KR101306609B1 - Plasma generator and encapsulation apparatus for OLED pannel having the same - Google Patents

Abstract

Disclosed is a plasma generator and an encapsulation device for an OLED panel having the same. Plasma generator according to an embodiment of the present invention, the body is provided with a plurality of injection nozzles to form an activation area by irradiating the plasma to the edge region of the metal sheet sealing the OLED panel therein; An electrode provided opposite the plurality of injection nozzles and converting the discharge gas passing through the injection nozzles into plasma by a high voltage applied from the outside; And a discharge gas supply unit supplying a discharge gas to the injection nozzle.

Description

Plasma generator and encapsulation apparatus for OLED panel having same

The present invention relates to a plasma generator and an encapsulation device for an OLED panel having the same, and more particularly, to a plasma generator for activating a metal sheet encapsulating the OLED panel and an encapsulation device for an OLED panel having the same.

Organic Light Emitting Diodes (OLEDs) have a high response time with a response speed of 1ms or less, low power consumption, and self-luminescence, which provides a wide viewing angle. Have

The principle of OLED is that when a voltage is applied, electrons and holes are injected from the cathode and the anode into the organic compound layer, which is a light emitting layer, respectively, and the excitons bonded by them in the organic compound layer fall from the excited state to the ground state. It is a structure that allows

Such OLEDs can be manufactured at low temperature and manufactured in a manner similar to the conventional semiconductor process technology, and are manufactured by sequentially performing a pattern forming process, a thin film deposition process, and an encapsulation process.

In the encapsulation process, when moisture or oxygen flows into the OLED panel on which the OLED element is formed, oxidation and peeling of the electrode material occur, thereby shortening the lifetime of the device and lowering the luminous efficiency. Since a problem occurs, in order to prevent this, the process of sealing the device during its manufacturing process prevents moisture and oxygen from penetrating.

In the encapsulation process, a method of sealing an OLED panel using a glass is used. However, glass has a weak strength, and thus, a metal sheet has recently been considered as an encapsulation material of an OLED panel.

The metal sheet is attached with a protective film to prevent damage to the surface, the protective film is peeled off and removed from the metal sheet prior to the sealing process.

However, the metal sheet from which the protective film is removed, for example, a metal sheet made of stainless steel, has a problem in that adhesion to the sealant, which is a bonding material, is inferior in surface smoothness, and thus an improvement is needed.

[Patent Document 1] KR 2006-0055483 A 2006.5.23.

Accordingly, an aspect of the present invention is to provide a plasma generator capable of activating a metal sheet encapsulating an OLED panel and increasing adhesion with a sealant, and an encapsulation device of an OLED panel having the same.

According to an aspect of the invention, the body is provided with a plurality of injection nozzles to form an activation area by irradiating plasma to the edge region of the metal sheet encapsulating the OLED panel; An electrode provided to face both sides of the plurality of injection nozzles and converting the discharge gas passing through the injection nozzles into plasma by a high voltage applied from the outside; And a discharge gas supply unit supplying a discharge gas to the injection nozzle.

The body may be provided in a rectangular annular shape so that the plasma can be irradiated to the edge region of the metal sheet at the same time.

The metal sheet may further include a non-contact mask provided under the inner portion of the activation area of the metal sheet in a non-contact state to prevent the plasma gas from entering the activation area.

The non-contact mask may include a blow hole formed at a side adjacent to the activation region of the metal sheet and blowing the plasma gas entering into the activation region.

The non-contact mask may include a suction hole formed at a side adjacent to the activation region of the metal sheet and sucking the plasma gas entering into the activation region.

A blowhole member is provided outside the activation region below the metal sheet to prevent a portion of the plasma gas from entering the activation region by blowing an outer region of the plasma gas irradiated to the activation region. can do.

It may further include a suction hole member provided outside the activation area under the metal sheet to prevent a portion of the plasma gas from entering the activation area by sucking the plasma gas irradiated to the activation area. .

The plurality of injection nozzles may be disposed below the inner side of the activation region so that the direction in which the plasma gas is injected toward the activation region is in a direction toward the outside of the metal sheet.

The body may further include a suction nozzle disposed at an outer lower portion of the activation area to suck plasma gases injected from the plurality of injection nozzles.

The body may further include a flow guide member disposed in an arc shape between the injection nozzle and the suction nozzle to guide the plasma gas injected from the injection nozzle to be sucked into the suction nozzle after contacting the activation area. .

According to another aspect of the invention, the protective film peeling chamber for peeling off the protective film from the metal sheet encapsulating the OLED panel; It is provided in the protective film peeling chamber, and after the protective film is peeled from the metal sheet, the activation to enable the sealant interposed between the OLED panel to be easily attached by irradiating plasma gas to the edge region of the metal sheet. A plasma generator forming a region; And an encapsulation chamber in which the metal sheet from which the protective film is removed and the OLED panel are bonded and encapsulated in a vacuum atmosphere.

