ATE496221T1 - Verfahren zur steuerung des stoppbetriebs einer vakuumpumpe - Google Patents

Verfahren zur steuerung des stoppbetriebs einer vakuumpumpe

Info

Publication number
ATE496221T1
ATE496221T1 AT07116083T AT07116083T ATE496221T1 AT E496221 T1 ATE496221 T1 AT E496221T1 AT 07116083 T AT07116083 T AT 07116083T AT 07116083 T AT07116083 T AT 07116083T AT E496221 T1 ATE496221 T1 AT E496221T1
Authority
AT
Austria
Prior art keywords
vacuum pump
gas transferring
gas
speed
controlling
Prior art date
Application number
AT07116083T
Other languages
English (en)
Inventor
Ryosuke Koshizaka
Shinya Yamamoto
Yoshiaki Fujiwara
Kentaro Ishihara
Osamu Uchiyama
Original Assignee
Toyota Jidoshokki Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Jidoshokki Kk filed Critical Toyota Jidoshokki Kk
Application granted granted Critical
Publication of ATE496221T1 publication Critical patent/ATE496221T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C14/00—Control of, monitoring of, or safety arrangements for, machines, pumps or pumping installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/17—Tolerance; Play; Gap
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2280/00—Arrangements for preventing or removing deposits or corrosion
    • F04C2280/02—Preventing solid deposits in pumps, e.g. in vacuum pumps with chemical vapour deposition [CVD] processes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2201/00—Metals
    • F05C2201/04—Heavy metals
    • F05C2201/0433—Iron group; Ferrous alloys, e.g. steel
    • F05C2201/0436—Iron
    • F05C2201/0439—Cast iron
    • F05C2201/0442—Spheroidal graphite cast iron, e.g. nodular iron, ductile iron
AT07116083T 2006-09-12 2007-09-11 Verfahren zur steuerung des stoppbetriebs einer vakuumpumpe ATE496221T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006247196A JP4702236B2 (ja) 2006-09-12 2006-09-12 真空ポンプの運転停止制御方法及び運転停止制御装置

Publications (1)

Publication Number Publication Date
ATE496221T1 true ATE496221T1 (de) 2011-02-15

Family

ID=38704900

Family Applications (1)

Application Number Title Priority Date Filing Date
AT07116083T ATE496221T1 (de) 2006-09-12 2007-09-11 Verfahren zur steuerung des stoppbetriebs einer vakuumpumpe

Country Status (7)

Country Link
US (1) US20080063536A1 (de)
EP (1) EP1900943B1 (de)
JP (1) JP4702236B2 (de)
KR (1) KR100872503B1 (de)
AT (1) ATE496221T1 (de)
DE (1) DE602007012030D1 (de)
TW (1) TW200823369A (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4987660B2 (ja) * 2007-10-12 2012-07-25 株式会社荏原製作所 真空ポンプの運転制御装置及び運転停止方法
JP5284753B2 (ja) * 2008-10-22 2013-09-11 株式会社荏原製作所 真空ポンプ装置の異物掻き出し制御方法、及び真空ポンプ装置
JP5562144B2 (ja) * 2010-06-29 2014-07-30 株式会社荏原製作所 真空ポンプ、その運転制御装置及び運転制御方法
GB2501735B (en) * 2012-05-02 2015-07-22 Edwards Ltd Method and apparatus for warming up a vacuum pump arrangement
DE102013208829A1 (de) * 2013-05-14 2014-11-20 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
JP6058497B2 (ja) * 2013-07-19 2017-01-11 オークマ株式会社 工作機械及びその制御方法
JP6616611B2 (ja) * 2015-07-23 2019-12-04 エドワーズ株式会社 排気システム
CN106762650A (zh) * 2015-11-25 2017-05-31 中国科学院沈阳科学仪器股份有限公司 一种用于真空获得设备的节能控制系统及方法
CN107084135A (zh) * 2017-06-29 2017-08-22 德耐尔节能科技（上海）股份有限公司 一种干式螺旋真空泵
FR3076582B1 (fr) * 2018-01-09 2020-01-24 Pfeiffer Vacuum Pompe a vide de type seche et procede de commande d'un moteur synchrone de pompe a vide
JP7019513B2 (ja) * 2018-06-05 2022-02-15 株式会社荏原製作所 制御装置、制御システム、制御方法、プログラム及び機械学習装置
JP7141332B2 (ja) * 2018-12-28 2022-09-22 株式会社荏原製作所 真空ポンプ装置
US11815095B2 (en) * 2019-01-10 2023-11-14 Elival Co., Ltd Power saving vacuuming pump system based on complete-bearing-sealing and dry-large-pressure-difference root vacuuming root pumps
GB2592573A (en) * 2019-12-19 2021-09-08 Leybold France S A S Lubricant-sealed vacuum pump, lubricant filter and method.
EP4172014B1 (de) * 2020-06-24 2024-02-28 Pierburg Pump Technology GmbH Kraftfahrzeug-vakuumpumpe
GB2602625B (en) 2020-12-15 2023-05-31 Edwards S R O Method for stopping a vacuum pump
JP2022151996A (ja) * 2021-03-29 2022-10-12 株式会社荏原製作所 真空ポンプ装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2617253A (en) * 1950-09-23 1952-11-11 Gen Electric Safety control system for cooling a gas turbine power plant on shutdown
JP2002130170A (ja) * 2000-10-23 2002-05-09 Toyota Industries Corp 真空ポンプにおける流路構造
JP2003120529A (ja) * 2001-10-17 2003-04-23 Toyota Industries Corp 真空ポンプにおけるガス供給装置
JP3941452B2 (ja) * 2001-10-17 2007-07-04 株式会社豊田自動織機 真空ポンプにおける運転停止制御方法及び運転停止制御装置
DE10156179A1 (de) * 2001-11-15 2003-05-28 Leybold Vakuum Gmbh Kühlung einer Schraubenvakuumpumpe
JP2003254285A (ja) * 2002-02-28 2003-09-10 Boc Edwards Technologies Ltd ポンプ装置
CN1675469A (zh) * 2002-08-20 2005-09-28 株式会社荏原制作所 真空泵及其起动方法
JP3896930B2 (ja) * 2002-09-10 2007-03-22 株式会社豊田自動織機 流体ポンプ装置
JP4218756B2 (ja) * 2003-10-17 2009-02-04 株式会社荏原製作所 真空排気装置
JP2006009587A (ja) * 2004-06-22 2006-01-12 Shimadzu Corp 温度調整可能な真空ポンプ
US7300257B2 (en) * 2004-12-20 2007-11-27 Carrier Corporation Prevention of unpowered reverse rotation in compressors
US7922457B2 (en) * 2005-02-26 2011-04-12 Ingersoll-Rand Company System and method for controlling a variable speed compressor during stopping

Also Published As

Publication number Publication date
US20080063536A1 (en) 2008-03-13
JP2008069666A (ja) 2008-03-27
DE602007012030D1 (de) 2011-03-03
EP1900943B1 (de) 2011-01-19
JP4702236B2 (ja) 2011-06-15
KR20080024058A (ko) 2008-03-17
TWI341368B (de) 2011-05-01
EP1900943A1 (de) 2008-03-19
TW200823369A (en) 2008-06-01
KR100872503B1 (ko) 2008-12-08

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