KR100872503B1 - 진공 펌프의 운전 정지 제어 방법 및 운전 정지 제어 장치 - Google Patents

진공 펌프의 운전 정지 제어 방법 및 운전 정지 제어 장치 Download PDF

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Publication number
KR100872503B1
KR100872503B1 KR1020070070371A KR20070070371A KR100872503B1 KR 100872503 B1 KR100872503 B1 KR 100872503B1 KR 1020070070371 A KR1020070070371 A KR 1020070070371A KR 20070070371 A KR20070070371 A KR 20070070371A KR 100872503 B1 KR100872503 B1 KR 100872503B1
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South Korea
Prior art keywords
rotation speed
gas
pump
vacuum pump
predetermined
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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KR1020070070371A
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English (en)
Korean (ko)
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KR20080024058A (ko
Inventor
료우스케 코시자카
신야 야마모토
요시아키 후지와라
켄타로우 이시하라
오사무 우치야마
Original Assignee
가부시키가이샤 도요다 지도숏키
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Publication of KR20080024058A publication Critical patent/KR20080024058A/ko
Application granted granted Critical
Publication of KR100872503B1 publication Critical patent/KR100872503B1/ko
Expired - Fee Related legal-status Critical Current
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C14/00—Control of, monitoring of, or safety arrangements for, machines, pumps or pumping installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/17—Tolerance; Play; Gap
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2280/00—Arrangements for preventing or removing deposits or corrosion
    • F04C2280/02—Preventing solid deposits in pumps, e.g. in vacuum pumps with chemical vapour deposition [CVD] processes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2201/00—Metals
    • F05C2201/04—Heavy metals
    • F05C2201/0433—Iron group; Ferrous alloys, e.g. steel
    • F05C2201/0436—Iron
    • F05C2201/0439—Cast iron
    • F05C2201/0442—Spheroidal graphite cast iron, e.g. nodular iron, ductile iron

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
KR1020070070371A 2006-09-12 2007-07-13 진공 펌프의 운전 정지 제어 방법 및 운전 정지 제어 장치 Expired - Fee Related KR100872503B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2006-00247196 2006-09-12
JP2006247196A JP4702236B2 (ja) 2006-09-12 2006-09-12 真空ポンプの運転停止制御方法及び運転停止制御装置

Publications (2)

Publication Number Publication Date
KR20080024058A KR20080024058A (ko) 2008-03-17
KR100872503B1 true KR100872503B1 (ko) 2008-12-08

Family

ID=38704900

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020070070371A Expired - Fee Related KR100872503B1 (ko) 2006-09-12 2007-07-13 진공 펌프의 운전 정지 제어 방법 및 운전 정지 제어 장치

Country Status (7)

