JP4055002B2 - 真空調圧用バルブ - Google Patents
真空調圧用バルブ Download PDFInfo
- Publication number
- JP4055002B2 JP4055002B2 JP2003310607A JP2003310607A JP4055002B2 JP 4055002 B2 JP4055002 B2 JP 4055002B2 JP 2003310607 A JP2003310607 A JP 2003310607A JP 2003310607 A JP2003310607 A JP 2003310607A JP 4055002 B2 JP4055002 B2 JP 4055002B2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- shaft
- piston
- adjustment shaft
- adjustment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000006243 chemical reaction Methods 0.000 claims description 12
- 239000012530 fluid Substances 0.000 claims description 12
- 230000033001 locomotion Effects 0.000 claims description 8
- 238000006073 displacement reaction Methods 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 3
- 238000005192 partition Methods 0.000 description 9
- 230000001105 regulatory effect Effects 0.000 description 9
- 230000001276 controlling effect Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 230000029058 respiratory gaseous exchange Effects 0.000 description 2
- 238000012993 chemical processing Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K41/00—Spindle sealings
- F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
- F16K31/047—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor characterised by mechanical means between the motor and the valve, e.g. lost motion means reducing backlash, clutches, brakes or return means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Fluid-Driven Valves (AREA)
- Details Of Valves (AREA)
- Indication Of The Valve Opening Or Closing Status (AREA)
Description
ことを特徴とするものである。
3 弁開度調節部
5 真空チャンバ
6 真空ポンプ
10 バルブハウジング
11 第1メインポート
12 第2メインポート
13 流路
14 弁座
15 弁部材
20 弁シャフト
23 復帰ばね
32 ピストン
37 受圧室
38 パイロットポート
41 調節軸
41a 先端
42 駆動機構
45 モーター
45a 出力軸
46 変換機構
50 螺子棒
51 ナット部材
54 センサー
Claims (3)
- 真空チャンバ及び真空ポンプに接続するための第1メインポート及び第2メインポートと、これら両メインポートを結ぶ流路と、該流路中に上記第1メインポートの回りを取り囲むように設けられた弁座とを有するバルブハウジング、
上記バルブハウジング内に設けられている、上記弁座を開閉する弁部材と、この弁部材から上記バルブハウジングの軸線方向に延びて先端がシリンダ部に達する弁シャフトと、上記弁部材を弁座の閉鎖方向に向けて付勢する復帰ばね、
上記弁シャフトの先端に取り付けられたピストンと、このピストンに上記弁部材が開放する方向の流体圧を作用させる受圧室と、この受圧室にパイロット流体を供給するためのパイロットポートとを有する上記シリンダ部、
上記ピストンの背面に先端が当接する調節軸と、この調節軸を任意の位置まで無段階に前後進駆動可能な駆動機構とを有し、該駆動機構で上記調節軸を変位させてピストンの動作位置を規定することにより上記弁部材の開度を設定する弁開度調節部を有し、
上記駆動機構が、電動式のモーターと、このモーターの出力軸の正逆回転運動を往復直進運動に変換する変換機構とを有していて、この変換機構に上記調節軸が連結されており、
上記変換機構が、上記モーターの出力軸に連結されて回転する螺子棒と、この螺子棒に非回転の状態で該螺子棒の軸線方向には変位自在なるように螺着されたナット部材とからなっていて、このナット部材に円筒状をした上記調節軸の基端部が連結され、該調節軸の先端は自由端となって、上記ピストンに接離自在に当接している、
ことを特徴とする真空調圧用バルブ。 - 上記弁開度調節部が、上記調節軸の変位量を測定可能なセンサーを有し、このセンサーからの検出信号に基づいて上記駆動機構で調節軸を位置制御するように構成されていることを特徴とする請求項1に記載のバルブ。
- 上記バルブハウジングにおける第1メインポートとは反対側の端部に、上記シリンダ部と弁開度調節部とが直列に接続されていて、上記弁座と、弁部材及び弁シャフトと、ピストンと、調節軸とが、同一軸線上に位置していることを特徴とする請求項1又は2に記載のバルブ。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003310607A JP4055002B2 (ja) | 2003-09-02 | 2003-09-02 | 真空調圧用バルブ |
US10/890,466 US7070159B2 (en) | 2003-09-02 | 2004-07-12 | Vacuum regulating valve |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003310607A JP4055002B2 (ja) | 2003-09-02 | 2003-09-02 | 真空調圧用バルブ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005076829A JP2005076829A (ja) | 2005-03-24 |
