WO2008041273A1

WO2008041273A1 - Method of pickup and pickup apparatus

Info

Publication number: WO2008041273A1
Application number: PCT/JP2006/319443
Authority: WO
Inventors: Akira Nakatsu
Original assignee: Canon Machinery Inc.
Priority date: 2006-09-29
Filing date: 2006-09-29
Publication date: 2008-04-10
Also published as: JPWO2008041273A1; CN101512746B; CN101512746A; JP4850916B2; KR20090043538A; KR101133963B1

Abstract

A method of pickup and pickup apparatus that lower the possibility of cracking of neighboring pellets and realize unfailing easy detaching and taking out of pellets to be detached. Multiple rectangular thin pellets (11) stuck onto pressure sensitive adhesive sheet (12) are sequentially detached from the pressure sensitive adhesive sheet (12) and taken out. While retaining each pellet (11) to be detached from above, suction from below is applied to the pressure sensitive adhesive sheet (12). Simultaneously with the air suction and pellet retention from above, while supporting the pressure sensitive adhesive sheet (12) from below by means of protrusions (25) for insertion in apertures (19), receiving part (17) is traveled in the horizontal direction to thereby realize detaching of the pellet (11).

Description

Specification

Pickup method and pickup device

Technical field

[0001] The present invention relates to a pickup method and a pickup apparatus.

Background art

In a semiconductor device manufacturing process, it is necessary to pick up a diced semiconductor pellet (hereinafter simply referred to as a pellet) from an adhesive sheet. As a conventional pickup device, there is one provided with a stage for holding an adhesive sheet, a push-up stand that moves forward and backward with respect to the stage, and a dollar that is pushed up by the push-up stand. That is, it is configured such that the pressure-sensitive adhesive sheet of the stage is pushed from the back side by one dollar pushed up by the push-up stand, and the pellet is detached from the pressure-sensitive adhesive sheet.

[0003] However, in a pickup device using a needle, when the needle pierces the adhesive sheet, pushes up the pellet and peels from the adhesive sheet, the tip of the needle may be worn, damaged or bent. is there. In such a case, the damaged one dollar may damage the back of the pellet when the pellet is pushed up. Moreover, if it is worn out, the length of each dollar differs due to breakage, and the pellets are tilted and pushed up, and adjacent pellets may collide and be damaged.

[0004] Furthermore, the pellet is adsorbed by a collet and taken out. However, if the pellet is tilted and pushed up, a mistake in adsorption of the pellet due to the collet occurs. If a collet pellet pick-up error occurs, the subsequent work will be hindered. In some cases, the pellet was damaged by the needle being pushed up.

[0005] Therefore, in recent years, a pickup device (Patent Document 1) has been proposed without using such a dollar. As shown in FIGS. 8 and 9, the pickup device includes a stage 3 that holds an adhesive sheet 2 on which a pellet 1 is attached. Further, the stage 3 is provided with a receiving portion 4 whose upper surface 4a protrudes from the stage upper surface 3a. For this reason, a gap 6 is formed on the outer peripheral side of the receiving portion 4 between the adhesive sheet 2 and the adhesive sheet 2 as shown in FIG. Furthermore, the stage 3 is provided with a suction hole 5 communicating with the gap 6. These suction holes 5, 5 As shown in FIG. 8, a part thereof protrudes outside the first side 8a of the pellet 1 in a plan view.

Next, a pickup device using the pickup device will be described. First, the pressure-sensitive adhesive sheet 2 is sucked through the suction hole 5 while the pellet 1 is sucked (held) by the collet (adsorption collet) 7 from above. As a result, the air in the gap 6 is sucked as indicated by an arrow A, the pressure-sensitive adhesive sheet 2 around the receiving portion 4 is sucked, and the pressure-sensitive adhesive sheet 2 is peeled off on the outer peripheral side of the pellet 1.

Thereafter, as shown in FIG. 10, the receiving portion 4 is moved in the direction of arrow B. That is, it is moved to the second side 8b facing the first side 8a. As a result, the receiving area of the pellet 1 received by the receiving part 4 is reduced, and the adsorption (suction) area of the adhesive sheet 2 is increased. Can be completely peeled off.