The plasma generator may be provided in a rectangular annular shape and include a body in which a plurality of injection nozzles are formed.

The plasma generator may include an electrode provided to face both sides of the plurality of injection nozzles and converting the discharge gas passing through the injection nozzles into plasma by a high voltage applied from the outside; And a discharge gas supply unit supplying a discharge gas to the injection nozzle.

The plasma generator may further include a non-contact mask that is provided in a non-contact state with the metal sheet below the inside of the activation region of the metal sheet and prevents the plasma gas from entering into the activation region.

The non-contact mask may include a blow hole formed at a side adjacent to the activation region of the metal sheet and blowing the plasma gas entering into the activation region.

The non-contact mask may include a suction hole formed at a side adjacent to the activation region of the metal sheet and sucking the plasma gas entering into the activation region.

The plasma generator is provided outside the activation region under the metal sheet and blows an outer region of the plasma gas irradiated to the activation region to prevent a portion of the plasma gas from entering the activation region. It may further include a hole member.

The plasma generator may include a suction hole member provided outside the activation region under the metal sheet and sucking a portion of the plasma gas irradiated to the activation region to prevent a portion of the plasma gas from entering the activation region. It may further include.

The body may further include a suction nozzle disposed at an outer lower portion of the activation region to suck plasma gas injected from the plurality of injection nozzles.

Embodiments of the present invention can provide a plasma generator capable of activating a sealant attaching region of a metal sheet by one plasma gas irradiation to the metal sheet, and an encapsulation device of an OLED panel having the same.

1 is a plan view of a sealing device of an OLED panel according to a first embodiment of the present invention.
2 is a cross-sectional view taken along the line AA of FIG. 1.
3 is a schematic perspective view of the inside of the protective film peeling chamber.
4 is a schematic perspective view of a plasma generator.
5 is a cross-sectional structural view of the plasma generator of FIG. 4.
6 is a front view of the electrostatic chuck unit.
7 is a plan view of the electrostatic chuck unit.
8 is a schematic perspective view of the inside of the encapsulation chamber.
9 is a plan view of the LED curing unit.
10 is a cross-sectional structural view of the LED curing unit.
11 is a cross-sectional structural view of the plasma generator of the encapsulation device of the OLED panel according to the second embodiment of the present invention.
12 is a cross-sectional structure diagram of a plasma generator of an encapsulation device of an OLED panel according to a third embodiment of the present invention.
13 is a cross-sectional structural view of the plasma generator of the encapsulation device of the OLED panel according to the fourth embodiment of the present invention.
14 is a cross-sectional structural view of the plasma generator of the encapsulation device of the OLED panel according to the fifth embodiment of the present invention.

In order to fully understand the present invention, operational advantages of the present invention, and objects achieved by the practice of the present invention, reference should be made to the accompanying drawings and the accompanying drawings which illustrate preferred embodiments of the present invention.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. Like reference symbols in the drawings denote like elements.

1 is a plan view of an encapsulation device of an OLED panel according to a first embodiment of the present invention, Figure 2 is a cross-sectional view of the line AA of Figure 1, Figure 3 is a schematic perspective view of the inside of the protective film peeling chamber, Figure 4 is FIG. 5 is a schematic perspective view of the plasma generator of FIG. 4, FIG. 6 is a front view of the electrostatic chuck unit, FIG. 7 is a plan view of the electrostatic chuck unit, and FIG. 8 is a bag. 9 is a schematic perspective view of the interior of the chamber, FIG. 9 is a plan view of the LED curing unit, FIG. 10 is a cross-sectional view of the LED curing unit, and FIG. 12 is a cross-sectional structural view of a plasma generator of an OLED panel encapsulation device according to a third embodiment of the present invention, and FIG. 13 is a plasma generator of an encapsulation device of an OLED panel according to a fourth embodiment of the present invention. Sweet 14 is a cross-sectional structural view of the plasma generator of the encapsulation device of the OLED panel according to the fifth embodiment of the present invention.

