KR101277827B1 - 구조화된 연마 용품 및 이의 제조 및 사용 방법 - Google Patents

구조화된 연마 용품 및 이의 제조 및 사용 방법 Download PDF

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Publication number
KR101277827B1
KR101277827B1 KR1020087026041A KR20087026041A KR101277827B1 KR 101277827 B1 KR101277827 B1 KR 101277827B1 KR 1020087026041 A KR1020087026041 A KR 1020087026041A KR 20087026041 A KR20087026041 A KR 20087026041A KR 101277827 B1 KR101277827 B1 KR 101277827B1
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abrasive
delete delete
pyramidal
backing
structured
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KR20080109880A (ko
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에드워드 제이. 우
크레익 에프. 램피어
그레고리 에이. 코엔레
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쓰리엠 이노베이티브 프로퍼티즈 컴파니
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/001—Manufacture of flexible abrasive materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D2203/00—Tool surfaces formed with a pattern

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
KR1020087026041A 2006-04-27 2007-03-22 구조화된 연마 용품 및 이의 제조 및 사용 방법 Active KR101277827B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/380,444 2006-04-27
US11/380,444 US7410413B2 (en) 2006-04-27 2006-04-27 Structured abrasive article and method of making and using the same
PCT/US2007/064585 WO2007127549A2 (en) 2006-04-27 2007-03-22 Structured abrasive article and method of making and using the same

Publications (2)

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KR20080109880A KR20080109880A (ko) 2008-12-17
KR101277827B1 true KR101277827B1 (ko) 2013-06-21

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US (1) US7410413B2 (enExample)
EP (1) EP2012972B1 (enExample)
JP (1) JP5384326B2 (enExample)
KR (1) KR101277827B1 (enExample)
CN (1) CN101432099B (enExample)
BR (1) BRPI0710788B1 (enExample)
WO (1) WO2007127549A2 (enExample)

Families Citing this family (101)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101541479B (zh) * 2006-07-14 2012-11-28 圣戈本磨料股份有限公司 无背衬研磨制品
US7993185B2 (en) * 2007-01-17 2011-08-09 Russell Gelfuso Device for smoothing the surfaces of hard or soft materials
US8080073B2 (en) * 2007-12-20 2011-12-20 3M Innovative Properties Company Abrasive article having a plurality of precisely-shaped abrasive composites
JP5597140B2 (ja) * 2007-12-31 2014-10-01 スリーエム イノベイティブ プロパティズ カンパニー プラズマ処理された研磨物品及び同物品の作製方法
US8979613B2 (en) * 2008-06-11 2015-03-17 Advanced Diamond Technologies, Inc. Nano-fabricated structured diamond abrasive article
WO2010002725A2 (en) * 2008-07-03 2010-01-07 3M Innovative Properties Company Fixed abrasive particles and articles made therefrom
WO2010033559A1 (en) * 2008-09-16 2010-03-25 Diamond Innovations, Inc. Abrasive grains having unique features
KR101120034B1 (ko) * 2008-10-08 2012-03-23 태양연마 주식회사 요철을 갖는 이형성 기재를 이용한 연마포지의 제조방법
EP2419243A1 (en) * 2009-04-17 2012-02-22 3M Innovative Properties Company Metal particle transfer article, metal modified substrate, and method of making and using the same
US8628597B2 (en) 2009-06-25 2014-01-14 3M Innovative Properties Company Method of sorting abrasive particles, abrasive particle distributions, and abrasive articles including the same
