JP2009031642A - 揺動体装置、光偏向器およびそれを用いた画像形成装置 - Google Patents

揺動体装置、光偏向器およびそれを用いた画像形成装置 Download PDF

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Publication number
JP2009031642A
JP2009031642A JP2007197393A JP2007197393A JP2009031642A JP 2009031642 A JP2009031642 A JP 2009031642A JP 2007197393 A JP2007197393 A JP 2007197393A JP 2007197393 A JP2007197393 A JP 2007197393A JP 2009031642 A JP2009031642 A JP 2009031642A
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JP
Japan
Prior art keywords
orientation
torsion spring
torsion
movable portion
optical deflector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2007197393A
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English (en)
Japanese (ja)
Other versions
JP2009031642A5 (enExample
Inventor
Kazutoshi Torashima
和敏 虎島
Takahisa Kato
貴久 加藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2007197393A priority Critical patent/JP2009031642A/ja
Priority to EP08160494A priority patent/EP2028523B1/en
Priority to AT08160494T priority patent/ATE467855T1/de
Priority to DE602008001221T priority patent/DE602008001221D1/de
Priority to US12/174,880 priority patent/US20090034038A1/en
Priority to KR1020080072060A priority patent/KR100939499B1/ko
Priority to CN200810131184XA priority patent/CN101359092B/zh
Publication of JP2009031642A publication Critical patent/JP2009031642A/ja
Publication of JP2009031642A5 publication Critical patent/JP2009031642A5/ja
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Micromachines (AREA)
  • Facsimile Scanning Arrangements (AREA)
  • Laser Beam Printer (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
JP2007197393A 2007-07-30 2007-07-30 揺動体装置、光偏向器およびそれを用いた画像形成装置 Withdrawn JP2009031642A (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2007197393A JP2009031642A (ja) 2007-07-30 2007-07-30 揺動体装置、光偏向器およびそれを用いた画像形成装置
EP08160494A EP2028523B1 (en) 2007-07-30 2008-07-16 Oscillating device, light deflector, and image forming apparatus using the light deflector
AT08160494T ATE467855T1 (de) 2007-07-30 2008-07-16 Oszillierende vorrichtung, lichtdeflektor und bilderzeugungsvorrichtung, die diesen verwendet
DE602008001221T DE602008001221D1 (de) 2007-07-30 2008-07-16 Oszillierende Vorrichtung, Lichtdeflektor und Bilderzeugungsvorrichtung, die diesen verwendet
US12/174,880 US20090034038A1 (en) 2007-07-30 2008-07-17 Oscillating device, light deflector, and image forming apparatus using the light deflector
KR1020080072060A KR100939499B1 (ko) 2007-07-30 2008-07-24 요동체 장치, 광 편향기, 및 광 편향기를 이용한화상형성장치
CN200810131184XA CN101359092B (zh) 2007-07-30 2008-07-30 振荡器件、光偏转器以及使用光偏转器的成像装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007197393A JP2009031642A (ja) 2007-07-30 2007-07-30 揺動体装置、光偏向器およびそれを用いた画像形成装置

Publications (2)

Publication Number Publication Date
JP2009031642A true JP2009031642A (ja) 2009-02-12
JP2009031642A5 JP2009031642A5 (enExample) 2010-09-09

Family

ID=39870688

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007197393A Withdrawn JP2009031642A (ja) 2007-07-30 2007-07-30 揺動体装置、光偏向器およびそれを用いた画像形成装置

Country Status (7)

Country Link
US (1) US20090034038A1 (enExample)
EP (1) EP2028523B1 (enExample)
JP (1) JP2009031642A (enExample)
KR (1) KR100939499B1 (enExample)
CN (1) CN101359092B (enExample)
AT (1) ATE467855T1 (enExample)
DE (1) DE602008001221D1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8681410B2 (en) 2009-07-23 2014-03-25 Brother Kogyo Kabushiki Kaisha Optical scanner, image forming apparatus and image display apparatus

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009031643A (ja) * 2007-07-30 2009-02-12 Canon Inc 揺動体装置、光偏向器およびそれを用いた画像形成装置
US8217630B2 (en) * 2009-11-18 2012-07-10 Hamilton Sundstrand Corporation Electric load damper for damping torsional oscillation
EP3640704B1 (en) * 2017-06-13 2023-08-09 Mitsubishi Electric Corporation Optical scanning device and method for adjusting optical scanning device
JP7169745B2 (ja) 2018-01-19 2022-11-11 キヤノン株式会社 半導体装置および光学式エンコーダ

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4317611A (en) 1980-05-19 1982-03-02 International Business Machines Corporation Optical ray deflection apparatus
US5740150A (en) * 1995-11-24 1998-04-14 Kabushiki Kaisha Toshiba Galvanomirror and optical disk drive using the same
WO1997021977A1 (en) 1995-12-11 1997-06-19 Adagio Associates, Inc. Integrated silicon profilometer and afm head
US6639713B2 (en) 2000-04-25 2003-10-28 Umachines, Inc. Silicon micromachined optical device
JP2003019700A (ja) * 2001-07-06 2003-01-21 Canon Inc マイクロ構造体、およびその作製方法
JP3740444B2 (ja) * 2001-07-11 2006-02-01 キヤノン株式会社 光偏向器、それを用いた光学機器、ねじれ揺動体
JP4574396B2 (ja) * 2005-03-02 2010-11-04 キヤノン株式会社 光偏向器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8681410B2 (en) 2009-07-23 2014-03-25 Brother Kogyo Kabushiki Kaisha Optical scanner, image forming apparatus and image display apparatus

Also Published As

Publication number Publication date
KR20090013050A (ko) 2009-02-04
US20090034038A1 (en) 2009-02-05
EP2028523A1 (en) 2009-02-25
CN101359092A (zh) 2009-02-04
CN101359092B (zh) 2010-07-21
EP2028523B1 (en) 2010-05-12
ATE467855T1 (de) 2010-05-15
KR100939499B1 (ko) 2010-01-29
DE602008001221D1 (de) 2010-06-24

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