JP4055002B2 true JP4055002B2 (ja) | 2008-03-05 |
Family
ID=34214228
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2003310607A Expired - Lifetime JP4055002B2 (ja) | 2003-09-02 | 2003-09-02 | 真空調圧用バルブ |
Country Status (2)
Country | Link |
---|---|
US (1) | US7070159B2 (ja) |
JP (1) | JP4055002B2 (ja) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006010037A (ja) * | 2004-06-29 | 2006-01-12 | Smc Corp | サックバックバルブ |
JP4196293B2 (ja) | 2004-08-02 | 2008-12-17 | Smc株式会社 | 真空調圧用バルブ |
JP4547674B2 (ja) * | 2005-11-24 | 2010-09-22 | Smc株式会社 | 真空調圧システム |
GB2469119B (en) * | 2009-04-03 | 2013-07-03 | Managed Pressure Operations | Drill pipe connector |
CN102444745B (zh) * | 2011-10-13 | 2013-05-22 | 中国船舶重工集团公司第七0五研究所 | 一种液路机械开关 |
US9151401B2 (en) * | 2011-12-29 | 2015-10-06 | Tescom Corporation | Fail-safe apparatus for use with fluid valves |
CN102720843B (zh) * | 2012-06-04 | 2013-07-10 | 西安交通大学 | 一种交流伺服电机直驱式大通径比例气动阀 |
US20140103240A1 (en) * | 2012-10-17 | 2014-04-17 | Swagelok Company | Actuator with dual drive |
WO2015022011A1 (de) * | 2013-08-12 | 2015-02-19 | Alfred Kärcher Gmbh & Co. Kg | Steuereinrichtung für eine flüssigkeitspumpenanordnung und flüssigkeitspumpenanordnung mit einer derartigen steuereinrichtung |
JP6609168B2 (ja) * | 2015-11-13 | 2019-11-20 | 株式会社Ihi | バルブアクチュエータ |
CN108194677A (zh) * | 2018-02-27 | 2018-06-22 | 苏州欧纳克纳米科技有限公司 | 一种真空压力控制阀 |
WO2020158573A1 (ja) * | 2019-01-31 | 2020-08-06 | 株式会社フジキン | バルブ装置、流量制御方法、流体制御装置、半導体製造方法、および半導体製造装置 |
JP7036756B2 (ja) * | 2019-02-04 | 2022-03-15 | Ckd株式会社 | 真空圧力比例制御弁 |
JP7021145B2 (ja) * | 2019-03-29 | 2022-02-16 | Ckd株式会社 | 真空弁 |
CN110281394B (zh) * | 2019-08-05 | 2024-02-23 | 承德鼎信自动化工程股份有限公司 | 一种可调节开口的粉体预给料调节阀门装置 |
CN110906039B (zh) * | 2019-11-14 | 2022-03-29 | 上海交通大学 | 真空冷箱用可调节低温节流阀装置 |
JP7379216B2 (ja) * | 2020-03-04 | 2023-11-14 | 愛三工業株式会社 | 流量制御弁 |
CN111874855A (zh) * | 2020-06-30 | 2020-11-03 | 浙江瑞森路政设施有限公司 | 一种气液比控制装置 |
CN114183539B (zh) * | 2021-11-29 | 2024-05-10 | 上海齐耀动力技术有限公司 | 一种磁力驱动式真空抽拉阀 |
US20230287993A1 (en) * | 2022-03-09 | 2023-09-14 | Pfeiffer Vacuum Technology AG | Vacuum valve |
DE102022003518A1 (de) | 2022-09-23 | 2024-03-28 | Vat Holding Ag | Pneumatisches gaseinlassventil mit verstellbarem anschlag |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3155365A (en) * | 1960-10-28 | 1964-11-03 | Hartung | Pressure medium controlled liquid valve for automatic flow limitation devices |
US4461450A (en) * | 1982-06-25 | 1984-07-24 | Combustion Engineering, Inc. | Remote control choke |
JP3294962B2 (ja) | 1994-12-20 | 2002-06-24 | エスエムシー株式会社 | 真空バルブ |
JP3745427B2 (ja) * | 1995-11-14 | 2006-02-15 | Smc株式会社 | 真空圧制御用スロー排気バルブ |
JP3890561B2 (ja) * | 2002-07-12 | 2007-03-07 | Smc株式会社 | 弁開度を調整可能な2ポート真空バルブ |
-
2003
- 2003-09-02 JP JP2003310607A patent/JP4055002B2/ja not_active Expired - Lifetime
-
2004
- 2004-07-12 US US10/890,466 patent/US7070159B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US20050045839A1 (en) | 2005-03-03 |
US7070159B2 (en) | 2006-07-04 |
JP2005076829A (ja) | 2005-03-24 |
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