KR101133963B1 - Method of pickup and pickup apparatus - Google Patents

Abstract

Provided are a pick-up method and a pick-up device in which cracking is unlikely to occur in neighboring pellets, and the pellets to be peeled can be reliably and easily peeled off and taken out. The thin pellets 11 having a plurality of rectangular shapes adhered on the adhesive sheet 12 are sequentially peeled from the adhesive sheet 12 and taken out. In the state which hold | maintained the pellet 11 which should be peeled from the upper side, the adhesive sheet 12 is sucked from below, the suction | suction of this air and holding | maintenance of the pellet from above, and the protrusion 25 which intrudes into the clearance gap 19 is carried out. ), The pellets 11 are peeled off by moving the accommodating portion 17 along the horizontal direction while supporting the adhesive sheet 12 from below.

Description

Pick-up method and pick-up device {METHOD OF PICKUP AND PICKUP APPARATUS}

The present invention relates to a pickup method and a pickup device.

In the manufacturing process of a semiconductor device, it is necessary to pick up the diced semiconductor pellet (henceforth simply a pellet) from an adhesive sheet. As a conventional pick-up device, there is a stage holding a pressure-sensitive adhesive sheet, a pusher that moves forward and backward with respect to the stage, and a needle pushed up by the pusher. That is, it is comprised so that the adhesive sheet of a stage may be pushed out from the back surface side by the needle pushed up by the pushing-up stand, and the pellet may be removed from an adhesive sheet.

However, in the pick-up apparatus using the needle, when the needle breaks through the adhesive sheet and pushes the pellets off from the adhesive sheet, the tip end of the needle may be worn out, broken, or bent. In such a case, there is a fear that the broken needle will scratch the back surface of the pellet when the pellet is pushed up. In addition, the length of each needle is increased by abrasion or damage, and the pellets are inclined to be pushed up, so that neighboring pellets may collide with each other and be scratched.

In addition, the pellets are adsorbed by the collet and taken out. However, when the pellet is tilted and pushed up, the adsorption miss of the pellet by the collet occurs. Pellet adsorption misses of the collet will interfere with subsequent work. In addition, the pellets were sometimes damaged by pushing up the needle.

Then, the pick-up apparatus (patent document 1) which does not use such a needle is proposed in recent years. This pick-up apparatus is provided with the stage 3 which hold | maintains the adhesive sheet 2 to which the pellet 1 was bonded as shown in FIG. 8 and FIG. In addition, the stage 3 is provided with a receiving portion 4 in which the upper surface 4a protrudes from the stage upper surface 3a. For this reason, the clearance gap 6 is formed in the outer peripheral side of the accommodating part 4 as shown in FIG. 9 between the adhesive sheets 2. In addition, a suction hole 5 communicating with the gap 6 is formed in the stage 3. In addition, these suction holes 5 and 5 protrude outward from the 1st side 8a of the pellet 1 in plan view, as shown in FIG.

Next, a pickup apparatus using the pickup apparatus will be described. First, the adhesive sheet 2 is sucked through the suction hole 5 in the state in which the pellet 1 is sucked (held) by the collet (adsorption collet) 7 from above. Thereby, the air of the clearance gap 6 is attracted like arrow A, the adhesive sheet 2 around the accommodating part 4 is attracted | sucked, and the adhesive sheet 2 in the outer peripheral side of the pellet 1 Peel off.

Thereafter, as shown in FIG. 10, the housing portion 4 is moved in the direction of the arrow B. FIG. That is, it moves to the 2nd side 8b side facing the 1st side 8a. Thereby, the accommodation area of the pellet 1 accommodated by the accommodating part 4 is reduced, the adsorption (suction) area of the adhesive sheet 2 increases, and finally it adheres from this pellet 1 The sheet 2 can be completely peeled off.

Patent Document 1: Japanese Patent No. 3209736

By the way, when the said pick-up apparatus is used, since it is necessary to peel off the adsorption sheet 2 around the accommodating part 4 in the initial stage of peeling, it takes time to peel off around the chip (pellet) 1 by this adsorption. In this case, the force (stress) required for peeling around the chip by adsorption is weak because it is distributed along the three sides 8a, 8b, 8c, 8d (see Fig. 11) of the accommodating portion 4.

