KR101197650B1 - 폐루프 가속도계에서의 진동 정류 오차 감소 방법 및 장치 - Google Patents

폐루프 가속도계에서의 진동 정류 오차 감소 방법 및 장치 Download PDF

Info

Publication number
KR101197650B1
KR101197650B1 KR1020077008269A KR20077008269A KR101197650B1 KR 101197650 B1 KR101197650 B1 KR 101197650B1 KR 1020077008269 A KR1020077008269 A KR 1020077008269A KR 20077008269 A KR20077008269 A KR 20077008269A KR 101197650 B1 KR101197650 B1 KR 101197650B1
Authority
KR
South Korea
Prior art keywords
closed loop
vre
gain setting
loop accelerometer
feedback gain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020077008269A
Other languages
English (en)
Korean (ko)
Other versions
KR20070057933A (ko
Inventor
도니 에프. 로조
마이클 제이. 로빈슨
에릭 씨. 애본
Original Assignee
허니웰 인터내셔널 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 허니웰 인터내셔널 인코포레이티드 filed Critical 허니웰 인터내셔널 인코포레이티드
Publication of KR20070057933A publication Critical patent/KR20070057933A/ko
Application granted granted Critical
Publication of KR101197650B1 publication Critical patent/KR101197650B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Vibration Prevention Devices (AREA)
  • Pressure Sensors (AREA)
KR1020077008269A 2004-09-28 2005-09-28 폐루프 가속도계에서의 진동 정류 오차 감소 방법 및 장치 Expired - Fee Related KR101197650B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US61386404P 2004-09-28 2004-09-28
US60/613,864 2004-09-28
US10/908,090 US7131315B2 (en) 2004-09-28 2005-04-27 Methods and apparatus for reducing vibration rectification errors in closed-loop accelerometers
US10/908,090 2005-04-27
PCT/US2005/034436 WO2006036897A1 (en) 2004-09-28 2005-09-28 Methods and apparatus for reducing vibration rectification errors in closed-loop accelerometers

Publications (2)

Publication Number Publication Date
KR20070057933A KR20070057933A (ko) 2007-06-07
KR101197650B1 true KR101197650B1 (ko) 2012-11-07

Family

ID=35730629

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020077008269A Expired - Fee Related KR101197650B1 (ko) 2004-09-28 2005-09-28 폐루프 가속도계에서의 진동 정류 오차 감소 방법 및 장치

Country Status (5)

Country Link
US (1) US7131315B2 (https=)
EP (1) EP1794598B1 (https=)
JP (1) JP5139802B2 (https=)
KR (1) KR101197650B1 (https=)
WO (1) WO2006036897A1 (https=)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070155271A1 (en) * 2005-12-30 2007-07-05 Touzov Igor V Heat conductive textile and method producing thereof
US7552637B2 (en) * 2006-09-19 2009-06-30 Honeywell International Inc. Torque driving circuit
US7437255B2 (en) * 2007-01-22 2008-10-14 General Electric Company Method and system for calibrating triaxial acceleration sensors
DE102007027652B4 (de) * 2007-06-15 2013-06-20 Litef Gmbh Betriebsverfahren und Schaltungsanordnung für einen kapazitiven mikromechanischen Sensor mit analoger Rückstellung
US8086328B2 (en) 2008-08-29 2011-12-27 Honeywell International Inc. Systems and methods for vibration rectification error reduction in closed-loop accelerometer systems
JP6358913B2 (ja) * 2014-09-30 2018-07-18 株式会社日立製作所 加速度センサ
US9789919B1 (en) 2016-03-22 2017-10-17 Google Inc. Mitigating sensor noise in legged robots
JP2019086486A (ja) 2017-11-10 2019-06-06 セイコーエプソン株式会社 処理装置、処理システム、物理量測定装置及び測定方法
JP7040253B2 (ja) 2018-04-20 2022-03-23 セイコーエプソン株式会社 物理量センサーモジュール、傾斜計、慣性計測装置、構造物監視装置、及び移動体

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5375469A (en) 1992-03-09 1994-12-27 Societe D'applications Generales D'electricite Et De Mecanique Sagem Capacitive acceleration sensor and its application in a non-servoed accelerometer
US5915278A (en) 1995-02-27 1999-06-22 Mallick; Brian C. System for the measurement of rotation and translation for modal analysis
US6631643B2 (en) 2000-01-13 2003-10-14 Bae Systems Plc Accelerometer
US6826960B2 (en) 2002-08-07 2004-12-07 Quartz Sensors, Inc. Triaxial acceleration sensor

