KR100957561B1 - Unit for transferring customer trays and test handler having the unit for transferring customer trays - Google Patents

Abstract

The customer tray transfer unit includes a loading plate, an unloading plate, a buffer stacker, a first transfer arm and a second transfer arm. The loading plate is a customer tray between a first position where the customer tray containing the semiconductor elements to be tested is loaded, a second position where the semiconductor elements of the customer tray are taken out, and a third position where the semiconductor elements are taken out and the empty customer tray is unloaded. Transfer it. The unloading plate moves the customer tray between a fourth position in which the empty customer tray is loaded, a fifth position in which the empty semiconductor tray contains the tested semiconductor elements, and a sixth position in which the customer tray containing the tested semiconductor elements is unloaded. Transfer. The buffer stacker is stacked with empty customer trays. The first transfer arm transfers the empty customer tray from the third position to the buffer stacker. The second transfer arm transfers the empty customer tray from the buffer stacker to the fourth position.

Description

Unit for transferring customer trays and test handler having the unit for transferring customer trays}

The present invention relates to a test handler including a customer tray transfer unit and a customer tray transfer unit, and more particularly, a test including a customer tray transfer unit and a customer tray transfer unit for transferring a customer tray containing a plurality of semiconductor elements. It's about a handler.

In general, semiconductor devices and integrated circuits including the semiconductor devices are shipped after various tests after production.

The test handler is a device for testing the semiconductor device and the integrated circuit. The test handler accommodates the semiconductor devices of the customer trays loaded on the loading stacker as a test tray, and then transfers the test trays containing the semiconductor devices to a test site to the test devices. Perform a test on At the test site, a lead or ball portion of the semiconductor devices mounted on the test tray is electrically connected to the socket of the test head to perform a predetermined electrical test. The test handler separates the semiconductor elements of the test tray from which the test is completed, classifies and stores the semiconductor elements in the customer tray according to the test result, and then loads the customer tray in the unloading stacker.

In the test handler, the first transfer arm transfers the empty customer tray after receiving the semiconductor elements into the customer trays and the test tray loaded in the loading stacker, and the second transfer arm transfers the empty customer tray and the tested semiconductor element. Transfers the customer tray in which they are stored.

Since the first transfer arm and the second transfer arm may operate at the same height, the first transfer arm and the second transfer arm may collide with each other. Thus, while either one of the first transfer arm and the second transfer arm is operating, the other must wait or avoid. Therefore, the transfer efficiency of the customer tray can be lowered.

When the transfer efficiency of the customer tray is lowered, the throughput per unit time of the test handler may be reduced.

The present invention provides a customer tray transfer unit capable of improving the transfer efficiency of the customer tray.

The present invention provides a test handler having the customer tray transfer unit.

The customer tray transfer unit according to the present invention includes a first position at which a customer tray containing semiconductor elements to be tested is loaded, a second position at which the semiconductor elements of the customer tray are taken out, and the semiconductor elements are taken out to free the empty customer tray. A loading plate for transferring the customer tray between a third position to be loaded, a fourth position at which the empty customer tray is loaded, a fifth position to receive the tested semiconductor elements in the empty customer tray, and the tested semiconductor elements An unloading plate for transferring the customer trays between the sixth positions at which the stored customer trays are unloaded, a buffer stacker in which the empty customer trays are stacked, and the empty customer trays from the third position to the buffer stacker. The first transfer arm and the transfer to the The customer tray stacker from the buffer may include a second transfer arm for transferring to said fourth position.

According to one embodiment of the invention, the first position, the second position and the third position of the loading plate have different heights, and the sixth, fifth and fourth positions of the unloading plate are each different. May have a height.

The first, second and third positions of the loading plate may have the same height as the sixth, fifth and fourth positions of the unloading plate, respectively. The height may be increased in order of the first position, the third position, and the second position. The buffer stacker may be moved up to the same height as the third position or fixedly disposed at the same height as the third position for loading and unloading the empty customer tray.

According to another embodiment of the present invention, the customer tray transfer unit includes a loading stacker in which customer trays containing the semiconductor elements to be tested are stacked, and a customer tray in which the semiconductor elements to be tested of the loading stacker are stored. A third transfer arm for transferring to a first position, an unloading stacker in which customer trays containing the tested semiconductor elements are stacked, and a customer tray in which the tested semiconductor elements are received, from the sixth position It may further include a fourth transfer arm for transferring to the beaker.

The loading stacker, the loading plate, the first transfer arm and the third transfer arm are disposed in a first space, and the unloading stacker, the unloading plate, the second transfer arm and the fourth transfer arm are made of The buffer stacker may be disposed in two spaces, and the buffer stacker may be disposed between the first space and the second space.

The unloading stacker may include a first stacker in which customer trays in which semiconductor devices, which are normally tested, are stored, are stacked, and a second stacker in which customer trays in which the semiconductor devices, which are bad of the test results, are stored, are stacked.

According to an exemplary embodiment of the present invention, a test handler includes a first position in which a customer tray containing semiconductor elements to be tested is loaded, a second position in which the semiconductor elements of the customer tray are carried out, and the semiconductor elements are exported, and an empty customer tray is unloaded. A loading plate for transferring the customer tray between a third position, a fourth position at which the empty customer tray is loaded, a fifth position at which the tested semiconductor elements are housed in the empty customer tray, and a customer containing the tested semiconductor elements An unloading plate for transferring the customer trays between the sixth positions at which the trays are unloaded, a buffer stacker for stacking the empty customer trays, and a first for transferring the empty customer trays from the third position to the buffer stacker Feed arm and empty customer tray A customer tray transfer unit including a second transfer arm transferring the buffer stacker to the fourth position and one side of the customer tray transfer unit, and receive the semiconductor elements to be tested from the customer tray transfer unit; The semiconductor device may include a chamber unit which exports the tested semiconductor devices to the customer tray transfer unit and provides a space for performing a test on the semiconductor devices.

According to the invention, the first transfer arm for transferring the empty customer tray from the third position to the buffer stacker and the third transfer arm for transporting the customer tray containing the semiconductor elements to be tested operate at different heights of the first space. .

The second transfer arm for transferring the empty customer tray to the fourth position from the buffer stacker and the fourth transfer arm for transferring the customer tray containing the tested semiconductor elements operate at different heights of the second space.

Since the first to fourth transfer arms have different operating regions, the first to fourth transfer arms may operate at the same time. Therefore, the transfer efficiency of the customer trays can be improved.

Hereinafter, a test handler including a customer tray transfer unit and a customer tray transfer unit according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings. As the inventive concept allows for various changes and numerous embodiments, particular embodiments will be illustrated in the drawings and described in detail in the text. However, this is not intended to limit the present invention to the specific disclosed form, it should be understood to include all modifications, equivalents, and substitutes included in the spirit and scope of the present invention. Like reference numerals are used for like elements in describing each drawing. In the accompanying drawings, the dimensions of the structures are shown in an enlarged scale than actual for clarity of the invention.

The terms first, second, etc. may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as the second component, and similarly, the second component may also be referred to as the first component.

The terminology used herein is for the purpose of describing particular example embodiments only and is not intended to be limiting of the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this application, the terms "comprise" or "have" are intended to indicate that there is a feature, number, step, action, component, part, or combination thereof described in the specification, and one or more other features. It is to be understood that the present invention does not exclude the possibility of the presence or the addition of numbers, steps, operations, components, parts, or combinations thereof.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art. Terms such as those defined in the commonly used dictionaries should be construed as having meanings consistent with the meanings in the context of the related art and shall not be construed in ideal or excessively formal meanings unless expressly defined in this application. Do not.

Hereinafter, the first semiconductor device to be tested, the second semiconductor device to be tested, the customer tray containing the semiconductor devices to be tested, the first customer tray, and the semiconductor devices to be tested are exported to remove the empty customer tray. The second customer tray and the customer tray containing the tested semiconductor elements are referred to as a third customer tray.

1 is a schematic front view for explaining a customer tray transfer unit 100 according to an embodiment of the present invention.

1, the customer tray transfer unit 100 includes a loading stacker 110, a loading plate 120, a first transfer arm 130, a preliminary stacker 140, a buffer stacker 150, The unloading stacker 160, the unloading plate 170, the preliminary plate 172, the second transfer arm 180, the third transfer arm 190, and the fourth transfer arm 195 are included.

The customer tray transfer unit 100 is divided into a first space 102 and a second space 104 adjacent to the first space 102. The loading stacker 110, the loading plate 120, the first transfer arm 130, the preliminary stacker 140, and the third transfer arm 180 are disposed in the first space 102, and the frozen The loading stacker 160, the unloading plate 170, the preliminary plate 172, the second transfer arm 180 and the fourth transfer arm 195 are disposed in the second space 104. The buffer stacker 150 is disposed between the first space 102 and the second space 104.

The loading stacker 110 loads first customer trays in which the first semiconductor devices to be tested are stored. The first customer trays are stacked in a direction perpendicular to the loading stacker 110.

The loading plate 120 is provided above the loading stacker 110 and moves in a vertical direction. For example, the loading plate 120 moves between the first position 122, the second position 124, and the third position 126. The height is higher in the order of the first position 122, the third position 126, and the second position 124. When the loading plate 120 is in the first position 122, the first customer tray is loaded into the loading plate 120. When the loading plate 120 is in the second position 124, the first semiconductor elements of the first customer tray are taken out and transferred to a test tray (not shown). When the loading plate 120 is in the third position 126, the first semiconductor devices are taken out so that the empty second customer tray is unloaded from the loading plate 120.

The first transfer arm 130 is provided on the loading stacker 110 and moves in a vertical direction and a horizontal direction. The first transfer arm 130 transfers the first customer tray loaded on the loading stacker 110 to the loading plate 120 at the first position 122. Therefore, the first transfer arm 130 may rise only to the first position 122.

The preliminary stacker 140 is provided at a side surface of the loading stacker 110, and the second semiconductor trays, in which some of the first semiconductor devices are not carried out but some remain, are stacked. The second customer trays are stacked in a direction perpendicular to the preliminary stacker 140.

The unloading stacker 160 loads third customer trays in which the tested second semiconductor devices are accommodated. The third customer trays are stacked in a direction perpendicular to the unloading stacker 160.

The unloading stacker 160 includes a first stacker 162 in which third customer trays in which good second semiconductor devices are housed, and a third in which bad second semiconductor devices are stored. It may include a second stacker 164 in which customer trays are stacked.

The unloading plate 170 is provided above the unloading stacker 160 and moves in a vertical direction. For example, the unloading plate 170 moves between the fourth position 172, the fifth position 174, and the sixth position 176. The height is higher in order of the sixth position 176, the fourth position 172, and the fifth position 174. When the unloading plate 170 is in the fourth position 172, the second customer tray is loaded into the unloading plate 170. When the unloading plate 170 is in the fifth position 174, the second semiconductor devices tested from the test tray are received into the second customer tray. When the unloading plate 170 is in the sixth position 176, the third customer tray in which the second semiconductor elements are accommodated is unloaded from the unloading plate 170.

The fourth position 172, the fifth position 174, and the sixth position 176 of the unloading plate 170 are a third position 126, a second position 124 of the loading plate 120. And the same height as the first position 126, respectively.

The preliminary plate 172 is provided on one side of the unloading plate 170 and has the same function as the unloading plate 170. When the operation of the unloading plate 170 is normal, the preliminary plate 172 does not operate. If the operation of the unloading plate 170 is poor, the preliminary plate 172 operates by replacing the unloading plate 170.

The second transfer arm 180 is provided above the unloading stacker 160 and moves in a vertical direction and a horizontal direction. The second transfer arm 180 transfers and loads the third customer tray to the unloading stacker 160 from the unloading plate 170 at the sixth position 176. Therefore, the second transfer arm 130 may rise only to the sixth position 122.

The buffer stacker 150 is disposed between the first space 102 and the second space 104. For example, the buffer stacker 150 is disposed between the preliminary stacker 140 and the unloading stacker 160. The buffer stacker 150 loads the second customer trays. The second customer trays are stacked in a direction perpendicular to the buffer stacker 150. The buffer stacker 150 may be provided in plural as necessary.

The buffer stacker 150 may move up and down the same height as the third position 126 (or the fourth position 172) in order to quickly load and unload the second customer trays. When the buffer stacker 150 rises to the same height as the third position 126, the buffer stacker 150 moves the second customer tray placed on the loading plate 120 at the third position 126. The second customer tray may be quickly transferred from the buffer stacker 150 to the unloading plate 170 of the fourth position 172.

As another example, the buffer stacker 150 may be fixedly disposed at the same height as the third position 126 without lifting up.

The third transfer arm 190 is disposed at the same height as the third position 126 above the loading stacker 110 and the preliminary stacker 140. The third transfer arm 190 transfers the second customer tray from the loading plate 120 at the third position 126 to the buffer stacker 150 raised to the same height as the third position 126. . Accordingly, since the third transfer arm 190 may be horizontally moved without vertical movement, the third transfer arm 190 moves the second customer tray from the loading plate 120 to the buffer stacker 150. Can be transported quickly.

When the first semiconductor device remains in the second customer tray, the third transfer arm 190 moves the second customer tray from the loading plate 120 at the third position 126 to the preliminary stacker ( Transfer it to 140) and load it.

The fourth transfer arm 195 is disposed at the same height as the fourth position 172 above the unloading stacker 160. The fourth transfer arm 195 transfers the second customer tray from the buffer stacker 150 raised to the same height as the fourth position 172 to the unloading plate 170 of the fourth position 172. do. Since the fourth transfer arm 195 may be moved only horizontally without vertical movement, the fourth transfer arm 195 moves the second customer tray from the buffer stacker 150 to the unloading plate 170. Can be transported quickly

Since the third position 126 and the fourth position 172 are the same height, the third transfer arm 190 and the fourth transfer arm 195 move horizontally at the same height. However, the third transfer arm 190 moves horizontally in the first space 102, and the fourth transfer arm 195 moves horizontally in the second space 104. Therefore, the operating regions of the third transfer arm 190 and the fourth transfer arm 195 are different from each other. The third transfer rock 190 loads the second customer tray to the buffer stacker 150 and the fourth transfer arm 195 moves the second customer from the buffer stacker 150. The operation of carrying out the tray may be performed alternately.

The first transfer arm 130 is elevated only to the first position 122 in the first space 102, the second transfer arm 180 is the first position (in the second space 104) Only the sixth position 176, which is the same height as 122, may be elevated. In addition, the third transfer arm 190 moves horizontally at the same height as the third position 126 of the first space 102, and the fourth transfer arm 195 is the second space 104. It moves horizontally at the same height as the fourth position 172 of. Accordingly, the first transfer arm 120, the second transfer arm 180, the third transfer arm 190, and the fourth transfer arm 195 have different operating areas, and thus, the first transfer arm 120. The arm 120, the second transfer arm 180, the third transfer arm 190, and the fourth transfer arm 195 may operate simultaneously. Therefore, the transfer efficiency of the first to third customer trays can be improved.

2A to 2H are views for explaining the operation of the customer tray transfer unit 100 shown in FIG.

Referring to FIG. 2A, the first transfer arm 130 transfers the first customer tray CT loaded on the loading stacker 110 to the loading plate 120 at the first position 122. First semiconductor elements to be tested are accommodated in the first customer tray CT.

Referring to FIG. 2B, the loading plate 120 is lifted to transfer the first customer tray CT to the second position 124. The first semiconductor devices accommodated in the first customer tray CT are carried out to the test tray at the second position 124.

Referring to FIG. 2C, the loading plate 120 is lowered and the first semiconductor devices are carried out to transfer the empty second customer tray CT to the third position 126.

2D, the third transfer arm 190 transfers the second customer tray CT to the buffer stacker 150 from the loading plate 120 at the third position 126. In this case, since the buffer stacker 150 may rise to the same height as the third position 126, the vertical movement of the third transfer arm 190 may be minimized.

Even when the buffer stacker 150 is fixed at the same height as the third position 126, the vertical movement of the third transfer arm 190 may be minimized.

On the other hand, the buffer stacker 150 does not rise, and the third transfer arm 190 moves from the loading plate 120 of the third position 126 to the second customer tray ( CT) may be transferred to the buffer stacker 150.

When the first semiconductor element remains in the second customer tray CT, the third transfer arm 190 is moved from the loading plate 120 of the third position 126 to the second customer tray CT. Transported to the preliminary stacker 140 and loaded.

2E, the fourth transfer arm 195 moves the second customer tray CT from the buffer stacker 150 to the fourth position 172 having the same height as the third position 126. ) To the unloading plate 170. In this case, since the buffer stacker 150 may rise to the same height as the fourth position 172 (or the third position 126), the vertical movement of the fourth transfer arm 195 may be minimized. Can be.

Even when the buffer stacker 150 is fixed at the same height as the fourth position 126, the vertical movement of the fourth transfer arm 195 may be minimized.

Meanwhile, the buffer stacker 150 does not rise, and the fourth transfer arm 195 moves the second customer tray CT from the buffer stacker 150 to the fourth through horizontal and vertical movements. May be transferred to the unloading plate 170 at position 172.

Referring to FIG. 2F, the unloading plate 170 is raised to transfer the second customer tray CT to the fifth position 174. In the fifth position 174, the tested second semiconductor devices are received in the second customer tray CT from a test tray.

Referring to FIG. 2G, the unloading plate 170 descends to transfer the third customer tray CT in which the second semiconductor elements are accommodated to the sixth position 176.

Referring to FIG. 2H, the second transfer arm 180 transfers the third customer tray CT to the unloading stacker 160 from the unloading plate 170 at the sixth position 176. do. When the second semiconductor elements of the third customer tray CT are good, the third customer tray CT is loaded on the first stacker 162. When the second semiconductor elements of the third customer tray CT are defective, the third customer tray CT is loaded on the second stacker 164.

Since the first transfer arm 120, the second transfer arm 180, the third transfer arm 190, and the fourth transfer arm 195 have different operating regions, the first transfer arm ( 120, the second transfer arm 180, the third transfer arm 190 and the fourth transfer arm 195 may operate simultaneously. Therefore, the transfer efficiency of the first to third customer trays can be improved.

In particular, since the third transfer arm 190 and the fourth transfer arm 195 operate simultaneously, the second customer tray CT is moved from the loading plate 120 of the third position 126 to the buffer stacker. It is possible to quickly transfer to the unloading plate 170 of the fourth position 172 via the 150.

3 is a schematic diagram illustrating a test handler 200 according to an embodiment of the present invention.

Referring to FIG. 3, the test handler 200 includes a customer tray loading unit 210 and a chamber unit 220.

The customer tray loading unit 210 includes a loading stacker, a loading plate, a first transfer arm, a preliminary stacker, a buffer stacker, an unloading stacker, an unloading plate, a preliminary plate, a second transfer arm, and a third transfer arm. And a fourth transfer arm.

The customer tray loading unit 210 is divided into a first space 212 and a second space 214. The loading stacker, the loading plate, the first transfer arm, the preliminary stacker, and the third transfer arm are disposed in the first space 212, and the unloading stacker, the unloading plate, the preliminary plate, and the second transfer arm. And a fourth transfer arm is disposed in the second space 214, and the buffer stacker is disposed between the first space 212 and the second space 214.

A detailed description of the customer tray loading unit 210 is substantially the same as that of the customer tray loading unit 100 with reference to FIG. 1.

The chamber unit 220 is provided at one side of the customer tray loading unit 210, the loading unit 230, the preheating chamber 250, the test chamber 260, the heat removing chamber 270, and the unloading unit 240. ), A loading picker 281 and an unloading picker 282.

The loading unit 230 is disposed at the rear of the first space 212, and the test tray TT in which the first semiconductor elements taken out from the first customer tray are accommodated is placed in a horizontal state. The test tray TT has a structure in which a plurality of carrier modules CM for fixing and releasing semiconductor elements are arranged at regular intervals in a rectangular frame made of metal having excellent heat resistance.

The unloading unit 240 is disposed at the rear of the first space 212 and receives the test tray TT conveyed from the heat removal chamber 270. The unloading unit 240 separates the second semiconductor devices tested in the test tray TT conveyed from the heat removal chamber 270.