Referring to these drawings, the encapsulation device according to the present embodiment is a protective film peeling chamber 100 for peeling a protective film (not shown) from the metal sheet (M) for sealing the OLED panel (P), the protective film is peeled off Load lock chamber 200 for transferring the metal sheet (M), the electrostatic chuck unit 210 provided in the load lock chamber 200 to support the metal sheet (M) by the electrostatic force adsorption, OLED panel (P) A dispenser chamber 300 for applying a sealant to a non-pixel forming region of the panel, a panel loading chamber 400 for transferring the OLED panel P transferred from the dispenser chamber to a vacuum atmosphere, and a panel loading chamber 400 The encapsulation chamber 500 and the encapsulation chamber 500 to bond the metal sheet M loaded through the OLED panel P and the load lock chamber 200 in a vacuum atmosphere, and the metal sheet M in the encapsulation chamber 500. It includes a panel unloading chamber 600 for unloading the OLED panel (P) is bonded.

As shown in FIG. 1, the encapsulation device 10 of the OLED panel according to the present embodiment includes a line for supplying the OLED panel P and a line for supplying the metal sheet M for encapsulating the OLED panel P. The OLED panel P, which is joined in the encapsulation chamber 500 and is encapsulated in the encapsulation chamber 500, is discharged through the panel unloading chamber 600.

1 to 3, the protective film peeling chamber 100 is for peeling the protective film from the metal sheet M to which the protective film is attached, and assists the electrostatic chuck unit 210 with the metal sheet M. Adsorption auxiliary unit 110 for adsorbing and supporting the separation, the peeling unit 120 for peeling the protective film from the metal sheet (M), and the plasma generator 130 for activating the outer region of the metal sheet (M) peeled off the protective film Accept.

As described above, the protective film attached to the metal sheet (M) is to prevent the metal sheet (M) from being damaged in the transfer process before bonding to the OLED panel (P), it is supplied to the encapsulation chamber (500) Prior to the removal from the metal sheet (M) to be removed.

Since the protective film is adhered to the metal sheet (M) by the adhesive, when the protective film is removed, the adhesion of the protective film and the metal sheet (M) has a large adsorption force of the electrostatic chuck unit 210 that absorbs the metal sheet (M). In this case, a problem may occur in which the metal sheet M is separated from the electrostatic chuck unit 210.

Adsorption auxiliary unit 110 is to prevent this, the suction nozzle 111 is inserted into the suction hole (213a) formed on one side of the electrostatic chuck 213 which will be described later, the lifting and lowering drive to drive the suction nozzle (111) It includes a lower driving unit 112, and a vacuum pump line 113 for providing a vacuum pressure to the suction nozzle (111).

Adsorption nozzle 111 is provided with a plurality of nozzles connected to the nozzle body (111a), it is provided with a conical nozzle that is smaller in diameter downward so as to be easily seated in the conical suction hole (213a). In addition, the distal end of the suction nozzle 111 may be provided with a flexible material so that the sealing with the suction hole (213a) can be made.

The elevating driving unit 112 and the vacuum pump line 113 are connected to an upper portion of the nozzle body 111a. The lifting lowering unit 112 lifts the suction nozzle 111 up and down by a motor or a hydraulic cylinder. When the suction nozzle 111 is coupled to the suction hole 213a, the suction nozzle 111 is connected through the vacuum pump line 113. Is provided with a vacuum pressure.

The peeling unit 120 is provided on the side opposite to the side on which the metal sheet M is loaded in the protective film peeling chamber 100, and the peeling roller 121 is attached to the protective film to remove the protective film from the metal sheet M. And, the peeling roller 121 is rotatably coupled to the moving member 123 for reciprocating the peeling roller 121 under the metal sheet (M) and the guide member for guiding the reciprocating motion of the moving member (123) ( 122).

An adhesive material is applied to the peeling roller 121 or an adhesive tape is attached. When the peeling roller 121 is attached to the protective film of the metal sheet M and rotates and returns to its original position by the moving member 123, the protective film is dried on the peeling roller 121 and peeled from the metal sheet M. do.

The moving member 123 is guided by the guide member 122 coupled to the protective film peeling chamber 100 and reciprocates under the electrostatic chuck 213. The moving member 123 is not shown in the reciprocating motion, it may be performed by a known drive motor or linear motor.

4 and 5, the plasma generator 130a is for forming an activation region A by irradiating plasma gas to the metal sheet M from which the protective film is removed, and having a body having a rectangular ring shape. 131, an electrode 132 embedded in the body 131, a voltage supply unit 133 for applying a high voltage to the electrode 132, a discharge gas supply unit 134 for supplying discharge gas to the body 131, and , And a non-contact mask 135 provided between the body 131 and the metal sheet.

The metal sheet M from which the protective film has been removed, for example, the metal sheet M made of stainless steel, has a smooth surface and is inferior in adhesion with the sealant which is a bonding material. The plasma generator 130a of this embodiment forms the activation region A by cleaning the surface and adjusting the surface roughness by irradiating the plasma gas along the region to which the sealant is to be attached.

