relationship in the positional relationship of the element glass substrate 1 and the sheet-like sealing material 5 bonded to this element glass substrate 1 in the film 13 in this way, It is set to the position which can detect the head position of the sheet-like sealing material 5 bonded to the next element glass substrate 1, and adjusts this head position accordingly, and the element glass substrate stopped at the predetermined position. The positional relationship of (1) and the sheet-like sealing material 5 bonded to this can be set to the said predetermined positional relationship.

Thus, when the positional relationship of the element glass substrate 1 and the sheet-like sealing material 5 in the film 13 bonded to this is set, the element glass substrate 1 and the film 13 will stop for a predetermined time. In this state, at this time, in the inter-substrate processing mechanism part 16, a peeling part forming a boundary of division is placed at this position after the sealant film 5 'in the film 13, and this part is the inter-substrate processing mechanism part 16. It peels by the peeling apparatus 22 of (). Thereby, the following sheet-like sealing material 5 is formed.

Then, the film 13 and the element glass substrate 1 travel at the same speed, and are sent to the lamination mechanism part 19 operated by the drive motor 19a, and the film 13 of the element glass substrate 1 is transferred to the element glass substrate 1. The sheet-like sealing material 5 is joined by thermocompression bonding.

This thermocompression bonding is performed by continuously moving the sheet-shaped sealing material 5 of the film 13 and the element glass substrate 1, and the following element glass substrate 1 is carried in from the front chamber 10 at the same time. It stops at a predetermined position as mentioned above. In addition, the element glass substrate 1 to which the sheet-shaped sealing material 5 of the film 13 is bonded by the lamination mechanism part 19 is also stopped, and the alignment mechanism part 18 is carried out to the next element glass substrate 1. Position adjustment of the sheet-like sealing material 5 of the film 13 and formation of the next sheet-shaped sealing material 5 in the inter-substrate processing mechanism part 16 are performed, and the sheet-shaped sealing material to the next element glass substrate 1 ( 5) is performed.

Thus, the bonding of the sheet-like sealing material 5 to the element glass substrate 1 sequentially conveyed from the front chamber 10 is performed sequentially.

The element glass substrate 1 to which the sheet-shaped sealing material 5 of the film 13 is bonded is cooled by the board | substrate cooling mechanism part 20 driven by the drive motor 20a, and then to the drive motors 21a and 21b. The base film 13 of the film 13 is peeled off by the base film winding-up mechanism part 21 driven by it, and it becomes the individual element glass substrate 1 with the sheet-shaped sealing material 5, and conveys it to the rear chamber 11 do. However, at this time, the film 13 and the element glass substrate 1 move intermittently to the dimension l shown in FIG. 8 according to said intermittent operation | movement.

Moreover, the sealing material bonding apparatus 8 which performs the above operation is provided in the chamber 9, and the drive motor of each apparatus, such as the drive motors 14a-14c of the film unwinding mechanism part 14, is the outer side of the chamber 9 Installed in

FIG. 6: is the block diagram which expands and shows the film winding-up mechanism part 14 and the cover film winding-up mechanism part 15 in FIG. 5, 24a-24d is a film roll, 25a-25d is a rotating shaft, ( 26 is a torque limiter, 27 is a film tensioning roll, 28 is a pinch roll, 29a, 29b is a drive motor, 30a to 30d is a cover film winding roll, and 31 is a cover film The peeling roll 32 is a torque limiter, the same code | symbol is attached | subjected to the part corresponding to FIG. 5, and duplication description is abbreviate | omitted.

In the same figure, in the film unwinding mechanism part 14, film rolls 24b and 24d in which two films 13 are rolled up in a roll shape are provided at a predetermined interval on the rotation shaft 25a of the drive motor 14a. In addition, the film rolls 24a and 24c in which the two films 13 are wound in rolls are provided at predetermined intervals on the rotation shaft 25b of the drive motor 14b. The film 13 is unwound from these film rolls 24a-24d, respectively, the film 13 from the film roll 24a, the film 13 from the film roll 24b, and the film from the film roll 24c. The film 13 from the film 13 and the film roll 24d is arrange | positioned at the rotational shafts 25a and 25b so that it may become the said predetermined space | interval in this order, respectively.

