KR100915547B1 - 진공조절 압력용 밸브 - Google Patents

진공조절 압력용 밸브

Info

Publication number
KR100915547B1
KR100915547B1 KR1020050024759A KR20050024759A KR100915547B1 KR 100915547 B1 KR100915547 B1 KR 100915547B1 KR 1020050024759 A KR1020050024759 A KR 1020050024759A KR 20050024759 A KR20050024759 A KR 20050024759A KR 100915547 B1 KR100915547 B1 KR 100915547B1
Authority
KR
South Korea
Prior art keywords
valve
pressure
electric motor
driving
valve member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
KR1020050024759A
Other languages
English (en)
Korean (ko)
Other versions
KR20060044720A (ko
Inventor
마사오 가지타니
가즈오 히라마쓰
Original Assignee
에스엠시 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 에스엠시 가부시키가이샤 filed Critical 에스엠시 가부시키가이샤
Publication of KR20060044720A publication Critical patent/KR20060044720A/ko
Application granted granted Critical
Publication of KR100915547B1 publication Critical patent/KR100915547B1/ko
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/20—Control of fluid pressure characterised by the use of electric means
    • G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
    • G05D16/2013—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means
    • G05D16/202—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means actuated by an electric motor
    • E—FIXED CONSTRUCTIONS
    • E01—CONSTRUCTION OF ROADS, RAILWAYS, OR BRIDGES
    • E01D—CONSTRUCTION OF BRIDGES, ELEVATED ROADWAYS OR VIADUCTS; ASSEMBLY OF BRIDGES
    • E01D15/00—Movable or portable bridges; Floating bridges
    • E01D15/12—Portable or sectional bridges
    • E01D15/133—Portable or sectional bridges built-up from readily separable standardised sections or elements, e.g. Bailey bridges
    • E—FIXED CONSTRUCTIONS
    • E01—CONSTRUCTION OF ROADS, RAILWAYS, OR BRIDGES
    • E01D—CONSTRUCTION OF BRIDGES, ELEVATED ROADWAYS OR VIADUCTS; ASSEMBLY OF BRIDGES
    • E01D19/00—Structural or constructional details of bridges
    • E01D19/005—Piers, trestles, bearings, expansion joints or parapets specially adapted for portable or sectional bridges
    • E—FIXED CONSTRUCTIONS
    • E01—CONSTRUCTION OF ROADS, RAILWAYS, OR BRIDGES
    • E01D—CONSTRUCTION OF BRIDGES, ELEVATED ROADWAYS OR VIADUCTS; ASSEMBLY OF BRIDGES
    • E01D2101/00—Material constitution of bridges
    • E01D2101/30—Metal
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8158—With indicator, register, recorder, alarm or inspection means
    • Y10T137/8225—Position or extent of motion indicator
    • Y10T137/8242—Electrical

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Architecture (AREA)
  • Civil Engineering (AREA)
  • Structural Engineering (AREA)
  • Fluid-Driven Valves (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Details Of Valves (AREA)
  • Control Of Fluid Pressure (AREA)
KR1020050024759A 2004-08-02 2005-03-25 진공조절 압력용 밸브 Expired - Lifetime KR100915547B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2004-00225887 2004-08-02
JP2004225887A JP4196293B2 (ja) 2004-08-02 2004-08-02 真空調圧用バルブ

Publications (2)

Publication Number Publication Date
KR20060044720A KR20060044720A (ko) 2006-05-16
KR100915547B1 true KR100915547B1 (ko) 2009-09-03

Family

ID=35730780

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020050024759A Expired - Lifetime KR100915547B1 (ko) 2004-08-02 2005-03-25 진공조절 압력용 밸브

Country Status (4)

Country Link
US (1) US7117886B2 (enExample)
JP (1) JP4196293B2 (enExample)
KR (1) KR100915547B1 (enExample)
CN (1) CN100535488C (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101035101B1 (ko) * 2011-03-31 2011-05-19 한국뉴매틱(주) 이단 에어콘트롤 밸브
KR101183169B1 (ko) 2011-09-20 2012-09-14 (주)한창산업 가스파이프라인의 씰 포트

