KR20060055483A - Apparatus for encapsulation of organic electroluminescent devices - Google Patents

Abstract

The present invention discloses an organic electroluminescent display device encapsulation device.

The organic electroluminescent display device encapsulation device according to the present invention is an inline cross type organic electroluminescent display device encapsulation device for encapsulating a deposited substrate on which deposition is completed, wherein the glass cans are transferred in a vacuum to be disposed in a straight line. And a transfer chamber for linearly reciprocating the tray by the main cylinder, a can charging chamber disposed at one end of the transfer chamber, and optionally maintaining a vacuum state when charging of the glass can is performed by the robot, and the other end of the transfer chamber. A carrying-out chamber in which the disposed and encapsulated element is carried out and optionally maintained in a vacuum state, a plasma pretreatment chamber disposed at one side of the can charging chamber and removing foreign matter from the glass can transferred along the tray of the transfer chamber; Is disposed on one side of the plasma processing chamber A getter chamber for attaching a moisture absorbent to the glass can transferred along the tray of the burr, a dispenser chamber disposed on one side of the getter chamber and applying a sealing agent to the glass can transferred along the tray of the transfer chamber, and the dispenser chamber A decompression chamber disposed at one side to remove foreign substances and generated gases present in the glass can transferred along the tray of the transfer chamber at a reduced pressure; and a deposition substrate disposed on one side of the decompression chamber is loaded by a robot and optionally Sealing agent of glass can by bonding the substrate charging chamber to charge the deposition substrate toward the transfer chamber while maintaining the vacuum state, and the glass can and the deposition substrate disposed on one side of the substrate charging chamber and transferred along the tray of the transfer chamber. An ultraviolet irradiation chamber which irradiates and hardens | cures an ultraviolet-ray is comprised.

The organic electroluminescent display element encapsulation device configured as described above is arranged in an inline form, and thus, each process is performed in sequence so that continuous encapsulation is possible for a long time. As it can be shortened, it provides a very useful effect in the industry to increase productivity and lower manufacturing costs.

Organic, EL, manufacturing equipment, evaporation, encapsulation, light emitting substrate

Description

Apparatus for encapsulation of organic electroluminescent devices

1 is a plan view for explaining the configuration of the organic electroluminescent display device deposition apparatus according to the prior art,

2 is a system configuration diagram for explaining the configuration of the organic light emitting display device encapsulation device according to the present invention.

<Explanation of symbols for the main parts of the drawings>

1: organic electroluminescent display element encapsulation device

10 transfer chamber 11: tray

15: main cylinder 20: can charging chamber

30: carrying out chamber 40: plasma pretreatment chamber

50: getter chamber 60: dispenser chamber

70: decompression chamber 80: substrate charging chamber

90: ultraviolet irradiation chamber t: transfer chamber

ts: sub cylinder gc: glass can

ep: evaporation substrate lp: light emitting substrate

The present invention relates to a device for encapsulating an organic light emitting display device, and more particularly, a light emitting substrate that has completed a deposition process can be disposed in an inline form to be encapsulated in a sequential process, thereby enabling rapid continuous deposition over a long period of time. The present invention relates to an organic electroluminescent display device encapsulation device capable of ensuring ease of upgrade.

Recently, various flat panel display devices that can reduce the weight and volume, which are disadvantages of cathode ray tubes, have been developed. Such flat panel display devices include a liquid crystal display (LCD) and a field emission display device. (Field Emission Display (FED)), Plasma Display Panel (PDP) and Electro-luminescence (EL) display elements.

Here, the PDP is most advantageous for large screens because of its relatively simple structure and manufacturing process, but has a disadvantage of low luminous efficiency, low luminance, and high power consumption. As it is mainly used as a display device of a computer, the demand is increasing, but it is difficult to make a large screen and the power consumption is large due to the backlight unit. There was a narrow problem. In contrast, EL display devices are classified into organic ELs and inorganic ELs, and have advantages of fast response speed and high luminous efficiency, luminance, and viewing angle. At this time, the organic electroluminescent display element which is an organic EL can display an image with a high luminance of tens of thousands [cd / m 2] at a voltage of about 10 [V].

In general, an organic light emitting display device emits light when electrons and holes are paired and extinguished when charge is injected into an organic film formed between an electron injection electrode (cathode) and a hole injection electrode (anode). The device is characterized in that the power consumption is relatively low.

