KR101006827B1 - 저 전압 nmos-기반 정전기 방전 클램프 - Google Patents
저 전압 nmos-기반 정전기 방전 클램프 Download PDFInfo
- Publication number
- KR101006827B1 KR101006827B1 KR1020057014761A KR20057014761A KR101006827B1 KR 101006827 B1 KR101006827 B1 KR 101006827B1 KR 1020057014761 A KR1020057014761 A KR 1020057014761A KR 20057014761 A KR20057014761 A KR 20057014761A KR 101006827 B1 KR101006827 B1 KR 101006827B1
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- KR
- South Korea
- Prior art keywords
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- transistor
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000002955 isolation Methods 0.000 claims description 11
- 239000000758 substrate Substances 0.000 claims description 6
- 230000005611 electricity Effects 0.000 claims 1
- 230000003068 static effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 8
- 230000008878 coupling Effects 0.000 description 6
- 238000010168 coupling process Methods 0.000 description 6
- 238000005859 coupling reaction Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000006870 function Effects 0.000 description 4
- 229910044991 metal oxide Inorganic materials 0.000 description 4
- 150000004706 metal oxides Chemical class 0.000 description 4
- 230000003071 parasitic effect Effects 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000007792 addition Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 230000036039 immunity Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000008707 rearrangement Effects 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 238000009662 stress testing Methods 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D89/00—Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
- H10D89/60—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD]
- H10D89/601—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs
- H10D89/811—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs using FETs as protective elements
- H10D89/813—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs using FETs as protective elements specially adapted to provide an electrical current path other than the field-effect induced current path
- H10D89/815—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs using FETs as protective elements specially adapted to provide an electrical current path other than the field-effect induced current path involving a parasitic bipolar transistor triggered by the local electrical biasing of the layer acting as base region of said parasitic bipolar transistor
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D89/00—Aspects of integrated devices not covered by groups H10D84/00 - H10D88/00
- H10D89/60—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD]
- H10D89/601—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs
- H10D89/811—Integrated devices comprising arrangements for electrical or thermal protection, e.g. protection circuits against electrostatic discharge [ESD] for devices having insulated gate electrodes, e.g. for IGFETs or IGBTs using FETs as protective elements
Landscapes
- Semiconductor Integrated Circuits (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Emergency Protection Circuit Devices (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/361,469 US6844597B2 (en) | 2003-02-10 | 2003-02-10 | Low voltage NMOS-based electrostatic discharge clamp |
| US10/361,469 | 2003-02-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20050107753A KR20050107753A (ko) | 2005-11-15 |
| KR101006827B1 true KR101006827B1 (ko) | 2011-01-12 |
Family
ID=32824249
