KR101226634B1 - 레이저 기반 어닐링 시스템에서의 고온계에 대한 다수의 대역 통과 필터링 - Google Patents

레이저 기반 어닐링 시스템에서의 고온계에 대한 다수의 대역 통과 필터링 Download PDF

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KR101226634B1
KR101226634B1 KR1020077012613A KR20077012613A KR101226634B1 KR 101226634 B1 KR101226634 B1 KR 101226634B1 KR 1020077012613 A KR1020077012613 A KR 1020077012613A KR 20077012613 A KR20077012613 A KR 20077012613A KR 101226634 B1 KR101226634 B1 KR 101226634B1
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laser
wafer
radiation
pyrometer
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KR20070085742A (ko
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브루스 이. 아담스
딘 제닝스
아아론 엠. 헌터
아브힐라쉬 제이. 마이어
비자이 파리하르
티모시 엔. 토마스
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어플라이드 머티어리얼스, 인코포레이티드
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/281—Interference filters designed for the infrared light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/005—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4012—Beam combining, e.g. by the use of fibres, gratings, polarisers, prisms

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Radiation Pyrometers (AREA)
  • Laser Beam Processing (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Semiconductor Lasers (AREA)
  • Optical Filters (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
KR1020077012613A 2004-11-12 2005-10-12 레이저 기반 어닐링 시스템에서의 고온계에 대한 다수의 대역 통과 필터링 Expired - Lifetime KR101226634B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US62752704P 2004-11-12 2004-11-12
US60/627,527 2004-11-12
US11/195,380 US7438468B2 (en) 2004-11-12 2005-08-02 Multiple band pass filtering for pyrometry in laser based annealing systems
US11/195,380 2005-08-02
PCT/US2005/036796 WO2006055130A2 (en) 2004-11-12 2005-10-12 Multiple band pass filtering for pyrometry in laser based annealing systems

Publications (2)

Publication Number Publication Date
KR20070085742A KR20070085742A (ko) 2007-08-27
KR101226634B1 true KR101226634B1 (ko) 2013-01-25

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KR1020077012613A Expired - Lifetime KR101226634B1 (ko) 2004-11-12 2005-10-12 레이저 기반 어닐링 시스템에서의 고온계에 대한 다수의 대역 통과 필터링

Country Status (6)

Country Link
US (2) US7438468B2 (https=)
EP (1) EP1831658B1 (https=)
JP (1) JP5103186B2 (https=)
KR (1) KR101226634B1 (https=)
CN (1) CN101065649B (https=)
WO (1) WO2006055130A2 (https=)

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Publication number Publication date
US20090084986A1 (en) 2009-04-02
CN101065649B (zh) 2012-11-28
EP1831658B1 (en) 2016-08-03
US7717617B2 (en) 2010-05-18
WO2006055130A2 (en) 2006-05-26
EP1831658A2 (en) 2007-09-12
US20060102607A1 (en) 2006-05-18
JP2008520096A (ja) 2008-06-12
CN101065649A (zh) 2007-10-31
WO2006055130A3 (en) 2006-07-13
JP5103186B2 (ja) 2012-12-19
US7438468B2 (en) 2008-10-21
KR20070085742A (ko) 2007-08-27

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