KR101195085B1 - 접합 기판 제조 장치 및 접합 기판 제조 방법 - Google Patents

접합 기판 제조 장치 및 접합 기판 제조 방법 Download PDF

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Publication number
KR101195085B1
KR101195085B1 KR1020107006124A KR20107006124A KR101195085B1 KR 101195085 B1 KR101195085 B1 KR 101195085B1 KR 1020107006124 A KR1020107006124 A KR 1020107006124A KR 20107006124 A KR20107006124 A KR 20107006124A KR 101195085 B1 KR101195085 B1 KR 101195085B1
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KR
South Korea
Prior art keywords
substrate
lower substrate
base portion
pressing member
bonded
Prior art date
Application number
KR1020107006124A
Other languages
English (en)
Korean (ko)
Other versions
KR20100057653A (ko
Inventor
세이치 사토
미츠루 야하기
히로후미 미나미
가즈히로 무샤
준페이 유야마
마사오 무라타
다카히로 미야타
규죠 나카무라
Original Assignee
가부시키가이샤 아루박
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 아루박 filed Critical 가부시키가이샤 아루박
Publication of KR20100057653A publication Critical patent/KR20100057653A/ko
Application granted granted Critical
Publication of KR101195085B1 publication Critical patent/KR101195085B1/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67092—Apparatus for mechanical treatment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B37/00—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding
    • B32B37/10—Methods or apparatus for laminating, e.g. by curing or by ultrasonic bonding characterised by the pressing technique, e.g. using action of vacuum or fluid pressure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Liquid Crystal (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Joining Of Glass To Other Materials (AREA)
  • Laminated Bodies (AREA)
KR1020107006124A 2007-11-08 2008-11-05 접합 기판 제조 장치 및 접합 기판 제조 방법 KR101195085B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007290912 2007-11-08
JPJP-P-2007-290912 2007-11-08
PCT/JP2008/070114 WO2009060855A1 (ja) 2007-11-08 2008-11-05 貼合せ基板製造装置および貼合せ基板製造方法

Publications (2)

Publication Number Publication Date
KR20100057653A KR20100057653A (ko) 2010-05-31
KR101195085B1 true KR101195085B1 (ko) 2012-10-29

Family

ID=40625743

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020107006124A KR101195085B1 (ko) 2007-11-08 2008-11-05 접합 기판 제조 장치 및 접합 기판 제조 방법

Country Status (5)

Country Link
JP (1) JP4839407B2 (ja)
KR (1) KR101195085B1 (ja)
CN (1) CN101801646B (ja)
TW (1) TW200941614A (ja)
WO (1) WO2009060855A1 (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101470921B1 (ko) * 2012-10-16 2014-12-10 주식회사 글로벌스탠다드테크놀로지 기판 합착장치 및 기판 합착 방법
JP6188123B2 (ja) * 2012-12-28 2017-08-30 芝浦メカトロニクス株式会社 貼合装置および貼合処理方法
JP6100571B2 (ja) * 2013-03-22 2017-03-22 株式会社東芝 表示装置の製造装置、および表示装置の製造方法
CH708932B1 (en) * 2013-12-09 2017-04-13 Besi Switzerland Ag Downholder for holding down the substrate locations of a substrate for the purpose of mounting semiconductor components.
JP6128337B2 (ja) * 2014-10-23 2017-05-17 パナソニックＩｐマネジメント株式会社 半導体装置の製造方法及び製造装置
JP6049820B1 (ja) * 2015-07-24 2016-12-21 信越エンジニアリング株式会社 貼合デバイスの製造装置及び製造方法
JP6622254B2 (ja) * 2017-06-21 2019-12-18 芝浦メカトロニクス株式会社 貼合装置および貼合処理方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0631500A (ja) * 1992-07-20 1994-02-08 Hitachi Ltd ホットプレス
JP3542956B2 (ja) * 2000-10-30 2004-07-14 信越エンジニアリング株式会社 液晶パネル用基板の貼り合わせ装置
JP2005238456A (ja) * 2004-02-24 2005-09-08 Sumitomo Chemical Co Ltd 偏肉大型導光板の製造方法
JP4078487B2 (ja) * 2005-05-25 2008-04-23 株式会社日立プラントテクノロジー 基板組立装置及び方法

Also Published As

Publication number Publication date
WO2009060855A1 (ja) 2009-05-14
KR20100057653A (ko) 2010-05-31
CN101801646B (zh) 2013-04-17
CN101801646A (zh) 2010-08-11
JPWO2009060855A1 (ja) 2011-03-24
TW200941614A (en) 2009-10-01
JP4839407B2 (ja) 2011-12-21

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