The preheating chamber 250 is disposed immediately behind the loading unit 230, and moves the test tray TT transferred from the loading unit 230 backward by one step in a vertical state. Is heated to a constant temperature state. For example, inside the preheating chamber 250, a first tray transfer unit (not shown) for moving the test tray TT step by step and a high temperature hot air or a low temperature cooling gas into the preheating chamber 250. A first temperature control unit (not shown) for selectively supplying may be provided.

In addition, a first rotator 252 is installed at the front of the preheating chamber 250 to rotate the horizontal test tray TT transferred from the loading unit 230 to a vertical state by 90 degrees.

The test chamber 260 is disposed between the preheating chamber 250 and the heat removing chamber 270, and tests the first semiconductor device of the test tray TT transferred from the preheating chamber 250 under a predetermined temperature. The test chamber 260 is vertically coupled to a test head 262 having a plurality of test sockets (not shown) for electrically connecting the first semiconductor elements of the test tray TT. In front of the test head 262, a contact push unit 264 for pressing a semiconductor element of the test tray TT toward the test head 262 and connecting it to a test socket (not shown) at a predetermined pressure in front and rear directions. It is installed to reciprocate.

The test chamber 260 is provided with a second temperature control unit (not shown) for selectively supplying high temperature hot air or low temperature cooling gas therein.

The test head 262 is electrically connected to a separate test equipment called an external tester (TESTER) to exchange electrical signals.

The heat removal chamber 270 is a second semiconductor device tested by applying a thermal stress opposite to the preheat chamber 250 while moving the test tray TT transferred from the test chamber 260 one step forward in a vertical state. Reduce to room temperature. For example, the heat removal chamber 270 selectively supplies a second tray transfer unit (not shown) for moving the test tray TT step by step, and a high temperature hot air or a low temperature cooling gas into the chamber. The state has a third temperature control unit (not shown).

In addition, a second rotator 272 is installed at the front side of the heat removal chamber 270 to rotate the test tray TT in a vertical state to make the horizontal state by 90 degrees.

The preheating chamber 250, the test chamber 260, and the heat removing chamber 270 may be provided in a single layer, but the test chamber 260 is provided with two rear and upper layers of the chambers 250, 260, and 270. In the two test trays TT can be tested simultaneously.

At this time, the rear of the preheat chamber 250 and the heat removal chamber 270 may be provided with a tray lifting unit (not shown) for elevating the test tray TT to the upper and lower layers, respectively.

A first tray transfer 232 for transferring the test tray TT in a horizontal state is provided between the loading unit 230 and the preheating chamber 250. In addition, a second tray transfer 242 is also provided between the unloading unit 240 and the heat removal chamber 270 to transfer the test tray TT in a horizontal state.

The loading picker 281 and the unloading picker 282 are provided to be movable in the horizontal and vertical directions. The loading picker 281 may vacuum-adsorb the first semiconductor devices from the first customer tray and transfer the vacuum picker to the loading unit 230. The unloading picker 282 vacuum-absorbs the second semiconductor devices to transfer them to the second customer tray.

The customer tray transfer unit 210 may quickly supply the first semiconductor element to the chamber unit 220 and quickly remove the second semiconductor element from the chamber unit 220. Therefore, the throughput per unit time of the chamber unit 220 may be increased.

As described above, according to the embodiments of the present invention, the operating areas of the transfer arms for transporting the first customer tray, the transfer arms for transporting the third customer tray, and the two transport arms for transporting the second customer tray are different from each other. The four transfer arms can operate simultaneously.

 Therefore, the transfer efficiency of the customer tray transfer unit can be improved. In addition, the efficiency of the test handler including the transfer unit can be improved.

While the foregoing has been described with reference to preferred embodiments of the present invention, those skilled in the art will be able to variously modify and change the present invention without departing from the spirit and scope of the invention as set forth in the claims below. It will be appreciated.

1 is a schematic front view for explaining a customer tray transfer unit according to an embodiment of the present invention.

2A to 2H are diagrams for describing an operation of the customer tray transfer unit illustrated in FIG. 1.

