KR101110086B1 - 치밀화층들로 형성된 능동 채널들을 갖는 유기 전계-효과 트랜지스터들 - Google Patents

치밀화층들로 형성된 능동 채널들을 갖는 유기 전계-효과 트랜지스터들 Download PDF

Info

Publication number
KR101110086B1
KR101110086B1 KR1020040097395A KR20040097395A KR101110086B1 KR 101110086 B1 KR101110086 B1 KR 101110086B1 KR 1020040097395 A KR1020040097395 A KR 1020040097395A KR 20040097395 A KR20040097395 A KR 20040097395A KR 101110086 B1 KR101110086 B1 KR 101110086B1
Authority
KR
South Korea
Prior art keywords
substrate
organic molecules
channel
organic
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020040097395A
Other languages
English (en)
Korean (ko)
Other versions
KR20050054441A (ko
Inventor
제난 바오
Original Assignee
알카텔-루센트 유에스에이 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 알카텔-루센트 유에스에이 인코포레이티드 filed Critical 알카텔-루센트 유에스에이 인코포레이티드
Publication of KR20050054441A publication Critical patent/KR20050054441A/ko
Application granted granted Critical
Publication of KR101110086B1 publication Critical patent/KR101110086B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40Organic transistors
    • H10K10/46Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40Organic transistors
    • H10K10/46Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462Insulated gate field-effect transistors [IGFETs]
    • H10K10/464Lateral top-gate IGFETs comprising only a single gate
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40Organic transistors
    • H10K10/46Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462Insulated gate field-effect transistors [IGFETs]
    • H10K10/466Lateral bottom-gate IGFETs comprising only a single gate
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40Organic transistors
    • H10K10/46Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462Insulated gate field-effect transistors [IGFETs]
    • H10K10/468Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics
    • H10K10/471Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics the gate dielectric comprising only organic materials
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40Organic transistors
    • H10K10/46Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462Insulated gate field-effect transistors [IGFETs]
    • H10K10/468Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics
    • H10K10/478Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics the gate dielectric comprising a layer of composite material comprising interpenetrating or embedded materials, e.g. TiO2 particles in a polymer matrix
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40Organic transistors
    • H10K10/46Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462Insulated gate field-effect transistors [IGFETs]
    • H10K10/481Insulated gate field-effect transistors [IGFETs] characterised by the gate conductors
    • H10K10/482Insulated gate field-effect transistors [IGFETs] characterised by the gate conductors the IGFET comprising multiple separately-addressable gate electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/40Organic transistors
    • H10K10/46Field-effect transistors, e.g. organic thin-film transistors [OTFT]
    • H10K10/462Insulated gate field-effect transistors [IGFETs]
    • H10K10/484Insulated gate field-effect transistors [IGFETs] characterised by the channel regions
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K10/00Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
    • H10K10/80Constructional details
    • H10K10/82Electrodes
    • H10K10/84Ohmic electrodes, e.g. source or drain electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10Deposition of organic active material
    • H10K71/191Deposition of organic active material characterised by provisions for the orientation or alignment of the layer to be deposited
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K85/00Organic materials used in the body or electrodes of devices covered by this subclass
    • H10K85/10Organic polymers or oligomers
    • H10K85/111Organic polymers or oligomers comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
    • H10K85/113Heteroaromatic compounds comprising sulfur or selene, e.g. polythiophene
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/13Discrete devices, e.g. 3 terminal devices
    • H01L2924/1304Transistor
    • H01L2924/1306Field-effect transistor [FET]
    • H01L2924/1307Organic Field-Effect Transistor [OFET]

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Composite Materials (AREA)
  • Thin Film Transistor (AREA)
  • Electroluminescent Light Sources (AREA)
  • Junction Field-Effect Transistors (AREA)
KR1020040097395A 2003-12-04 2004-11-25 치밀화층들로 형성된 능동 채널들을 갖는 유기 전계-효과 트랜지스터들 Expired - Fee Related KR101110086B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/727,709 US7767998B2 (en) 2003-12-04 2003-12-04 OFETs with active channels formed of densified layers
US10/727,709 2003-12-04

Publications (2)

Publication Number Publication Date
KR20050054441A KR20050054441A (ko) 2005-06-10
KR101110086B1 true KR101110086B1 (ko) 2012-02-24

Family

ID=34465771

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020040097395A Expired - Fee Related KR101110086B1 (ko) 2003-12-04 2004-11-25 치밀화층들로 형성된 능동 채널들을 갖는 유기 전계-효과 트랜지스터들

Country Status (4)