Patent Document 1: Patent No. 3209736

Disclosure of the invention

Problems to be solved by the invention

[0008] By the way, when the pickup device is used, it is necessary to peel off the suction sheet 2 around the receiving portion 4 at the initial stage of peeling, so that it takes time to peel around the chip (pellet) 1 by this suction. The force (stress) necessary for peeling around the chip by adsorption is distributed along the three sides 8a, 8b, 8c, 8d (see Fig. 11) of the receiving part 4 and is weak. .

As shown in FIG. 11, the adhesive sheet 2 is peeled from the first side 8a toward the second side 8b facing the first side 8a. For this reason, the length of the first side 8a is peeled off and a relatively large peeling force is required. However, since the tip 1 is held only by the collet 7 adsorption force at the time of peeling, the tip (pellet) 1 side loses against the peeling force at the time of sliding, and the tip 1 is detached from the collet 7 or received. There is a risk that the adhesive sheet 2 is pulled by the sliding movement of the part 4 and the chip 1 is displaced.

[0010] In view of the above problems, the present invention provides a pickup method and pickup apparatus that can reliably and easily peel and take out pellets to be peeled.

Means for solving the problem

[0011] The pickup method of the present invention comprises a plurality of rectangular thin-walled sheets affixed on an adhesive sheet. In this pick-up method, the pellet is peeled off from the pressure-sensitive adhesive sheet in order, and the pellet to be peeled is received via the pressure-sensitive adhesive sheet at the receiving part, and the outer peripheral side of the receiving part is in contact with the pressure-sensitive adhesive sheet. After the gap is formed on the outer periphery of the receiving portion, the pellet is held at the upper force and the gap is sucked by supporting the lower part of the pressure-sensitive adhesive sheet by the protrusions that enter the gap while supporting the lower portion. The pressure-sensitive adhesive sheet is peeled off, and then the pellet is peeled by moving the receiving portion along the horizontal direction while supporting the pressure-sensitive adhesive sheet with protrusions and holding the pellet from above.

[0012] According to the pickup method of the present invention, if the pellets to be peeled are received via the adhesive sheet and the air in the gap formed between the receiving portion and the adhesive sheet is sucked, the receiver At the outer peripheral side of the part, the pressure-sensitive adhesive sheet is sucked and peeled off from the pellet. After that, the receiving area of the pellet by the receiving part decreases by moving the receiving part along the horizontal direction. As a result, the adsorption (suction) area of the pressure-sensitive adhesive sheet increases, and finally, the pressure-sensitive adhesive sheet can be completely peeled off from the pellet to be peeled.

[0013] In this peeling operation, the pressure-sensitive adhesive sheet is supported downward by a protrusion that is inserted into a gap formed on the outer peripheral side of the receiving portion. Therefore, when air in the gap is sucked, Stress can be concentrated in the vicinity of the protrusions, and peeling of the pellets by adsorption becomes easy. Moreover, a protrusion will bite into an adhesive sheet by suction.

[0014] The pickup apparatus of the present invention is a pickup apparatus that sequentially removes a plurality of rectangular thin pellets attached on an adhesive sheet from the adhesive sheet and takes out the pellets to be peeled upward. Holding means, a stage on which the pressure-sensitive adhesive sheet is placed, a receiving part that receives the pellets via the pressure-sensitive adhesive sheet, and air in a gap formed between the pressure-sensitive adhesive sheet on the outer peripheral side of the receiving part Air suction means, a protrusion that is inserted into the gap and supports a part of the pressure-sensitive adhesive sheet from below, and a drive means that moves the receiving portion along the horizontal direction.

[0015] According to the pickup device of the present invention, the pellets to be peeled can be received by the receiving part via the adhesive sheet. Then, the pellet is received by the receiving part and the upward force is also held by the holding means, and is formed between the adhesive sheet on the outer peripheral side of the receiving part. By sucking the air in the gap formed by the air suction means, the pressure-sensitive adhesive sheet is sucked and peeled off from the pellets on the outer peripheral side of the receiving portion. Further, the receiving portion can be moved along the horizontal direction by the driving means. As a result, the receiving area of the pellet by the receiving portion decreases, and the adsorption (suction) area of the adhesive sheet increases. For this reason, if the adsorption area is the same as the pellet area or larger than the pellet area, the pressure-sensitive adhesive sheet can be completely peeled from the pellet to be peeled.

[0016] In this peeling operation, the pressure-sensitive adhesive sheet is supported downward by a protrusion that is inserted into a gap formed on the outer peripheral side of the receiving portion. Therefore, when air in the gap is sucked, Stress can be concentrated in the vicinity of the protrusions, and peeling of the pellets by adsorption becomes easy. For this reason, the said pick-up method can be performed reliably.