US8425278B2 (en) * 2009-08-26 2013-04-23 3M Innovative Properties Company Structured abrasive article and method of using the same
US8348723B2 (en) 2009-09-16 2013-01-08 3M Innovative Properties Company Structured abrasive article and method of using the same
US20110081830A1 (en) * 2009-10-07 2011-04-07 Anthony David Pollasky Method for finishing and fitting dental restorations and an abrasive material for doing same
US9447311B2 (en) 2009-12-02 2016-09-20 3M Innovative Properties Company Dual tapered shaped abrasive particles
RU2510323C1 (ru) * 2010-03-03 2014-03-27 Зм Инновейтив Пропертиз Компани Абразивный круг со связкой
SA111320374B1 (ar) * 2010-04-14 2015-08-10 بيكر هوغيس انكوبوريتد طريقة تشكيل الماسة متعدد البلورات من الماس المستخرج بحجم النانو
US9205531B2 (en) 2011-09-16 2015-12-08 Baker Hughes Incorporated Methods of fabricating polycrystalline diamond, and cutting elements and earth-boring tools comprising polycrystalline diamond
US10005672B2 (en) 2010-04-14 2018-06-26 Baker Hughes, A Ge Company, Llc Method of forming particles comprising carbon and articles therefrom
KR101849797B1 (ko) * 2010-04-27 2018-04-17 쓰리엠 이노베이티브 프로퍼티즈 컴파니 세라믹 형상화 연마 입자, 이의 제조 방법 및 이를 함유하는 연마 용품
CN103702800B (zh) 2011-06-30 2017-11-10 圣戈本陶瓷及塑料股份有限公司 包括氮化硅磨粒的磨料制品
CA2848733A1 (en) 2011-09-16 2013-03-21 Baker Hughes Incorporated Methods of fabricating polycrystalline diamond, and cutting elements and earth-boring tools comprising polycrystalline diamond
JP5802336B2 (ja) 2011-09-26 2015-10-28 サン−ゴバン セラミックス アンド プラスティクス，インコーポレイティド 研磨粒子材料を含む研磨製品、研磨粒子材料を使用する研磨布紙および形成方法
JP2013086239A (ja) * 2011-10-21 2013-05-13 Hoya Corp プラスチックレンズ用の研磨工具、プラスチックレンズの研磨方法及びプラスチックレンズの製造方法
CN109054745A (zh) 2011-12-30 2018-12-21 圣戈本陶瓷及塑料股份有限公司 成形磨粒及其形成方法
CN104114327B (zh) 2011-12-30 2018-06-05 圣戈本陶瓷及塑料股份有限公司 复合成型研磨颗粒及其形成方法
CA3056658C (en) 2012-01-10 2023-07-04 Doruk O. Yener Abrasive particles having complex shapes and methods of forming same
WO2013106602A1 (en) 2012-01-10 2013-07-18 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles having particular shapes and methods of forming such particles
KR101389572B1 (ko) * 2012-04-23 2014-04-29 주식회사 디어포스 다방향성 연마돌기를 갖는 연마제품
CN110013795A (zh) 2012-05-23 2019-07-16 圣戈本陶瓷及塑料股份有限公司 成形磨粒及其形成方法
EP2671676B1 (fr) * 2012-06-07 2021-04-28 Comadur S.A. Système de finissage d'une pièce formée de plusieurs matériaux
BR112014032152B1 (pt) 2012-06-29 2022-09-20 Saint-Gobain Ceramics & Plastics, Inc Partículas abrasivas tendo formatos particulares e artigos abrasivos
JP2015530265A (ja) * 2012-08-02 2015-10-15 スリーエム イノベイティブ プロパティズ カンパニー 精密に成形された形成部を有する研磨要素、その研磨要素から製造される研磨物品、及びそれらの作製方法
WO2014022465A1 (en) * 2012-08-02 2014-02-06 3M Innovative Properties Company Abrasive articles with precisely shaped features and method of making thereof
US9956664B2 (en) 2012-08-02 2018-05-01 3M Innovative Properties Company Abrasive element precursor with precisely shaped features and methods of making thereof
US9440332B2 (en) 2012-10-15 2016-09-13 Saint-Gobain Abrasives, Inc. Abrasive particles having particular shapes and methods of forming such particles