Moreover, as shown in FIG. 11, the adhesive sheet 2 peels from the 1st side 8a toward the 2nd side 8b side facing this. For this reason, it peels by the length of the 1st edge | side 8a, and requires comparatively large peeling force. However, since the holding of the chip 1 at the time of peeling is only the adsorption force of the collet 7, the chip (pellet) 1 side is weaker than the peeling force at the time of slide, so that the chip 1 is removed from the collet 7, The adhesive sheet 2 is pulled out by the slide operation of the accommodating part 4, and there exists a possibility that the position shift may arise in the chip | tip 1.

In view of the above problems, the present invention provides a pick-up method and a pick-up apparatus capable of reliably and easily peeling and taking out pellets to be peeled off.

The pickup method of the present invention is a pickup method in which a plurality of rectangular-shaped thin pellets adhered on an adhesive sheet are sequentially peeled off and taken out from the adhesive sheet, and the pellets to be peeled off at the receiving portion are accommodated through the adhesive sheet. On the outer circumferential side of the housing portion, a gap is formed between the pressure-sensitive adhesive sheet, and the air of the gap is sucked while supporting a part of the pressure-sensitive adhesive sheet from below by a projection projecting into the gap with the pellet held from above. Then, the adhesive sheet on the outer circumferential side of the accommodating portion is peeled off, and then the pellet is peeled off by moving the accommodating portion along the horizontal direction while supporting the adhesive sheet with a projection and maintaining the pellet from above.

According to the pick-up method of this invention, when the pellet which should be peeled is accommodated through an adhesive sheet, and the air of the clearance gap formed with the adhesive sheet in the outer peripheral side of this accommodating part is sucked, the adhesive sheet in the outer peripheral side of a accommodating part Is sucked and the adhesive sheet is peeled from the pellets. Thereafter, the receiving area of the pellets by the containing portion decreases by moving the containing portion along the horizontal direction. Thereby, the adsorption (suction) area of the pressure sensitive adhesive sheet increases, and finally the pressure sensitive adhesive sheet can be completely peeled from the pellet to be peeled off.

Moreover, in this peeling operation, since the said adhesive sheet is supported by the protrusion which penetrates into the clearance gap formed in the outer peripheral side of a accommodating part from below, when the air | gap of a clearance gap is attracted, a stress can be concentrated in the vicinity of this projection, Peeling of the pellets is facilitated. Moreover, a processus | protrusion penetrates into an adhesive sheet by suction.

The pick-up device of the present invention is a pick-up device which sequentially peels and pulls out thin thin pellets of a plurality of rectangular shapes bonded onto a pressure-sensitive adhesive sheet from the pressure-sensitive adhesive sheet, the holding means for holding the pellets to be peeled from above; In the stage in which an adhesive sheet is mounted, the accommodating part which accommodates the said pellet through an adhesive sheet, the air suction means which sucks the air of the gap formed between the adhesive sheet in the outer peripheral side of this accommodating part, and in the said gap. It is provided with the projection which protrudes and supports a part of said adhesive sheet from below, and the drive means which moves the said accommodating part along a horizontal direction.

According to the pick-up apparatus of this invention, the pellet to peel can be accommodated in a accommodating part through an adhesive sheet. And the outer periphery of the accommodating part is made by accommodating the pellets in the accommodating part and aspirating air of the gap formed between the adhesive sheet on the outer peripheral side of the accommodating part with the air suction means while the pellet is held from above by the retaining means. The pressure-sensitive adhesive sheet is attracted on the side, and the pressure-sensitive adhesive sheet is peeled from the pellets. Further, the housing portion can be moved along the horizontal direction by the driving means. As a result, the receiving area of the pellets by the containing part decreases, and the adsorption (suction) area of the adhesive sheet increases. For this reason, when an adsorption area becomes the same as a pellet area or larger than a pellet area, an adhesive sheet can be peeled completely from this pellet to peel.

Moreover, in this peeling operation | work, since the said adhesive sheet is supported by the protrusion which penetrates into the clearance gap formed in the outer peripheral side of a accommodating part from below, when the air | gap of a clearance gap is attracted, a stress can concentrate in this vicinity and adsorption | suction Peeling of the pellets by means of easy. For this reason, the said pick-up method can be reliably performed.

The protrusion may be configured as a pin that is movable up and down. Thereby, the height position of a pin can be adjusted. In addition, the projections can be integrally attached to the stage where the accommodation portion is disposed. In this case, it may extend in an up-down direction, or may extend in a horizontal direction (horizontal direction).