3 is a schematic diagram illustrating a test handler according to an embodiment of the present invention.

Explanation of symbols on the main parts of the drawings

100: customer tray transfer unit 102: first space

104: second space 110: loading stacker

120: loading plate 130: first transfer arm

140: buffer stacker 150: preliminary stacker

160: unloading stacker 170: unloading plate

180: second transfer arm 190: third transfer arm

195: 4th transfer arm

Claims (10)

The customer between a first position at which the customer tray containing the semiconductor elements to be tested is loaded, a second position at which the semiconductor elements of the customer tray are taken out, and a third position at which the semiconductor elements are exported and the unloaded empty customer tray is unloaded. A loading plate for transporting the tray; The customer tray may be disposed between a fourth position at which the empty customer tray is loaded, a fifth position at which the semiconductor devices tested in the empty customer tray are accommodated, and a sixth position at which the customer tray containing the tested semiconductor elements is unloaded. Conveying unloading plate; A buffer stacker on which the empty customer trays are stacked; A first transfer arm for transferring said empty customer tray from said third position to said buffer stacker; And A second transfer arm for transferring said empty customer tray from said buffer stacker to said fourth position, The first, second and third positions of the loading plate have different heights, and the sixth, fifth and fourth positions of the unloading plate have different heights, respectively. The first position, the second position, and the third position have the same height as the sixth position, the fifth position, and the fourth position of the unloading plate, respectively, and the heights are in the order of the first position, the third position, and the second position. Customer tray transfer unit characterized in that the rising . delete delete delete 2. The customer tray transport unit of claim 1, wherein the buffer stacker moves to the same height as the third position for loading and unloading the empty customer tray. The customer tray transfer unit of claim 1, wherein the buffer stacker is fixedly disposed at the same height as the third position for loading and unloading the empty customer tray. The semiconductor device of claim 1, further comprising: a loading stacker on which customer trays containing the semiconductor devices to be tested are stacked; A third transfer arm configured to transfer the customer tray containing the semiconductor elements to be tested of the loading stacker to the first position; An unloading stacker on which customer trays containing the tested semiconductor devices are stacked; And And a fourth transfer arm configured to transfer the customer tray containing the tested semiconductor elements from the sixth position to the unloading stacker. The method of claim 7, wherein the loading stacker, the loading plate, the first transfer arm and the third transfer arm are disposed in a first space, the unloading stacker, the unloading plate, the second transfer arm and The fourth transfer arm is disposed in the second space, and the buffer stacker is disposed between the first space and the second space. The method of claim 7, wherein the unloading stacker, A first stacker in which customer trays in which semiconductor devices, which are normally tested, are stored, are stacked; And And a second stacker on which the customer trays containing the semiconductor devices, which are defective as a result of the test, are stacked. The customer between a first position at which the customer tray containing the semiconductor elements to be tested is loaded, a second position at which the semiconductor elements of the customer tray are taken out, and a third position at which the semiconductor elements are exported and the unloaded empty customer tray is unloaded. A loading plate for transporting the tray, a fourth position at which the empty customer tray is loaded, a fifth position at which the semiconductor elements tested are stored in the empty customer tray, and a sixth at which the customer tray containing the tested semiconductor elements is unloaded An unloading plate for transferring the customer tray between positions, a buffer stacker on which the empty customer trays are stacked, a first transfer arm for transferring the empty customer tray from the third position to the buffer stacker and the empty customer tray From the buffer stacker A second transfer arm for transferring to the fourth position, the first position of the loading plate, a second position and a third position has a different height respectively, in the sixth position of the unloading plate, a fifth position and a fourth The positions each have a different height, and the first, second and third positions of the loading plate have the same height as the sixth, fifth and fourth positions of the unloading plate, respectively; A customer tray transfer unit , the height of which is increased in order of a position, a third position, and a second position ; And Is provided on one side of the customer tray transfer unit, the semiconductor device to be tested is supplied from the customer tray transfer unit, the tested semiconductor elements are carried out to the customer tray transfer unit, and the test is performed on the semiconductor elements. And a chamber unit providing a space to the test handler.

Images