WO2014106173A1 (en) 2012-12-31 2014-07-03 Saint-Gobain Ceramics & Plastics, Inc. Particulate materials and methods of forming same
WO2014161001A1 (en) 2013-03-29 2014-10-02 Saint-Gobain Abrasives, Inc. Abrasive particles having particular shapes and methods of forming such particles
JP6186809B2 (ja) 2013-03-29 2017-08-30 株式会社リコー 研磨ローラ、定着装置、及び画像形成装置
TW201502263A (zh) 2013-06-28 2015-01-16 Saint Gobain Ceramics 包含成形研磨粒子之研磨物品
US9969057B2 (en) * 2013-06-28 2018-05-15 Robert Bosch Gmbh Abrasive means
CA3114978A1 (en) 2013-09-30 2015-04-02 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particles and methods of forming same
CN105722643B (zh) * 2013-11-12 2018-06-05 3M创新有限公司 结构化磨料制品及其使用方法
EP3089851B1 (en) 2013-12-31 2019-02-06 Saint-Gobain Abrasives, Inc. Abrasive article including shaped abrasive particles
US9771507B2 (en) 2014-01-31 2017-09-26 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particle including dopant material and method of forming same
CN103831737A (zh) * 2014-02-11 2014-06-04 当涂县南方红月磨具磨料有限公司 一种含贝壳粉的立方氮化硼砂轮
JP5674229B1 (ja) * 2014-03-17 2015-02-25 株式会社リペアワークス 充填剤研磨具の充填剤屑の除去方法
US9586308B2 (en) * 2014-04-09 2017-03-07 Fabrica Nacional De Lija, S.A. De C.V. Abrasive product coated with agglomerated particles formed in situ and method of making the same
WO2015157412A1 (en) * 2014-04-10 2015-10-15 Shell Oil Company A method of making a supported gas separation membrane
US9803119B2 (en) 2014-04-14 2017-10-31 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
US10557067B2 (en) 2014-04-14 2020-02-11 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
CN106457526B (zh) * 2014-05-20 2020-06-09 3M创新有限公司 具有不同组的多个研磨元件的磨料及其制备工具
JP6611414B2 (ja) * 2014-05-27 2019-11-27 スリーエム イノベイティブ プロパティズ カンパニー 塗装表面の仕上げ方法及び研磨材料
US9902045B2 (en) 2014-05-30 2018-02-27 Saint-Gobain Abrasives, Inc. Method of using an abrasive article including shaped abrasive particles
WO2016057279A1 (en) 2014-10-07 2016-04-14 3M Innovative Properties Company Abrasive article and related methods
US9873180B2 (en) 2014-10-17 2018-01-23 Applied Materials, Inc. CMP pad construction with composite material properties using additive manufacturing processes
US10875153B2 (en) 2014-10-17 2020-12-29 Applied Materials, Inc. Advanced polishing pad materials and formulations
CN113579992A (zh) 2014-10-17 2021-11-02 应用材料公司 使用加成制造工艺的具复合材料特性的cmp衬垫建构
US11745302B2 (en) 2014-10-17 2023-09-05 Applied Materials, Inc. Methods and precursor formulations for forming advanced polishing pads by use of an additive manufacturing process
US9707529B2 (en) 2014-12-23 2017-07-18 Saint-Gobain Ceramics & Plastics, Inc. Composite shaped abrasive particles and method of forming same
US9914864B2 (en) 2014-12-23 2018-03-13 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particles and method of forming same
US9676981B2 (en) 2014-12-24 2017-06-13 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particle fractions and method of forming same
TWI634200B (zh) 2015-03-31 2018-09-01 聖高拜磨料有限公司 固定磨料物品及其形成方法
EP3277459B1 (en) 2015-03-31 2023-08-16 Saint-Gobain Abrasives, Inc. Fixed abrasive articles and methods of forming same
TWI609742B (zh) * 2015-04-20 2018-01-01 中國砂輪企業股份有限公司 研磨工具
TWI603813B (zh) * 2015-04-20 2017-11-01 中國砂輪企業股份有限公司 研磨工具及其製造方法
