KR101028286B1 - 반도체 발광소자 및 그 제조방법 - Google Patents
반도체 발광소자 및 그 제조방법 Download PDFInfo
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- KR101028286B1 KR101028286B1 KR20090132182A KR20090132182A KR101028286B1 KR 101028286 B1 KR101028286 B1 KR 101028286B1 KR 20090132182 A KR20090132182 A KR 20090132182A KR 20090132182 A KR20090132182 A KR 20090132182A KR 101028286 B1 KR101028286 B1 KR 101028286B1
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- 238000000034 method Methods 0.000 title claims description 8
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- 239000000463 material Substances 0.000 description 11
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- 229910052782 aluminium Inorganic materials 0.000 description 4
- JAONJTDQXUSBGG-UHFFFAOYSA-N dialuminum;dizinc;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Al+3].[Al+3].[Zn+2].[Zn+2] JAONJTDQXUSBGG-UHFFFAOYSA-N 0.000 description 4
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- 238000002955 isolation Methods 0.000 description 3
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
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- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- HRHKULZDDYWVBE-UHFFFAOYSA-N indium;oxozinc;tin Chemical compound [In].[Sn].[Zn]=O HRHKULZDDYWVBE-UHFFFAOYSA-N 0.000 description 2
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- 229910052719 titanium Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 2
- -1 Si 3 N 4 Inorganic materials 0.000 description 1
- 229910001316 Ag alloy Inorganic materials 0.000 description 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910002601 GaN Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910019897 RuOx Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- DZLPZFLXRVRDAE-UHFFFAOYSA-N [O--].[O--].[O--].[O--].[Al+3].[Zn++].[In+3] Chemical compound [O--].[O--].[O--].[O--].[Al+3].[Zn++].[In+3] DZLPZFLXRVRDAE-UHFFFAOYSA-N 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- SBYXRAKIOMOBFF-UHFFFAOYSA-N copper tungsten Chemical compound [Cu].[W] SBYXRAKIOMOBFF-UHFFFAOYSA-N 0.000 description 1
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- YZZNJYQZJKSEER-UHFFFAOYSA-N gallium tin Chemical compound [Ga].[Sn] YZZNJYQZJKSEER-UHFFFAOYSA-N 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- VRIVJOXICYMTAG-IYEMJOQQSA-L iron(ii) gluconate Chemical compound [Fe+2].OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C([O-])=O.OC[C@@H](O)[C@@H](O)[C@H](O)[C@@H](O)C([O-])=O VRIVJOXICYMTAG-IYEMJOQQSA-L 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 229910003465 moissanite Inorganic materials 0.000 description 1
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- 239000011733 molybdenum Substances 0.000 description 1
- GNRSAWUEBMWBQH-UHFFFAOYSA-N nickel(II) oxide Inorganic materials [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
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- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000010944 silver (metal) Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
- H01L33/24—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate of the light emitting region, e.g. non-planar junction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
- H01L33/22—Roughened surfaces, e.g. at the interface between epitaxial layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
- H01L33/06—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1203—Rectifying Diode
- H01L2924/12032—Schottky diode
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- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Led Devices (AREA)
Abstract
Description
Claims (18)
- 제1도전형 반도체층;상기 제1도전형 반도체층 위에 배치되며, 복수의 우물층과 복수의 장벽층을 포함하는 활성층; 및상기 활성층 위에 제2도전형 반도체층을 포함하며,상기 활성층의 최상층은 상기 복수의 장벽층 중 제1장벽층이 배치되며,상기 제1장벽층의 상면은 요철 구조를 포함하며,상기 우물층 및 장벽층 중 적어도 하나의 하면은 플랫한 면인 반도체 발광소자.
- 제1항에 있어서, 상기 제1장벽층은 상기 제1장벽층의 요철 구조의 요부 깊이보다 더 두꺼운 두께를 갖는 반도체 발광소자.
- 제1항에 있어서, 상기 활성층의 제1장벽층의 상면은 다른 장벽층의 상면 면적보다 더 큰 면적을 갖는 반도체 발광소자.
- 제1항에 있어서, 상기 제1장벽층의 요철 구조의 요부 깊이는 10~2000Å 범위를 포함하는 반도체 발광소자.
- 제1항에 있어서, 상기 제2도전형 반도체층은 P형 반도체층이며, 상기 제2도전형 반도체층은 상기 활성층의 제1장벽층 위에 배치된 제1반도체층 및 상기 제1반도체층 위에 제2반도체층을 포함하며,상기 제1반도체층은 상기 제2반도체층의 도핑 농도보다 더 높은 도핑 농도를 갖는 반도체 발광소자.
- 제1항 내지 제3항 중 어느 한 항에 있어서, 상기 활성층의 제1장벽층은 AlxInyGa(1-x-y)N(0≤x≤1,0≤y≤1,0<x+y<1)의 조성식을 포함하는 반도체 발광소자.