[0017] The protrusion may be constituted by a pin that can move up and down. As a result, the height position of the pin can be adjusted. Further, it is possible to integrally attach the protrusion to the stage on which the receiving portion is arranged. In this case, it may extend in the vertical direction or may extend in the horizontal direction (horizontal direction).

[0018] It is preferable to arrange the protrusions in correspondence with the corner portions (corner portions) of the pellet. By arranging the protrusions in this manner, stress can be concentrated on the corner portions of the pellet that can be easily peeled off. The invention's effect

In the present invention, when the air in the gap is sucked, the stress can be concentrated in the vicinity of the protrusion, and the peeling of the pellet by adsorption becomes easy. That is, the peeling can be performed with a relatively small force at the initial stage of peeling, and the peeling start time can be shortened.

[0020] Further, in this peeling operation, the protrusions bite into the adhesive sheet by suction, and the protrusions become anchors to the adhesive sheet. For this reason, the peeling work is stable and the adhesive sheet is not pulled by the slide of the receiving part, and the chip (pellet) side does not lose against the peeling force at the time of sliding. Therefore, the pellet cannot be removed from the collet (holding means), and there is no possibility that the pellet is displaced due to the adhesive sheet being pulled.

[0021] By configuring the protrusion with a pin that can move up and down, the height position of the pin can be adjusted, so that the thickness of the adhesive sheet, the height of the stage on which the receiving portion is disposed, and the like can be adjusted. Depending on By adjusting the height position of the pin, it is possible to exhibit the optimum peeling performance for the pellet to be peeled.

[0022] When the protrusions are formed integrally with the stage, the configuration of the entire apparatus can be simplified. In addition, whether it extends in the vertical direction or in the horizontal direction (horizontal direction), the adhesive sheet can support the downward force, and reliably exerts the function of improving the peelability. Can do.

[0023] By arranging the protrusions in correspondence with the corner portions (corner portions) of the pellet, stress can be concentrated on the corner portions of the pellet, which can be easily peeled off. For this reason, the start of peeling can be performed stably and reliably, and the reliability of the peeling work is improved.

Brief Description of Drawings

FIG. 1 is a simplified process diagram illustrating a pickup method according to an embodiment of the present invention.

FIG. 2 shows a pickup device according to an embodiment of the present invention, and is a simplified sectional view of a pickup using this device.

FIG. 3 is a simplified plan view showing pellets attached to an adhesive sheet.

FIG. 4 is a simplified diagram showing the relationship between the protrusion of the pickup device and the receiving portion.

FIG. 5 is a cross-sectional view of a pickup device according to another embodiment of the present invention.

FIG. 6 is a simplified process diagram showing a pickup method using another pickup apparatus according to the embodiment of the present invention.

FIG. 7 is a simplified diagram showing a modification of the protrusion of the pickup device.

FIG. 8 is a simplified plan view of a conventional pickup device.

FIG. 9 is a simplified cross-sectional view of a conventional pickup device.

FIG. 10 is a simplified cross-sectional view showing a peeling process using a conventional pickup device.

FIG. 11 is a simplified diagram showing problems of a pickup method using a conventional pickup device.

Explanation of symbols

[0025] 11 pellets

12 adhesive sheet

15 Holding means 16 stages

17 receiving part

18 Air suction means

19 gap

25 protrusions

BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, embodiments of the present invention will be described with reference to FIGS.

FIG. 2 shows the pickup device of the present invention. This pickup device is a device that sequentially peels and takes out a plurality of rectangular thin-walled pellets (semiconductor chips) 11 affixed on the pressure-sensitive adhesive sheet 12 from the pressure-sensitive adhesive sheet 12.

[0028] The pellet 11 is made from woofer W (see Fig. 3) as a raw material, and the final product is obtained by cutting the raw material into a rectangular shape. For this reason, the pellets 11 include squares and strips. That is, as shown in FIG. 3, wafer W is circular as a whole, and is divided into individual pellets 11 by dicing, and these pellets 11 are attached to the adhesive sheet 12! /, Ru. Further, a frame 13 having a ring strength is attached to the outer peripheral side of the adhesive sheet 12. That is, the frame 13 and the adhesive sheet 12 are integrated. Then, in a state where the frame 13 and the adhesive sheet 12 are integrated, the pellet 11 is taken out by this pickup device.