USD807045S1 (en) * 2015-05-08 2018-01-09 Mirka Oy Abrasive material
JP6046865B1 (ja) * 2015-05-13 2016-12-21 バンドー化学株式会社 研磨パッド及び研磨パッドの製造方法
FI129203B (en) * 2015-06-05 2021-09-15 Kwh Mirka Ltd An abrasive product, a method for manufacturing such, a belt and a roll of such
CA3118262C (en) 2015-06-11 2023-09-19 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
EP3362224B1 (en) * 2015-10-16 2024-08-14 Applied Materials, Inc. Method and apparatus for forming advanced polishing pads using an additive manufacturing process
CN108602170B (zh) * 2015-11-20 2020-07-07 Ntt前进技术株式会社 工件端面的多阶段一并研磨方法及研磨膜
US10391605B2 (en) 2016-01-19 2019-08-27 Applied Materials, Inc. Method and apparatus for forming porous advanced polishing pads using an additive manufacturing process
CN118372187A (zh) 2016-05-10 2024-07-23 圣戈本陶瓷及塑料股份有限公司 磨料颗粒及其形成方法
KR102422875B1 (ko) 2016-05-10 2022-07-21 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 연마 입자들 및 그 형성 방법
WO2018064642A1 (en) 2016-09-29 2018-04-05 Saint-Gobain Abrasives, Inc. Fixed abrasive articles and methods of forming same
EP3532561B1 (en) 2016-10-25 2021-04-28 3M Innovative Properties Company Magnetizable abrasive particles and abrasive articles including them
WO2018080799A1 (en) 2016-10-25 2018-05-03 3M Innovative Properties Company Magnetizable abrasive particle and method of making the same
CN109843509A (zh) * 2016-10-25 2019-06-04 3M创新有限公司 结构化磨料制品及其制备方法
CN109863568B (zh) 2016-10-25 2020-05-15 3M创新有限公司 制备可磁化磨料颗粒的方法
US10563105B2 (en) 2017-01-31 2020-02-18 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
US10759024B2 (en) 2017-01-31 2020-09-01 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
WO2018236989A1 (en) 2017-06-21 2018-12-27 Saint-Gobain Ceramics & Plastics, Inc. Particulate materials and methods of forming same
CN111032284B (zh) * 2017-08-04 2022-11-04 3M创新有限公司 具有增强的共平面性的微复制型抛光表面
CN107553312B (zh) * 2017-10-12 2021-04-20 河北思瑞恩新材料科技有限公司 一种立体磨料及其制备方法
USD870782S1 (en) * 2017-12-12 2019-12-24 3M Innovative Properties Company Coated abrasive disc
USD849066S1 (en) * 2017-12-12 2019-05-21 3M Innovative Properties Company Coated abrasive disc
USD849067S1 (en) * 2017-12-12 2019-05-21 3M Innovative Properties Company Coated abrasive disc
USD862538S1 (en) * 2017-12-12 2019-10-08 3M Innovative Properties Company Coated abrasive disc
USD879164S1 (en) * 2017-12-12 2020-03-24 3M Innovative Properties Company Coated abrasive disc
JP7158147B2 (ja) * 2018-01-05 2022-10-21 スリーエム イノベイティブ プロパティズ カンパニー 研磨シート及び研磨方法
CN108747876B (zh) * 2018-06-11 2021-03-19 河北思瑞恩新材料科技有限公司 一种漆面研磨砂碟的制备方法
WO2020035764A1 (en) * 2018-08-13 2020-02-20 3M Innovative Properties Company Structured abrasive article and method of making the same
USD879165S1 (en) * 2018-11-15 2020-03-24 3M Innovative Properties Company Coated abrasive belt
USD879166S1 (en) * 2018-11-15 2020-03-24 3M Innovative Properties Company Coated abrasive belt
EP3924146A4 (en) * 2019-02-13 2022-11-09 3M Innovative Properties Company ABRASIVES WITH PRECISELY SHAPED FEATURES, ABRASIVES MADE THEREOF AND PROCESSES FOR THEIR MANUFACTURE
CN114867582B (zh) 2019-12-27 2024-10-18 圣戈本陶瓷及塑料股份有限公司 磨料制品及其形成方法