It is preferable to arrange | position a protrusion corresponding to the corner part (edge part) of a pellet, and by arrange | positioning in this way, stress can be concentrated in the edge part of the pellet which is easy to peel.

(Effects of the Invention)

In the present invention, when the air in the gap is sucked in, the stress can be concentrated in the vicinity of the projection, and the peeling of the pellet by adsorption becomes easy. That is, in the initial stage of peeling, peeling becomes possible with a relatively small force, and shortening of peeling start time can be aimed at.

Moreover, in this peeling operation | work, a processus | protrusion penetrates into an adhesive sheet by suction, and a processus | protrusion becomes an anchor with respect to an adhesive sheet. For this reason, while a peeling operation | work is stabilized, an adhesive sheet is not pulled also by the slide of a accommodating part, and a chip (pellet) side does not receive with respect to the peeling force at the time of a slide. Therefore, the pellet does not come out of the collet (holding means), and the adhesive sheet is pulled out so that there is no fear of positional shift in the pellet.

Since the height position of the pin can be adjusted by constructing the pin up and down, the optimum peeling performance can be obtained for the pellet to be peeled off by adjusting the height position of the pin according to the thickness of the adhesive sheet, the height of the stage on which the receiving portion is placed, and the like. Can be exercised.

When protrusions are integrally formed with respect to the stage, the configuration of the entire apparatus can be simplified. Moreover, even if it extends in an up-down direction, even if it extends in a horizontal direction (horizontal direction), an adhesive sheet can be supported from below and the function which aims at improvement of peelability can be exhibited reliably.

By arranging the projections corresponding to the corners (edges) of the pellets, the stress can be concentrated at the corners of the pellets that are easily peeled off. For this reason, peeling start can be performed stably and reliably, and the reliability of peeling operation | work improves.

1 is a simplified process chart showing a pickup method of an embodiment of the present invention.

2 shows a pickup device of an embodiment of the present invention and is a simplified cross-sectional view of a pickup using this device.

3 is a simplified plan view showing pellets adhered to an adhesive sheet.

4 is a simplified diagram showing the relationship between the projection and the accommodation portion of the pickup apparatus.

5 is a cross-sectional view of a pickup device of another embodiment of the present invention.

6 is a simplified process chart showing a pickup method using another pickup device of the embodiment of the present invention.

7 is a simplified view showing a modification of the projection of the pickup device.

8 is a simplified plan view of a conventional pickup apparatus.

9 is a simplified cross-sectional view of a conventional pickup apparatus.

10 is a simplified cross-sectional view showing a peeling process using a conventional pickup apparatus.

11 is a simplified diagram showing a problem of a pickup method using a conventional pickup device.

<Explanation of symbols for the main parts of the drawings>

11: pellet 12: adhesive sheet

15: holding means 16: stage

17 accommodating part 18: air suction means

19: gap 25: protrusion

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described based on FIG.

2 shows a pickup apparatus of the present invention. This pick-up apparatus is an apparatus which peels and pulls out the thin pellet (semiconductor tip) 11 which is a plurality of rectangular shape attached on the adhesive sheet 12 sequentially from the said adhesive sheet 12. FIG.

The pellet 11 uses the wafer W (refer FIG. 3) as a raw material, and cut | disconnects this raw material to rectangular shape, and turns into a final product. For this reason, the pellet 11 has a square or rectangular shape. That is, as shown in FIG. 3, the wafer W is circular as a whole, it is divided into the individual pellets 11 by dicing, and this pellet 11 is adhere | attached on the adhesive sheet 12. As shown in FIG. Moreover, the frame 13 which consists of a ring body is adhere | attached on the outer peripheral side of the adhesive sheet 12. As shown in FIG. That is, this frame 13 and the adhesive sheet 12 are integrated. And the pellet 11 is taken out by this pick-up apparatus in the state in which the frame 13 and the adhesive sheet 12 are integrated.

As shown in FIG. 2, the pick-up apparatus holds the holding means 15 for holding the pellets 11 to be peeled from above, the stage 16 on which the adhesive sheet 12 is loaded, and the pellets 11 with the adhesive sheets. Air suction means 18 which sucks the air of the accommodating part 17 accommodated through the 12, and the clearance gap 19 formed between the adhesive sheet 12 in the outer peripheral side of this accommodating part 17. And driving means (not shown) for moving the housing portion 17.

