CN101359092B - 振荡器件、光偏转器以及使用光偏转器的成像装置 - Google Patents
振荡器件、光偏转器以及使用光偏转器的成像装置 Download PDFInfo
- Publication number
- CN101359092B CN101359092B CN200810131184XA CN200810131184A CN101359092B CN 101359092 B CN101359092 B CN 101359092B CN 200810131184X A CN200810131184X A CN 200810131184XA CN 200810131184 A CN200810131184 A CN 200810131184A CN 101359092 B CN101359092 B CN 101359092B
- Authority
- CN
- China
- Prior art keywords
- moving part
- torsion spring
- orientation
- light deflector
- axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000013078 crystal Substances 0.000 claims abstract description 72
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims abstract description 14
- 108091008695 photoreceptors Proteins 0.000 claims description 10
- 238000003384 imaging method Methods 0.000 claims description 9
- 239000000758 substrate Substances 0.000 description 44
- 238000000034 method Methods 0.000 description 18
- 230000003287 optical effect Effects 0.000 description 15
- 230000010355 oscillation Effects 0.000 description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 11
- 229910052710 silicon Inorganic materials 0.000 description 11
- 239000010703 silicon Substances 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 10
- 238000005516 engineering process Methods 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 5
- 238000006073 displacement reaction Methods 0.000 description 4
- 238000001312 dry etching Methods 0.000 description 4
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- 238000000059 patterning Methods 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 102220298895 rs1025502215 Human genes 0.000 description 1
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- 102220097500 rs876658362 Human genes 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000010356 wave oscillation Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
- G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/042—Micromirrors, not used as optical switches
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- Mechanical Optical Scanning Systems (AREA)
- Micromachines (AREA)
- Facsimile Scanning Arrangements (AREA)
- Laser Beam Printer (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007197393 | 2007-07-30 | ||
| JP2007-197393 | 2007-07-30 | ||
| JP2007197393A JP2009031642A (ja) | 2007-07-30 | 2007-07-30 | 揺動体装置、光偏向器およびそれを用いた画像形成装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101359092A CN101359092A (zh) | 2009-02-04 |
| CN101359092B true CN101359092B (zh) | 2010-07-21 |
Family
ID=39870688
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200810131184XA Expired - Fee Related CN101359092B (zh) | 2007-07-30 | 2008-07-30 | 振荡器件、光偏转器以及使用光偏转器的成像装置 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20090034038A1 (enExample) |
| EP (1) | EP2028523B1 (enExample) |
| JP (1) | JP2009031642A (enExample) |
| KR (1) | KR100939499B1 (enExample) |
| CN (1) | CN101359092B (enExample) |
| AT (1) | ATE467855T1 (enExample) |
| DE (1) | DE602008001221D1 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009031643A (ja) * | 2007-07-30 | 2009-02-12 | Canon Inc | 揺動体装置、光偏向器およびそれを用いた画像形成装置 |
| JP5267370B2 (ja) | 2009-07-23 | 2013-08-21 | ブラザー工業株式会社 | 光スキャナ |
| US8217630B2 (en) * | 2009-11-18 | 2012-07-10 | Hamilton Sundstrand Corporation | Electric load damper for damping torsional oscillation |
| EP3640704B1 (en) * | 2017-06-13 | 2023-08-09 | Mitsubishi Electric Corporation | Optical scanning device and method for adjusting optical scanning device |
| JP7169745B2 (ja) | 2018-01-19 | 2022-11-11 | キヤノン株式会社 | 半導体装置および光学式エンコーダ |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4317611A (en) | 1980-05-19 | 1982-03-02 | International Business Machines Corporation | Optical ray deflection apparatus |
| US5740150A (en) * | 1995-11-24 | 1998-04-14 | Kabushiki Kaisha Toshiba | Galvanomirror and optical disk drive using the same |
| WO1997021977A1 (en) | 1995-12-11 | 1997-06-19 | Adagio Associates, Inc. | Integrated silicon profilometer and afm head |
| US6639713B2 (en) | 2000-04-25 | 2003-10-28 | Umachines, Inc. | Silicon micromachined optical device |
| JP2003019700A (ja) * | 2001-07-06 | 2003-01-21 | Canon Inc | マイクロ構造体、およびその作製方法 |
| JP3740444B2 (ja) * | 2001-07-11 | 2006-02-01 | キヤノン株式会社 | 光偏向器、それを用いた光学機器、ねじれ揺動体 |
| JP4574396B2 (ja) * | 2005-03-02 | 2010-11-04 | キヤノン株式会社 | 光偏向器 |
-
2007
- 2007-07-30 JP JP2007197393A patent/JP2009031642A/ja not_active Withdrawn
-
2008
- 2008-07-16 DE DE602008001221T patent/DE602008001221D1/de active Active
- 2008-07-16 AT AT08160494T patent/ATE467855T1/de not_active IP Right Cessation
- 2008-07-16 EP EP08160494A patent/EP2028523B1/en not_active Not-in-force
- 2008-07-17 US US12/174,880 patent/US20090034038A1/en not_active Abandoned
- 2008-07-24 KR KR1020080072060A patent/KR100939499B1/ko not_active Expired - Fee Related
- 2008-07-30 CN CN200810131184XA patent/CN101359092B/zh not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN101359092A (zh) | 2009-02-04 |
| ATE467855T1 (de) | 2010-05-15 |
| EP2028523B1 (en) | 2010-05-12 |
| KR100939499B1 (ko) | 2010-01-29 |
| KR20090013050A (ko) | 2009-02-04 |
| EP2028523A1 (en) | 2009-02-25 |
| JP2009031642A (ja) | 2009-02-12 |
| DE602008001221D1 (de) | 2010-06-24 |
| US20090034038A1 (en) | 2009-02-05 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20100721 Termination date: 20170730 |
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| CF01 | Termination of patent right due to non-payment of annual fee |