That is, the organic light emitting display device is a flat panel display using a phenomenon in which when the direct current voltage is applied to the laminated thin film of the organic material, the electrical energy is converted into light energy and emits light.

The organic EL display, which has been commercialized until recently, uses a low molecular weight organic light emitting material, and since the low molecular weight organic light emitting material is weak to moisture or high energy particles, the thin film formation of the organic light emitting layer or the cathode metal electrode is used as a shadow mask. The pattern is formed by vacuum evaporation using).

 Looking at the manufacturing process of such an organic EL (electroluminesecence) display device as follows.

First, an anode on which a transparent conductive film made of indium tin oxide (ITO) is formed is formed on an upper surface of a glass substrate having insulation and transparency. In addition, a hole injection layer is formed on the upper surface of the anode, and a hole transport layer is deposited on the upper surface of the hole injection layer. Then, the iron emission layer is formed on the upper surface of the hole transport layer. At this time, a dopant, which is a kind of impurity, is added to the organic light emitting layer as necessary. Subsequently, the metallization compound layer alkali metal or alkaline metal is deposited on the upper surface of the electron injection layer to improve the injection of electrons. And finally to form a cathode using a metal on the metal layer.

In this case, since the organic light emitting layer generally has pi electrons, the organic light emitting layer interacts with water molecules. Therefore, moisture in the air, or moisture already attached to the substrate, gradually attacks the electrode and the organic thin film even if it is simply stored without driving the device to form a dark spot.

Thus, the biggest problem of an organic electroluminescent display element is improvement of durability, and the biggest problem is the generation | occurrence | production of the non-light-emitting part called said black spot and prevention of the growth.

In particular, it is known that even a very small amount of moisture has a great effect. Therefore, in order to mass-produce the organic EL display element, it is very important to purify the material so that there is no moisture in the material. For this purpose, the organic electroluminescent display element is sealed in a chamber, and each material is deposited under vacuum to maximize the moisture in the air. I'm blocking it.

In addition, in the method of depositing the organic light emitting display device, a source loaded with an organic material in the chamber is loaded, vacuum evacuated through pumping, and heat is applied to the source to evaporate the deposition material to deposit on the substrate.

For this reason, once loaded ITO substrate is processed in an inert gas atmosphere excluding water and oxygen even during the deposition process and the encapsulation process. To this end, satellite-type equipment is mainly used in which a processor chamber is attached around a single transfer chamber.

1 is a planar schematic diagram showing an example of an organic light emitting display device deposition apparatus according to the prior art.

As shown in the drawing, the glass substrate stored in the substrate storage chamber 100 was taken out from the transfer chamber 200 located at the center by the vacuum transfer robot 300 and fed to the pretreatment chamber 400, and the pretreatment chamber 400. In the pre-treatment prior to performing the vacuum deposition, and then again by the transfer robot 300 of the transfer chamber 200, it is distributed to several deposition chambers (500, 600, 700, 800) and distributed, and in each of the deposition chambers (500, 600, 700, 800) The vacuum deposition process is performed to form a plurality of laminated thin films on the glass substrate, and when the vacuum deposition process is completed, the transport robot 300 of the transport chamber 200 is supplied to the feed chamber 900 to perform the next process.

In addition, in the case of vacuum deposition on glass substrates in various deposition chambers 500, 600, 700, and 800, these deposition chambers 500, 600, 700, and 800 have a glass substrate equipped with a shadow mask on a single stage and are fixed in several stages. The vacuum deposition process is sequentially performed. The vacuum deposition process is performed independently, and vacuum deposition is performed inside each of the deposition chambers 500, 600, 700, and 800 which are single stages.

In the light emitting substrate manufactured through the above process, the fluorescent organic solid, which is a material of the light emitting layer, is vulnerable to moisture and oxygen. In particular, characteristics of the electrode formed directly on the light emitting layer or through the hole injection layer / electron injection layer are degraded due to oxidation. There is a tendency. As a result, when the conventional organic EL element is driven in the air, its luminescence properties deteriorate rapidly. Therefore, in order to obtain an organic EL element that can be actually used in the field, it is necessary to encapsulate the organic EL element so that moisture, oxygen, or the like does not enter the light emitting layer, thereby extending the life.

