KR101106921B1 - 감광성 페이스트 조성물 및 패턴 형성 방법 - Google Patents
감광성 페이스트 조성물 및 패턴 형성 방법 Download PDFInfo
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- KR101106921B1 KR101106921B1 KR1020080065947A KR20080065947A KR101106921B1 KR 101106921 B1 KR101106921 B1 KR 101106921B1 KR 1020080065947 A KR1020080065947 A KR 1020080065947A KR 20080065947 A KR20080065947 A KR 20080065947A KR 101106921 B1 KR101106921 B1 KR 101106921B1
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- South Korea
- Prior art keywords
- photosensitive paste
- paste composition
- pattern
- acid
- meth
- Prior art date
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0047—Photosensitive materials characterised by additives for obtaining a metallic or ceramic pattern, e.g. by firing
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/028—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
- G03F7/031—Organic compounds not covered by group G03F7/029
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/037—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polyamides or polyimides
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials For Photolithography (AREA)
- Gas-Filled Discharge Tubes (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Conductive Materials (AREA)
- Manufacturing Of Electric Cables (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP-P-2007-00179179 | 2007-07-09 | ||
JP2007179179 | 2007-07-09 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20090005990A KR20090005990A (ko) | 2009-01-14 |
KR101106921B1 true KR101106921B1 (ko) | 2012-01-25 |
Family
ID=40307395
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020080065947A KR101106921B1 (ko) | 2007-07-09 | 2008-07-08 | 감광성 페이스트 조성물 및 패턴 형성 방법 |
Country Status (3)
Country | Link |
---|---|
JP (2) | JP4640460B2 (nl) |
KR (1) | KR101106921B1 (nl) |
CN (1) | CN101354533B (nl) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5120119B2 (ja) * | 2008-07-10 | 2013-01-16 | Jsr株式会社 | 感光性ペースト組成物およびパターン形成方法 |
JP5120120B2 (ja) * | 2008-07-15 | 2013-01-16 | Jsr株式会社 | 感光性ペースト組成物およびパターン形成方法 |
JP2010102200A (ja) * | 2008-10-24 | 2010-05-06 | Jsr Corp | 感光性ペースト組成物およびパターン形成方法 |
KR101138795B1 (ko) * | 2008-12-23 | 2012-04-24 | 제일모직주식회사 | 감광성 페이스트 조성물 이를 이용하여 제조한 플라즈마 디스플레이 전극 |
JP5287397B2 (ja) * | 2009-03-18 | 2013-09-11 | Jsr株式会社 | アルミニウム含有感光性樹脂組成物およびパターン形成方法 |
JP5347665B2 (ja) * | 2009-04-07 | 2013-11-20 | Jsr株式会社 | アルミニウム含有感光性組成物および電極の製造方法 |
JP2011007864A (ja) * | 2009-06-23 | 2011-01-13 | Jsr Corp | 感光性ペースト組成物およびパターン形成方法 |
CN103295659B (zh) * | 2012-02-24 | 2016-03-30 | 比亚迪股份有限公司 | 太阳能电池用导电浆料及其制备方法 |
JP5884556B2 (ja) * | 2012-03-02 | 2016-03-15 | 東レ株式会社 | 感光性導電ペースト |
WO2013165223A1 (ko) * | 2012-05-03 | 2013-11-07 | 주식회사 엘지화학 | 태양전지 제조에서 이용 가능한 잉크 조성물 및 이를 이용한 패턴형성방법 |
KR101431485B1 (ko) * | 2012-05-03 | 2014-08-26 | 주식회사 엘지화학 | 태양전지 제조에서 이용 가능한 잉크 조성물 및 이를 이용한 패턴형성방법 |
KR101765707B1 (ko) | 2012-06-15 | 2017-08-07 | 가부시키가이샤 무라타 세이사쿠쇼 | 도전성 페이스트, 그리고 적층 세라믹 전자부품 및 그 제조방법 |
CN113196170A (zh) * | 2018-10-03 | 2021-07-30 | 艾曲迪微系统股份有限公司 | 感光性树脂组合物、图案固化物的制造方法、固化物、层间绝缘膜、覆盖涂层、表面保护膜及电子部件 |
JP7238316B2 (ja) * | 2018-10-03 | 2023-03-14 | Hdマイクロシステムズ株式会社 | 感光性樹脂組成物、パターン硬化物の製造方法、硬化物、層間絶縁膜、カバーコート層、表面保護膜及び電子部品 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10269848A (ja) * | 1997-03-26 | 1998-10-09 | Taiyo Ink Mfg Ltd | アルカリ現像型光硬化性導電性ペースト組成物及びそれを用いて電極形成したプラズマディスプレイパネル |
JP2006086123A (ja) * | 2004-09-09 | 2006-03-30 | Samsung Sdi Co Ltd | 感光性ペースト組成物,感光性ペースト組成物を用いた電極およびグリーンシート |
JP2006126354A (ja) * | 2004-10-27 | 2006-05-18 | Sumitomo Bakelite Co Ltd | 感光性樹脂組成物及びパターン形成樹脂層の製造方法、並びに該感光性樹脂組成物を含む半導体装置及び表示素子 |
JP2006219660A (ja) * | 2005-01-11 | 2006-08-24 | Jsr Corp | 無機粉体含有樹脂組成物、転写フィルムおよびプラズマディスプレイパネルの製造方法 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4253306B2 (ja) * | 2005-03-01 | 2009-04-08 | 太陽インキ製造株式会社 | 感光性ペースト及びそれを用いて形成した焼成物パターン |
-
2008
- 2008-07-08 KR KR1020080065947A patent/KR101106921B1/ko not_active IP Right Cessation
- 2008-07-08 JP JP2008177748A patent/JP4640460B2/ja not_active Expired - Fee Related
- 2008-07-09 CN CN2008101611420A patent/CN101354533B/zh not_active Expired - Fee Related
-
2010
- 2010-10-08 JP JP2010228531A patent/JP4645774B1/ja not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10269848A (ja) * | 1997-03-26 | 1998-10-09 | Taiyo Ink Mfg Ltd | アルカリ現像型光硬化性導電性ペースト組成物及びそれを用いて電極形成したプラズマディスプレイパネル |
JP2006086123A (ja) * | 2004-09-09 | 2006-03-30 | Samsung Sdi Co Ltd | 感光性ペースト組成物,感光性ペースト組成物を用いた電極およびグリーンシート |
JP2006126354A (ja) * | 2004-10-27 | 2006-05-18 | Sumitomo Bakelite Co Ltd | 感光性樹脂組成物及びパターン形成樹脂層の製造方法、並びに該感光性樹脂組成物を含む半導体装置及び表示素子 |
JP2006219660A (ja) * | 2005-01-11 | 2006-08-24 | Jsr Corp | 無機粉体含有樹脂組成物、転写フィルムおよびプラズマディスプレイパネルの製造方法 |
Also Published As
Publication number | Publication date |
---|---|
KR20090005990A (ko) | 2009-01-14 |
CN101354533A (zh) | 2009-01-28 |
JP4645774B1 (ja) | 2011-03-09 |
JP4640460B2 (ja) | 2011-03-02 |
JP2009037232A (ja) | 2009-02-19 |
JP2011065166A (ja) | 2011-03-31 |
CN101354533B (zh) | 2012-10-10 |
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