- 제1항 내지 제3항 중 어느 한 항에 있어서, 상기 제1장벽층의 요철 구조의 철부는 일정한 간격 또는 불규칙한 간격으로 배치되는 반도체 발광소자.
- 제1항에 있어서, 상기 제2도전형 반도체층 위에 채널층, 반사층, 접합층, 오믹 접촉층, 전도성 지지부재, 제2전극, 및 N형 반도체층 중 적어도 하나를 포함하며,상기 제1도전형 반도체층 아래에 언도프드 반도체층, 버퍼층, 기판, 및 제1전극 중 적어도 하나를 포함하는 반도체 발광소자.
- 제1항에 있어서, 상기 활성층의 아래에 제1도전형 클래드층을 포함하는 반도체 발광소자.
- 제5항에 있어서, 상기 제2도전형 반도체층의 제1반도체층은 상기 제1장벽층의 상면의 요철 구조에 대응되는 요철 구조를 포함하는 반도체 발광소자.
- 제1항 내지 제3항 중 어느 한 항에 있어서, 상기 제1장벽층의 요철 구조의 요부는 플랫한 평면을 갖는 반도체 발광소자.
- 제11항에 있어서, 상기 제1장벽층의 요철 구조의 요부에는 미세 요철 패턴을 포함하는 반도체 발광소자.
- 제3항에 있어서, 상기 제1장벽층의 상면은 다른 장벽층의 상면 면적보다 50% 이상 넓은 면적을 갖는 반도체 발광소자.
- 제4항에 있어서, 상기 제1장벽층의 요철 구조의 요부 깊이는 50Å 이상인 반도체 발광소자.
- 제1도전형 반도체층;상기 제1도전형 반도체층 위에 배치되며, 복수의 우물층과 복수의 장벽층을 포함하는 활성층; 및상기 활성층 위에 제2도전형 반도체층을 포함하며,상기 활성층의 상면은 요철 면이며,상기 우물층 및 장벽층 중 적어도 하나의 하면은 플랫한 면인 반도체 발광소자.
- 기판 위에 제1도전형 반도체층을 형성하는 단계;상기 제1도전형 반도체층 위에 우물층 및 장벽층이 교대로 배치된 활성층을 형성하는 단계; 및상기 활성층 위에 제2도전형 반도체층을 형성하는 단계를 포함하며,상기 활성층의 우물층 및 장벽층 중 적어도 하나의 하면은 플랫한 면으로 형성되며,상기 활성층의 최상층에 배치된 장벽층의 상면은 요철 구조로 형성되는 반도체 발광소자 제조방법.
- 제16항에 있어서, 상기 활성층의 최상층에 배치된 장벽층의 요철 구조는 규칙적으로 또는 불규칙적으로 형성되는 반도체 발광소자 제조방법.
- 제17항에 있어서, 상기 활성층의 최상층에 배치된 장벽층은 다른 장벽층의 상면 면적보다 큰 면적으로 형성되거나, 상기 활성층의 최상층에 배치된 장벽층의 요부 깊이가 적어도 10~2000Å로 형성되는 반도체 발광소자 제조방법.
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR20090132182A KR101028286B1 (ko) | 2009-12-28 | 2009-12-28 | 반도체 발광소자 및 그 제조방법 |
EP10192964.4A EP2339651B1 (en) | 2009-12-28 | 2010-11-29 | Light emitting device, light emitting device package and illumination system |
CN201010583537.7A CN102110753B (zh) | 2009-12-28 | 2010-12-03 | 发光器件、发光器件封装以及照明系统 |
US12/977,841 US8796705B2 (en) | 2009-12-28 | 2010-12-23 | Light emitting device, light emitting device package and illumination system |
US14/316,326 US10283673B2 (en) | 2009-12-28 | 2014-06-26 | Light emitting device, light emitting device package and illumination system |
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KR20090132182A KR101028286B1 (ko) | 2009-12-28 | 2009-12-28 | 반도체 발광소자 및 그 제조방법 |
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KR101028286B1 true KR101028286B1 (ko) | 2011-04-11 |
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US (2) | US8796705B2 (ko) |
EP (1) | EP2339651B1 (ko) |
KR (1) | KR101028286B1 (ko) |
CN (1) | CN102110753B (ko) |
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KR20130079873A (ko) * | 2012-01-03 | 2013-07-11 | 엘지이노텍 주식회사 | 발광소자 및 이를 포함하는 조명시스템 |
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US20140306178A1 (en) | 2014-10-16 |
US20110156068A1 (en) | 2011-06-30 |
US8796705B2 (en) | 2014-08-05 |
CN102110753A (zh) | 2011-06-29 |
CN102110753B (zh) | 2015-05-27 |
US10283673B2 (en) | 2019-05-07 |
EP2339651A3 (en) | 2014-01-22 |
EP2339651A2 (en) | 2011-06-29 |
EP2339651B1 (en) | 2018-05-09 |
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