As a sealing structure commonly applied in the related art, a structure in which resin or the like is directly applied to an organic EL element or a structure in which a gas or a liquid is filled in the encapsulation space is used. Stainless steel (hereinafter, Sus Can) was used as an encapsulant.

However, the encapsulation device according to the prior art has a disadvantage in that it is impossible to install the additional chamber as it is provided in a form very different from the above-described deposition apparatus, resulting in an increase in equipment cost and a decrease in production speed.

In addition, there is a disadvantage in that it is virtually impossible to add a chamber for process change and increase yield, and when attaching several additional chambers to one chamber, the overall size becomes excessively large, and the arm of the transfer robot needs to be lengthened. In addition, each additional chamber had a transfer robot, which resulted in a cost increase.

In addition, as the interval between each chamber is narrow, not only the monitoring of the process during production is difficult, but there is a problem in that it takes a lot of time for maintenance.

The present invention was created in order to solve the above problems, the encapsulation process is carried out in an in-line structure during the encapsulation process to improve productivity while minimizing the time required for maintenance (maintenance) and facilitate the further work of the process It is an object of the present invention to provide an organic electroluminescent display device encapsulation device.

An organic electroluminescent display device encapsulation device according to an embodiment of the present invention for achieving the above object, in the in-line cross-type organic electroluminescent display device encapsulation device for encapsulating the deposition substrate is completed,

A transfer chamber in which the glass can and the deposition substrate are transferred in a vacuum state and arranged in a straight line to linearly reciprocate the tray by the main cylinder; When the glass can is placed at one end of the transfer chamber and the glass can is charged by the robot, the can charging chamber is selectively maintained in the vacuum state and the encapsulated element is carried out at the other end of the transfer chamber. A discharge chamber maintained; A plasma pretreatment chamber disposed at one side of the can charging chamber and removing foreign matters from the glass can transferred along the tray of the transfer chamber; A getter chamber disposed at one side of the plasmman pretreatment chamber and attaching a moisture absorbent to the glass can transferred along the tray of the transfer chamber; A dispenser chamber disposed at one side of the getter chamber to apply a sealing agent to a glass can transferred along a tray of the transfer chamber; A decompression chamber disposed at one side of the dispenser chamber to remove foreign substances and gas generated in the glass can transferred along the tray of the transfer chamber at a reduced pressure; A substrate charging chamber disposed at one side of the decompression chamber and configured to charge the deposition substrate by a robot and to selectively deposit the deposition substrate toward the transfer chamber while maintaining a vacuum state; It is characterized in that it comprises an ultraviolet irradiation chamber which is disposed on one side of the substrate charging chamber to bond the glass can and the deposition substrate transported along the tray of the transfer chamber to irradiate and cure the sealing agent of the glass can with ultraviolet rays. do.

As a preferable feature of the present invention, the transfer chamber is configured to move the substrate to the front end of each process chamber by linearly reciprocating a tray placed in a constant track using a main cylinder.

In another preferred embodiment of the present invention, the can charging chamber, the carrying chamber, the plasma pretreatment chamber, the getter chamber, the dispenser chamber, the decompression chamber, the charging chamber, and the ultraviolet irradiation chamber are alternately arranged on both sides of the transfer chamber. The transfer chamber provided with the sub cylinder which transfers and unloads a board | substrate on a tray into each chamber at the position facing to this is further comprised.

As another preferable feature of the present invention, the transfer chamber is configured to transfer and convey the substrate into the chamber by arranging a sub cylinder in a direction perpendicular to the tray moving direction of the transfer chamber.

The features and advantages of the present invention will become more apparent from the following detailed description based on the accompanying drawings. Prior to this, the terms or words used in the present specification and claims are consistent with the technical spirit of the present invention based on the principle that the inventor can appropriately define the concept of the term in order to explain the invention in the best way. It must be interpreted as meaning and concept.

Hereinafter, an embodiment of an organic light emitting display device encapsulation device according to the present invention will be described with reference to the accompanying drawings.

2 is a system configuration diagram for explaining the configuration of the organic light emitting display device encapsulation device according to the present invention.