The holding means 15 is comprised by the adsorption member (collet) 21 which has the head 20 which adsorb | sucks the pellet 11. A suction hole is formed in the lower end surface 20a of the head 20, and the pellet 11 is sucked in vacuum through this suction hole, and the pellet 11 is sucked by the lower surface 20a of the head 20. do. For this reason, when the vacuum suction (vacuum treatment) is released, the pellet 11 is pulled out of the head 20. And this adsorption member 21 is connected to the arm of a robot, for example, and it is a vertical direction (the arrow (C, D) direction of FIG. 2), a horizontal direction (the arrow (E) direction of FIG. 2), and a combination thereof. It is possible to move in the direction.

The recessed part 22 is formed in the upper surface of the stage 16, and the accommodating part 17 is arrange | positioned at this recessed part 22. As shown in FIG. The recessed part 22 is provided with the rectangular main-body part 22a and the taper part 22b provided in the outer peripheral side of the main-body part 22a. Moreover, the accommodating part 17 is a rectangular flat body fitted into the main-body part 22a of the recessed part 22, and the thickness dimension is set to be substantially equal to the depth dimension of the main-body part 22a. 1, the width dimension W of the accommodating part 17 is set smaller than the length (width dimension) W1 of one side of the square pellet 11. As shown in FIG. In this case, one long side 17a of the accommodating part 17 corresponds to the first side 23a of the pellet 11 to be peeled off, and the other long side 17b of the accommodating part 17 should be peeled off. It corresponds to the 2nd side 23b (side facing the 1st side 23a) of the pellet 11, and the short side 17c of the front end side of the accommodating part 17 is the 3rd side of the pellet 11 (23c) (the side perpendicular to the first side 23a and the second side 23b).

As shown in FIG. 1, the recess 22 has a suction hole corresponding to the middle portion of the first side 23a, the middle portion of the second side 23b, and the middle portion of the third side 23c. 30a, 30b, 30c) are formed. And each suction hole 30 protrudes outward from the pellet 11, as can be seen from a plan view.

And as shown to FIG. 2 (A), by arrange | positioning the adhesive sheet 12 which the pellet 11 adhere | attached on the stage 16, the outer peripheral side of the accommodating part 17, specifically, the accommodating part 17 is at least. The gap 19 is formed between the adhesive sheet 12 on the front side of the short side 17c on the front end side of the side face).

The suction means 18 has the said suction hole 30a, 30b, 30c, and the vacuum pump which is not shown in figure in this suction hole 30a etc. is connected. That is, the air in the gap 19 is sucked through the suction hole 30a or the like by driving the vacuum pump.

The accommodating part 17 moves along a horizontal direction, keeping the short side 17c of the front end side of the accommodating part 17 parallel with the 3rd side 23c of the pellet 11 via a drive means. Moreover, as a drive means, various mechanisms, such as a reciprocating mechanism and a cylinder mechanism, which consist of a bolt shaft member and the nut member screwed to this, can be used. Moreover, the support member 31 is extended in this accommodating part 17, and the movable block body 32 is comprised by this accommodating part 17 and the support member 31. As shown in FIG.

In addition, the stage 16 is provided with the projection 25 which penetrates into the said gap 19. That is, the corner part (edge part) which the 1st side 23a and the 3rd side 23c of the pellet 11 to peel off, and the 2nd side 23b and the 3rd side 23c of the pellet 11 The pins (small cylindrical cylinders whose ends are R-shaped) (refer to FIG. 4) are arranged at the corners (edges) formed by the protrusions 25, respectively.

In this case, holes (not shown) are formed in the stage 16 in the vertical direction, and the pins as the projections 25 are arranged in the holes so as to be movable up and down. The projection 25 moves up and down by a vertical movement mechanism such as a cylinder mechanism or a ball screw mechanism (not shown). For this reason, as shown to FIG. 4 (A), the height position of the tip end 26 of the projection 25 and the height position of the upper surface 27 of the accommodating part 17 are made to correspond, or FIG. 4 (B) As shown in FIG. 4, the height position of the tip 26 of the protrusion 25 is set to be higher than the height position of the upper surface 27 of the accommodation portion 17, or as shown in FIG. 4C, the protrusion 25. The height position of the tip end 26 of the receiving part 17 can be made into the state lower than the height position of the upper surface 27 of the accommodating part 17. FIG. In addition, although the protrusion 25 differs according to the size and thickness dimension of the pellet 11 to be peeled off, the thickness dimension of the adhesive sheet 12, etc., it is about 0.6 mm-about 0.7 mm, for example, and the radius of curvature of the R part of the front-end | tip is As an example, it is about 200 micrometers-300 micrometers.

