KR100939499B1 - 요동체 장치, 광 편향기, 및 광 편향기를 이용한화상형성장치 - Google Patents

요동체 장치, 광 편향기, 및 광 편향기를 이용한화상형성장치 Download PDF

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Publication number
KR100939499B1
KR100939499B1 KR1020080072060A KR20080072060A KR100939499B1 KR 100939499 B1 KR100939499 B1 KR 100939499B1 KR 1020080072060 A KR1020080072060 A KR 1020080072060A KR 20080072060 A KR20080072060 A KR 20080072060A KR 100939499 B1 KR100939499 B1 KR 100939499B1
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KR
South Korea
Prior art keywords
orientation
movable portion
movable
torsion spring
optical deflector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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KR1020080072060A
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English (en)
Korean (ko)
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KR20090013050A (ko
Inventor
카즈토시 토라시마
타카히사 카토
Original Assignee
캐논 가부시끼가이샤
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Application filed by 캐논 가부시끼가이샤 filed Critical 캐논 가부시끼가이샤
Publication of KR20090013050A publication Critical patent/KR20090013050A/ko
Application granted granted Critical
Publication of KR100939499B1 publication Critical patent/KR100939499B1/ko
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Micromachines (AREA)
  • Facsimile Scanning Arrangements (AREA)
  • Laser Beam Printer (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
KR1020080072060A 2007-07-30 2008-07-24 요동체 장치, 광 편향기, 및 광 편향기를 이용한화상형성장치 Expired - Fee Related KR100939499B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2007-00197393 2007-07-30
JP2007197393A JP2009031642A (ja) 2007-07-30 2007-07-30 揺動体装置、光偏向器およびそれを用いた画像形成装置

Publications (2)

Publication Number Publication Date
KR20090013050A KR20090013050A (ko) 2009-02-04
KR100939499B1 true KR100939499B1 (ko) 2010-01-29

Family

ID=39870688

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020080072060A Expired - Fee Related KR100939499B1 (ko) 2007-07-30 2008-07-24 요동체 장치, 광 편향기, 및 광 편향기를 이용한화상형성장치

Country Status (7)

Country Link
US (1) US20090034038A1 (enExample)
EP (1) EP2028523B1 (enExample)
JP (1) JP2009031642A (enExample)
KR (1) KR100939499B1 (enExample)
CN (1) CN101359092B (enExample)
AT (1) ATE467855T1 (enExample)
DE (1) DE602008001221D1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009031643A (ja) * 2007-07-30 2009-02-12 Canon Inc 揺動体装置、光偏向器およびそれを用いた画像形成装置
JP5267370B2 (ja) 2009-07-23 2013-08-21 ブラザー工業株式会社 光スキャナ
US8217630B2 (en) * 2009-11-18 2012-07-10 Hamilton Sundstrand Corporation Electric load damper for damping torsional oscillation
EP3640704B1 (en) * 2017-06-13 2023-08-09 Mitsubishi Electric Corporation Optical scanning device and method for adjusting optical scanning device
JP7169745B2 (ja) 2018-01-19 2022-11-11 キヤノン株式会社 半導体装置および光学式エンコーダ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010049959A1 (en) 1995-12-11 2001-12-13 Neukermans Armand P. Integrated silicon profilometer and AFM head
US20020135864A1 (en) 2000-04-25 2002-09-26 Chen-Wei Chiu Silicon micromachined optical device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4317611A (en) 1980-05-19 1982-03-02 International Business Machines Corporation Optical ray deflection apparatus
US5740150A (en) * 1995-11-24 1998-04-14 Kabushiki Kaisha Toshiba Galvanomirror and optical disk drive using the same
JP2003019700A (ja) * 2001-07-06 2003-01-21 Canon Inc マイクロ構造体、およびその作製方法
JP3740444B2 (ja) * 2001-07-11 2006-02-01 キヤノン株式会社 光偏向器、それを用いた光学機器、ねじれ揺動体
JP4574396B2 (ja) * 2005-03-02 2010-11-04 キヤノン株式会社 光偏向器

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20010049959A1 (en) 1995-12-11 2001-12-13 Neukermans Armand P. Integrated silicon profilometer and AFM head
US20020135864A1 (en) 2000-04-25 2002-09-26 Chen-Wei Chiu Silicon micromachined optical device

Also Published As

Publication number Publication date
CN101359092A (zh) 2009-02-04
ATE467855T1 (de) 2010-05-15
EP2028523B1 (en) 2010-05-12
CN101359092B (zh) 2010-07-21
KR20090013050A (ko) 2009-02-04
EP2028523A1 (en) 2009-02-25
JP2009031642A (ja) 2009-02-12
DE602008001221D1 (de) 2010-06-24
US20090034038A1 (en) 2009-02-05

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