JPS6435188A - Vacuum valve - Google Patents

Vacuum valve

Info

Publication number
JPS6435188A
JPS6435188A JP19040887A JP19040887A JPS6435188A JP S6435188 A JPS6435188 A JP S6435188A JP 19040887 A JP19040887 A JP 19040887A JP 19040887 A JP19040887 A JP 19040887A JP S6435188 A JPS6435188 A JP S6435188A
Authority
JP
Japan
Prior art keywords
valve
piston
feed screw
opening
closing direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19040887A
Other languages
Japanese (ja)
Inventor
Satoru Sugita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP19040887A priority Critical patent/JPS6435188A/en
Publication of JPS6435188A publication Critical patent/JPS6435188A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To sufficiently ensure operational stability and safety by adding a mechanism having a stepless valve opening adjustment function and an emergency cut-off function to a drive system for opening and closing a valve. CONSTITUTION:When gas is fed into a vacuum container so as to control the internal pressure thereof, a valve 201a is moved in the direction as indicated by the arrow. At this time, air pressures 203a, 204a are distributed so that a piston 207a is always urged in the valve closing direction. The movement of the piston 207a in the valve closing direction is inhibited by a feed screw 206a. When the feed screw 206a is rotated by a motor 205a, the valve is pushed out in the valve opening direction. When the operation of the device system becomes difficult due to occurrence of an abnormality, air pressure is at once led into the chamber 204a to close the valve.
JP19040887A 1987-07-31 1987-07-31 Vacuum valve Pending JPS6435188A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19040887A JPS6435188A (en) 1987-07-31 1987-07-31 Vacuum valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19040887A JPS6435188A (en) 1987-07-31 1987-07-31 Vacuum valve

Publications (1)

Publication Number Publication Date
JPS6435188A true JPS6435188A (en) 1989-02-06

Family

ID=16257647

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19040887A Pending JPS6435188A (en) 1987-07-31 1987-07-31 Vacuum valve

Country Status (1)

Country Link
JP (1) JPS6435188A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5560586A (en) * 1994-05-25 1996-10-01 Anelva Corporation Main valve
JP2002054751A (en) * 2000-08-07 2002-02-20 Akatake Engineering Kk Damper device for powder storage tank
JP2005325928A (en) * 2004-05-14 2005-11-24 Smc Corp Exhaust valve
JP2006046415A (en) * 2004-08-02 2006-02-16 Smc Corp Vacuum pressure regulating valve
WO2007072602A1 (en) * 2005-12-21 2007-06-28 Kabushiki Kaisha Fujikin Water hammer-less valve
JP2011133005A (en) * 2009-12-24 2011-07-07 Murata Mfg Co Ltd Opening and closing valve
JP2013228109A (en) * 2013-07-31 2013-11-07 Murata Mfg Co Ltd Opening/closing valve
KR101422201B1 (en) * 2012-11-23 2014-07-24 주식회사 태한이엔씨 Gate valve device

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5560586A (en) * 1994-05-25 1996-10-01 Anelva Corporation Main valve
JP2002054751A (en) * 2000-08-07 2002-02-20 Akatake Engineering Kk Damper device for powder storage tank
JP2005325928A (en) * 2004-05-14 2005-11-24 Smc Corp Exhaust valve
JP2006046415A (en) * 2004-08-02 2006-02-16 Smc Corp Vacuum pressure regulating valve
WO2007072602A1 (en) * 2005-12-21 2007-06-28 Kabushiki Kaisha Fujikin Water hammer-less valve
US8210493B2 (en) 2005-12-21 2012-07-03 Kabushiki Kaisha Fujikin Water hammerless valve
JP2011133005A (en) * 2009-12-24 2011-07-07 Murata Mfg Co Ltd Opening and closing valve
KR101422201B1 (en) * 2012-11-23 2014-07-24 주식회사 태한이엔씨 Gate valve device
JP2013228109A (en) * 2013-07-31 2013-11-07 Murata Mfg Co Ltd Opening/closing valve

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