As shown therein, the organic electroluminescent display device encapsulation device 1 of the present invention is to ensure the ease of equipment upgrade while encapsulating the evaporation substrate on which deposition has been completed continuously, and to transport the evaporation substrate. The transfer chamber 10 is provided in a straight structure having a predetermined length, and the cans are loaded for carrying out the light emitting substrate lp, which has completed the loading and sealing process of the glass cans gs, at both ends of the transfer chamber 10. The chamber 20 and the carrying-out chamber 30 are provided, and the chambers for arranging a plurality of encapsulation processes and deposition substrates are arranged on both sides of the transfer chamber 10.

Here, each of the chambers is maintained in a vacuum state by a vacuum means such as a known vacuum pump, but a charging chamber for charging a glass can, a substrate charging chamber 80 for charging a deposited vapor deposition substrate, and a glass can (gs). The carrying-out chamber 30 for carrying out the light emitting substrate lp encapsulating the deposition substrate is selectively configured to maintain a vacuum state. Since the structure for the vacuum of each of these chambers may be implemented by known techniques, detailed description thereof will be omitted.

That is, the organic electroluminescent display device encapsulation device 1 of the present invention is characterized in that a straight transfer chamber 10 having a tray 11 for transporting the substrate in a vacuum state, and the respective chambers in which the encapsulation process is performed. Simplified transfer and transfer paths by intersecting the left and right centers of the straight transfer chamber 10, and using the tray 11 and the main cylinder 15 instead of the transfer robot, glass cans (gs) and deposition substrates ( ep) to implement rapid conveyance and conveyance.

The transfer chamber 10 includes a tray 11 for linear reciprocating movement for transferring glass cans in a vacuum state, wherein the tray 11 is the length of the transfer chamber 10 by the main cylinder 15. Forward and backward reciprocating movement based on the direction. That is, the transfer chamber 10 linearly reciprocates the tray 11 placed on a predetermined track using the main cylinder 15 arranged in the longitudinal direction to move the glass cans gs to the front end of each process chamber. At this time, the tray 11 is a structure arranged in a number of straight lines as shown in the figure.

The transfer chamber 10 configured as described above is linearly moved by the main cylinder 15 when the glass cans gs are placed on the tray 11, and then moved to the front end of the chamber of the next process. When the sub cylinder ts of the transfer chamber t provided at the position opposite to advances toward the transfer chamber 10, the transfer of the glass cans gs on the tray 11 into the chamber is completed. 11) the position return is made by the main cylinder (15).

The can charging chamber 20 is for charging the glass can gs to the transfer chamber 10 side by a robot and is disposed at one end of the transfer chamber 10 to selectively maintain a vacuum state. When the can charging chamber 20 receives the glass cans gs from the outside through the robot in the state in which the vacuum is released, the can charging chamber 20 maintains the vacuum state while maintaining the vacuum state. gs).

At this time, the transfer chamber t having a sub cylinder ts for transferring the glass can gs in the can charging chamber 20 to the transfer chamber 10 is located at an opposite position of the can charging chamber 20. Is installed.

The carrying-out chamber 30 is for discharging the light emitting substrate lp, which is disposed at the opposite end of the transfer chamber 10 in which the can charging chamber 20 is installed, to the outside, and with the can charging chamber 20 described above. Likewise, when the transfer chamber 10 is converted into a sealed state after receiving the light emitting substrate lp sealed from the transfer chamber 10 in the vacuum state, the vacuum is released to carry out the light emitting substrate lp. Like the can charging chamber 20, the transfer chamber 30 is also provided with a transfer chamber t at an opposite position to receive the light emitting substrate lp on the transfer chamber 10.

Meanwhile, the encapsulation process is substantially performed between the can charging chamber 20 and the carrying out chamber 30, and a plasma pretreatment chamber 40 for removing foreign matters on the surface of the glass can using plasma and pretreatment. The getter chamber 50 attaching a sheet-type absorber to the finished glass cans gs, and the dispenser chamber 60 applying a UV epoxy sealing agent to the glass cans gs attached to the absorber, and pressure Lowering the pressure reducing chamber 70 to remove the foreign substances and the gas present in the glass can (gs) attached to the moisture absorbent and the substrate loading chamber 80 to enter the deposition substrate (ep) completed the deposition process in the encapsulation process Then, the deposition substrate (ep) and the glass can (gs) is bonded to the ultraviolet irradiation chamber 90 to cure the applied UV epoxy by irradiating ultraviolet rays to seal the product is a structure arranged sequentially.