As shown in FIG. 2, the pick-up device holds the pellet 11 to be peeled upward by holding means 15, a stage 16 on which the adhesive sheet 12 is placed, and the pellet 11 through the adhesive sheet 12. Receiving portion 17, air suction means 18 for sucking air in gap 19 formed between adhesive sheet 12 on the outer peripheral side of receiving portion 17, and drive means (not shown) for moving receiving portion 17 Is provided.

The holding means 15 is constituted by an adsorbing member (collet) 21 having a head 20 that adsorbs the pellets 11. The head 20 is provided with an adsorption hole in its lower end surface 20 a, and the pellet 11 is vacuumed through the adsorption hole, and the pellet 11 is adsorbed on the lower end surface 20 a of the head 20. For this reason, when this vacuum suction (evacuation) is released, the pellet 20 is also removed from the head 20 force. The adsorbing member 21 is connected to a robot arm, for example, in the vertical direction (see FIG. 2). It is possible to move in the direction of arrows C and D), in the horizontal direction (in the direction of arrow E in Fig. 2), and in a combination of these directions.

[0031] A recess 22 is provided on the upper surface of the stage 16, and a receiving portion 17 is disposed in the recess 22. The recess 22 includes a rectangular main body portion 22a and a tapered portion 22b disposed on the outer peripheral side of the main body portion 22a. The receiving portion 17 is a rectangular flat body that fits into the main body portion 22a of the recess 22, and the thickness dimension is set to be substantially the same as the depth dimension of the main body portion 22a. Further, as shown in FIG. 1, the width dimension W of the receiving portion 17 is set to be smaller than the length (width dimension) W1 of one side of the pellet 11 which is a square. In this case, one long side 17a of the receiving part 17 corresponds to the first side 23a of the pellet 11 to be peeled, and the other long side 17b of the receiving part 17 is the second side 23b of the pellet 11 to be peeled off. Corresponding to (the side facing the first side 23a), the short side 17c on the tip side of the receiving part 17 is the third side 23c of the pellet 11 (the side perpendicular to the first side 23a and the second side 23b) ).

As shown in FIG. 1, the recess 22 has suction holes 30a, 30b corresponding to the middle part of the first side 23a, the middle part of the second side 23b, and the middle part of the third side 23c. 30c is provided. A part of each suction hole 30 protrudes outward from the pellet 11 so as to be divided in plan view.

Then, as shown in FIG. 2 (A), by disposing the adhesive sheet 12 with the pellets 11 affixed on the stage 16, the outer peripheral side of the receiving portion 17, specifically, at least the receiving portion. A gap 19 is formed between the front side of the short side 17 c of the tip 17 and the adhesive sheet 12.

The suction means 18 has the suction holes 30a, 30b, 30c, and a vacuum pump (not shown) is connected to the suction holes 30a. That is, when the vacuum pump is driven, air in the gap 19 is sucked through the suction holes 30a and the like.

The receiving portion 17 moves along the horizontal direction via the driving means while the short side 17c on the distal end side of the receiving portion 17 is kept parallel to the third side 23c of the pellet 11. As the driving means, various mechanisms such as a bolt shaft member and a reciprocating mechanism having a nut member force screwed to the bolt shaft member or a cylinder mechanism can be used. In addition, a support member 31 is connected to the receiving portion 17, and the receiving portion 17 and the support member 31 constitute a moving block body 32.

In addition, the stage 16 is provided with a protrusion 25 that is inserted into the gap 19. sand That is, the corner portion (corner portion) formed by the first side 23a and the third side 23c of the pellet 11 to be peeled, and the corner portion (corner portion) formed by the second side 23b and the third side 23c of the pellet 11 ) Are provided as pins 25 (small-diameter cylinders with a rounded tip) (see Fig. 4).