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020057014761A Expired - Lifetime KR101006827B1 (ko) | 2003-02-10 | 2004-02-04 | 저 전압 nmos-기반 정전기 방전 클램프 |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US6844597B2 (enExample) |
| EP (1) | EP1595277A2 (enExample) |
| JP (1) | JP4402109B2 (enExample) |
| KR (1) | KR101006827B1 (enExample) |
| CN (1) | CN100416824C (enExample) |
| TW (1) | TWI322501B (enExample) |
| WO (1) | WO2004073023A2 (enExample) |
Families Citing this family (29)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005311134A (ja) * | 2004-04-22 | 2005-11-04 | Nec Electronics Corp | 静電気放電保護素子 |
| KR20060010979A (ko) * | 2004-07-29 | 2006-02-03 | 현대자동차주식회사 | 차량의 원격 감시 및 제어장치와 그것의 제어방법 |
| US7122867B2 (en) * | 2004-11-19 | 2006-10-17 | United Microelectronics Corp. | Triple well structure and method for manufacturing the same |
| DE102005000801A1 (de) * | 2005-01-05 | 2006-07-13 | Infineon Technologies Ag | Vorrichtung, Anordnung und System zum ESD-Schutz |
| US7508038B1 (en) | 2005-04-29 | 2009-03-24 | Zilog, Inc. | ESD protection transistor |
| US7394133B1 (en) * | 2005-08-31 | 2008-07-01 | National Semiconductor Corporation | Dual direction ESD clamp based on snapback NMOS cell with embedded SCR |
| US7268613B2 (en) * | 2005-10-31 | 2007-09-11 | International Business Machines Corporation | Transistor switch with integral body connection to prevent latchup |
| JP2008218564A (ja) * | 2007-03-01 | 2008-09-18 | Matsushita Electric Ind Co Ltd | 半導体装置 |
| WO2008132561A1 (en) * | 2007-04-27 | 2008-11-06 | Freescale Semiconductor, Inc. | Integrated circuit, electronic device and esd protection therefor |
| CN101373770B (zh) * | 2007-08-20 | 2011-10-05 | 天津南大强芯半导体芯片设计有限公司 | 一种芯片衬底电位隔离电路及其应用和应用方法 |
| US8279566B2 (en) * | 2008-04-30 | 2012-10-02 | Freescale Semiconductor, Inc. | Multi-voltage electrostatic discharge protection |
| US20100067155A1 (en) * | 2008-09-15 | 2010-03-18 | Altera Corporation | Method and apparatus for enhancing the triggering of an electrostatic discharge protection device |
| US8194370B2 (en) * | 2008-11-25 | 2012-06-05 | Nuvoton Technology Corporation | Electrostatic discharge protection circuit and device |
| US8399909B2 (en) | 2009-05-12 | 2013-03-19 | Osi Optoelectronics, Inc. | Tetra-lateral position sensing detector |
| DE102011109596B4 (de) | 2011-08-05 | 2018-05-09 | Austriamicrosystems Ag | Schaltungsanordnung zum Schutz gegen elektrostatische Entladungen |
| CN102646601B (zh) * | 2012-04-19 | 2016-09-28 | 北京燕东微电子有限公司 | 一种半导体结构及其制造方法 |
| US9257463B2 (en) * | 2012-05-31 | 2016-02-09 | Taiwan Semiconductor Manufacturing Company, Ltd. | Self-aligned implantation process for forming junction isolation regions |
| CN103280458B (zh) * | 2013-05-17 | 2015-07-29 | 电子科技大学 | 一种集成电路芯片esd防护用mos器件 |
| CN103887194A (zh) * | 2013-05-23 | 2014-06-25 | 上海华力微电子有限公司 | 并行测试器件 |
| KR101847227B1 (ko) | 2013-05-31 | 2018-04-10 | 매그나칩 반도체 유한회사 | Esd 트랜지스터 |
| KR101975608B1 (ko) | 2013-06-12 | 2019-05-08 | 매그나칩 반도체 유한회사 | 고전압용 esd 트랜지스터 및 그 정전기 보호 회로 |
| KR102098663B1 (ko) | 2013-10-11 | 2020-04-08 | 삼성전자주식회사 | 정전기 방전 보호 소자 |
| JP6349217B2 (ja) * | 2014-09-29 | 2018-06-27 | 日立オートモティブシステムズ株式会社 | 電子制御装置 |
| CN104392995B (zh) * | 2014-10-30 | 2017-09-22 | 京东方科技集团股份有限公司 | 一种晶体管、驱动电路及其驱动方法、显示装置 |
| US9997510B2 (en) * | 2015-09-09 | 2018-06-12 | Vanguard International Semiconductor Corporation | Semiconductor device layout structure |
| US10680435B2 (en) * | 2016-04-26 | 2020-06-09 | Intersil Americas LLC | Enhanced electrostatic discharge (ESD) clamp |
| US20200066709A1 (en) * | 2018-08-21 | 2020-02-27 | Mediatek Inc. | Semiconductor device having noise isolation between power regulator circuit and electrostatic discharge clamp circuit |