Next, a pickup method using the pickup device will be described. First, as shown in FIG. 3, in the state in which the frame 13 and the adhesive sheet 12 are integrated, pellets 11 different from one side (in this case, the fourth side 23d) as shown in FIG. ) Select the pellet 11a which does not correspond, and place the stage 16 of this pick-up apparatus below this pellet 11a, and move it through the adhesive sheet 12 as shown to FIG. 2 (A). It is accommodated in the accommodating part 17 of the block body 32.

For this reason, the clearance gap 19 is formed in the lower side of the adhesive sheet 12 at least in front of the accommodating part 17, as shown to FIG. 2 (A). In addition, the gap 19 has a corner portion (edge portion) formed by the first side 23a and the third side 23c of the pellet 11, and the second side 23b and the third side of the pellet 11. The projection 25 corresponding to the corner portion (edge portion) formed by 23c is intruded. At this time, for example, as shown in FIG.4 (a), it is set as the state where the height position of the front end 26 of the projection 25 and the height position of the upper surface 27 of the accommodating part 17 correspond. In this state, the collet 21 of the holding means 15 is lowered as shown by the arrow D to bring the head 20 into contact with the upper surface of the pellet 1, and the pellet 11a is vacuumed through the suction hole. It sucks and makes the pellet 11a adsorb | suck to the lower end surface 20a of this head 20.

The gap 19 communicates with the suction holes 30a, 30b, and 30c as described above. Thus, the air in the gap 19 is sucked through the suction holes 30a, 30b, and 30c by driving the suction means 18. As a result, as shown in FIG. 2B, a part of the adhesive sheet 12 around the protrusion 25 is sucked in a state where a part of the adhesive sheet 12 is supported by the protrusion 25, and the protrusion ( 25) The adhesive sheet 12 in the vicinity is peeled from the pellet 11a.

 Then, as shown to FIG. 1 (B) (C) and FIG.2 (C) (D), the accommodating part 17 is moved (slide) like arrow F. As shown to FIG. Thereby, the accommodation area of the pellet 1 by the accommodation part 17 decreases, and the adsorption (suction) area below the adhesive sheet 12 increases. At this time, since the pellet 11a is hold | maintained (adsorption) in the collet 21, the adhesive sheet 12 is peeled from the pellet 11a sequentially. For this reason, as shown in FIG.2 (D), when the adsorption area becomes larger than a pellet area from the same as a pellet area, the adhesive sheet 12 can be peeled completely from the pellet 1 to peel.

And after peeling, as shown in FIG.2 (E), the pellet 11a can be taken out from the adhesive sheet 12 by raising the collet 21 like arrow C, and separating it from the stage 16. As shown to FIG. . After that, as shown in FIG. 2 (F), the accommodating part 17 is returned as shown by the arrow G to be in a standby state, and the accommodating part 17 accommodates the pellet 11 to be peeled off next. To place. In this case, it corresponds to the pellet 11 of 11b of FIG.

In this way, if the pick-up apparatus is made to correspond to the pellet 11 sequentially, all the pellets 11 on the adhesive sheet 12 can be peeled off from the adhesive sheet 12, and can be taken out.

In the case where the pick-up device is associated with each pellet 11, the pick-up device side may be moved, or the sticky sheet 12 to which the pellet 11 is bonded may be moved, or both may be moved.

In the present invention, the pressure-sensitive adhesive sheet 12 is supported from below by the projections 25 indented into the gaps 19 formed on the outer circumferential side of the accommodating portion 17, so that the projections are sucked when the air in the gaps 19 is sucked. (25) The stress can be concentrated in the vicinity, and the peeling of the pellet 11 by adsorption becomes easy. That is, in the initial stage of peeling, peeling becomes possible with a relatively small force, and shortening of peeling start time can be aimed at.

In addition, in this peeling operation | work, the processus | protrusion 25 penetrates into the adhesive sheet 12 by suction, and the processus | protrusion 25 becomes an anchor with respect to the adhesive sheet 12. As shown in FIG. For this reason, peeling operation | work is stabilized and the adhesive sheet 12 is not pulled also by the slide of the accommodating part 17, and the chip (pellet) 1 side does not lose with respect to the peeling force at the time of a slide. Therefore, the pellet 11 does not come out of the collet 21 (holding means), and the adhesive sheet 12 is pulled out, and there exists no possibility that the position shift may arise in the pellet 11.

