KR100994271B1 - 제품 설계 및 수율 피드백 시스템에 기초하는 포괄적인집적 리소그래피 공정 제어 시스템 - Google Patents

제품 설계 및 수율 피드백 시스템에 기초하는 포괄적인집적 리소그래피 공정 제어 시스템 Download PDF

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KR100994271B1
KR100994271B1 KR1020057005554A KR20057005554A KR100994271B1 KR 100994271 B1 KR100994271 B1 KR 100994271B1 KR 1020057005554 A KR1020057005554 A KR 1020057005554A KR 20057005554 A KR20057005554 A KR 20057005554A KR 100994271 B1 KR100994271 B1 KR 100994271B1
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parameters
manufacturing process
quality
design
quality indicator
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KR20050062576A (ko
Inventor
콰이 에이. 판
반와르 싱
바라쓰 랑가라잔
람쿠마르 서브라마니안
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어드밴스드 마이크로 디바이시즈, 인코포레이티드
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70491—Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes
    • G03F7/70525—Controlling normal operating mode, e.g. matching different apparatus, remote control or prediction of failure
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70605—Workpiece metrology
    • G03F7/70616—Monitoring the printed patterns
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps

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  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Toxicology (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Feedback Control In General (AREA)
  • General Factory Administration (AREA)
KR1020057005554A 2002-09-30 2003-09-12 제품 설계 및 수율 피드백 시스템에 기초하는 포괄적인집적 리소그래피 공정 제어 시스템 Expired - Lifetime KR100994271B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/261,569 2002-09-30
US10/261,569 US6915177B2 (en) 2002-09-30 2002-09-30 Comprehensive integrated lithographic process control system based on product design and yield feedback system

Publications (2)

Publication Number Publication Date
KR20050062576A KR20050062576A (ko) 2005-06-23
KR100994271B1 true KR100994271B1 (ko) 2010-11-12

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KR1020057005554A Expired - Lifetime KR100994271B1 (ko) 2002-09-30 2003-09-12 제품 설계 및 수율 피드백 시스템에 기초하는 포괄적인집적 리소그래피 공정 제어 시스템

Country Status (9)

Country Link
US (1) US6915177B2 (enExample)
JP (1) JP4478574B2 (enExample)
KR (1) KR100994271B1 (enExample)
CN (1) CN1685492B (enExample)
AU (1) AU2003276881A1 (enExample)
DE (1) DE10393394B4 (enExample)
GB (1) GB2410834B (enExample)
TW (1) TWI332129B (enExample)
WO (1) WO2004031859A2 (enExample)

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US20070240121A1 (en) * 2006-01-31 2007-10-11 Caterpillar Inc. System for evaluating component value
US7352439B2 (en) * 2006-08-02 2008-04-01 Asml Netherlands B.V. Lithography system, control system and device manufacturing method
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IL210832A (en) * 2010-02-19 2016-11-30 Asml Netherlands Bv Lithographic facility and method of manufacturing facility
CN102800563B (zh) * 2011-05-26 2014-11-05 中芯国际集成电路制造(上海)有限公司 晶片投片方法与晶片投片装置
US9227295B2 (en) 2011-05-27 2016-01-05 Corning Incorporated Non-polished glass wafer, thinning system and method for using the non-polished glass wafer to thin a semiconductor wafer
KR101530848B1 (ko) * 2012-09-20 2015-06-24 국립대학법인 울산과학기술대학교 산학협력단 데이터마이닝을 이용하여 생산 공정에서 품질을 관리하는 장치 및 방법
KR101508641B1 (ko) * 2013-08-08 2015-04-08 국립대학법인 울산과학기술대학교 산학협력단 생산 공정에서 데이터마이닝을 이용하여 제품 상태를 예측하는 장치 및 방법
CN107850861B (zh) * 2015-07-16 2020-08-07 Asml荷兰有限公司 光刻设备和器件制造方法
US10289109B2 (en) * 2015-10-01 2019-05-14 Globalfoundries Inc. Methods of error detection in fabrication processes
US10241502B2 (en) 2015-10-01 2019-03-26 Globalfoundries Inc. Methods of error detection in fabrication processes
US10311186B2 (en) * 2016-04-12 2019-06-04 Globalfoundries Inc. Three-dimensional pattern risk scoring
CN106205528B (zh) * 2016-07-19 2019-04-16 深圳市华星光电技术有限公司 一种goa电路及液晶显示面板
EP3279737A1 (en) * 2016-08-05 2018-02-07 ASML Netherlands B.V. Diagnostic system for an industrial process
JP7229686B2 (ja) * 2017-10-06 2023-02-28 キヤノン株式会社 制御装置、リソグラフィ装置、測定装置、加工装置、平坦化装置及び物品製造方法
CN110246775B (zh) * 2018-03-09 2022-05-03 联华电子股份有限公司 控制机台操作的装置与方法
CN110071059B (zh) * 2019-03-29 2020-12-22 福建省福联集成电路有限公司 一种监控蚀刻的工艺方法及系统
CN111861050B (zh) * 2019-04-25 2024-02-20 富联精密电子(天津)有限公司 生产制程管控装置、方法及计算机可读存储介质
DE102020215716A1 (de) 2020-12-11 2022-06-15 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren zur Herstellung eines Halbleiterbauelements und Fertigungslinie
US20240231242A9 (en) * 2021-03-02 2024-07-11 Asml Netherlands B.V. Operating a metrology system, lithographic apparatus, and methods thereof
US11955358B2 (en) * 2021-09-24 2024-04-09 Applied Materials, Inc. Model-based failure mitigation for semiconductor processing systems
CN114326620B (zh) * 2021-12-25 2022-09-27 北京国控天成科技有限公司 一种全流程自动控制方法、装置及电子设备
US12321159B2 (en) * 2022-02-04 2025-06-03 University Of South Florida Systems, methods, and media for monitoring the production process of a product

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Also Published As

Publication number Publication date
DE10393394T5 (de) 2005-08-11
AU2003276881A1 (en) 2004-04-23
TWI332129B (en) 2010-10-21
WO2004031859A3 (en) 2004-06-17
KR20050062576A (ko) 2005-06-23
AU2003276881A8 (en) 2004-04-23
CN1685492B (zh) 2012-12-26
GB2410834A (en) 2005-08-10
JP4478574B2 (ja) 2010-06-09
WO2004031859A2 (en) 2004-04-15
GB0505193D0 (en) 2005-04-20
JP2006501673A (ja) 2006-01-12
US6915177B2 (en) 2005-07-05
GB2410834B (en) 2006-04-19
CN1685492A (zh) 2005-10-19
TW200408919A (en) 2004-06-01
DE10393394B4 (de) 2016-10-13
US20040063009A1 (en) 2004-04-01

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