These film rolls 24a to 24d can be removed from the rotating shafts 25a and 25b, respectively, and can be replaced with new film rolls when the film 13 is mostly unrolled from the film rolls 24a to 24d.

The film tension addition roll 27 which the film from the film roll 24a, 24b, 24c, 24d contacts each is provided in the rotating shaft 25c of the drive motor 14c. Moreover, four pinch rolls 28 are provided in the rotating shaft 25d via the film 13 which contacts these film tensioning rolls 27 for each of these film tensioning rolls 27.

When the drive motors 14a to 14c rotate, the films 13 are unrolled downward from the film rolls 24a to 24d, respectively, and these films 13 are respectively applied to the film tensioning rolls 27 and the pinch rolls 28, respectively. It is tensioned by a predetermined tension and moved. At this time, the movement direction of each film 13 moving downward from the film rolls 24a to 24d by the film tensioning roll 27 is switched to the horizontal direction.

Here, the film rolls 24a-24d are rotatably provided in the rotating shafts 25a, 25b, respectively, and the torque limiters 26 are provided in these installation parts, respectively. These torque limiters 26 cause the film rolls 24a to 24d to rotate together with the rotation of the rotary shafts 25a and 25b, respectively, to unwind the film 13, and together with the film rolls 24a to 24d to rotate the shafts 25a, It rotates with respect to 25b), and the loosening tension of the film 13 is adjusted.

In this way, the four films 13 unwound from the film winding-up mechanism part 14 are sent to the cover film winding-up mechanism part 15.

In the cover film winding-up mechanism part 15, two cover film winding rolls 30b and 30d are provided in the rotating shaft 29a of the drive motor 15a at predetermined intervals, and the rotating shaft 29b of the drive motor 15b is provided. Two cover film winding rolls 30a and 30c are provided at predetermined intervals. Moreover, four cover film peeling rolls 31 are provided in the rotating shaft 29c so that each film 13 unwound from the film unwinding mechanism part 14 may contact. The cover film 13a is peeled from these films 13 in these cover film peeling rolls 31, and the peeled cover film 13a is wound up by the cover film winding rolls 30a-30d, respectively.

These cover film peeling rolls 31 are removable from the rotating shafts 29a and 29b, respectively, and when the film 13 is mostly unwound from the film rolls 24a to 24d in the film unwinding mechanism part 14 and replaced with a new film roll, These cover film peeling rolls 31 are also removed from the rotating shafts 29a and 29b, respectively, and the new cover film peeling rolls 31 to which the cover film 13a is not wound are attached to the rotating shafts 29a and 29b, respectively. After the worker pulls out the film 13 from each of the new film rolls 24a to 24d in the film unwinding mechanism part 14, peels off the cover film 13a and installs it on the cover film peeling roll 31, These cover films 13a are made to wind up to the cover film winding rolls 30a-30d.

Moreover, the cover film winding rolls 30a-30d are rotatably provided in the rotating shaft 29a, 29b, respectively, and the torque limiter 32 is provided in these installation parts, respectively. The cover film winding rolls 30a to 30d rotate with the rotation of the rotary shafts 29a and 29b, respectively, so that the cover film 13a is wound, and tension is added and wound up by the torque limiter 32.

In this way, the four films 13 from which the cover film 13a has been peeled off from the cover film peeling roll 31 are moved to the inter-substrate processing mechanism portion 16 (FIG. 7) in parallel at predetermined intervals as described above. Is sent.

Moreover, the tension measurement result of the film tension measuring mechanism part 17 demonstrated in FIG. 5 is sent to the film unwinding mechanism part 14, the rotational torque of the drive motors 14a-14c is adjusted, and it is sent also to the cover film winding mechanism part 15 Rotational torques of the drive motors 15a and 15b are adjusted.