The body 131 is provided in a rectangular ring shape corresponding to the shape of the activation region A to be formed on the lower surface of the metal sheet M. This is for forming the activation region A by one plasma gas irradiation by irradiating the plasma gas to the rectangular activation region A simultaneously.

Inside the body 131, a plurality of injection nozzles 131a are provided, in which discharge gas is converted into plasma gas and flows. The injection nozzle 131a is combined into one gas pipeline 131b at a lower portion thereof, and the discharge gas is supplied to the gas pipeline 131b through the discharge gas supply unit 134.

The electrode 132 includes a first electrode 132a and a second electrode 132b. The first electrode 132a is disposed at one side of the injection nozzle 131a and is connected to the voltage supply unit 133 to apply a high voltage, and the second electrode 132b is connected to the first electrode 132a at the other side of the injection nozzle 131a. 132a is spaced apart and grounded outside the body 131. The body 131 is formed of a dielectric that is an insulating material to insulate the first and second electrodes 132a and 132b from each other.

When the discharge gas is supplied to the injection nozzle 131a through the gas pipeline 131b and a high contact pressure is applied to the first electrode 132a, the injection nozzle 131a between the first and second electrodes 132a and 132b is used. Discharge occurs and the discharge gas is converted into plasma gas. The converted plasma gas is injected to the upper part of the miller by the discharge gas continuously supplied to the injection nozzle 131a. The injected plasma gas is irradiated to the activation region A of the metal sheet M.

Meanwhile, a portion of the plasma gas for forming the activation region A in the metal sheet M may also enter the metal sheet M inside the activation region A to damage the metal sheet M.

The non-contact mask 135 is disposed to be spaced apart from the metal sheet M by a mask support member (not shown). When the plasma gas is irradiated to the activation region A, the plasma gas is metal inside the activation region A. Prevents contact with the bottom of the sheet (M).

The blow hole 135a formed in the non-contact mask 135 is for blocking plasma gas from entering the gap between the non-contact mask 135 and the metal sheet M. The metal sheet such as air, oxygen, nitrogen, hydrogen ( A blocking gas which does not affect M) is injected from the non-contact mask 135 toward the activation region A. FIG. The blow hole 135a may be provided with a plurality of holes along the edge of the non-contact mask 135. Plasma gas may be injected from all four edges of the non-contact mask 135 by spraying the blocking gas into the non-contact mask 135 and the metal. It is prevented from entering the inside of the activation area A through the gap of the sheet M.

Referring back to FIGS. 1 and 2, the load lock chamber 200 is provided between the protective film peeling chamber 100 maintained at atmospheric pressure and the encapsulation chamber 500 maintained in a vacuum state, so that the metal sheet M It is a chamber in which atmospheric pressure or vacuum is optionally maintained during the transfer process. That is, when the electrostatic chuck 213 is located in the protective film peeling chamber 100 to adsorb the metal sheet M, the gate valve (not shown) of the protective film peeling chamber 100 is opened to protect the protective film peeling chamber. Maintaining the atmospheric pressure state as shown in (100), when the protective film peeling of the metal sheet (M) is finished and the electrostatic chuck 213 draws the metal sheet (M) into the load lock chamber 200, the gate valve is closed and the load lock chamber 200 is converted to a vacuum state in the same manner as the encapsulation chamber 500.

Referring to FIGS. 6 and 7 mainly, the electrostatic chuck unit 210 is accommodated in the load lock chamber 200 and absorbs the metal sheet M by the electrostatic force. The up-down drive motor 211 and the up-down drive And a multi-joint arm 212 connected to the motor 211 and an electrostatic chuck 213 connected to the articulated arm 212.

The up-down driving motor 211 operates when the metal sheet M is to be adsorbed from the protective film peeling chamber 100 or when the metal sheet M is adsorbed at a desired position, thereby operating the articulated arm 212. ) And the electrostatic chuck 213 are lowered.

The articulated arm 212 transfers the metal sheet M while the metal sheet M absorbed by the electrostatic chuck 213 is overlapped, bent or unfolded when being transferred from the protective film peeling chamber 100 to the encapsulation chamber 500. do. By providing the articulated arm 212, the electrostatic chuck 213 can transfer the metal sheet M in a narrow chamber space.

The electrostatic chuck 213 is coupled to the distal end of the articulated arm 212, and when the opposite polarity is applied to the main electrode 213a and the metal electrode 213b, the polarity of the metal electrode 213b is charged to the metal sheet M. The attraction between the metal sheet M and the electrostatic chuck 213 acts so that the metal sheet M is attracted to the electrostatic chuck 213, and the same polarity is applied between the metal sheet M and the electrostatic chuck 213. The repulsive force acts to separate the metal sheet M and the electrostatic chuck 213.