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US7591000B2 (en) * 2003-02-14 2009-09-15 Oracle International Corporation System and method for hierarchical role-based entitlements
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JP2006010037A (ja) * 2004-06-29 2006-01-12 Smc Corp サックバックバルブ
JP2006292137A (ja) * 2005-04-14 2006-10-26 Ckd Corp 流量制御弁
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US8387657B2 (en) * 2007-06-15 2013-03-05 Fisher Controls International, Llc Methods and apparatus to determine a position of a valve
DE102007034926A1 (de) * 2007-07-24 2009-02-05 Vat Holding Ag Verfahren zur Steuerung oder Regelung eines Vakuumventils
DE102007050086A1 (de) * 2007-10-19 2009-04-23 Alfa Laval Kolding A/S Verfahren zum Betrieb eines Ventils
KR101168505B1 (ko) * 2008-05-29 2012-07-30 아이신에이더블류 가부시키가이샤 전자기 밸브 장치
DE102008050269A1 (de) * 2008-10-07 2010-04-08 DüRR DENTAL AG Strahlgerät
JP5243201B2 (ja) * 2008-11-21 2013-07-24 Ｃｋｄ株式会社 真空弁
JP5093090B2 (ja) * 2008-12-25 2012-12-05 アイシン・エィ・ダブリュ株式会社 電磁弁装置および動力伝達装置
JP4672076B2 (ja) * 2009-09-24 2011-04-20 藤倉ゴム工業株式会社 緩作動開閉弁
EP2317310B1 (en) * 2009-10-28 2017-04-26 Jasco Corporation Pressure control apparatus for supercritical fluid
JP4815538B2 (ja) * 2010-01-15 2011-11-16 シーケーディ株式会社 真空制御システムおよび真空制御方法
JP5612906B2 (ja) * 2010-05-28 2014-10-22 サーパス工業株式会社 流量調整弁
KR101008763B1 (ko) 2010-10-07 2011-01-14 김기덕 밸브 제어 장치
CN102537486B (zh) * 2012-01-13 2013-10-02 杭州博流科技有限公司 一种智能阀门定位器
JP5397525B1 (ja) * 2012-11-13 2014-01-22 Ｓｍｃ株式会社 真空調圧システム
JP2014229370A (ja) * 2013-05-20 2014-12-08 大日本スクリーン製造株式会社 複合膜の製造装置および製造方法
CN103321876B (zh) * 2013-07-09 2015-11-25 上海磊航机械制造有限公司 电磁双先导真空压差阀
US9194509B2 (en) * 2013-09-17 2015-11-24 Ge Oil & Gas Pressure Control Lp Power boost assist closed device for actuators
CN103699137B (zh) * 2013-12-17 2016-05-04 重庆川仪自动化股份有限公司 具有密封垫片的智能定位器
US9550635B2 (en) 2014-02-20 2017-01-24 Stephen B. Maguire Air flow limiter with closed/open sensing
US9550636B2 (en) * 2014-02-20 2017-01-24 Stephen B. Maguire Method and apparatus for resin delivery with adjustable air flow limiter
US9937651B2 (en) 2014-02-20 2018-04-10 Novatec, Inc. Resin delivery apparatus and method with plural air flow limiters
US10414083B2 (en) 2014-02-20 2019-09-17 Novatec, Inc. Multiple sensor resin delivery optimizing vacuum pump operation
US10175701B2 (en) 2014-02-20 2019-01-08 Stephen B. Maguire Air flow regulator with detector and method for regulating air flow
US10144598B2 (en) 2014-02-20 2018-12-04 Novatec, Inc. Variable frequency drive combined with flow limiter set for limiting flow to selected level above design choice
US9604793B2 (en) 2014-02-20 2017-03-28 Maguire Products, Inc. Resin delivery system with air flow regulator
US10179708B2 (en) 2014-02-20 2019-01-15 Maguire Products, Inc. Granular material delivery system with air flow limiter
US10280015B2 (en) 2014-02-20 2019-05-07 Stephen B. Maguire Method for adjustably restricting air flow and apparatus therefor
CN104084924B (zh) * 2014-06-27 2015-11-11 广汽菲亚特克莱斯勒汽车有限公司 一种隔热罩倒刺垫片安装器