FIG. 7: is a block diagram which expands and shows the inter-substrate processing mechanism part 16 in FIG. 5, 33a, 33b is a film press member, 34 is a half cut member, 35 is peeling A roller, 36 is a peeling tape, 37 is a tape unwinding roll, 38 is a tape winding roll, 39a, 39b is a lowering roller, and the part corresponding to FIG. Omit.

In the same figure, in the inter-substrate processing mechanism part 16, when the film 13 is sent by the predetermined length (film conveyance length) from the cover film winding mechanism part 15 (FIG. 6), this film 13 will stop, These films 13 are simultaneously pressed to a flat portion (not shown) by the two film pressing members 33a and 33b elongated in parallel in the direction orthogonal to the arrangement direction of the film 13. Thereby, the part between the film pressing members 33a and 33b of these films 13 is fixed. The peeling device 22 acts on the pressing part by the film pressing members 33a and 33b of these films 13, so that the sealing material film 5 'of the area | region which distinguishes the sheet-like sealing material 5 as mentioned above is Peel off.

Here, assuming that the peeling part of the sealing material film 5 'in the film 13 is determined in synchronization with the carrying-in of the element glass substrate 1 from the front chamber 10 (FIG. 5), in the film 13 The space | interval of the peeling part of the sealing material film 5 ', and the length (length in the moving direction of the film 13) are determined as follows.

That is, in FIG. 8, the element glass in the sealing region 40 currently covering the length of the conveyance direction of the element glass substrate 1 with (L) and the sheet-like sealing material 5 in this element glass substrate 1 When the length of the conveyance direction of the board | substrate 1 is (L '), and the space | interval of the element glass substrate 1 carried in from the front chamber 10 is set to (D), the sealing in the two element glass substrates 1 back and forth will be carried out. The interval d of the area 40 is

d = L-L '+ D

. This space | interval d is the length of the peeling part in the sealing material film 5 'of the film 13. Therefore, the pressing members 33a and 33b fix the film 13 through this peeling part. In addition, the repeating length (that is, the film conveyance length of the film 13) 1 of this peeling part is

l = L '+ d = L + D

It becomes the repetition length of element glass substrate loading.

Returning to FIG. 7, the peeling apparatus 22 is equipped with the half cut member 34, the peeling tape 36, and the peeling roller 35. As shown in FIG. The half cut member 34 is movable in the direction of the arrow A and the direction of the arrow B opposite thereto by a driving means (not shown), and the peeling roller 35 and the lowering rollers 39a and 39b are also shown. It is movable in the direction of arrow A, (B) by the drive means which has not been made. The peeling roller 35 moves with movement of the reduction rollers 39a and 39b, and can also move in an up-down direction. That is, although not shown, for example, means are provided which are movable in the directions of arrows A and B in which the half-cut member 34, the peeling roller 35, and the reduction rollers 39a and 39b are mounted. The drive means is provided with the drive means for rotationally driving the half cut member 34, and the peeling roller 35 is provided so that a vertical movement is possible in this means.

Therefore, while the half cut member 34 moves to the arrow A direction from the winding roll 38 side, the peeling part of the length d (FIG. 8) of the sealing film 5 'in the film 13 is carried out. It cuts in both front and back, and this film (with the peeling tape 36 pressed by the film 13 by the peeling roller 35 which moves similarly to the arrow A direction from the back of this half cut member 34) The part between the incisions by the half cut member 34 of the sealing material film 5 'of 13) is peeled from the film 13. As shown in FIG. The peeling tape 36 is attached between the unwinding roll 37 and the winding roll 38, and is lowered downward between two lowering rollers 39a and 39b to be attached to the film 13 by the peeling roller 35. It is pressurized.