Looking at the supply process of the metal sheet (M) is passed through the protective film peeling chamber 100 and the load lock chamber 200 configured as described above and transferred to the encapsulation chamber 500 as follows.

When the metal sheet M having the protective film attached to the lower surface is loaded into the protective film peeling chamber 100 by a tray (not shown), the electrostatic chuck unit 210 has the electrostatic chuck 213 of the metal sheet M. It operates to be located at the top.

When the articulated arm 212 and the electrostatic chuck 213 are lowered by the operation of the up-down driving motor 211, and the electrostatic chuck 213 contacts the metal sheet M, a voltage is applied to the electrostatic chuck 213 to allow the metal. The sheet M is attracted to the electrostatic chuck 213.

When the electrostatic chuck 213 on which the metal sheet M is adsorbed again rises, the tray is conveyed, and the peeling roller 121 of the peeling unit 120 moves to the lower side of the metal sheet M. As shown in FIG.

At the same time, the adsorption auxiliary unit 110 is lowered to assist the electrostatic adsorption force of the electrostatic chuck 213. When the adsorption nozzle 111 of the adsorption auxiliary unit 110 is inserted into the adsorption hole 213c of the electrostatic chuck 213 and the vacuum pressure is provided to the adsorption nozzle 111, the electrostatic chuck 213 on one side of the metal sheet M. Electrostatic adsorption force of the) and the vacuum adsorption force of the adsorption auxiliary unit 110 is acted together. Thereby, when the protective film is peeled off from the metal sheet M, the metal sheet M is prevented from being separated from the electrostatic chuck 213.

Thereafter, when the peeling roll 121 is attached to the protective film to peel the protective film from the metal sheet M and return to the original position, the protective film peeling process of the metal sheet M is completed.

When the protective film of the metal sheet M is removed, the activation region A to which the sealant under the metal sheet M is attached is activated by irradiation of the plasma gas of the plasma generator 130. The metal sheet M after the activation process is introduced into the load lock chamber 200 by the electrostatic chuck unit 210 to maintain the standby state for bonding with the OLED panel P.

Meanwhile, while the preparation process of the metal sheet M for encapsulation of the OLED panel P is in progress, the OLED panel P passes through the dispenser chamber 300 and a sealant is coated.

Referring back to FIG. 1, a sealant coating unit 310 is provided in the dispenser chamber 300. The sealant coating unit 310 is slidably connected along the longitudinal direction of the X-axis guide member 311 and the pair of X-axis guide members 311 provided on both sides of the feed roller 11. And a sealant applicator 313 slidably connected in the longitudinal direction of the Y-axis guide member 312 to apply the sealant to the OLED panel P.

When the OLED panel P is loaded and stopped in the dispenser chamber 300 through the feed roller 11, the Y-axis guide member 312 and the sealant applicator 313 are respectively X-axis guide member 311 and Y. The sealant is applied to the non-formed portion of the OLED element, which is the outer region of the OLED panel P, sliding on the shaft guide member 312.

After the sealant coating process is completed, the OLED panel P is drawn into the panel loading chamber 400 by driving the transfer roller 11. When the OLED panel P is introduced, the panel loading chamber 400 closes the gate and is converted into a vacuum state such as the encapsulation chamber 500.

1, 2 and 8 together, the encapsulation chamber 500 is a metal sheet transferred by the OLED panel (P) and the electrostatic chuck unit 210 transferred from the panel loading chamber 400 in a vacuum atmosphere ( As the chamber for bonding M), the press unit 510 for pressing the metal sheet M in the direction of the OLED panel P, and the alignment unit 520 for aligning the metal sheet M and the OLED panel P. And a panel stage 530 provided below the press unit 510 to seat the OLED panel P, and an LED curing unit 540 for curing the sealant applied to the OLED panel P.

The alignment unit 520 checks the alignment state of the OLED panel P and the metal sheet M through the vision camera 521 provided on the panel stage 530. If the OLED panel P and the metal sheet M are not aligned, the alignment table 522 provided under the panel stage 530 is adjusted to rotate the panel stage 530 or move the X and Y axes. Align the metal sheet (M) and the OLED panel (P).

The press unit 510 is driven by the press driving motor 511, and the press member 512 connected to the press driving motor 511 to move up and down presses the metal sheet M to press the metal sheet M and the OLED. The panel P is bonded.

The panel stage 530 is a place where the OLED panel P coated with the sealant is seated, and the stage driving motor 532 is connected and driven up and down. The upper space of the panel stage 530 is a vacuum space 501, and the vacuum state is maintained during the encapsulation process.