In this case, the stage 16 is provided with a hole (not shown) in the vertical direction, and a pin as the protrusion 25 is disposed in the hole so as to be movable up and down. The protrusion 25 moves up and down by a vertical movement mechanism such as a cylinder mechanism or a ball screw mechanism (not shown). For this reason, as shown in FIG. 4 (A), the height position of the tip 26 of the protrusion 25 and the height position of the upper surface 27 of the receiving portion 17 are in a state of matching, or as shown in FIG. 4 (B). As shown in FIG. 4 (C), the height position of the tip 26 of the projection 25 is higher than the height position of the upper surface 27 of the receiving portion 17, or the height position of the tip 26 of the projection 25 However, the height can be lower than the height position of the upper surface 27 of the receiving portion 17. The protrusion 25 has different forces depending on the size and thickness of the pellet 11 to be peeled off, the thickness of the adhesive sheet 12, etc. For example, 0.6 mn! It is about 0.7 mm, and the radius of curvature of the rounded portion at the tip is, for example, about 200 μm to 300 μm.

Next, a pickup method using the pickup device will be described. First, as shown in FIG. 3, in a state where the frame 13 and the adhesive sheet 12 are integrated, as shown in FIG. 1, another pellet 11 is placed on one side (in this case, the fourth side 23d). Is selected, and the stage 16 of the pickup device is positioned below the pellet 11a, and the receiving of the moving block body 32 via the adhesive sheet 12 as shown in FIG. Received in Part 17.

[0039] Therefore, a gap 19 is formed on the lower side of the adhesive sheet 12 at least on the front side of the receiving portion 17 as shown in FIG. Further, in the gap 19, a corner portion (corner portion) formed by the first side 23a and the third side 23c of the pellet 11 and a corner portion (corner portion) formed by the second side 23b and the third side 23c of the pellet 11 are formed. Insert the protrusion 25 corresponding to the At this time, for example, as shown in FIG. 4 (a), the height position of the tip 26 of the protrusion 25 and the height position of the upper surface 27 of the receiving portion 17 are set to coincide with each other. In this state, the collet 21 of the holding means 15 is lowered as indicated by an arrow D, the head 20 is brought into contact with the upper surface of the pellet 1, and the pellet 11a is vacuum-sucked through the suction hole, so that the bottom of the head 20 Adsorb pellet 1 la on end face 20a.

[0040] As described above, the gap 19 communicates with the suction holes 30a, 30b, 30c. Therefore Then, by driving the suction means 18, the air in the gap 19 is sucked through the suction holes 30a, 30b, 30c. As a result, as shown in FIG. 2 (B), in a state where a part of the adhesive sheet 12 is supported by the protrusion 25, a part of the adhesive sheet 12 around the protrusion 25 is sucked and the protrusion 25 The adjacent adhesive sheet 12 is peeled from the pellet 11a.

Thereafter, as shown in FIGS. 1 (B) (C) and FIGS. 2 (C) and (D), the receiving portion 17 is moved (slid) as indicated by an arrow F. As a result, the receiving area of the pellet 1 by the receiving part 17 decreases, and the adsorption (suction) area of the adhesive sheet 12 downward increases. At this time, the pellet 1 la is held (adsorbed) on the collet 21! /, So that the adhesive sheet 12 is peeled from the pellet 1 la in sequence. Therefore, as shown in FIG. 2D, if the adsorption area is the same as the pellet area or larger than the pellet area, the adhesive sheet 12 can be completely peeled from the pellet 1 to be peeled.

[0042] After peeling, as shown in FIG. 2 (E), the pellet 11a can be taken out of the adhesive sheet 12 by raising the collet 21 as indicated by arrow C and releasing the force by 16 stages. . Thereafter, as shown in FIG. 2 (F), the receiving portion 17 is returned as shown by an arrow G to be in a standby state, and the pellet 11 to be peeled next is arranged to be received by the receiving portion 17. In this case, it corresponds to the 1 lb pellet 11 in FIG.

[0043] In this way, if the pickup device is sequentially associated with the pellets 11, all the pellets 11 on the adhesive sheet 12 can be peeled off from the adhesive sheet 12 and taken out.

[0044] When the pickup device is associated with each pellet 11, the pickup device side is moved, the adhesive sheet 12 to which the pellet 11 is attached is moved, or both are moved. May be.

In the present invention, the pressure-sensitive adhesive sheet 12 is also supported by the protrusion 25 that is inserted into the gap 19 formed on the outer peripheral side of the receiving portion 17. Therefore, when the air in the gap 19 is sucked, the protrusion 25 In the vicinity, it can be stressed and the pellet 11 can be easily peeled off by adsorption. That is, peeling can be performed with a relatively small force at the initial stage of peeling, and the peeling start time can be shortened.