Since the height position of the pin can be adjusted by configuring the protrusion 25 as the pin which can move up and down, the height position of the pin is adjusted according to the thickness of the adhesive sheet 12 or the height of the stage 16 on which the accommodation portion 17 is disposed. By adjusting, the optimal peeling performance can be exhibited with respect to the pellet 11 which should be peeled off.

By arranging the projections 25 in correspondence with corner portions (edge portions) of the pellets 11, stress can be concentrated on the edge portions of the pellets 11 that are easily peeled off. For this reason, peeling start can be performed stably and reliably, and the reliability of peeling operation | work improves.

Next, FIG. 5 shows another embodiment, in which case the accommodating portion 17 protrudes from the upper surface of the stage 16. For this reason, when the pellet 11 which should be peeled off is accommodated in the accommodating part 17, the pellet 11 is accommodated above the upper surface of the stage 16. As shown in FIG.

Therefore, also in the pick-up apparatus shown in this FIG. 5, the vertically movable protrusion 25 which penetrates into the clearance gap 19 is provided. For this reason, if air is sucked into the clearance gap 19 in the state which hold | maintained the pellet 11 with the collet 21 from the upper side, in the front side of the accommodating part 17, the protrusion 25 of the adhesive sheet 12 is carried out. The adhesive sheet 12 can be peeled from the pellet 11 in the state which supported one part. Therefore, when the accommodating part 17 is moved in a horizontal direction in this state, the adhesive sheet 12 can be peeled easily like the pickup apparatus shown in FIG.

By the way, in each said embodiment, although the accommodating part 17 was moved with respect to the stage 16, as another embodiment, the accommodating part 17 is integrally provided in the stage 16, and the stage 16 is moved. The accommodation portion 17 may be moved relative to the pellet 11.

Next, FIG. 6 shows another embodiment, and in this case, the accommodating part 17 is provided with the thin part 35 tapering toward the front-end | tip. That is, the predecessor 35 has a first side 36 parallel to the second side 23b of the pellet 11 and a second side 37 parallel to the second side 23c of the pellet 11. The first side 36 and the second side 37 form 90 degrees. And the edge part 38 of the predecessor part 35 respond | corresponds to the one pellet edge part 39 which is going to peel. This one pellet edge portion 39 is a joining portion formed by the second side 23b and the third side 23c.

In this embodiment, the diagonal L which connects the pellet edge part 39 and the other pellet edge part 40 (the corner part which the 1st edge | side 23a and the 4th edge | side 23d make) opposing this is The corner portion 38 of the receiving portion 17 is disposed on the top.

In this embodiment, a suction hole 30d is formed corresponding to the corner portion of the second side 23b and the fourth side 23d, and the suction hole 30e corresponds to the middle portion of the second side 23a. ) Is formed, and a suction hole 30g is formed corresponding to the middle portion of the third side 23c, and the suction hole 30h corresponding to the corner portion of the third side 23c and the first side 23a. Is formed. Each suction hole 30 protrudes outward from the pellet 11 as can be seen in plan view. In this case, the up-and-down movable protrusion 25 which penetrates into the clearance gap 19 is provided corresponding to the edge part 39 of the 2nd side 23b and the 3rd side 23c.

Next, the pick-up method using the pick-up apparatus shown in FIG. 6 is demonstrated. First, in the state where the frame 13 and the pressure sensitive adhesive sheet 12 are integrated, the other pellets 11 do not correspond to two sides (in this case, the first side 23a and the fourth side 23d). The pellet 11a is selected, and the stage 16 of this pick-up apparatus is located below this pellet 11a, and is accommodated in the accommodating part 17 of the movable block body 32 through the adhesive sheet 12. As shown in FIG. At this time, the first side 36 of the accommodating part 17 is parallel to the second side 23b of the pellet 11a, and the second side 37 of the accommodating part 17 is formed of the pellet 11a. The edge part 38 of the accommodating part 17 is arrange | positioned on the diagonal L of the pellet 11a so that it may become parallel with respect to the 3rd side 23c. Further, the edge portion 38 is directed toward the edge portion 40 opposite to the edge portion 39 along the direction of the arrow α of FIG. 6, that is, the diagonal L, with respect to the edge portion 39 of the pellet 11a. It is out of order.

