KR100940114B1 - 능동 매트릭스형 액정 디스플레이의 전극 제조방법 - Google Patents
능동 매트릭스형 액정 디스플레이의 전극 제조방법 Download PDFInfo
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- KR100940114B1 KR100940114B1 KR1020030013153A KR20030013153A KR100940114B1 KR 100940114 B1 KR100940114 B1 KR 100940114B1 KR 1020030013153 A KR1020030013153 A KR 1020030013153A KR 20030013153 A KR20030013153 A KR 20030013153A KR 100940114 B1 KR100940114 B1 KR 100940114B1
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- South Korea
- Prior art keywords
- liquid crystal
- layer
- forming
- crystal display
- active matrix
- Prior art date
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/52—Particle separators, e.g. dust precipitators, using filters embodying folded corrugated or wound sheet material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D39/00—Filtering material for liquid or gaseous fluids
- B01D39/08—Filter cloth, i.e. woven, knitted or interlaced material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D39/00—Filtering material for liquid or gaseous fluids
- B01D39/14—Other self-supporting filtering material ; Other filtering material
- B01D39/20—Other self-supporting filtering material ; Other filtering material of inorganic material, e.g. asbestos paper, metallic filtering material of non-woven wires
- B01D39/2055—Carbonaceous material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D39/00—Filtering material for liquid or gaseous fluids
- B01D39/14—Other self-supporting filtering material ; Other filtering material
- B01D39/20—Other self-supporting filtering material ; Other filtering material of inorganic material, e.g. asbestos paper, metallic filtering material of non-woven wires
- B01D39/2068—Other inorganic materials, e.g. ceramics
- B01D39/2082—Other inorganic materials, e.g. ceramics the material being filamentary or fibrous
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/0002—Casings; Housings; Frame constructions
- B01D46/0005—Mounting of filtering elements within casings, housings or frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/0039—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with flow guiding by feed or discharge devices
- B01D46/0047—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with flow guiding by feed or discharge devices for discharging the filtered gas
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/02—Particle separators, e.g. dust precipitators, having hollow filters made of flexible material
- B01D46/023—Pockets filters, i.e. multiple bag filters mounted on a common frame
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/42—Auxiliary equipment or operation thereof
- B01D46/44—Auxiliary equipment or operation thereof controlling filtration
- B01D46/446—Auxiliary equipment or operation thereof controlling filtration by pressure measuring
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J20/00—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof
- B01J20/02—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material
- B01J20/20—Solid sorbent compositions or filter aid compositions; Sorbents for chromatography; Processes for preparing, regenerating or reactivating thereof comprising inorganic material comprising free carbon; comprising carbon obtained by carbonising processes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/20—Halogens or halogen compounds
- B01D2257/206—Organic halogen compounds
- B01D2257/2064—Chlorine
Abstract
Description
도 2는 본 발명의 바람직한 실시예에 따라 제조된 능동 매트릭스형 액정 디스플레이의 폴리실리콘 전극이 적용되는 부분을 설명하기 위한 도면이다.
또한, 도 3a 및 도 3b는 도2에 도시된 능동 매트릭스형 액정 디스플레이가 동작하는 것을 설명하기 위한 도면이다.
Claims (3)
- 반도체 기판 상에 액정층을 형성하는 단계;상기 액정층 상부에 실리콘 상에 형성된 절연체(SOI; silicon on insulator) 층을 형성하는 단계;630 ∼ 650℃의 온도에서 상기 SOI층 상에 폴리실리콘층을 형성하는 단계; 및상기 폴리실리콘층을 패터닝하는 단계를 포함하는 것을 특징으로 하는 능동 매트릭스형 액정 디스플레이의 전극 제조방법.
- 제1항에 있어서,상기 폴리실리콘층을 상기 능동 매트릭스형 액정 디스플레이를 제어하기 위한 전극으로 사용하는 것을 특징으로 하는 능동 매트릭스형 액정 디스플레이의 전극 제조방법.
- 제1항에 있어서,상기 폴리실리콘층을 형성하는 단계는,45 ∼ 55Pa의 압력에서 실란(SiH4)의 유량을 430 ∼ 500sccm으로 하여 진행하는 것을 특징으로 하는 능동 매트릭스형 액정 디스플레이의 전극 제조방법.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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KR1020030013153A KR100940114B1 (ko) | 2003-03-03 | 2003-03-03 | 능동 매트릭스형 액정 디스플레이의 전극 제조방법 |
Applications Claiming Priority (1)
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KR1020030013153A KR100940114B1 (ko) | 2003-03-03 | 2003-03-03 | 능동 매트릭스형 액정 디스플레이의 전극 제조방법 |
Publications (2)
Publication Number | Publication Date |
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KR20040078291A KR20040078291A (ko) | 2004-09-10 |
KR100940114B1 true KR100940114B1 (ko) | 2010-02-02 |
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KR1020030013153A KR100940114B1 (ko) | 2003-03-03 | 2003-03-03 | 능동 매트릭스형 액정 디스플레이의 전극 제조방법 |
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6355529A (ja) | 1986-08-25 | 1988-03-10 | Nec Corp | アクティブ・マトリクス液晶表示装置の製造方法 |
KR19990037169A (ko) * | 1997-10-17 | 1999-05-25 | 순페이 야마자키 | 반도체 장치 및 그 제조 방법 |
KR100302403B1 (ko) | 1995-02-16 | 2001-11-07 | 야마자끼 순페이 | 반도체장치 제작방법 |
JP2002014375A (ja) | 1990-12-13 | 2002-01-18 | Kopin Corp | 液晶光バルブ装置 |
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2003
- 2003-03-03 KR KR1020030013153A patent/KR100940114B1/ko active IP Right Grant
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6355529A (ja) | 1986-08-25 | 1988-03-10 | Nec Corp | アクティブ・マトリクス液晶表示装置の製造方法 |
JP2002014375A (ja) | 1990-12-13 | 2002-01-18 | Kopin Corp | 液晶光バルブ装置 |
KR100302403B1 (ko) | 1995-02-16 | 2001-11-07 | 야마자끼 순페이 | 반도체장치 제작방법 |
KR19990037169A (ko) * | 1997-10-17 | 1999-05-25 | 순페이 야마자키 | 반도체 장치 및 그 제조 방법 |
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