KR101144878B1 - 부상 장치 및 부상 반송 장치 - Google Patents

부상 장치 및 부상 반송 장치 Download PDF

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Publication number
KR101144878B1
KR101144878B1 KR1020107000548A KR20107000548A KR101144878B1 KR 101144878 B1 KR101144878 B1 KR 101144878B1 KR 1020107000548 A KR1020107000548 A KR 1020107000548A KR 20107000548 A KR20107000548 A KR 20107000548A KR 101144878 B1 KR101144878 B1 KR 101144878B1
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South Korea
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fluid
chamber
island
island member
floating
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KR1020107000548A
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English (en)
Korean (ko)
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KR20100018614A (ko
Inventor
가이 다나카
Original Assignee
가부시키가이샤 아이에이치아이
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G37/00—Combinations of mechanical conveyors of the same kind, or of different kinds, of interest apart from their application in particular machines or use in particular manufacturing processes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Fluid Mechanics (AREA)
  • Advancing Webs (AREA)
KR1020107000548A 2007-06-29 2008-05-09 부상 장치 및 부상 반송 장치 Active KR101144878B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2007173432A JP5239227B2 (ja) 2007-06-29 2007-06-29 浮上ユニット及び浮上搬送装置
JPJP-P-2007-173432 2007-06-29
PCT/JP2008/058627 WO2009004860A1 (ja) 2007-06-29 2008-05-09 浮上装置及び浮上搬送装置

Publications (2)

Publication Number Publication Date
KR20100018614A KR20100018614A (ko) 2010-02-17
KR101144878B1 true KR101144878B1 (ko) 2012-05-14

Family

ID=40225917

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020107000548A Active KR101144878B1 (ko) 2007-06-29 2008-05-09 부상 장치 및 부상 반송 장치

Country Status (5)

Country Link
JP (1) JP5239227B2 (enExample)
KR (1) KR101144878B1 (enExample)
CN (1) CN101711218B (enExample)
TW (1) TW200914351A (enExample)
WO (1) WO2009004860A1 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI131669B1 (en) * 2023-09-06 2025-09-04 Nordic Gravity Energy Storage Tech Oy Gravitational energy storage system, storage system and movable platform system

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20070051732A (ko) * 2005-11-14 2007-05-18 이시카와지마-하리마 주고교 가부시키가이샤 부상 장치 및 반송 장치

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE59406900D1 (de) * 1993-02-08 1998-10-22 Sez Semiconduct Equip Zubehoer Träger für scheibenförmige Gegenstände
JP2001010724A (ja) * 1999-06-28 2001-01-16 Watanabe Shoko:Kk 浮上搬送装置
JP2001070859A (ja) * 1999-09-06 2001-03-21 Takata Corp 薄板円板素材の保持構造
JP2004196482A (ja) * 2002-12-18 2004-07-15 Maruyasu Kikai Kk ローラコンベア
JP4258713B2 (ja) * 2003-07-08 2009-04-30 株式会社ダイフク 板状体搬送装置
JP4613800B2 (ja) * 2004-12-01 2011-01-19 株式会社Ihi 浮上装置および搬送装置
JP4889275B2 (ja) * 2005-10-11 2012-03-07 株式会社日本設計工業 薄板状材料搬送用エアテーブル及び薄板状材料搬送装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20070051732A (ko) * 2005-11-14 2007-05-18 이시카와지마-하리마 주고교 가부시키가이샤 부상 장치 및 반송 장치

Also Published As

Publication number Publication date
CN101711218B (zh) 2012-04-11
CN101711218A (zh) 2010-05-19
TWI359779B (enExample) 2012-03-11
JP5239227B2 (ja) 2013-07-17
KR20100018614A (ko) 2010-02-17
JP2009012874A (ja) 2009-01-22
WO2009004860A1 (ja) 2009-01-08
TW200914351A (en) 2009-04-01

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