GB2528891A (en) * 2014-08-01 2016-02-10 Chargepoint Technology Ltd Operator feedback of valves
CN105443778B (zh) * 2014-09-28 2018-01-02 新莱应材科技有限公司 两段式角阀
US10131506B2 (en) 2014-12-09 2018-11-20 Maguire Products, Inc. Selective matrix conveyance apparatus and methods for granular resin material
CN107208642B (zh) * 2015-01-15 2019-12-31 阿特拉斯·科普柯空气动力股份有限公司 入口阀和具有这种入口阀的真空泵
US10179696B2 (en) 2015-01-27 2019-01-15 Novatec, Inc. Variable opening slide gate for regulating material flow into airstream
US10138076B2 (en) 2015-02-25 2018-11-27 Stephen B. Maguire Method for resin delivery including metering introduction of external air to maintain desired vacuum level
CN105068446B (zh) * 2015-07-31 2019-01-18 通辽发电总厂 一种气压调节对象及热工气压自动控制系统
CN105223976A (zh) * 2015-10-30 2016-01-06 南通市飞宇石油科技开发有限公司 一种压力调节控制系统
GB2549468B (en) * 2016-04-14 2020-11-11 Edwards Ltd Protection valve
KR102624709B1 (ko) * 2016-07-27 2024-01-12 주식회사 선익시스템 유체밸브 및 이를 구비하는 진공챔버
CN106402444B (zh) * 2016-10-18 2019-01-11 中国核动力研究设计院 一种先导式安全阀系统
CN106402073B (zh) * 2016-10-18 2018-02-06 中国核动力研究设计院 一种由波纹管感压和驱动并具有流量放大作用的先导阀
CN106681384B (zh) * 2016-12-23 2019-12-20 北京航空航天大学 一种真空容器低气压智能调节控制装置
CN106681385B (zh) * 2016-12-23 2019-10-29 北京航空航天大学 一种plc真空容器低气压自动调节控制装置
JP6996289B2 (ja) * 2016-12-26 2022-01-17 株式会社島津製作所 バルブ装置
CN106958686B (zh) * 2017-05-16 2023-04-07 眉山中车制动科技股份有限公司 一种气控排气阀
EP3421850A1 (de) * 2017-06-30 2019-01-02 VAT Holding AG Vakuumventil mit positionssensor
CN108049979B (zh) * 2017-11-17 2019-09-03 广州柴油机厂股份有限公司 一种可无级调压空气压力的柴油机机旁操纵定值器
KR20250021391A (ko) 2017-12-21 2025-02-12 스웨이지락 캄파니 작동 밸브의 제어 및 모니터링을 위한 시스템 및 방법
CN109357026A (zh) * 2018-12-05 2019-02-19 燕山大学 先导式小锥度阀芯调压阀
CN111347145B (zh) * 2018-12-20 2025-09-05 中核建中核燃料元件有限公司 一种电子束波纹管
JP7155999B2 (ja) * 2018-12-20 2022-10-19 株式会社島津製作所 真空バルブおよびバルブ制御装置
JP6861756B2 (ja) * 2019-04-26 2021-04-21 株式会社アルバック 油圧駆動システム、仕切りバルブ
CN111895165B (zh) * 2019-05-05 2024-07-19 得立鼎工业株式会社 阀装置
CN109990127A (zh) * 2019-05-13 2019-07-09 西安航天基地思普动力科技有限公司 一种执行器驱动的活塞式电子调压阀及其调压方法
JP7164491B2 (ja) * 2019-06-12 2022-11-01 住友重機械工業株式会社 真空バルブ及び真空バルブに用いられるアクチュエータ
KR20220125866A (ko) 2021-03-04 2022-09-15 삼성전자주식회사 진공 밸브 및 이를 구비한 반도체 제조 장치
KR102687881B1 (ko) * 2022-07-28 2024-07-25 고병혁 센서 일체형 압력 제어용 진공 밸브 및 이를 구비하는 진공 시스템
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WO2024156282A1 (zh) * 2023-01-28 2024-08-02 中国核电工程有限公司 用于核电厂安全的阀组、卸压阀组及排放的阀组、隔离阀
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JPH11153235A (ja) * 1997-09-22 1999-06-08 Smc Corp スムースベントバルブ
KR20020020256A (ko) * 2000-09-07 2002-03-14 다까다 요시유끼 평활배기밸브
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101035101B1 (ko) * 2011-03-31 2011-05-19 한국뉴매틱(주) 이단 에어콘트롤 밸브
KR101183169B1 (ko) 2011-09-20 2012-09-14 (주)한창산업 가스파이프라인의 씰 포트

Also Published As

Publication number Publication date
US20060021656A1 (en) 2006-02-02
CN1734144A (zh) 2006-02-15
JP2006046415A (ja) 2006-02-16
JP4196293B2 (ja) 2008-12-17
CN100535488C (zh) 2009-09-02
KR20060044720A (ko) 2006-05-16
US7117886B2 (en) 2006-10-10

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