In this peeling operation, the protrusion 25 bites into the adhesive sheet 12 by suction, and the protrusion 25 becomes an anchor with respect to the adhesive sheet 12. For this reason, peeling work In addition, the adhesive sheet 12 is not pulled by the slide of the receiving part 17 and the chip (pellet) 1 side does not lose against the peeling force at the time of sliding. Therefore, the collet 21 (holding means) force does not come off the pellet 11, and there is no possibility that the pellet 11 will be displaced due to the adhesive sheet 12 being stretched.

[0047] By configuring the protrusion 25 with a pin that can move up and down, the height position of the pin can be adjusted, so the thickness of the adhesive sheet 12 and the stage 16 on which the receiving portion 17 is disposed By adjusting the height position of the pin according to the height or the like, the optimum peeling performance can be exhibited for the pellet 11 to be peeled.

[0048] By disposing the protrusions 25 so as to correspond to the corner portions (corner portions) of the pellets 11, stress can be concentrated on the corner portions of the pellets 11 which are easily peeled off. For this reason, the start of peeling can be performed stably and reliably, and the reliability of the peeling work is improved.

Next, FIG. 5 shows another embodiment. In this case, the receiving portion 17 protrudes from the upper surface of the stage 16. For this reason, when the pellet 11 to be peeled is received at the receiving portion 17, the pellet 11 is received at a higher position than the upper surface of the stage 16.

Therefore, even in the pickup device shown in FIG. 5, the protrusion 25 that can be moved up and down to enter the gap 19 is provided. For this reason, if air is sucked into the gap 19 with the pellet 11 holding the upward force with the collet 21, the pellet is supported with a part of the adhesive sheet 12 supported by the protrusion 25 on the front side of the receiving portion 17. The adhesive sheet 12 can be peeled off from 11. Therefore, if the receiving portion 17 is moved in the horizontal direction in this state, the adhesive sheet 12 can be easily peeled off as in the pickup device shown in FIG.

Incidentally, in each of the embodiments described above, as another embodiment in which the receiving portion 17 is moved with respect to the stage 16, the receiving portion 17 is provided integrally with the stage 16 and the stage 16 is moved. Thus, the receiving part 17 may be moved relative to the pellet 11.

[0052] Next, FIG. 6 shows another embodiment, in which the receiving part 17 is provided with a tapered portion 35 that narrows toward the tip. That is, the tapered portion 35 includes a first side 36 parallel to the second side 23b of the pellet 11 and a second side 37 parallel to the second side 23c of the pellet 11, and the first side 36 and the second side Side 37 is 90 degrees. The corner portion 38 of the tapered portion 35 corresponds to one pellet corner portion 39 to be peeled off. The one pellet corner 39 has the second side 23b and the third side 23c. It is a joint part to make.

[0053] In this embodiment, the receiving portion 17 is placed on a diagonal line L connecting the pellet corner portion 39 and another pellet corner portion 40 (the corner portion formed by the first side 23a and the fourth side 23d) facing the pellet corner portion 39. The corners 38 are arranged.

In this embodiment, suction holes 30d are provided corresponding to the corners of the second side 23b and the fourth side 23d, and suction holes 30e are provided corresponding to the intermediate part of the second side 23a. The suction hole 30g is provided corresponding to the middle part of the third side 23c, and the suction hole 30h is provided corresponding to the corner part of the third side 23c and the first side 23a. Each suction hole 30 protrudes outward from the pellet 11 as can be seen in plan view. In this case, a vertically movable protrusion 25 that enters the gap 19 is provided corresponding to a corner 39 between the second side 23b and the third side 23c.

Next, a pickup method using the pickup device shown in FIG. 6 will be described. First, in a state where the frame 13 and the adhesive sheet 12 are integrated together, a pellet 11a that does not correspond to the other pellets 11 is selected on two sides (in this case, the first side 23a and the fourth side 23d). Then, the stage 16 of the pick-up device is positioned below the pellet 11a and is received by the receiving portion 17 of the moving block body 32 via the adhesive sheet 12. At this time, the first side 36 of the receiving part 17 is parallel to the second side 23b of the pellet 11a, and the second side 37 of the receiving part 17 is parallel to the third side 23c of the pellet 11a. In such a manner, the corner portion 38 of the receiving portion 17 is arranged on the diagonal line L of the pellet 11a. Further, the corner portion 38 is shifted from the corner portion 39 of the pellet 11a toward the corner portion 40 facing the corner portion 39 along the direction of the arrow α in FIG.