Country Link
US (2) US7767998B2 (enExample)
EP (1) EP1538685A1 (enExample)
JP (1) JP5042452B2 (enExample)
KR (1) KR101110086B1 (enExample)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050211973A1 (en) * 2004-03-23 2005-09-29 Kiyotaka Mori Stressed organic semiconductor
KR100766318B1 (ko) * 2005-11-29 2007-10-11 엘지.필립스 엘시디 주식회사 유기 반도체 물질을 이용한 박막트랜지스터와 이를 구비한액정표시장치용 어레이 기판 및 그 제조방법
US8138075B1 (en) 2006-02-06 2012-03-20 Eberlein Dietmar C Systems and methods for the manufacture of flat panel devices
DE602007007003D1 (de) * 2006-03-24 2010-07-22 Merck Patent Gmbh Organische Halbleiterformulierung
KR100845004B1 (ko) * 2007-04-30 2008-07-09 삼성전자주식회사 나노 갭을 갖는 금속막 패턴의 형성 방법 및 이를 이용한분자크기의 소자 제조 방법
US8043978B2 (en) * 2007-10-11 2011-10-25 Riken Electronic device and method for producing electronic device
KR100906144B1 (ko) * 2007-12-05 2009-07-07 한국전자통신연구원 검출 소자 및 검출 소자의 제조 방법
US11786036B2 (en) 2008-06-27 2023-10-17 Ssw Advanced Technologies, Llc Spill containing refrigerator shelf assembly
US8286561B2 (en) 2008-06-27 2012-10-16 Ssw Holding Company, Inc. Spill containing refrigerator shelf assembly
WO2010042668A1 (en) 2008-10-07 2010-04-15 Ross Technology Corporation Spill resistant surfaces having hydrophobic and oleophobic borders
ES2613885T3 (es) 2009-11-04 2017-05-26 Ssw Holding Company, Inc. Superficies de aparatos de cocción que tienen un patrón de confinamiento de salpicaduras y procedimientos de fabricación de las mismas
MX2012010669A (es) 2010-03-15 2013-02-07 Ross Technology Corp Destacadores y metodos para producir supreficies hidrofobas.
US20120112830A1 (en) * 2010-11-04 2012-05-10 Ludwig Lester F Towards the very smallest electronic circuits and systems: transduction, signal processing, and digital logic in molecular fused-rings via mesh ring-currents
MX2013009609A (es) 2011-02-21 2013-09-16 Ross Technology Corp Revestimiento suoerhidrofobos y oleofobos con sistemas aglutinantes con bajo contenido de compuestos organicos volatiles.
DE102011085428A1 (de) 2011-10-28 2013-05-02 Schott Ag Einlegeboden
EP2791255B1 (en) 2011-12-15 2017-11-01 Ross Technology Corporation Composition and coating for superhydrophobic performance
EP2844781A4 (en) 2012-05-02 2016-01-13 Basf Se METHOD FOR DEPOSITION OF ORGANIC MATTER
CN104520392A (zh) 2012-06-25 2015-04-15 罗斯科技公司 具有疏水和/或疏油性质的弹性体涂层
US20150155494A1 (en) * 2012-07-13 2015-06-04 Merck Patent Gmbh Organic electronic device comprising an organic semiconductors formulation
KR101980198B1 (ko) * 2012-11-12 2019-05-21 삼성전자주식회사 신축성 트랜지스터용 채널층
KR102089347B1 (ko) * 2013-10-08 2020-03-16 경북대학교 산학협력단 비휘발성 메모리 소자 및 이의 제조 방법
US20220045274A1 (en) * 2020-08-06 2022-02-10 Facebook Technologies Llc Ofets having organic semiconductor layer with high carrier mobility and in situ isolation

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5206525A (en) 1989-12-27 1993-04-27 Nippon Petrochemicals Co., Ltd. Electric element capable of controlling the electric conductivity of π-conjugated macromolecular materials
US5556706A (en) * 1993-10-06 1996-09-17 Matsushita Electric Industrial Co., Ltd. Conductive layered product and method of manufacturing the same
US5574291A (en) * 1994-12-09 1996-11-12 Lucent Technologies Inc. Article comprising a thin film transistor with low conductivity organic layer
CA2306384A1 (en) * 1997-10-14 1999-04-22 Patterning Technologies Limited Method of forming an electronic device
JP2003518754A (ja) 1999-12-21 2003-06-10 プラスティック ロジック リミテッド 溶液処理された素子
TW555790B (en) 2000-12-26 2003-10-01 Matsushita Electric Industrial Co Ltd Conductive organic thin film, process for producing the same, and organic photoelectronic device, electric wire, and electrode aech employing the same
US6946676B2 (en) 2001-11-05 2005-09-20 3M Innovative Properties Company Organic thin film transistor with polymeric interface
US6555411B1 (en) 2001-12-18 2003-04-29 Lucent Technologies Inc. Thin film transistors
GB0130485D0 (en) 2001-12-21 2002-02-06 Plastic Logic Ltd Self-aligned printing
US6777529B2 (en) * 2002-01-11 2004-08-17 Xerox Corporation Polythiophenes and devices thereof
CN100459164C (zh) * 2002-02-08 2009-02-04 大日本印刷株式会社 有机半导体结构物、其制造方法和有机半导体装置
US6596569B1 (en) 2002-03-15 2003-07-22 Lucent Technologies Inc. Thin film transistors
US6770549B2 (en) 2002-05-08 2004-08-03 Lucent Technologies Inc. Forming patterned thin film metal layers
US6661024B1 (en) 2002-07-02 2003-12-09 Motorola, Inc. Integrated circuit including field effect transistor and method of manufacture
US7132680B2 (en) 2003-06-09 2006-11-07 International Business Machines Corporation Organic field-effect transistor and method of making same based on polymerizable self-assembled monolayers