For this reason, in the front side (front side of the 1st side 36 and the 2nd side 37) of the predecessor part 35 of the accommodating part 17, the clearance gap 19 is provided in the lower side of the adhesive sheet 12. It is formed and supports a part of the adhesive sheet 12 by the projection 25. As shown in FIG. In this state, the pellet 11a is made to adsorb | suck by the collet 21 of the holding means 15 like FIG.

The gap 19 sucks air in the gap 19 through suction holes 30d, 30e, 30g, and 30h. As a result, a part of the pressure sensitive adhesive sheet 12 corresponding to the gap 19 is attracted, and the pressure sensitive adhesive sheet 12 near the protrusion 25 is peeled from the pellet 11a.

Thereafter, the receiving portion 17 is moved (slided) along the diagonal L as shown by the arrow α. Thereby, the accommodating area of the pellet 11 by the accommodating part 17 reduces, and the adsorption (suction) area below the adhesive sheet 12 increases. At this time, since the pellet 11a is hold | maintained (adsorption) in the collet 21, the adhesive sheet 12 is peeled from the pellet 11a sequentially. For this reason, when the adsorption area becomes larger than the pellet area or the same as the pellet area, the adhesive sheet 12 can be completely peeled from the pellet 1 to be peeled off.

In the pick-up apparatus shown in FIG. 6, it peels along the diagonal L of the pellet 11. As shown in FIG. For this reason, the peeling force is required small compared with the case of peeling by the length of one side of the pellet 11, and peeling of an adhesive sheet becomes easy. In addition, when peeling, the accommodating part 17 will space apart with respect to the side of the adjacent pellet 11 corresponding to two sides which comprise the pellet edge part of the pellet 11 which starts peeling. Thereby, dynamic bending stress is not applied to the adjacent pellets 11, and cracks do not occur in the adjacent pellets 11 (in particular, sides corresponding to the pellets to be peeled). Moreover, since it peels from one pellet edge part, the adsorption stress which attracts the adhesive sheet 12 can be concentrated in one place, and even if it is the thin and flexible pellet 11, peeling becomes possible and can peel off. There is an advantage that the application range of the pellet 11 is expanded. Moreover, since the peeling site | part is inclined and moves, the adhesive sheet 12 peels off by adsorption force, applying a shear, and the improvement of peeling performance can be aimed at.

In particular, at the start of the peeling operation, it is only necessary to correspond to one pellet edge portion of the pellet 11 to be peeled off the edge portion of the accommodating portion 17, so that the width dimension thereof is slightly smaller than one side of the pellet 11 or the like. It is not necessary to set the accommodating part 17 every time by setting it as. In other words, it is possible to match pellets of various sizes by simply positioning the one-piece accommodating portion without adjusting the accommodating portion 17 to the dimensions of the pellets 11, thereby providing excellent versatility and contributing to cost reduction. Moreover, since the moving direction of the accommodating part 17 is a direction which forms 45 degrees with respect to the two sides which comprise the pellet edge part 39, it can peel with an equal peeling force with respect to the adhesive sheet 12, Product damage can be prevented by completing without unnecessary load on the product (pellet). Moreover, since the protrusion 25 is formed corresponding to the pellet edge part which is easy to peel, the peeling can be started reliably and the peeling of the adhesive sheet 12 becomes easier by peeling along the diagonal L further. There is this.

As shown in FIG. 6, when the container part 17 slides in the inclined direction with respect to the pellet 11, the movement direction can also be changed. In this way, when the movement direction of the accommodating part 17 can be changed, the movement direction can be changed according to the nature of the pellet 11 to peel. That is, since the pellet 11 has a fragile direction depending on the crystal orientation, the movement direction of the accommodating part 17 can be set so that the force of the fragile direction acts on the adjacent pellet 1. For this reason, damage (brokenness) of adjacent pellets can be prevented more stably.

By the way, as the protrusion 25, as shown in FIG. 7, the thing formed integrally with the stage 16 may be sufficient. In this case, the protrusion 25 protrudes horizontally from the horizontal direction to the recessed part 22, and may extend in an up-down direction. In this way, when the projections are integrally formed with respect to the stage 16, the configuration of the entire apparatus can be simplified. Moreover, even if it extends in an up-down direction, even if it extends in a horizontal direction (horizontal direction), the adhesive sheet 12 can be supported from below and the function which aims at improvement of peelability can be exhibited reliably.