| US10896953B2 (en) * | 2019-04-12 | 2021-01-19 | Globalfoundries Inc. | Diode structures |
| JP7455016B2 (ja) * | 2020-07-15 | 2024-03-25 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6329692B1 (en) | 1998-11-30 | 2001-12-11 | Motorola Inc. | Circuit and method for reducing parasitic bipolar effects during eletrostatic discharges |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0723429B1 (en) * | 1992-09-30 | 2002-04-10 | FEINGOLD, Vladimir | Intraocular lens insertion system |
| US5563525A (en) * | 1995-02-13 | 1996-10-08 | Taiwan Semiconductor Manufacturing Company Ltd | ESD protection device with FET circuit |
| US5686751A (en) * | 1996-06-28 | 1997-11-11 | Winbond Electronics Corp. | Electrostatic discharge protection circuit triggered by capacitive-coupling |
| CN1051171C (zh) * | 1997-04-14 | 2000-04-05 | 世界先进积体电路股份有限公司 | 半导体器件的静电保护电路及其结构 |
| US6013932A (en) * | 1998-01-07 | 2000-01-11 | Micron Technology, Inc. | Supply voltage reduction circuit for integrated circuit |
| US6329691B1 (en) * | 1999-12-13 | 2001-12-11 | Tower Semiconductor Ltd. | Device for protection of sensitive gate dielectrics of advanced non-volatile memory devices from damage due to plasma charging |
-
2003
- 2003-02-10 US US10/361,469 patent/US6844597B2/en not_active Expired - Lifetime
-
2004
- 2004-02-04 JP JP2006503295A patent/JP4402109B2/ja not_active Expired - Lifetime
- 2004-02-04 WO PCT/US2004/003094 patent/WO2004073023A2/en not_active Ceased
- 2004-02-04 CN CNB2004800038357A patent/CN100416824C/zh not_active Expired - Lifetime
- 2004-02-04 EP EP04708128A patent/EP1595277A2/en not_active Withdrawn
- 2004-02-04 KR KR1020057014761A patent/KR101006827B1/ko not_active Expired - Lifetime
- 2004-02-06 TW TW093102773A patent/TWI322501B/zh not_active IP Right Cessation
- 2004-12-01 US US11/000,584 patent/US7288820B2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6329692B1 (en) | 1998-11-30 | 2001-12-11 | Motorola Inc. | Circuit and method for reducing parasitic bipolar effects during eletrostatic discharges |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI322501B (en) | 2010-03-21 |
| US6844597B2 (en) | 2005-01-18 |
| JP2006517350A (ja) | 2006-07-20 |
| EP1595277A2 (en) | 2005-11-16 |
| CN100416824C (zh) | 2008-09-03 |
| US20050093073A1 (en) | 2005-05-05 |
| US7288820B2 (en) | 2007-10-30 |
| JP4402109B2 (ja) | 2010-01-20 |
| WO2004073023A3 (en) | 2004-12-23 |
| CN1748309A (zh) | 2006-03-15 |
| KR20050107753A (ko) | 2005-11-15 |
| WO2004073023A2 (en) | 2004-08-26 |
| US20040155300A1 (en) | 2004-08-12 |
| TW200417022A (en) | 2004-09-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0105 | International application |
Patent event date: 20050810 Patent event code: PA01051R01D Comment text: International Patent Application |
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| PG1501 | Laying open of application | ||
| A201 | Request for examination | ||
| PA0201 | Request for examination |
Patent event code: PA02012R01D Patent event date: 20090204 Comment text: Request for Examination of Application |
|
| E701 | Decision to grant or registration of patent right | ||
| PE0701 | Decision of registration |
Patent event code: PE07011S01D Comment text: Decision to Grant Registration Patent event date: 20101027 |
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| GRNT | Written decision to grant | ||
| PR0701 | Registration of establishment |
Comment text: Registration of Establishment Patent event date: 20110103 Patent event code: PR07011E01D |
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| PR1002 | Payment of registration fee |
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