Thus, when the part which becomes the space | interval of the sheet-like sealing material 5 in four films 13 (namely, the sheet-shaped sealing material space | interval part 42 shown in FIG. 9) is formed, the drive motor 16b of By the drive, the winding roll 38 rotates to wind up the release tape 36. At this time, the drive motor 16a is not driven and the release roll 37 does not loosen the release tape 36. For this reason, when the peeling tape 36 moves to the winding roll 38 side between the lowering rollers 39a and 39b, the peeling roller 35 is lifted up and separated from the film 13, and the drive motor 16a is thereafter. ) Is started, and the release tape 36 is released from the release roll 37 at the same speed as the winding speed of the release tape 36 in the take-up roll 38. In addition, the half-cut member 34 and the peeling roller 35 and the means in which the lowering rollers 39a and 39b are mounted along with this move in the direction of the arrow B, whereby the half-cut member 34 and the peeling roller 35 ) And the reduction rollers 39a and 39b move in the direction of the arrow B until they are closer to the winding roll 38 than the film 13.

Further, when the film pressing members 33a and 33b are lifted up and the film 13 is opened from the fixed state and moved by the length l in the direction of the arrow C, the film pressing members 33a and 33b are lowered again. Then, the film 13 is fixed, and the following sheet-shaped sealing material space | interval part 42 (FIG. 9) is formed by the peeling apparatus 22 as mentioned above.

By repeating the above operation, the sealing region 40 is formed sequentially with the repetition length l, and the sheet-like sealing material 5 is formed sequentially for each of them.

FIG. 9: is a figure which shows the operation | movement which the peeling apparatus 22 in FIG. 7 peels the sealing film 5 'of the sheet-shaped sealing material space | interval part from the film 13, and 34a and 34b are half The circular blade for cutting, 34c is a rotating shaft, 41a, 4lb is cut in, and 42 is a sheet-shaped sealing material space | interval.

In the figure, the half-cut member 34 is equal to the length d shown in FIG. 8 to each of both ends of the rotating shaft 34c arranged in parallel in the moving direction of the film 13 indicated by the arrow C. FIG. Half-cut circular blades 34a and 34b are provided at intervals. The half cut member 34 of such a structure is rotated and driven by the drive motor which is not shown in figure, and the half-cut member 34 of the film 13 shown by the arrow C while rotating the circular blades 34a and 34b for half cuts is rotated. It moves in the direction of the arrow A orthogonal to a running direction (length direction), and cuts 41a and 41b of the same depth are formed in the sealing film 5 'of the film 13 by this.

On the other hand, the peeling roller 35 cuts the peeling tape 36 from the back of the half cut member 34 by the half cut circular blades 34a and 34b in the sealing film 5 'of the film 13. It moves in the direction of arrow A, pressing to the part between 41a and 41b, and the part between cut-outs 41a and 41b of the sealing material film 5 'adheres to the peeling tape 36, and it peels off. Thereby, the sheet-shaped sealing material space | interval part 42 is formed, and the sheet shape sealing material 5 of length L '(FIG. 8) of the part before the sheet-shaped sealing material space | interval part 42 in the sealing material film 5' is formed. )

In this way, in the inter-substrate processing mechanism part 16, the sheet-like sealing material 5 of length L 'is sequentially formed on the film 13 at the interval of length d.

FIG. 10: is the block diagram which expands and shows the lamination mechanism part 19 in FIG. 5, 19b and 19c are drive motors, 43 are rollers with a guide for width direction adjustment, and 44a-44d. Is a width direction adjustment motor, 45a and 45b are thermocompression rollers, 46 are board | substrate conveyance rollers, 47 are conveyance direction conversion rollers, and the part corresponding to FIG. Omit the description.

In the same figure, in the lamination mechanism part 19, the film 13 conveyed in the downward direction shown by the arrow D from the film tension measurement mechanism part 17 (FIG. 5) is respectively conveyed by the conveyance direction conversion roller 47. It converts to the direction along the conveyance direction shown by the arrow E of the element glass substrate 1. These films 13 which were converted into directions are conveyed between the thermocompression rollers 45a and 45b. By this direction conversion, the sheet-like sealing material 5 will be arrange | positioned at the element glass substrate 1 side in the film 13.

Immediately before the conveyance direction conversion roller 47, the roller with a guide 43 for width direction adjustments driven by the width direction adjustment motors 44a-44d is provided for every film. Each of these widthwise adjustment guide rollers 43 is provided with flange portions (not shown) at both ends in the width direction, and the film 13 passes between these two flange portions. These width direction adjustment motors 44a-44d and the width direction adjustment roller 43 form the adjustment means of the width direction of the alignment mechanism part 18 in FIG. Moreover, between the conveyance direction conversion roller 47, the thermocompression roller 45a, and 45b, the position detector 23 is provided for every film 13 (however, only one is shown here) and the film 13 ) Deviation in the position of each width direction is detected. According to the detection result, the width | variety which the width direction adjustment motor 44 (general name of the width direction adjustment motors 44a-44d) with respect to the film 13 in which the position shift occurred among the width direction adjustment motors 44a-44d corresponds. The guide roller 43 for direction adjustment is rotated in a predetermined direction, and the position shift of the width direction of the film 13 is adjusted.

As described above, the sheet-like sealing material 5 in the film 13 with respect to the element glass substrate 1 being brought in and stopped from the front chamber 10 (FIG. 5) by the alignment mechanism portion 18 (FIG. 5). When the positional relationship is set to predetermined, while this film 13 is conveyed, the element glass substrate 1 is also conveyed by the board | substrate conveyance roller 46 at the speed | rate equivalent to this, and the sealing area | region of this element glass substrate 1 is carried out. The sheet-shaped sealing material 5 of the film 13 overlaps 40 (FIG. 8). In this state, the element glass substrate 1 and the film 13 are sandwiched and heated between the rollers 45a and 45b for thermal compression driven by the drive motors 19b and 19c to be rotated. The sheet-shaped sealing material 5 in each film 13 is thermocompression-bonded to the sealing region 40 of the element glass substrate 1.

Thus, the film 13 by which the sheet-shaped sealing material 5 was thermally crimped to the element glass substrate 1 and its sealing area 40 is conveyed by the board | substrate conveyance roller 46 to the next cooling process.

FIG. 11: is a block diagram which expands and shows the board | substrate cooling mechanism part 20 and the base film winding-up mechanism part 21 in FIG. 5, 48a and 48b are board | substrate cooling rollers, 49 are base films The peeling roll, 50a-50d is a winding roller, 51 is a torque limiter, 52 is a board | substrate conveying motor, the same code | symbol is attached | subjected to the part corresponding to FIGS. 5 and 10, and duplication description is abbreviate | omitted.

In the same figure, in the board | substrate cooling mechanism part 20, two sets of cooling roller parts which pair the board | substrate cooling rollers 48a and 48b which are rotationally driven by the drive motor 20a are provided, and a film is formed in each cooling roller part. The element glass substrate 1 to which the sheet-shaped sealing material 5 of 13 was bonded is clamped by the board | substrate cooling roller 48a, 48b, and is conveyed. Further, these substrate cooling rollers 48a and 48b are made of steel and have a cylindrical shape, and cooling means are provided inside these substrate cooling rollers 48a and 48b by introducing and discharging the cooling water therein. The film 13 and the element glass substrate 1 are cooled by being fitted on the surfaces of the substrate cooling rollers 48a and 48b cooled by this cooling means.

In the lamination mechanism part 19 (FIG. 10), when the sheet-like sealing material 5 is heat-compression-bonded to the sealing area 40 of the element glass substrate 1 at 100 degreeC, for example, the sheet-like sealing material 5 is Although it adheres to the sealing region 40 of the element glass substrate 1, at this time, the adhesiveness of this sheet-like sealing material 5 and the base film 13b of the film 13 is also high, and the base film 13a is not cooled. If it is going to peel, the sheet-like sealing material 5 may peel from the sealing area | region 40 of the element glass substrate 1, adhere | attached on the base film 13b.

Therefore, the element glass sheet | seat sealing material 5 element is cooled by cooling the element glass substrate 1 about 40 degreeC, for example in the state which the sheet-shaped sealing material 5 of the film 13 was heat-compressed in the board | substrate cooling mechanism part 20. Adhesiveness to the glass substrate 1 increases, and the sheet-like sealing material 5 becomes easy to peel from the base film 13b of the film 13.

This element glass substrate 1 cooled by the substrate cooling mechanism part 20 is conveyed to the base film winding mechanism part 21, and the sealing area 40 of the element glass substrate 1 is carried out by the base film peeling roll 49. The base film 13b of each film 13 to which the sheet-shaped sealing material 5 was bonded is peeled off. The base film 13b peeled from each film 13 is wound up by the winding rollers 50a-50d rotationally driven by the drive motor 21a, 21b, respectively. The torque limiter 51 is provided also in these winding rollers 50a-50d, and the generation | occurrence | production of the curvature of the base film 13b is prevented.

The element glass substrate 1 from which the base film 13b was removed is separated, and is conveyed by the substrate conveyance roller 46 which is rotationally driven by the substrate conveyance motor 52, respectively, from the inside of the chamber 8 It is carried out to the rear chamber 11 (FIG. 5).

In addition, in this embodiment, although the film 13 of four predetermined | prescribed widths shall be used by predetermined space | interval, this invention is not limited to this, It is using a some film 13. As shown in FIG.

1: Device Glass Substrate
5: sheet shape sealing material
5 ': sealant film
8: sealing material bonding device
9: chamber
10: all rooms
11: rear room
12a to 12d: gate valve
13: film
13a: cover film
13b: base film
14: film unwinding mechanism part
15: Cover film winding mechanism part
16: Inter-substrate processing mechanism part
17: film tension measuring instrument
18: alignment mechanism
19: lamination mechanism part
20: substrate cooling mechanism part
21: Base film winding mechanism part
22: peeling device
24a to 24d: film roll
30a to 30d: cover film winding roll
31: cover film peeling roll
33a, 33b: film pressing member
34: Half cut member
34a, 34b: circular blade for half cut
35: peeling roller
36: peeling tape
39a, 39b: lowering roller
40: sealing area sheet-shaped sealing material gap
41a, 4lb: Infeed
42: sheet-shaped sealing material gap
43: Roller with guide for width direction adjustment
45a, 45b: thermal pressing roller
48a, 48b: substrate cooling roller
49: base film peeling roll
50a to 50d: winding roll

Claims (5)