Referring to FIGS. 1 and 2, 9, and 10, the LED curing unit 540 is accommodated in an atmospheric pressure space 531 inside the panel stage 530, and includes an LED lamp 541 and an LED lamp ( Quartz window 542 provided on the upper portion of the 541, and atmospheric pressure tube 543 for maintaining the space in which the LED lamp 541 is installed at atmospheric pressure state.

The LED lamp 541 is installed in the shape of a square ring along the edge of the inside of the panel stage 530, and irradiates ultraviolet rays to the region where the sealant of the OLED panel P is applied. By this structure, ultraviolet rays can be irradiated to four surfaces of the OLED panel P to which the sealant is applied, and the sealant can be cured at once.

The quartz window 542 protects the LED lamp 541 and seals between the atmospheric pressure space 531 in which the LED lamp 541 is installed and the upper space of the panel stage 530, that is, the vacuum space 501. The atmospheric pressure space 531 in which the LED lamp 541 is installed by the quartz window 542 is separated from the vacuum space 501 of the encapsulation chamber 500 maintained in a vacuum state during the process.

Atmospheric pressure pipe 543 is a space connecting the LED lamp 541 and the outside of the encapsulation chamber 500, the main pipe 543a is arranged in a rectangular ring shape along the space in which the LED lamp 541 is installed, It includes an auxiliary pipe 543b connecting the main pipe 543 and the space where the LED lamp 541 is installed.

Both ends of the main pipe 543a are provided to communicate with the outside of the encapsulation chamber 500, and the auxiliary pipe 543b is disposed at appropriate intervals to communicate the space in which the main pipe 543b and the LED lamp 541 are installed. Therefore, the space in which the LED lamp 541 is installed is maintained at atmospheric pressure through the auxiliary pipe 543b and the main pipe 543a.

Due to this configuration, the space in which the LED lamp 541 is installed is maintained at atmospheric pressure even during the process, unlike the vacuum space 501 of the encapsulation chamber 500 which is maintained in a vacuum state, so that the life of the LED lamp 541 is maintained in a vacuum state. The problem of sharp reduction is prevented, and the sealant interposed between the OLED panel P and the metal sheet M can be cured in a vacuum atmosphere.

The panel unloading chamber 600 is for carrying out the encapsulated OLED panel P to the outside. When the OLED panel P is transferred from the encapsulation chamber 500 under the same vacuum as the encapsulation chamber 500, the OLED The gate valve on the side of the encapsulation chamber 500 is closed so that the panel P can be taken out, and the state is switched to the atmospheric pressure state.

The encapsulation process of the OLED panel P in the encapsulation chamber 500 configured as described above is as follows.

The OLED panel P coated with the sealant in the dispenser chamber 300 is reduced in the panel loading chamber 400 and then transferred to the encapsulation chamber 500 through the transfer roller 11.

When the transferred OLED panel P is positioned on the panel stage 530, the panel stage 530 may be detached from the transfer roller 11 so as to be seated on the upper surface of the panel stage 530. To rise.

When the OLED panel P is seated on the panel stage 530, the metal sheet M from which the protective film is removed is absorbed by the electrostatic chuck 213 and transferred to the upper portion of the OLED panel P.

Thereafter, the alignment table 522 is adjusted according to the image information acquired by the vision camera 521 of the alignment unit 520 so that the OLED panel P and the metal sheet M are aligned.

When the OLED panel P and the metal sheet M are aligned, the panel stage 530 is raised until the OLED panel P and the metal sheet M contact. At this time, the OLED panel P and the metal sheet M are temporarily bonded by the sealant.

When the OLED panel P and the metal sheet M are temporarily bonded, the metal sheet M is separated from the electrostatic chuck 213, and then the electrostatic chuck 213 returns to the load lock chamber 200.

When the electrostatic chuck 213 returns to the load lock chamber 200, the press member 512 of the press unit 510 is lowered to press the metal sheet M so that the OLED panel P and the metal sheet M are pressed. Are cemented.

Thereafter, when the sealant is cured through the LED curing unit 540, the encapsulation process of the OLED panel P is completed.

The OLED panel P, which has been sealed, is transferred to the panel unloading chamber 600. When the panel unloading chamber 600 is switched to the atmospheric pressure state, the OLED panel P is transferred to the panel unloading chamber by the feed roller 11. It is taken out from 600.

11 to 14 show modified embodiments of the plasma generators 130b to 130e of the encapsulation device 10 of the OLED panel according to the second to fifth embodiments of the present invention.

Referring to FIG. 11, the plasma generator 130b of the encapsulation device 10 of the OLED panel according to the second embodiment of the present invention includes a non-contact mask 136 having a suction hole 136a formed therein. Since the configuration other than the plasma generator 130b is the same as that of the first embodiment of the present invention, only a configuration different from the first embodiment of the present invention will be described below.