[0056] For this reason, a gap 19 is formed on the lower side of the adhesive sheet 12 on the front side of the tapered portion 35 of the receiving portion 17 (the front side of the first side 36 and the second side 37). A part of the adhesive sheet 12 is supported. In this state, the pellet 11 a is adsorbed by the collet 21 of the holding means 15 as in (Α) of FIG.

[0057] The gap 19 sucks air in the gap 19 through the suction holes 30d, 30e, 30g, and 30h.

As a result, a part of the pressure-sensitive adhesive sheet 12 corresponding to the gap 19 is sucked, and the pressure-sensitive adhesive sheet 12 in the vicinity of the protrusion 25 is peeled off from the pellet 11a.

[0058] Thereafter, the receiving part 17 is moved (slid) along the diagonal line L as indicated by an arrow oc. As a result, the receiving area of the pellets 11 by the receiving part 17 is reduced, and the adhesive sheet 12 The adsorption (suction) area downward increases. At this time, since the pellet 11a is held (adsorbed) on the collet 21, the pressure-sensitive adhesive sheet 12 is sequentially peeled from the pellet 11a. Therefore, if the adsorption area is the same as the pellet area or larger than the pellet area, the pressure-sensitive adhesive sheet 12 can be completely peeled from the pellet 1 to be peeled.

In the pickup device shown in FIG. 6, the peeling occurs along the diagonal line L of the pellet 11. For this reason, unlike the case of peeling by the length of one side of the pellet 11, the peeling force is small, and the pressure-sensitive adhesive sheet can be easily peeled off. In addition, when peeling off, the receiving part 17 moves away from the side of the adjacent pellet 11 corresponding to the two sides constituting the pellet corner of the pellet 11 from which peeling starts. As a result, no dynamic bending stress is applied to the adjacent pellets 11, and the adjacent pellets 11 (particularly, the sides corresponding to the pellets to be peeled) are not cracked. In addition, since it peels from one corner of the pellet, the adsorption stress that sucks the pressure-sensitive adhesive sheet 12 can be concentrated in one place. This has the advantage that the applicable range of pellets 11 that can be peeled off is expanded. Furthermore, since the peeling site moves obliquely, the pressure-sensitive adhesive sheet 12 is peeled off by the adsorbing force while applying shear, and the peeling performance can be improved.

[0060] In particular, at the start of the peeling operation, the corner portion of the receiving portion 17 only needs to correspond to one pellet corner portion of the pellet 11 to be peeled, so that the width dimension is slightly smaller than one side of the pellet 11. There is no need to set the receiving part 17 each time with a small size. In other words, the receiving part 17 can be adjusted to pellets of various sizes by simply adjusting the position of the receiving part 17 with one type of receiving part without matching the size of the pellet 11, and it is excellent in versatility and contributes to cost reduction. Further, since the moving direction of the receiving part 17 is a direction that forms 45 degrees with respect to the two sides constituting the pellet corner part 39, it peels off with a uniform peeling force with respect to the adhesive sheet 12. This eliminates unnecessary load on the product (pellet) and prevents product damage. Since the projection 25 is provided corresponding to the corner of the pellet that is easy to peel off, the peeling can be started reliably, and the force is also coupled with the peeling along the diagonal L. There is an advantage that the pressure-sensitive adhesive sheet 12 can be peeled off more easily.

[0061] As shown in FIG. 6, when the receiving portion 17 is slid in an oblique direction with respect to the pellet 11, The moving direction can be changed. Thus, if the movement direction of the receiving part 17 can be changed, the movement direction can be changed according to the properties of the pellet 11 to be peeled off. In other words, depending on the crystal orientation, there is a direction in which the pellet 11 is easily cracked. Therefore, the moving direction of the receiving portion 17 can be set so that a force in a direction in which cracking hardly occurs is applied to the adjacent pellet 1. For this reason, damage (cracking) of adjacent pellets can be prevented more stably.

[0062] Incidentally, the protrusion 25 may be formed integrally with the stage 16 as shown in FIG. In this case, the protrusion 25 protrudes horizontally in the recess 22 and may extend in the vertical direction. As described above, when the protrusions are formed integrally with the stage 16, it is possible to simplify the configuration of the entire apparatus. In addition, it can support the adhesive sheet 12 with downward force, whether it extends in the vertical direction or in the horizontal direction (horizontal direction), and reliably exerts the function to improve the peelability. can do.