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Organic thin-film transistors: A review of recent advances, VOL.45, NO.1, IBM J. RES. & DEV.(2001년 1월 공개)*

Also Published As

Publication number Publication date
KR20050054441A (ko) 2005-06-10
JP2005167256A (ja) 2005-06-23
US7338835B2 (en) 2008-03-04
US20050121728A1 (en) 2005-06-09
US7767998B2 (en) 2010-08-03
US20050242345A1 (en) 2005-11-03
JP5042452B2 (ja) 2012-10-03
EP1538685A1 (en) 2005-06-08

Similar Documents

Publication Publication Date Title
KR101110086B1 (ko) 치밀화층들로 형성된 능동 채널들을 갖는 유기 전계-효과 트랜지스터들
Halik et al. Relationship between molecular structure and electrical performance of oligothiophene organic thin film transistors
Jung et al. A TIPS-TPDO-tetraCN-based n-type organic field-effect transistor with a cross-linked PMMA polymer gate dielectric
Umeda et al. High-mobility and air-stable organic thin-film transistors with highly ordered semiconducting polymer films
CN101743628B (zh) 有机半导体元件的制造方法、有机半导体元件及有机半导体装置
KR101887167B1 (ko) 전자 장치
CN101847689A (zh) 双极发光场效应晶体管
Todescato et al. Correlation between dielectric/organic interface properties and key electrical parameters in PPV-based OFETs
KR20060079195A (ko) 박막 트랜지스터의 밀봉 방법
US7968871B2 (en) Organic thin film transistor
WO2009093606A1 (ja) 有機半導体素子の製造方法
JP5103448B2 (ja) 半導体ポリマー
Fu et al. Enabling scalable, ultralow-voltage flexible organic field-effect transistors via blade-coated cross-linked thick polyvinyl alcohol gate dielectric
JP5106489B2 (ja) 半導体ポリマーを備える電子デバイス
WO2007026781A1 (ja) トランジスタ及びその製造方法、並びに、このトランジスタを有する半導体装置
Bhat et al. Organic field effect transistors (OFETs) of poly (p-phenylenevinylene) fabricated by chemical vapor deposition (CVD) with improved hole mobility
US20070286953A1 (en) Solution processible materials and their use in electronic devices
KR20090104058A (ko) 중합성 게이트 유전체를 갖는 유기 전계 효과 트랜지스터 및 그 제조 방법
TW201304148A (zh) 薄膜電晶體及其製造方法
KR102020685B1 (ko) 요변성 조성물
JP5223294B2 (ja) 有機薄膜トランジスタの製造方法
Kim et al. Investigation of Top-Contact Organic Field Effect Transistors by the Treatment Using the VDP Process on Dielectric
Kim et al. Rubber-stamp-printed Poly (3-hexylthiophene) organic field-effect transistor on a plastic substrate with high mobility
Cosseddu et al. ALL-ORGANIC FLEXIBLE AND TRANSARENT AMBIPOLAR FETs WITH ORGANIC BULK HETEROJUNCTIONS
Colleaux Novel Solution Processable Dielectrics for Organic and Graphene Transistors

Legal Events

Date Code Title Description
PA0109 Patent application

St.27 status event code: A-0-1-A10-A12-nap-PA0109

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

A201 Request for examination
AMND Amendment
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

R17-X000 Change to representative recorded

St.27 status event code: A-3-3-R10-R17-oth-X000

R18-X000 Changes to party contact information recorded

St.27 status event code: A-3-3-R10-R18-oth-X000

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

AMND Amendment
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E601 Decision to refuse application
PE0601 Decision on rejection of patent

St.27 status event code: N-2-6-B10-B15-exm-PE0601

AMND Amendment
E13-X000 Pre-grant limitation requested

St.27 status event code: A-2-3-E10-E13-lim-X000

J201 Request for trial against refusal decision
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PJ0201 Trial against decision of rejection

St.27 status event code: A-3-3-V10-V11-apl-PJ0201

PB0901 Examination by re-examination before a trial

St.27 status event code: A-6-3-E10-E12-rex-PB0901

B701 Decision to grant
PB0701 Decision of registration after re-examination before a trial

St.27 status event code: A-3-4-F10-F13-rex-PB0701

GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U11-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

S20-X000 Security interest recorded

St.27 status event code: A-4-4-S10-S20-lic-X000

S22-X000 Recordation of security interest cancelled

St.27 status event code: A-4-4-S10-S22-lic-X000

FPAY Annual fee payment

Payment date: 20150109

Year of fee payment: 4

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

FPAY Annual fee payment

Payment date: 20160108

Year of fee payment: 5

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 5

FPAY Annual fee payment

Payment date: 20170106

Year of fee payment: 6

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 6

LAPS Lapse due to unpaid annual fee
PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20180120

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20180120

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000

P22-X000 Classification modified

St.27 status event code: A-4-4-P10-P22-nap-X000