The suction hole 136a sucks the plasma gas before the plasma gas enters into the activation area A through the gap between the non-contact mask 136 and the metal sheet M, so that the plasma gas is absorbed into the metal inside the activation area A. The contact with the sheet M is prevented. Although not shown in the suction hole 136a, a pump providing a suction pressure may be connected.

Referring to FIG. 12, the plasma generator 130c of the encapsulation device 10 of the OLED panel according to the third embodiment of the present invention includes a suction hole member 137 having a suction hole 137a formed therein.

The suction hole member 137 is disposed outside the activation region A. When the plasma gas is irradiated to the activation region A, the suction gas member 137 sucks the plasma gas through the suction hole 137a so that the plasma gas is activated. It is prevented from entering the inside of the activation area A after contacting.

Referring to FIG. 13, the plasma generator 130d of the encapsulation device 10 of the OLED panel according to the fourth embodiment of the present invention includes a blowhole member 138 in which a blowhole 138a is formed.

The blowhole member 138 is disposed outside the activation region A, and when the plasma gas is irradiated to the activation region A, the blocking gas is directed toward the outside of the activation region A through the blowhole 138a. Spray at high speed in diagonal direction. At this time, the pressure of the outer periphery of the activation area A drops to change the course of the plasma gas in contact with the activation area A, thereby preventing the plasma gas from entering the activation area A.

Referring to FIG. 14, in the fifth embodiment of the present invention, the plasma generator 130e according to the encapsulation device 10 of the OLED panel includes a body 131b formed with a spray nozzle 139a and a suction nozzle 139b. Include.

The injection nozzle 139a is provided to be positioned inside the lower portion of the activation region A, and injects the plasma gas toward the outside of the activation region A. FIG. The exit direction of the injection nozzle 139a may be provided to be inclined toward the activation area A.

The suction nozzle 139b is provided to be positioned below the outer side of the activation region A, and sucks the plasma gas injected from the injection nozzle 139a. The suction nozzle 139b may be provided to be inclined toward the activation region A so as to easily suck the plasma gas.

Flow guide member 139c between the injection nozzle 139a and the suction nozzle 139b so that the plasma gas injected from the injection nozzle 139a can naturally flow into the suction nozzle 139b after contacting the activation area A. Can be attached. The flow guide member 139c is provided in the form of an arc connecting the injection nozzle 139a and the suction nozzle 139b, and may be formed integrally with the body 131b.

With this configuration, the plasma gas injected from the injection nozzle 139a contacts the activation region A and is sucked into the suction nozzle 139b so that the plasma gas contacts the metal sheet M inside the activation region A. Is prevented.

It will be apparent to those skilled in the art that the present invention described above is not limited to the described embodiments, and various modifications and variations can be made without departing from the spirit and scope of the present invention. Accordingly, such modifications or variations are intended to fall within the scope of the appended claims.

100: protective film peeling chamber 110: adsorption auxiliary unit
111: suction nozzle 112: elevating drive unit
113: vacuum pump line 120: separation unit
121: peeling roller 122: guide member
123: moving member 130a: plasma generator
131: body 132: electrode
133: discharge gas supply unit 134: voltage supply unit
135: non-contact mask 200: load lock chamber
210: electrostatic chuck unit 211: electrostatic chuck drive motor 212: articulated arm 213: electrostatic chuck
213a: adsorption hole 300: dispenser chamber
310: sealant coating unit 311: X-axis guide member
312: Y-axis guide member 313: dispenser
400: panel loading chamber 500: encapsulation chamber
510: press unit 511: press driving unit
512: press member 520: alignment unit
521: vision camera 522: alignment table
530: panel stage 531: stage elevating drive unit
540: LED curing unit 541: LED lamp
542: quartz window 543: atmospheric pressure tube

Claims (19)

