KR101223198B1 - 표면 건조방법 - Google Patents

표면 건조방법 Download PDF

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Publication number
KR101223198B1
KR101223198B1 KR1020077026378A KR20077026378A KR101223198B1 KR 101223198 B1 KR101223198 B1 KR 101223198B1 KR 1020077026378 A KR1020077026378 A KR 1020077026378A KR 20077026378 A KR20077026378 A KR 20077026378A KR 101223198 B1 KR101223198 B1 KR 101223198B1
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KR
South Korea
Prior art keywords
gas
rinse liquid
rinse
liquid
shaped article
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020077026378A
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English (en)
Korean (ko)
Other versions
KR20080005553A (ko
Inventor
케이 키노시타
필립 엥게쎄르
Original Assignee
램 리서치 아게
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 램 리서치 아게 filed Critical 램 리서치 아게
Publication of KR20080005553A publication Critical patent/KR20080005553A/ko
Application granted granted Critical
Publication of KR101223198B1 publication Critical patent/KR101223198B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P70/00—Cleaning of wafers, substrates or parts of devices
    • H10P70/10—Cleaning before device manufacture, i.e. Begin-Of-Line process
    • H10P70/15—Cleaning before device manufacture, i.e. Begin-Of-Line process by wet cleaning only
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
    • B08B3/02—Cleaning by the force of jets or sprays
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0406—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H10P72/0408—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for drying

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
  • Drying Of Solid Materials (AREA)
  • Detergent Compositions (AREA)
KR1020077026378A 2005-05-13 2006-04-11 표면 건조방법 Expired - Fee Related KR101223198B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
ATA831/2005 2005-05-13
AT8312005 2005-05-13
PCT/EP2006/061522 WO2007054377A1 (en) 2005-05-13 2006-04-11 Method for drying a surface

Publications (2)

Publication Number Publication Date
KR20080005553A KR20080005553A (ko) 2008-01-14
KR101223198B1 true KR101223198B1 (ko) 2013-01-17

Family

ID=37890725

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020077026378A Expired - Fee Related KR101223198B1 (ko) 2005-05-13 2006-04-11 표면 건조방법

Country Status (7)

Country Link
US (1) US8038804B2 (https=)
EP (1) EP1888263A1 (https=)
JP (1) JP2008540994A (https=)
KR (1) KR101223198B1 (https=)
CN (1) CN101175579B (https=)
TW (1) TWI364524B (https=)
WO (1) WO2007054377A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5096849B2 (ja) * 2007-09-13 2012-12-12 株式会社Ｓｏｋｕｄｏ 基板処理装置および基板処理方法
JP5390873B2 (ja) * 2009-01-28 2014-01-15 大日本スクリーン製造株式会社 基板処理方法および基板処理装置
JP5538102B2 (ja) * 2010-07-07 2014-07-02 株式会社Ｓｏｋｕｄｏ 基板洗浄方法および基板洗浄装置
JP5615650B2 (ja) 2010-09-28 2014-10-29 大日本スクリーン製造株式会社 基板処理方法および基板処理装置
CN108176640A (zh) * 2017-11-17 2018-06-19 天津津航技术物理研究所 一种提高激光陀螺腔体清洗洁净度的干燥方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0938595A (ja) * 1995-05-23 1997-02-10 Tokyo Electron Ltd 洗浄方法及びその装置

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8900480A (nl) * 1989-02-27 1990-09-17 Philips Nv Werkwijze en inrichting voor het drogen van substraten na behandeling in een vloeistof.
US5271774A (en) * 1990-03-01 1993-12-21 U.S. Philips Corporation Method for removing in a centrifuge a liquid from a surface of a substrate
JPH05326392A (ja) * 1992-05-14 1993-12-10 Fujitsu Ltd 半導体装置の製造方法
TW386235B (en) * 1995-05-23 2000-04-01 Tokyo Electron Ltd Method for spin rinsing
JPH1041267A (ja) * 1996-07-19 1998-02-13 Kaijo Corp 基板の洗浄・乾燥装置
US5997653A (en) * 1996-10-07 1999-12-07 Tokyo Electron Limited Method for washing and drying substrates
US6729040B2 (en) * 1999-05-27 2004-05-04 Oliver Design, Inc. Apparatus and method for drying a substrate using hydrophobic and polar organic compounds
US7021319B2 (en) * 2000-06-26 2006-04-04 Applied Materials Inc. Assisted rinsing in a single wafer cleaning process
US20020121286A1 (en) 2001-01-04 2002-09-05 Applied Materials, Inc. Rinsing solution and rinsing and drying methods for the prevention of watermark formation on a surface
CN2460229Y (zh) * 2001-01-16 2001-11-21 集贤实业有限公司 干燥气化装置
TW200303581A (en) * 2002-02-28 2003-09-01 Tech Ltd A Method and apparatus for cleaning and drying semiconductor wafer
TW556255B (en) 2002-06-04 2003-10-01 Semiconductor Mfg Int Shanghai Drying method of post-cleaned semiconductor wafer
JP4030832B2 (ja) * 2002-08-20 2008-01-09 大日本スクリーン製造株式会社 基板処理装置および基板処理方法
WO2005015627A1 (en) * 2003-08-07 2005-02-17 Ebara Corporation Substrate processing apparatus, substrate processing method, and substrate holding apparatus
TWI236061B (en) 2003-08-21 2005-07-11 Grand Plastic Technology Corp Method for wafer drying
JP4324527B2 (ja) * 2004-09-09 2009-09-02 東京エレクトロン株式会社 基板洗浄方法及び現像装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0938595A (ja) * 1995-05-23 1997-02-10 Tokyo Electron Ltd 洗浄方法及びその装置

Also Published As

Publication number Publication date
US20080190455A1 (en) 2008-08-14
TW200639361A (en) 2006-11-16
EP1888263A1 (en) 2008-02-20
CN101175579B (zh) 2012-06-27
KR20080005553A (ko) 2008-01-14
CN101175579A (zh) 2008-05-07
JP2008540994A (ja) 2008-11-20
TWI364524B (en) 2012-05-21
WO2007054377A1 (en) 2007-05-18
US8038804B2 (en) 2011-10-18

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