WO2021133888A1 (en) 2019-12-27 2021-07-01 Saint-Gobain Ceramics & Plastics, Inc. Abrasive articles and methods of forming same
CN114846112A (zh) 2019-12-27 2022-08-02 圣戈本陶瓷及塑料股份有限公司 磨料制品及其形成方法
AU2022426850B2 (en) 2021-12-30 2025-09-18 Saint-Gobain Abrasives, Inc. Abrasive articles and methods of forming same
EP4457054A1 (en) 2021-12-30 2024-11-06 Saint-Gobain Abrasives, Inc. Abrasive articles and methods of forming same
US20250134270A1 (en) * 2023-10-31 2025-05-01 Engineered Sleep, LLC Mattress arrangements having connectability

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20040068360A (ko) * 2001-12-28 2004-07-30 쓰리엠 이노베이티브 프로퍼티즈 컴파니 배킹 및 배킹으로 제조된 연마 제품 및 배킹 및 연마제품의 제조 및 이용 방법
KR100491452B1 (ko) 1997-09-19 2005-05-25 미네소타 마이닝 앤드 매뉴팩춰링 캄파니 웨이퍼 표면 개질용 플루오로화합물을 포함하는 연마 용품

Family Cites Families (63)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2242877A (en) 1939-03-15 1941-05-20 Albertson & Co Inc Abrasive disk and method of making the same
AT347283B (de) 1975-03-07 1978-12-27 Collo Gmbh Schaumstoffkoerper fuer reinigungs-, scheuer- und/oder polierzwecke u. dgl.
US4311489A (en) 1978-08-04 1982-01-19 Norton Company Coated abrasive having brittle agglomerates of abrasive grain
US5191101A (en) 1982-11-22 1993-03-02 Minnesota Mining And Manufacturing Company Energy polymerizable compositions containing organometallic initiators
US4609581A (en) 1985-04-15 1986-09-02 Minnesota Mining And Manufacturing Company Coated abrasive sheet material with loop attachment means
US4652275A (en) 1985-08-07 1987-03-24 Minnesota Mining And Manufacturing Company Erodable agglomerates and abrasive products containing the same
US4652274A (en) 1985-08-07 1987-03-24 Minnesota Mining And Manufacturing Company Coated abrasive product having radiation curable binder
US4751138A (en) 1986-08-11 1988-06-14 Minnesota Mining And Manufacturing Company Coated abrasive having radiation curable binder
US4799939A (en) 1987-02-26 1989-01-24 Minnesota Mining And Manufacturing Company Erodable agglomerates and abrasive products containing the same
US4735632A (en) 1987-04-02 1988-04-05 Minnesota Mining And Manufacturing Company Coated abrasive binder containing ternary photoinitiator system
US4950696A (en) 1987-08-28 1990-08-21 Minnesota Mining And Manufacturing Company Energy-induced dual curable compositions
US5086086A (en) 1987-08-28 1992-02-04 Minnesota Mining And Manufacturing Company Energy-induced curable compositions
JP2707264B2 (ja) 1987-12-28 1998-01-28 ハイ・コントロール・リミテッド 研磨シートおよびその製造方法
US5254194A (en) 1988-05-13 1993-10-19 Minnesota Mining And Manufacturing Company Coated abrasive sheet material with loop material for attachment incorporated therein
US4985340A (en) 1988-06-01 1991-01-15 Minnesota Mining And Manufacturing Company Energy curable compositions: two component curing agents
US4903440A (en) 1988-11-23 1990-02-27 Minnesota Mining And Manufacturing Company Abrasive product having binder comprising an aminoplast resin
US5190568B1 (en) 1989-01-30 1996-03-12 Ultimate Abrasive Syst Inc Abrasive tool with contoured surface
US5014468A (en) 1989-05-05 1991-05-14 Norton Company Patterned coated abrasive for fine surface finishing