As mentioned above, although embodiment of this invention was described, this invention is not limited to the said embodiment, A various deformation | transformation is possible, For example, as the suction hole 30 formed in the stage 16, size, number, The shape and the like can be arbitrarily set within the allowable range of air in the gap 19. For this reason, one suction hole 30 may be sufficient. The pellet 11 to be peeled off is not limited to a square, but may have a rectangular shape having a short side and a long side, or a rectangular shape having a very long side compared to the short side. Although the thickness of the adhesive sheet 12 also differs according to the suction force or the like, any material that can be curved and deformed can be peeled off from the pellet 11 when the air in the gap 19 is sucked by the suction means 18.

Also as the thickness of the accommodating part 17, it can set arbitrarily according to the range which can be peeled from the pellet 11 when the air | gap of the clearance gap 19 is suctioned by the suction means 18. As shown in FIG. In addition, in the case of the accommodating part 17 as shown in FIG. 6, it is not limited to 90 degrees as an angle of the corner part of the accommodating part 17, and may be rather acute or obtuse.

It is also arbitrary as the number of the pellets 11 adhering on the adhesive sheet 12, and in this invention, all the pellets 11 on the adhesive sheet 12 can be peeled off sequentially, without being influenced by the number. In addition, in the thing shown in FIG. 1, the other pellet 11 should not correspond to 23 d of 4th edges of the pellet 11 to peel, In the thing shown in FIG. Since the other pellet 11 does not need to correspond to the 2nd edge | side 23b and the 4th edge | side 23d, it can set arbitrarily in the range which satisfy | fills this condition as a peeling order.

In FIG. 1, the corner part (edge part) which the 1st side 23a and the 3rd side 23c of the pellet 11 which should peel the protrusion 25 forms, and the 2nd side 23b of the pellet 11 are shown. And the corner portion (edge portion) formed by the third edge portion 23c, and the corner portion (edge portion) 39 of the second side 23b and the third side 23c of the pellet 11 in FIG. 6. Although arrange | positioned at, respectively, the arrangement | positioning position, number, etc. of the projection 25 can be changed arbitrarily. That is, the intermediate part of the 1st side 23a, the intermediate part of the 2nd side 23b, the intermediate part of the 3rd side 23c, etc. may be sufficient. In addition, when arrange | positioning the processus | protrusion 25, you may form corresponding to the suction hole 30, or you may form avoiding the suction hole 30. In addition, even when the protrusion 25 is comprised by the pin like FIG. 2, the fixed type which does not move up and down may be sufficient. In this case, what is necessary is just to plant a pin structure member in the stage 16, and to provide it.

A plurality of pellets can be formed by adhering the cut wafer or the sheet material before the final product to the adhesive sheet and cutting it with a dicing saw or the like in this state. And this pick-up apparatus can take out a pellet by peeling one sheet from an adhesive sheet. The extracted pellets can be supplied to predetermined lands of the lead frame.

Claims (5)

A pickup method in which a plurality of rectangular-shaped pellets adhered on an adhesive sheet are sequentially peeled off and taken out from the adhesive sheet: a pellet to be peeled off from the accommodating portion is accommodated through the adhesive sheet and adhered on the outer peripheral side of the accommodating portion. After forming the gap with the sheet, while holding the pellet from the upper side, the adhesive sheet on the outer circumferential side of the receiving portion is peeled off by sucking the air in the gap while supporting a part of the adhesive sheet from the lower side with the projection penetrating into the gap. And then supporting the pressure-sensitive adhesive sheet with projections, and moving the receptacle along the horizontal direction while maintaining the pellets from above, thereby peeling the pellets. A pickup device for sequentially peeling and withdrawing a plurality of rectangular shaped pellets bonded onto an adhesive sheet from the adhesive sheet, comprising: holding means for holding a pellet to be peeled from above; A stage on which the adhesive sheet is stacked; An accommodation portion accommodating the pellets through an adhesive sheet; Air suction means for sucking air in a gap formed between the pressure-sensitive adhesive sheet and the adhesive sheet on the outer circumferential side; A projection which penetrates into the gap to support a part of the pressure-sensitive adhesive sheet from below; And drive means for moving the housing along the horizontal direction. The pickup apparatus according to claim 2, wherein the protrusion is constituted by a pin that can move up and down. The pickup apparatus according to claim 2 or 3, wherein the protrusions are integrally formed on a stage on which the accommodation portion is disposed. The pickup apparatus according to claim 2 or 3, wherein the projections are arranged in correspondence with corner portions of pellets to be peeled off.

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