A body having a plurality of injection nozzles formed therein to irradiate plasma to an edge region of the metal sheet encapsulating the OLED panel to form an activation region;
An electrode provided to face both sides of the plurality of injection nozzles and converting the discharge gas passing through the injection nozzles into plasma by a high voltage applied from the outside; And
It includes a discharge gas supply unit for supplying a discharge gas to the injection nozzle,
The body is provided in a rectangular annular shape so that the plasma can be irradiated to the edge region of the metal sheet at the same time,
And a non-contact mask provided in the inner lower portion of the activation region of the metal sheet in a non-contact state with the metal sheet to prevent the plasma gas from entering the activation region. delete delete The method of claim 1,
And the non-contact mask is formed on a side adjacent to the activation region of the metal sheet, and includes a blow hole for blowing the plasma gas entering the activation region. The method of claim 1,
The non-contact mask is formed on the side adjacent to the activation region of the metal sheet, the plasma generator comprising a suction hole for sucking the plasma gas entering into the activation region. A body having a plurality of injection nozzles formed therein to irradiate plasma to an edge region of the metal sheet encapsulating the OLED panel to form an activation region;
An electrode provided to face both sides of the plurality of injection nozzles and converting the discharge gas passing through the injection nozzles into plasma by a high voltage applied from the outside; And
It includes a discharge gas supply unit for supplying a discharge gas to the injection nozzle,
The body is provided in a rectangular annular shape so that the plasma can be irradiated to the edge region of the metal sheet at the same time,
A blowhole member is provided outside the activation region below the metal sheet to prevent a portion of the plasma gas from entering the activation region by blowing an outer region of the plasma gas irradiated to the activation region. Plasma generator, characterized in that. A body having a plurality of injection nozzles provided therein to form an activation area by irradiating plasma to the edge region of the metal sheet encapsulating the OLED panel;
An electrode provided to face both sides of the plurality of injection nozzles and converting the discharge gas passing through the injection nozzles into plasma by a high voltage applied from the outside; And
It includes a discharge gas supply unit for supplying a discharge gas to the injection nozzle,
The body is provided in a rectangular annular shape so that the plasma can be irradiated to the edge region of the metal sheet at the same time,
And a suction hole member disposed outside the activation region below the metal sheet and preventing a portion of the plasma gas from entering the activation region by sucking the plasma gas irradiated to the activation region. Plasma generator. delete delete delete A protective film peeling chamber for peeling off the protective film from the metal sheet encapsulating the OLED panel;
It is provided in the protective film peeling chamber, and after the protective film is peeled from the metal sheet, the activation to enable the sealant interposed between the OLED panel to be easily attached by irradiating plasma gas to the edge region of the metal sheet. A plasma generator forming a region; And
And an encapsulation chamber in which the metal sheet and the OLED panel from which the protective film is removed are bonded and encapsulated in a vacuum atmosphere.
The plasma generator is provided in a rectangular ring shape, and includes a body in which a plurality of injection nozzles are formed,
The plasma generator,
And a non-contact mask provided in the inner lower portion of the activation area of the metal sheet in a non-contact state with the metal sheet to prevent the plasma gas from entering the activation area. delete 12. The method of claim 11,
The plasma generator,
An electrode provided to face both sides of the plurality of injection nozzles and converting the discharge gas passing through the injection nozzles into plasma by a high voltage applied from the outside; And
The encapsulation device of an OLED panel further comprising a discharge gas supply unit for supplying a discharge gas to the injection nozzle. delete 12. The method of claim 11,
The non-contact mask is formed on the side adjacent to the activation area of the metal sheet, the encapsulation device of an OLED panel, characterized in that it comprises a blow hole for blowing the plasma gas entering into the activation area. 12. The method of claim 11,
The non-contact mask is formed on the side adjacent to the activation area of the metal sheet, the sealing device of the OLED panel, characterized in that it comprises a suction hole for sucking the plasma gas entering into the activation area. A protective film peeling chamber for peeling off the protective film from the metal sheet encapsulating the OLED panel;
It is provided in the protective film peeling chamber, and after the protective film is peeled from the metal sheet, the activation to enable the sealant interposed between the OLED panel to be easily attached by irradiating plasma gas to the edge region of the metal sheet. A plasma generator forming a region; And
And an encapsulation chamber in which the metal sheet and the OLED panel from which the protective film is removed are bonded and encapsulated in a vacuum atmosphere.
The plasma generator is provided in a rectangular ring shape, and includes a body in which a plurality of injection nozzles are formed,
The plasma generator,
A blowhole member is provided outside the activation region below the metal sheet to prevent a portion of the plasma gas from entering the activation region by blowing an outer region of the plasma gas irradiated to the activation region. The encapsulation device of an OLED panel. A protective film peeling chamber for peeling off the protective film from the metal sheet encapsulating the OLED panel;
It is provided in the protective film peeling chamber, and after the protective film is peeled from the metal sheet, the activation to enable the sealant interposed between the OLED panel to be easily attached by irradiating plasma gas to the edge region of the metal sheet. A plasma generator forming a region; And
And an encapsulation chamber in which the metal sheet and the OLED panel from which the protective film is removed are bonded and encapsulated in a vacuum atmosphere.
The plasma generator is provided in a rectangular ring shape, and includes a body in which a plurality of injection nozzles are formed,
The plasma generator,
And a suction hole member disposed outside the activation region below the metal sheet and preventing a portion of the plasma gas from entering the activation region by sucking the plasma gas irradiated to the activation region. OLED panel encapsulation device.

delete

Images