As described above, the embodiment of the present invention has been described. However, the present invention is not limited to the above-described embodiment, and various modifications are possible. For example, as the suction hole 30 provided in the stage 16, The size, number, shape, etc. can be arbitrarily set within the air suckable range of the gap 19. For this reason, one suction hole 30 may be provided. Further, the pellet 11 to be peeled may be a rectangle having a short side and a long side that is not limited to a square, or may be a strip having a very long side compared to the short side. The thickness of the pressure-sensitive adhesive sheet 12 is not limited so long as it can be deformed so that it can be peeled off from the pellet 11 when the air in the gap 19 is sucked by the force suction means 18 depending on the suction force or the like.

[0064] The thickness of the receiving portion 17 can also be arbitrarily set depending on the range in which the air can be peeled from the pellet 11 when the air in the gap 19 is sucked by the suction means 18. Further, in the case of the receiving portion 17 as shown in FIG. 6, the angle of the corner portion of the receiving portion 17 is not limited to 90 degrees, but may be a little acute or obtuse! / ヽ.

[0065] The number of pellets 11 affixed on the pressure-sensitive adhesive sheet 12 is arbitrary, and in the present invention, all the pellets 11 on the pressure-sensitive adhesive sheet 12 that are not affected by the number are sequentially peeled off. be able to. Further, in the case shown in FIG. 1, it is sufficient that the other pellet 11 does not correspond to the fourth side 23d of the pellet 11 to be peeled. Since the other pellets 11 do not have to correspond to the second side 23b and the fourth side 23d, the order of separation can be arbitrarily set as long as this condition is satisfied.

[0066] In FIG. 1, the protrusion 25 includes a corner portion (corner portion) formed by the first side 23a and the third side 23c of the pellet 11 to be peeled, and the second side 23b and the third side 23c of the pellet 11. In Fig. 6, it is arranged at the corner (corner) 39 of the second side 23b and the third side 23c of the pellet 11 in FIG. The arrangement position, the number, and the like can be arbitrarily changed. That is, it may be an intermediate part of the first side 23a, an intermediate part of the second side 23b, an intermediate part of the third side 23c, or the like. When the protrusion 25 is disposed, the protrusion 25 may be provided corresponding to the suction hole 30 or may be avoided. Further, even when the projection 25 is constituted by a pin as shown in FIG. 2, it may be a fixed type that does not move up and down. In this case, the pin constituting member may be implanted on the stage 16.

Industrial applicability

A plurality of pellets can be formed by attaching the cut wafer or the plate material before becoming the final product to an adhesive sheet and cutting with a dicing saw or the like in this state. And this pick-up apparatus can peel the pellet from the adhesive sheet one by one and take it out. The removed pellets can be supplied to a predetermined land of the lead frame.

Claims

The scope of the claims

[1] A pick-up method in which a plurality of rectangular thin-walled pellets affixed on an adhesive sheet are sequentially peeled from the adhesive sheet and taken out, and the pellet to be peeled is received via the adhesive sheet at a receiving portion. Then, after forming a gap with the adhesive sheet on the outer peripheral side of the receiving portion, with the pellet held from above, a part of the adhesive sheet is supported by the protrusions that enter the gap with a downward force. While suctioning the air in the gap, the adhesive sheet on the outer peripheral side of the receiving part is peeled off, and then the supporting part is supported along the horizontal direction while supporting the adhesive sheet with the protrusion and holding the upper force pellet. And picking up the pellets.

[2] A pick-up device that sequentially removes and removes a plurality of rectangular thin-walled pellets affixed on an adhesive sheet from the adhesive sheet, a holding means for holding the pellets to be peeled from above, and an adhesive sheet , A receiving part for receiving the pellets via an adhesive sheet, an air suction means for sucking air in a gap formed between the receiving part and the adhesive sheet on the outer peripheral side of the receiving part, and the gap A pick-up apparatus comprising: a protrusion that enters the inside and supports a part of the adhesive sheet from below; and a drive means that moves the receiving portion along a horizontal direction.

[3] The pick-up device according to claim 2, wherein the protrusion is configured by a pin that can move up and down.

4. The pickup device according to claim 2, wherein the protrusion is integrally provided on a stage on which the receiving portion is disposed.

[5] The pickup device according to any one of [2] to [4], wherein the protrusion is disposed in correspondence with a corner portion of a pellet to be peeled.