KR101187006B1 - 대면적 패널용 반송플레이트 - Google Patents

대면적 패널용 반송플레이트 Download PDF

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Publication number
KR101187006B1
KR101187006B1 KR1020120042733A KR20120042733A KR101187006B1 KR 101187006 B1 KR101187006 B1 KR 101187006B1 KR 1020120042733 A KR1020120042733 A KR 1020120042733A KR 20120042733 A KR20120042733 A KR 20120042733A KR 101187006 B1 KR101187006 B1 KR 101187006B1
Authority
KR
South Korea
Prior art keywords
air
plate
vacuum
rod
hole
Prior art date
Application number
KR1020120042733A
Other languages
English (en)
Korean (ko)
Inventor
이재성
Original Assignee
이재성
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 이재성 filed Critical 이재성
Priority to KR1020120042733A priority Critical patent/KR101187006B1/ko
Priority to JP2012108847A priority patent/JP5601345B2/ja
Application granted granted Critical
Publication of KR101187006B1 publication Critical patent/KR101187006B1/ko
Priority to CN201310035369.1A priority patent/CN103373606B/zh

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/911—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with air blasts producing partial vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Nonlinear Science (AREA)
  • Mechanical Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Fluid Mechanics (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Nozzles (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
KR1020120042733A 2012-04-24 2012-04-24 대면적 패널용 반송플레이트 KR101187006B1 (ko)

Priority Applications (3)

Application Number Priority Date Filing Date Title
KR1020120042733A KR101187006B1 (ko) 2012-04-24 2012-04-24 대면적 패널용 반송플레이트
JP2012108847A JP5601345B2 (ja) 2012-04-24 2012-05-10 大面積パネル用の搬送プレート
CN201310035369.1A CN103373606B (zh) 2012-04-24 2013-01-30 大尺寸面板用输送板

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020120042733A KR101187006B1 (ko) 2012-04-24 2012-04-24 대면적 패널용 반송플레이트

Publications (1)

Publication Number Publication Date
KR101187006B1 true KR101187006B1 (ko) 2012-09-28

Family

ID=47114269

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020120042733A KR101187006B1 (ko) 2012-04-24 2012-04-24 대면적 패널용 반송플레이트

Country Status (3)

Country Link
JP (1) JP5601345B2 (ja)
KR (1) KR101187006B1 (ja)
CN (1) CN103373606B (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108249746A (zh) * 2018-02-09 2018-07-06 京东方科技集团股份有限公司 移载基台及采用该移载基台切割基板的切割方法
KR20190028192A (ko) * 2017-09-08 2019-03-18 이재성 대면적 패널용 반송플레이트
US20210252635A1 (en) * 2020-02-13 2021-08-19 The Japan Steel Works, Ltd. Flotation conveyance apparatus and laser processing apparatus
KR102589933B1 (ko) * 2023-02-28 2023-10-13 이만홍 디스플레이 패널용 부상 및 흡착 플레이트

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015101020A (ja) * 2013-11-26 2015-06-04 日本電気硝子株式会社 板ガラスの積層方法及びその積層装置
KR102625921B1 (ko) * 2015-05-28 2024-01-16 가부시키가이샤 니콘 물체 유지 장치, 노광 장치, 플랫 패널 디스플레이의 제조 방법, 및 디바이스 제조 방법
CN106044225B (zh) * 2016-06-28 2019-05-31 江苏东旭亿泰智能装备有限公司 气浮平台、气浮装置及玻璃基板传送装置
KR102115204B1 (ko) * 2019-11-06 2020-05-26 한석영 하이드로겔 패치 자동화 시스템
JP7437187B2 (ja) 2020-02-26 2024-02-22 Ｊｓｗアクティナシステム株式会社 浮上搬送装置、及びレーザ処理装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101091561B1 (ko) * 2010-09-09 2011-12-13 이재성 비접촉식 반송플레이트

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63225028A (ja) * 1987-03-16 1988-09-20 Hitachi Ltd 搬送装置
JP2001007187A (ja) * 1999-06-25 2001-01-12 Sony Corp 基板搬送装置
US6398464B1 (en) * 1999-12-27 2002-06-04 Kabushiki Kaisha Watanabe Shoko Air stream transfer apparatus
TWI327128B (en) * 2003-07-08 2010-07-11 Daifuku Kk Plate-shaped work piece transporting apparatus
JP2008260591A (ja) * 2007-04-10 2008-10-30 Nippon Sekkei Kogyo:Kk 薄板状材料搬送装置及び方法
KR100876337B1 (ko) * 2008-06-25 2008-12-29 이재성 흡입력을 갖는 비접촉식 반송 플레이트
JP2010254463A (ja) * 2009-04-28 2010-11-11 Nitta Moore Co 非接触ワーク支持装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101091561B1 (ko) * 2010-09-09 2011-12-13 이재성 비접촉식 반송플레이트

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190028192A (ko) * 2017-09-08 2019-03-18 이재성 대면적 패널용 반송플레이트
KR102160851B1 (ko) 2017-09-08 2020-09-28 이재성 대면적 패널용 반송플레이트
CN108249746A (zh) * 2018-02-09 2018-07-06 京东方科技集团股份有限公司 移载基台及采用该移载基台切割基板的切割方法
CN108249746B (zh) * 2018-02-09 2020-12-11 京东方科技集团股份有限公司 移载基台及采用该移载基台切割基板的切割方法
US20210252635A1 (en) * 2020-02-13 2021-08-19 The Japan Steel Works, Ltd. Flotation conveyance apparatus and laser processing apparatus
JP2021127204A (ja) * 2020-02-13 2021-09-02 株式会社日本製鋼所 浮上搬送装置、及びレーザ処理装置
JP7387476B2 (ja) 2020-02-13 2023-11-28 Ｊｓｗアクティナシステム株式会社 浮上搬送装置、及びレーザ処理装置
KR102589933B1 (ko) * 2023-02-28 2023-10-13 이만홍 디스플레이 패널용 부상 및 흡착 플레이트

Also Published As

Publication number Publication date
JP5601345B2 (ja) 2014-10-08
CN103373606B (zh) 2016-12-28
JP2013227151A (ja) 2013-11-07
CN103373606A (zh) 2013-10-30

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