In addition, since each said chamber may be implemented by a well-known technique, detailed description is abbreviate | omitted. However, the chambers which substantially perform the encapsulation process are alternately arranged at both sides with respect to the transfer chamber 10, and the substrates on the tray 11 are transferred to each corresponding chamber at a position opposite to each chamber. The transfer chamber t provided with the sub cylinder ts is additionally comprised.

Here, the transfer chamber t has a structure in which the sub cylinder ts is disposed in a direction perpendicular to the moving direction of the tray 11 of the transfer chamber 10 to transfer and transport the substrate into the chamber.

Referring to the operation of the organic light emitting display device encapsulation device 1 of the present invention configured as described above are as follows.

First, after the glass can gs is charged by the robot into the can charging chamber 20 in which the vacuum is released, the can charging chamber 20 is sealed and converted into a vacuum state. In such a vacuum state, the glass cans gs positioned in the can charging chamber 20 are transferred to the tray 11 provided in the transfer chamber 10, and the transfer operation of the glass cans gs is performed in the can charging chamber. It is implemented by the sub cylinder ts of the transfer chamber t provided in the position which opposes 20 and the transfer chamber 10 between them.

Subsequently, the tray 11 of the transfer chamber 10 is moved forward by the operation of the main cylinder 15 to guide the front end of the plasma pretreatment chamber 40.

The glass cans gs transferred to the front end of the plasma pretreatment chamber 40 are plasma pretreatment chamber 40 by a sub cylinder ts of the transfer chamber t provided at a position facing the plasma pretreatment chamber 40. ), Surface cleaning is performed through plasma pretreatment, and returned to the tray 11 of the transfer chamber 10.

At this time, when the glass can gs is charged into the plasma pretreatment chamber 40, the tray 11 returns to the position by the operation of the main cylinder 15. Therefore, the glass cans gs finished plasma pretreatment as described above are placed in the tray 11 located in front of the previous tray 11.

Meanwhile, as described above, the glass can gs moved by the main cylinder 15 and the sub-cylinders ts of the transfer chamber t and the surface of the glass can gs is cleaned by plasma absorbs moisture to remove moisture from the outside. It is transferred to the getter chamber 50 for attaching.

In other words, the glass can gs placed on the tray 11 of the transfer chamber 10 is provided at a position facing the getter chamber 50 while being transferred to the front end of the getter chamber 50. It is transferred to the interior of the getter chamber 50 by the sub-cylinder (ts) of the sheet-shaped moisture absorbent is attached.

These glass cans gs are conveyed to the tray 11 of the transfer chamber 10 and transferred to the front end of the dispenser chamber 60 to likewise serve the sub chambers of the transfer chamber t provided at positions opposite to the dispenser chamber 60. It is conveyed to the inside of the dispenser chamber 60 by the cylinder ts.

Glass cans (gs) with a moisture absorbent attached to the inside of the dispenser chamber 60 are coated with a sealant made of UV epoxy, and after the coating process is finished, the glass cans (gs) are transferred back to the tray 11 of the transfer chamber 10. .

Subsequently, the glass epoxy gs coated with the UV epoxy moves to the front end of the decompression chamber 70 by the forward movement of the tray 11, and in this state, the glass can gs is the decompression chamber 70. ) Is transferred to the inside of the decompression chamber 70 by the sub cylinder ts of the transfer chamber t provided at the position facing the). Here, the decompression chamber 70 lowers the pressure inside the chamber to remove foreign substances and gas generated in the glass can gs.

In this way, the glass can gs from which the foreign matter and the generated gas have been removed by the reduced pressure is conveyed to the tray 11 of the transfer chamber 10.

At this time, the substrate charging chamber 80 disposed on one side of the decompression chamber 70 transfers the deposition substrate ep having completed the deposition process to the tray 11 of the transfer chamber 10. Here, the substrate charging chamber 80 is connected to the deposition apparatus and a glove box, which is a kind of passage, so that 15 to 20 deposition substrates (ep) are placed on one cassette, and such glove boxes and cassettes are known in the art. The detailed description is omitted since it is used.

On the other hand, the glass can (gs) passing through the decompression chamber 70 and the deposition substrate (ep) transferred to the tray 11 of the transfer chamber 10 through the substrate charging chamber 80 is the ultraviolet irradiation chamber 90 Is transferred to. At this time, the ultraviolet irradiation chamber 90 is irradiated with ultraviolet rays to the glass can (gs) to cure the UV epoxy as a sealing material to seal the glass can (gs) in a state in which one surface of the evaporation substrate (ep) is blocked from the outside.

As described above, the light emitting substrate lp in which the encapsulation process is completed in the ultraviolet irradiation chamber 90 is transferred to the transfer chamber 10 by a sub cylinder ts of a transfer chamber t provided opposite the ultraviolet irradiation chamber 90. The light emitting substrate lp thus conveyed is guided to the front end of the unloading chamber 30 by the forward movement of the tray 11.

Subsequently, the light emitting substrate lp is transferred to the discharging chamber 30 by the sub cylinder ts of the transfer chamber t located opposite the discharging chamber 30, and the discharging chamber 30 is in a vacuum state. The light emitting substrate lp is released to the outside by releasing the encapsulation.

Therefore, in the organic light emitting device encapsulation device 1 of the present invention, the transfer chamber 10 is disposed in a straight line while having a predetermined length, and the respective chambers are alternately arranged on both sides of the transfer chamber 10. It is possible to encapsulate for a long time by the configuration, and easy to replace and expand the chamber.

On the other hand, the present invention is not limited to the described embodiments, it is apparent to those skilled in the art that various modifications and variations can be made without departing from the spirit and scope of the present invention. Therefore, such modifications or variations will have to belong to the claims of the present invention.

The organic electroluminescent display device encapsulation device constructed and operated as described above is arranged in an inline form, and thus, each process is performed in sequence, so that continuous encapsulation is possible for a long time. Significantly shortening can provide a very useful effect in the industry to increase productivity and lower manufacturing costs.

In addition, since the transfer chamber is arranged in an in-line form and each chamber for the encapsulation process is arranged on both sides thereof, there is an advantage in that the monitoring of the entire apparatus is easy and the maintenance is easy in the event of an apparatus abnormality.

Claims (4)

An inline cross type organic light emitting display device encapsulation device for encapsulating an evaporation substrate on which deposition is completed, A transfer chamber in which the glass can and the deposition substrate are transferred in a vacuum state and arranged in a straight line to linearly reciprocate the tray by the main cylinder; When the glass can is placed at one end of the transfer chamber and the glass can is charged by the robot, the can charging chamber is selectively maintained in the vacuum state and the encapsulated element is carried out at the other end of the transfer chamber. A discharge chamber maintained; A plasma pretreatment chamber disposed at one side of the can charging chamber and removing foreign matters from the glass can transferred along the tray of the transfer chamber; A getter chamber disposed at one side of the plasmman pretreatment chamber and attaching a moisture absorbent to the glass can transferred along the tray of the transfer chamber; A dispenser chamber disposed at one side of the getter chamber to apply a sealing agent to a glass can transferred along a tray of the transfer chamber; A decompression chamber disposed at one side of the dispenser chamber to remove foreign substances and gas generated in the glass can transferred along the tray of the transfer chamber at a reduced pressure; A substrate charging chamber disposed at one side of the decompression chamber and configured to charge the deposition substrate by a robot and to selectively deposit the deposition substrate toward the transfer chamber while maintaining a vacuum state; An ultraviolet irradiation chamber disposed on one side of the substrate charging chamber to bond the glass can and the deposition substrate transferred along the tray of the transfer chamber to irradiate and cure the sealing agent of the glass can with ultraviolet rays; Organic electroluminescent display device encapsulation device comprising a. 2. The organic light emitting display device encapsulation device of claim 1, wherein the transfer chamber is configured to linearly reciprocate a tray placed in a predetermined track using a main cylinder to move the substrate to a front end of each process chamber. The chamber of claim 1, wherein the can charging chamber, the carrying chamber, the plasma pretreatment chamber, the getter chamber, the dispenser chamber, the decompression chamber, the charging chamber, and the ultraviolet irradiation chamber are alternately disposed on both sides of the transfer chamber, and face each chamber. And a transfer chamber having a sub-cylinder for transferring and transporting the substrate on the tray into and out of each chamber. 4. The organic light emitting display device encapsulation device of claim 3, wherein the transfer chamber is configured to transfer and transport the substrate into the chamber by arranging sub-cylinders at right angles to the tray moving direction of the transfer chamber. .

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