US5152917B1 (en) * 1991-02-06 1998-01-13 Minnesota Mining & Mfg Structured abrasive article
US5236472A (en) 1991-02-22 1993-08-17 Minnesota Mining And Manufacturing Company Abrasive product having a binder comprising an aminoplast binder
US5219462A (en) 1992-01-13 1993-06-15 Minnesota Mining And Manufacturing Company Abrasive article having abrasive composite members positioned in recesses
US6099394A (en) 1998-02-10 2000-08-08 Rodel Holdings, Inc. Polishing system having a multi-phase polishing substrate and methods relating thereto
US5286782A (en) 1992-08-31 1994-02-15 E. I. Du Pont De Nemours And Company Coating composition of an acrylic polymer, polyol and polyisocyanate crosslinking agent
US5354797A (en) 1992-08-31 1994-10-11 E. I. Du Pont De Nemours And Company Coating composition of hydroxy functional acrylic polymer, polyol and polyisocyanate crosslinking agent
US5435816A (en) 1993-01-14 1995-07-25 Minnesota Mining And Manufacturing Company Method of making an abrasive article
DE69326774T2 (de) 1993-06-02 2000-06-21 Dai Nippon Printing Co., Ltd. Schleifband und verfahren zu dessen herstellung
JPH08511733A (ja) 1993-06-17 1996-12-10 ミネソタ マイニング アンド マニュファクチャリング カンパニー パターン化された研磨用製品並びに製法及び使用法
RU2124978C1 (ru) 1993-09-13 1999-01-20 Миннесота Майнинг Энд Мэнюфекчуринг Компани Абразивное изделие, способ его производства, способ его использования для чистовой обработки и рабочий инструмент для его производства
US5489235A (en) 1993-09-13 1996-02-06 Minnesota Mining And Manufacturing Company Abrasive article and method of making same
US5454844A (en) 1993-10-29 1995-10-03 Minnesota Mining And Manufacturing Company Abrasive article, a process of making same, and a method of using same to finish a workpiece surface
US5505747A (en) 1994-01-13 1996-04-09 Minnesota Mining And Manufacturing Company Method of making an abrasive article
EP0745020B1 (en) 1994-02-22 1999-07-28 Minnesota Mining And Manufacturing Company Abrasive article, a method of making same, and a method of using same for finishing
USD366365S (en) 1994-05-11 1996-01-23 Minnesota Mining And Manufacturing Company Coated abrasive sheet article
JPH11501439A (ja) 1995-03-02 1999-02-02 ミネソタ・マイニング・アンド・マニュファクチャリング・カンパニー 構造化研磨物品を用いて支持体をテクスチャリングする方法
EP0846041B1 (en) * 1995-08-11 2003-04-23 Minnesota Mining And Manufacturing Company Method of making a coated abrasive article having multiple abrasive natures
US5975987A (en) 1995-10-05 1999-11-02 3M Innovative Properties Company Method and apparatus for knurling a workpiece, method of molding an article with such workpiece, and such molded article
US5863306A (en) 1997-01-07 1999-01-26 Norton Company Production of patterned abrasive surfaces
US5833724A (en) 1997-01-07 1998-11-10 Norton Company Structured abrasives with adhered functional powders
US5851247A (en) 1997-02-24 1998-12-22 Minnesota Mining & Manufacturing Company Structured abrasive article adapted to abrade a mild steel workpiece
US6139402A (en) 1997-12-30 2000-10-31 Micron Technology, Inc. Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates
DK1054916T3 (da) 1998-02-06 2006-03-06 Du Pont Reaktive siliciumoligomerer og coatingsammensætninger fremstillet deraf