Country Link
US (1) US20080063536A1 (https=)
EP (1) EP1900943B1 (https=)
JP (1) JP4702236B2 (https=)
KR (1) KR100872503B1 (https=)
AT (1) ATE496221T1 (https=)
DE (1) DE602007012030D1 (https=)
TW (1) TW200823369A (https=)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4987660B2 (ja) * 2007-10-12 2012-07-25 株式会社荏原製作所 真空ポンプの運転制御装置及び運転停止方法
JP5284753B2 (ja) * 2008-10-22 2013-09-11 株式会社荏原製作所 真空ポンプ装置の異物掻き出し制御方法、及び真空ポンプ装置
JP5562144B2 (ja) * 2010-06-29 2014-07-30 株式会社荏原製作所 真空ポンプ、その運転制御装置及び運転制御方法
GB2501735B (en) * 2012-05-02 2015-07-22 Edwards Ltd Method and apparatus for warming up a vacuum pump arrangement
DE102013208829A1 (de) * 2013-05-14 2014-11-20 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
JP6058497B2 (ja) * 2013-07-19 2017-01-11 オークマ株式会社 工作機械及びその制御方法
JP6616611B2 (ja) * 2015-07-23 2019-12-04 エドワーズ株式会社 排気システム
CN106762650A (zh) * 2015-11-25 2017-05-31 中国科学院沈阳科学仪器股份有限公司 一种用于真空获得设备的节能控制系统及方法
CN107084135A (zh) * 2017-06-29 2017-08-22 德耐尔节能科技（上海）股份有限公司 一种干式螺旋真空泵
FR3076582B1 (fr) 2018-01-09 2020-01-24 Pfeiffer Vacuum Pompe a vide de type seche et procede de commande d'un moteur synchrone de pompe a vide
JP7019513B2 (ja) * 2018-06-05 2022-02-15 株式会社荏原製作所 制御装置、制御システム、制御方法、プログラム及び機械学習装置
JP7141332B2 (ja) * 2018-12-28 2022-09-22 株式会社荏原製作所 真空ポンプ装置
US11815095B2 (en) * 2019-01-10 2023-11-14 Elival Co., Ltd Power saving vacuuming pump system based on complete-bearing-sealing and dry-large-pressure-difference root vacuuming root pumps
GB2592573A (en) 2019-12-19 2021-09-08 Leybold France S A S Lubricant-sealed vacuum pump, lubricant filter and method.
EP4172014B1 (en) * 2020-06-24 2024-02-28 Pierburg Pump Technology GmbH Motor vehicle vacuum pump
GB2602625B (en) * 2020-12-15 2023-05-31 Edwards S R O Method for stopping a vacuum pump
JP7555870B2 (ja) * 2021-03-29 2024-09-25 株式会社荏原製作所 真空ポンプ装置
EP4720517A1 (en) * 2023-06-05 2026-04-08 Edwards Limited Reducing power consumption in vacuum pumps
GB202308347D0 (en) * 2023-06-05 2023-07-19 Edwards Ltd Reducing consumption in positive displacement vacuum pumps
DE102023120370A1 (de) * 2023-08-01 2025-02-06 Bitzer Kühlmaschinenbau Gmbh Verdichter-/Expandermaschine
GB2642863A (en) * 2024-07-23 2026-01-28 Edwards Ltd Reducing power consumption in vacuum pumps

Citations (2)

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KR20030071525A (ko) * 2002-02-28 2003-09-03 비오씨 에드워즈 테크놀로지스 리미티드 펌프 장치
KR20050059076A (ko) * 2002-08-20 2005-06-17 가부시키가이샤 에바라 세이사꾸쇼 진공 펌프 및 진공 펌프의 시동 방법

Family Cites Families (10)

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US2617253A (en) * 1950-09-23 1952-11-11 Gen Electric Safety control system for cooling a gas turbine power plant on shutdown
JP2002130170A (ja) * 2000-10-23 2002-05-09 Toyota Industries Corp 真空ポンプにおける流路構造
JP2003120529A (ja) * 2001-10-17 2003-04-23 Toyota Industries Corp 真空ポンプにおけるガス供給装置
JP3941452B2 (ja) * 2001-10-17 2007-07-04 株式会社豊田自動織機 真空ポンプにおける運転停止制御方法及び運転停止制御装置
DE10156179A1 (de) * 2001-11-15 2003-05-28 Leybold Vakuum Gmbh Kühlung einer Schraubenvakuumpumpe
JP3896930B2 (ja) * 2002-09-10 2007-03-22 株式会社豊田自動織機 流体ポンプ装置
JP4218756B2 (ja) * 2003-10-17 2009-02-04 株式会社荏原製作所 真空排気装置
JP2006009587A (ja) * 2004-06-22 2006-01-12 Shimadzu Corp 温度調整可能な真空ポンプ
US7300257B2 (en) * 2004-12-20 2007-11-27 Carrier Corporation Prevention of unpowered reverse rotation in compressors
US7922457B2 (en) * 2005-02-26 2011-04-12 Ingersoll-Rand Company System and method for controlling a variable speed compressor during stopping

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030071525A (ko) * 2002-02-28 2003-09-03 비오씨 에드워즈 테크놀로지스 리미티드 펌프 장치
KR20050059076A (ko) * 2002-08-20 2005-06-17 가부시키가이샤 에바라 세이사꾸쇼 진공 펌프 및 진공 펌프의 시동 방법

Also Published As

Publication number Publication date
EP1900943B1 (en) 2011-01-19
TWI341368B (https=) 2011-05-01
DE602007012030D1 (de) 2011-03-03
ATE496221T1 (de) 2011-02-15
TW200823369A (en) 2008-06-01
KR20080024058A (ko) 2008-03-17
JP4702236B2 (ja) 2011-06-15
US20080063536A1 (en) 2008-03-13
JP2008069666A (ja) 2008-03-27
EP1900943A1 (en) 2008-03-19

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