As a sealing device of the substrate surface,
A chamber incorporating a film bonding apparatus for attaching a sheet-shaped sealing material on a substrate, a front chamber having a smaller volume than the chamber for carrying the substrate into the chamber, and the sheet-shaped sealing material in the film bonding apparatus. A rear chamber having a smaller volume than the chamber for discharging the attached substrate from within the chamber,
The gate valve is provided on the substrate inlet side and the chamber side of the front chamber and the chamber side and the substrate outlet side of the rear chamber, respectively, and the chamber is always kept in a high vacuum state, even when the substrate is loaded and discharged.
The film bonding apparatus,
Board | substrate conveying means which conveys the said board | substrate carried in from the said front chamber at predetermined intervals,
A film unwinding mechanism unit for unwinding a plurality of films of a predetermined width provided with a cover film and a base film through a sheet-shaped sealing material;
A cover film winding mechanism portion for peeling and winding up the cover film from each of the plurality of films unrolled from the film winding mechanism portion;
The said sheet-shaped sealing material used as the space | interval of the said board | substrate conveyed by the said board | substrate conveying means is peeled from each of the said several film from which the said cover film was peeled off by the said cover film winding mechanism part, An inter-substrate processing mechanism portion for forming a plurality of said sheet-shaped sealing materials corresponding to each of said substrates on a base film,
An alignment mechanism portion for positioning the leading end of the substrate and the tip of the sheet-shaped sealing material corresponding to the substrate of the film from the inter-substrate processing mechanism portion for each of the substrates carried in from the front chamber by the substrate transfer means;
An attachment mechanism portion for attaching a plurality of the sheet-shaped sealing materials corresponding to the substrates of the plurality of films from the alignment mechanism portion to the substrate conveyed by the substrate transfer means;
Base film winding-up mechanism part which peels and winds up the said base film from each of the said several film in which the said sheet-shaped sealing material adhered to the said board | substrate from the said attachment mechanism part.
Lt; / RTI >
The said board | substrate conveying means discharges the said board | substrate of the state with the some sheet-shaped sealing material with which the said base film of the said some film peeled from the said base film winding-up mechanism part to the said back chamber.
An apparatus for sealing a substrate surface, characterized in that. The method of claim 1,
A device for sealing a substrate surface, wherein the front chamber and the rear chamber are provided with a vacuum pump for bringing a room from a dry air state to a high vacuum state equivalent to that in the chamber. The method according to claim 1 or 2,
The inter-substrate processing mechanism part,
A table on which the surfaces on which the plurality of films are mounted are treated with non-adhesion,
A pair of pressing plates for urging the plurality of films to the surface of the table at predetermined intervals in the longitudinal direction;
A circular blade for half cut that cuts the sheet-shaped sealing material between portions pressed against the surface of the table by the pair of pressing plates of the plurality of films at intervals of the substrate in the longitudinal direction thereof;
Tape peeling mechanism which peels the said sheet-shaped sealing material of the part cut | disconnected by the said circular blade for half cuts of the said several film from the said base film.
The sealing apparatus of the board | substrate surface characterized by the above-mentioned. The method according to claim 1 or 2,
The board | substrate cooling mechanism part which cools the said board | substrate is provided between the said attachment mechanism part and the said base film winding mechanism part, The sealing apparatus of the substrate surface characterized by the above-mentioned. As a manufacturing method of an organic EL panel,
A carrying-in step of opening a first gate valve provided at a substrate inlet of a front chamber having a small volume by applying a sealing agent in a frame shape and having a plurality of EL elements installed inside the frame of the sealant;
A vacuuming step of bringing the substrate into the front chamber from the substrate inlet and closing the first gate valve to bring the inside of the front chamber into a high vacuum state;
Opening the second gate valve provided between the entire chamber in the high vacuum state and the large volume chamber maintained in the high vacuum state to convey the substrate from the front chamber into the chamber, and after the transfer of the substrate to the chamber, A conveying step of closing the two-gate valve,
A sealant attaching step of attaching a sheet-shaped sealant in the frame of the sealing agent of the substrate in the chamber;
A conveying step of bringing the inside of the rear chamber with a small volume into a high vacuum state, opening a third gate valve provided between the chamber and the rear chamber, and conveying the substrate with the sheet-shaped sealing material from the chamber to the rear chamber;
Closing the third gate valve provided at the substrate outlet of the rear chamber, opening the fourth gate valve to bring the interior of the rear chamber into the standby state, and discharging the substrate with the sheet-shaped sealant in the rear chamber from the substrate outlet. Discharge process
Lt; / RTI >
The sealing material attaching process,
A step of sequentially conveying the substrate carried in from the entire chamber at predetermined intervals;
A step of unwinding a plurality of films of a predetermined width provided with a cover film and a base film through the sheet-shaped sealing material;
Peeling and winding up said cover film from each of said plurality of films to be unwound;
From each of the plurality of films from which the cover film has been peeled off, a portion of the sheet-shaped sealing material that serves as an interval of the substrate to be conveyed is peeled off, and a plurality of the pieces corresponding to each of the substrates on the base film of each of the plurality of films Forming a sheet-shaped sealing material;
For each of the substrates carried from the front chamber, positioning of the tip of the substrate and the tip of the sheet-shaped sealing material corresponding to the substrate of the film;
Attaching the plurality of sheet-shaped sealing materials corresponding to the substrates of the plurality of films to the substrate to be conveyed;
Cooling the substrate to which the plurality of sheet-shaped sealants are attached;
Peeling and winding up said base film from each of said plurality of films having said sheet-shaped sealing material attached to said cooled substrate;
Discharging the substrate with the sheet-shaped sealing material to the rear chamber
The manufacturing method of the organic electroluminescent panel characterized by the above-mentioned.

Images