KR100919964B1 - 투명 기판 상의 컬러 이미지 센서 및 그 제조 방법 - Google Patents

투명 기판 상의 컬러 이미지 센서 및 그 제조 방법

Info

Publication number
KR100919964B1
KR100919964B1 KR1020047001560A KR20047001560A KR100919964B1 KR 100919964 B1 KR100919964 B1 KR 100919964B1 KR 1020047001560 A KR1020047001560 A KR 1020047001560A KR 20047001560 A KR20047001560 A KR 20047001560A KR 100919964 B1 KR100919964 B1 KR 100919964B1
Authority
KR
South Korea
Prior art keywords
wafer
substrate
layer
temporary support
support substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020047001560A
Other languages
English (en)
Korean (ko)
Other versions
KR20040047783A (ko
Inventor
루이 프리쏘
에릭 뿌르뀌에
Original Assignee
아트멜 그르노블 에스아
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 아트멜 그르노블 에스아 filed Critical 아트멜 그르노블 에스아
Publication of KR20040047783A publication Critical patent/KR20040047783A/ko
Application granted granted Critical
Publication of KR100919964B1 publication Critical patent/KR100919964B1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H10F71/139—Manufacture or treatment of devices covered by this subclass using temporary substrates
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • H10F39/182—Colour image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/199—Back-illuminated image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/30—Coatings
    • H10F77/306—Coatings for devices having potential barriers
    • H10F77/331—Coatings for devices having potential barriers for filtering or shielding light, e.g. multicolour filters for photodetectors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
KR1020047001560A 2001-08-31 2002-08-30 투명 기판 상의 컬러 이미지 센서 및 그 제조 방법 Expired - Fee Related KR100919964B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0111335A FR2829290B1 (fr) 2001-08-31 2001-08-31 Capteur d'image couleur sur substrat transparent et procede de fabrication
FR01/11335 2001-08-31
PCT/FR2002/002977 WO2003019667A1 (fr) 2001-08-31 2002-08-30 Capteur d'image couleur sur substrat transparent et procede de fabrication

Publications (2)

Publication Number Publication Date
KR20040047783A KR20040047783A (ko) 2004-06-05
KR100919964B1 true KR100919964B1 (ko) 2009-10-01

Family

ID=8866878

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020047001560A Expired - Fee Related KR100919964B1 (ko) 2001-08-31 2002-08-30 투명 기판 상의 컬러 이미지 센서 및 그 제조 방법

Country Status (10)

Country Link
US (1) US6933585B2 (enExample)
EP (1) EP1421622B1 (enExample)
JP (1) JP4147187B2 (enExample)
KR (1) KR100919964B1 (enExample)
CN (1) CN100487899C (enExample)
CA (1) CA2457899C (enExample)
DE (1) DE60223263T2 (enExample)
FR (1) FR2829290B1 (enExample)
IL (2) IL160113A0 (enExample)
WO (1) WO2003019667A1 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2863773B1 (fr) * 2003-12-12 2006-05-19 Atmel Grenoble Sa Procede de fabrication de puces electroniques en silicium aminci
JP4486043B2 (ja) * 2004-12-30 2010-06-23 東部エレクトロニクス株式会社 Ｃｍｏｓイメージセンサー及びその製造方法
KR100741920B1 (ko) * 2004-12-30 2007-07-24 동부일렉트로닉스 주식회사 씨모스(ｃｍｏｓ) 이미지 센서의 제조 방법
US8409970B2 (en) * 2005-10-29 2013-04-02 Stats Chippac, Ltd. Semiconductor device and method of making integrated passive devices
US8158510B2 (en) 2009-11-19 2012-04-17 Stats Chippac, Ltd. Semiconductor device and method of forming IPD on molded substrate
US8791006B2 (en) 2005-10-29 2014-07-29 Stats Chippac, Ltd. Semiconductor device and method of forming an inductor on polymer matrix composite substrate
DE102006014247B4 (de) * 2006-03-28 2019-10-24 Robert Bosch Gmbh Bildaufnahmesystem und Verfahren zu dessen Herstellung
US20090174018A1 (en) * 2008-01-09 2009-07-09 Micron Technology, Inc. Construction methods for backside illuminated image sensors
JP5347520B2 (ja) 2009-01-20 2013-11-20 ソニー株式会社 固体撮像装置の製造方法
US8310021B2 (en) * 2010-07-13 2012-11-13 Honeywell International Inc. Neutron detector with wafer-to-wafer bonding
KR20180114927A (ko) * 2016-02-16 2018-10-19 쥐-레이 스위츨란드 에스에이 접합된 경계면들에 걸친 전하 운반을 위한 구조물, 시스템 및 방법

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0945886A (ja) * 1995-08-01 1997-02-14 Sharp Corp 増幅型半導体撮像装置
US6257491B1 (en) * 1993-10-25 2001-07-10 Symbol Technologies, Inc. Packaged mirror including mirror travel stops

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4758734A (en) * 1984-03-13 1988-07-19 Nec Corporation High resolution image sensor array using amorphous photo-diodes
US4976802A (en) * 1989-10-16 1990-12-11 Xerox Corporation Process for assembling smaller scanning or printing arrays together to form a longer array
JPH05183141A (ja) * 1991-07-12 1993-07-23 Fuji Xerox Co Ltd カラーイメージセンサ
US5244817A (en) * 1992-08-03 1993-09-14 Eastman Kodak Company Method of making backside illuminated image sensors
US6204087B1 (en) * 1997-02-07 2001-03-20 University Of Hawai'i Fabrication of three-dimensional architecture for solid state radiation detectors

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6257491B1 (en) * 1993-10-25 2001-07-10 Symbol Technologies, Inc. Packaged mirror including mirror travel stops
JPH0945886A (ja) * 1995-08-01 1997-02-14 Sharp Corp 増幅型半導体撮像装置

Also Published As

Publication number Publication date
US20040188792A1 (en) 2004-09-30
CA2457899C (fr) 2012-07-03
DE60223263T2 (de) 2008-08-14
EP1421622B1 (fr) 2007-10-31
FR2829290B1 (fr) 2004-09-17
DE60223263D1 (de) 2007-12-13
CA2457899A1 (fr) 2003-03-06
IL160113A0 (en) 2004-06-20
WO2003019667A1 (fr) 2003-03-06
FR2829290A1 (fr) 2003-03-07
IL160113A (en) 2009-07-20
CN100487899C (zh) 2009-05-13
JP4147187B2 (ja) 2008-09-10
CN1550041A (zh) 2004-11-24
US6933585B2 (en) 2005-08-23
JP2005501420A (ja) 2005-01-13
KR20040047783A (ko) 2004-06-05
EP1421622A1 (fr) 2004-05-26

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