US6139594A (en) 1998-04-13 2000-10-31 3M Innovative Properties Company Abrasive article with tie coat and method
US6048375A (en) 1998-12-16 2000-04-11 Norton Company Coated abrasive
DE60023675T2 (de) 1999-03-17 2006-09-07 E.I. Dupont De Nemours And Co., Wilmington Klarlackzusammensetzung mit hohem feststoffgehalt
US20020077037A1 (en) 1999-05-03 2002-06-20 Tietz James V. Fixed abrasive articles
KR20010020807A (ko) 1999-05-03 2001-03-15 조셉 제이. 스위니 고정 연마재 제품을 사전-조절하는 방법
US6419574B1 (en) * 1999-09-01 2002-07-16 Mitsubishi Materials Corporation Abrasive tool with metal binder phase
US6293980B2 (en) 1999-12-20 2001-09-25 Norton Company Production of layered engineered abrasive surfaces
US6773475B2 (en) * 1999-12-21 2004-08-10 3M Innovative Properties Company Abrasive material having abrasive layer of three-dimensional structure
WO2001053040A1 (en) 2000-01-19 2001-07-26 Rodel Holdings, Inc. Printing of polishing pads
JP2002057130A (ja) * 2000-08-14 2002-02-22 Three M Innovative Properties Co Ｃｍｐ用研磨パッド
US6821189B1 (en) 2000-10-13 2004-11-23 3M Innovative Properties Company Abrasive article comprising a structured diamond-like carbon coating and method of using same to mechanically treat a substrate
US20020090901A1 (en) 2000-11-03 2002-07-11 3M Innovative Properties Company Flexible abrasive product and method of making and using the same
US20030022604A1 (en) 2001-05-07 2003-01-30 3M Innovative Properties Company Abrasive product and method of making and using the same
US20030207659A1 (en) 2000-11-03 2003-11-06 3M Innovative Properties Company Abrasive product and method of making and using the same
JP2002172563A (ja) 2000-11-24 2002-06-18 Three M Innovative Properties Co 研磨テープ
US20020072296A1 (en) * 2000-11-29 2002-06-13 Muilenburg Michael J. Abrasive article having a window system for polishing wafers, and methods
JP2002166355A (ja) 2000-11-30 2002-06-11 Tosoh Corp 研磨用成形体及びそれを用いた研磨用定盤
US6613113B2 (en) 2001-12-28 2003-09-02 3M Innovative Properties Company Abrasive product and method of making the same
US6949128B2 (en) 2001-12-28 2005-09-27 3M Innovative Properties Company Method of making an abrasive product
US6833014B2 (en) 2002-07-26 2004-12-21 3M Innovative Properties Company Abrasive product, method of making and using the same, and apparatus for making the same
US20050060942A1 (en) 2003-09-23 2005-03-24 3M Innovative Properties Company Structured abrasive article
WO2005053904A1 (en) 2003-11-26 2005-06-16 3M Innovative Properties Company Method of abrading a workpiece

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100491452B1 (ko) 1997-09-19 2005-05-25 미네소타 마이닝 앤드 매뉴팩춰링 캄파니 웨이퍼 표면 개질용 플루오로화합물을 포함하는 연마 용품
KR20040068360A (ko) * 2001-12-28 2004-07-30 쓰리엠 이노베이티브 프로퍼티즈 컴파니 배킹 및 배킹으로 제조된 연마 제품 및 배킹 및 연마제품의 제조 및 이용 방법

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US20070254560A1 (en) 2007-11-01
BRPI0710788A2 (pt) 2011-08-09
KR20080109880A (ko) 2008-12-17
JP2009535225A (ja) 2009-10-01
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CN101432099A (zh) 2009-05-13
BRPI0710788B1 (pt) 2019-07-02
CN101432099B (zh) 2010-09-01
US7410413B2 (en) 2008-08-12
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