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4891982A (en) * 1986-06-27 1990-01-09 Sundstrand Data Control, Inc. Temperature compensation of a steady-state accelerometer
US5205171A (en) * 1991-01-11 1993-04-27 Northrop Corporation Miniature silicon accelerometer and method
JP3216455B2 (ja) * 1994-12-22 2001-10-09 株式会社村田製作所 容量型静電サーボ加速度センサ
JP3264884B2 (ja) * 1998-05-11 2002-03-11 三菱電機株式会社 容量検出回路
JP3346379B2 (ja) * 2000-09-21 2002-11-18 三菱電機株式会社 角速度センサおよびその製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5375469A (en) 1992-03-09 1994-12-27 Societe D'applications Generales D'electricite Et De Mecanique Sagem Capacitive acceleration sensor and its application in a non-servoed accelerometer
US5915278A (en) 1995-02-27 1999-06-22 Mallick; Brian C. System for the measurement of rotation and translation for modal analysis
US6631643B2 (en) 2000-01-13 2003-10-14 Bae Systems Plc Accelerometer
US6826960B2 (en) 2002-08-07 2004-12-07 Quartz Sensors, Inc. Triaxial acceleration sensor

Also Published As

Publication number Publication date
JP2008514959A (ja) 2008-05-08
EP1794598A1 (en) 2007-06-13
WO2006036897A1 (en) 2006-04-06
EP1794598B1 (en) 2018-08-08
US7131315B2 (en) 2006-11-07
JP5139802B2 (ja) 2013-02-06
KR20070057933A (ko) 2007-06-07
US20060065039A1 (en) 2006-03-30

Similar Documents

Publication Publication Date Title
JP5180212B2 (ja) 材料試験装置の調節方法
CN104395695B (zh) 改进的振动陀螺仪
KR101197650B1 (ko) 폐루프 가속도계에서의 진동 정류 오차 감소 방법 및 장치
CN106052667B (zh) 振动陀螺仪中谐振器和科里奥利轴控制的系统、装置、方法
JP2001041846A (ja) 風洞試験の模型支持方法及びその装置
US11796319B2 (en) Sensor and electronic device
JP2016218055A (ja) Ｍｅｍｓ加速度計のためのインサイチュ・バイアス補正
US7088492B2 (en) Micro movable mechanism system and control method for the same
TW201414174A (zh) 改良共振器
JP5095084B2 (ja) 試料の表面形状の測定方法及び装置
JPH10221083A (ja) 振動型ジャイロ装置
JP2006226964A5 (https=)
CN100573156C (zh) 用于在闭环加速度计中减小振动校正误差的方法和设备
KR19990062925A (ko) 주사처리과정에서 기계적 진동의 방해작용을 보상하는 래스터주사장치
US6532096B2 (en) System and method for canceling ringing in a MEMS device
JPH11102858A (ja) ステージ位置決め制御装置および能動的除振装置
JPH0843185A (ja) 質量測定法および装置
JP7045620B2 (ja) 角速度センサおよび角速度センサの制御方法
JP2006504601A (ja) 複数の振動マシンの位相角を監視するための装置
CN107407563A (zh) 传感器控制中用于剩余值处理的装置和方法
KR100252484B1 (ko) 요레이트센서의온-웨이퍼테스트방법
JPH0712175A (ja) 精密防振装置
JP2004109089A (ja) 触針式プローブ機構の制御方法及び装置
JP2940009B2 (ja) 振動検出器
CN118049980A (zh) 运行器设备、转速传感器和用于运行转速传感器的方法

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

A201 Request for examination
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

St.27 status event code: A-1-2-D10-D22-exm-PE0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

FPAY Annual fee payment

Payment date: 20150930

Year of fee payment: 4

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

FPAY Annual fee payment

Payment date: 20160929

Year of fee payment: 5

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000

FPAY Annual fee payment

Payment date: 20171012

Year of fee payment: 6

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 6

FPAY Annual fee payment

Payment date: 20181019

Year of fee payment: 7

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 7

PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20191031

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20191031