ATE467855T1 - Oszillierende vorrichtung, lichtdeflektor und bilderzeugungsvorrichtung, die diesen verwendet - Google Patents

Oszillierende vorrichtung, lichtdeflektor und bilderzeugungsvorrichtung, die diesen verwendet

Info

Publication number
ATE467855T1
ATE467855T1 AT08160494T AT08160494T ATE467855T1 AT E467855 T1 ATE467855 T1 AT E467855T1 AT 08160494 T AT08160494 T AT 08160494T AT 08160494 T AT08160494 T AT 08160494T AT E467855 T1 ATE467855 T1 AT E467855T1
Authority
AT
Austria
Prior art keywords
movable portion
same
light deflector
oscillating device
image producing
Prior art date
Application number
AT08160494T
Other languages
English (en)
Inventor
Torashima Kazutoshi
Kato Takahisa
Original Assignee
Canon Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Kk filed Critical Canon Kk
Application granted granted Critical
Publication of ATE467855T1 publication Critical patent/ATE467855T1/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Micromachines (AREA)
  • Facsimile Scanning Arrangements (AREA)
  • Laser Beam Printer (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
AT08160494T 2007-07-30 2008-07-16 Oszillierende vorrichtung, lichtdeflektor und bilderzeugungsvorrichtung, die diesen verwendet ATE467855T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007197393A JP2009031642A (ja) 2007-07-30 2007-07-30 揺動体装置、光偏向器およびそれを用いた画像形成装置

Publications (1)

Publication Number Publication Date
ATE467855T1 true ATE467855T1 (de) 2010-05-15

Family

ID=39870688

Family Applications (1)

Application Number Title Priority Date Filing Date
AT08160494T ATE467855T1 (de) 2007-07-30 2008-07-16 Oszillierende vorrichtung, lichtdeflektor und bilderzeugungsvorrichtung, die diesen verwendet

Country Status (7)

Country Link
US (1) US20090034038A1 (de)
EP (1) EP2028523B1 (de)
JP (1) JP2009031642A (de)
KR (1) KR100939499B1 (de)
CN (1) CN101359092B (de)
AT (1) ATE467855T1 (de)
DE (1) DE602008001221D1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009031643A (ja) * 2007-07-30 2009-02-12 Canon Inc 揺動体装置、光偏向器およびそれを用いた画像形成装置
JP5267370B2 (ja) 2009-07-23 2013-08-21 ブラザー工業株式会社 光スキャナ
US8217630B2 (en) * 2009-11-18 2012-07-10 Hamilton Sundstrand Corporation Electric load damper for damping torsional oscillation
EP3640704B1 (de) * 2017-06-13 2023-08-09 Mitsubishi Electric Corporation Vorrichtung zur optischen abtastung und verfahren zur anpassung einer vorrichtung zur optischen abtastung
JP7169745B2 (ja) 2018-01-19 2022-11-11 キヤノン株式会社 半導体装置および光学式エンコーダ

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4317611A (en) 1980-05-19 1982-03-02 International Business Machines Corporation Optical ray deflection apparatus
US5740150A (en) * 1995-11-24 1998-04-14 Kabushiki Kaisha Toshiba Galvanomirror and optical disk drive using the same
WO1997021977A1 (en) 1995-12-11 1997-06-19 Adagio Associates, Inc. Integrated silicon profilometer and afm head
US6639713B2 (en) 2000-04-25 2003-10-28 Umachines, Inc. Silicon micromachined optical device
JP2003019700A (ja) * 2001-07-06 2003-01-21 Canon Inc マイクロ構造体、およびその作製方法
JP3740444B2 (ja) * 2001-07-11 2006-02-01 キヤノン株式会社 光偏向器、それを用いた光学機器、ねじれ揺動体
JP4574396B2 (ja) * 2005-03-02 2010-11-04 キヤノン株式会社 光偏向器

Also Published As

Publication number Publication date
CN101359092A (zh) 2009-02-04
EP2028523B1 (de) 2010-05-12
CN101359092B (zh) 2010-07-21
KR100939499B1 (ko) 2010-01-29
KR20090013050A (ko) 2009-02-04
EP2028523A1 (de) 2009-02-25
JP2009031642A (ja) 2009-02-12
DE602008001221D1 (de) 2010-06-24
US20090034038A1 (en) 2009-02-05

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Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties