KR100842001B1 - 반사 장치 - Google Patents

반사 장치 Download PDF

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Publication number
KR100842001B1
KR100842001B1 KR1020070047926A KR20070047926A KR100842001B1 KR 100842001 B1 KR100842001 B1 KR 100842001B1 KR 1020070047926 A KR1020070047926 A KR 1020070047926A KR 20070047926 A KR20070047926 A KR 20070047926A KR 100842001 B1 KR100842001 B1 KR 100842001B1
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KR
South Korea
Prior art keywords
mirror
electromagnet
actuator
coil
optical system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020070047926A
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English (en)
Korean (ko)
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KR20070113115A (ko
Inventor
신지 우치다
Original Assignee
캐논 가부시끼가이샤
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Application filed by 캐논 가부시끼가이샤 filed Critical 캐논 가부시끼가이샤
Publication of KR20070113115A publication Critical patent/KR20070113115A/ko
Application granted granted Critical
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Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0825—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a flexible sheet or membrane, e.g. for varying the focus
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/702—Reflective illumination, i.e. reflective optical elements other than folding mirrors, e.g. extreme ultraviolet [EUV] illumination systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70233—Optical aspects of catoptric systems, i.e. comprising only reflective elements, e.g. extreme ultraviolet [EUV] projection systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70258—Projection system adjustments, e.g. adjustments during exposure or alignment during assembly of projection system
    • G03F7/70266—Adaptive optics, e.g. deformable optical elements for wavefront control, e.g. for aberration adjustment or correction

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
KR1020070047926A 2006-05-23 2007-05-17 반사 장치 Expired - Fee Related KR100842001B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2006-00142720 2006-05-23
JP2006142720A JP2007316132A (ja) 2006-05-23 2006-05-23 反射装置

Publications (2)

Publication Number Publication Date
KR20070113115A KR20070113115A (ko) 2007-11-28
KR100842001B1 true KR100842001B1 (ko) 2008-06-27

Family

ID=38821798

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020070047926A Expired - Fee Related KR100842001B1 (ko) 2006-05-23 2007-05-17 반사 장치

Country Status (4)

Country Link
US (1) US7907326B2 (https=)
JP (1) JP2007316132A (https=)
KR (1) KR100842001B1 (https=)
TW (1) TW200807170A (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20150075361A (ko) * 2013-12-25 2015-07-03 캐논 가부시끼가이샤 광학장치, 투영 광학계, 노광장치, 및 물품의 제조방법
US9557560B2 (en) 2013-04-16 2017-01-31 Canon Kabushiki Kaisha Mirror unit and exposure apparatus
KR20170069146A (ko) * 2015-12-10 2017-06-20 캐논 가부시끼가이샤 광학 장치, 그것을 구비한 노광 장치 및 물품 제조 방법

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7989756B2 (en) 2008-03-18 2011-08-02 Nikon Corporation Active-isolation mounts for optical elements
DE102008032853A1 (de) * 2008-07-14 2010-01-21 Carl Zeiss Smt Ag Optische Einrichtung mit einem deformierbaren optischen Element
FR2935054B1 (fr) * 2008-08-14 2011-01-28 Alpao Miroir deformable a actionneurs de force et raideur repartie
DE102009009221A1 (de) 2009-02-17 2010-08-26 Carl Zeiss Smt Ag Projektionsbelichtungsanlage für die Halbleiterlithographie mit einem Aktuatorsystem
EP2275697A1 (en) * 2009-04-23 2011-01-19 Koninklijke Philips Electronics N.V. A magnetic bearing, a rotary stage, and a reflective electron beam lithography apparatus
JP2011119551A (ja) * 2009-12-04 2011-06-16 Nikon Corp 光学部材変形装置、光学系、露光装置、デバイスの製造方法
GB2468557A (en) * 2010-02-05 2010-09-15 Zeiss Carl Smt Ag Optical element module with imaging error correction and position adjustment
EP2469340B1 (en) 2010-12-21 2021-01-06 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method
FR2970787B1 (fr) * 2011-01-26 2014-01-10 Alpao Miroir deformable a capteurs capacitifs
DE102011075316A1 (de) 2011-05-05 2012-11-08 Carl Zeiss Smt Gmbh Optisches Modul mit einer Messeinrichtung
DE102011075393B4 (de) * 2011-05-06 2013-08-14 Carl Zeiss Smt Gmbh Anordnung zur Aktuierung eines Elementes in einer Projektionsbelichtungsanlage
DE102013201082A1 (de) * 2013-01-24 2014-03-13 Carl Zeiss Smt Gmbh Anordnung zur Aktuierung eines Elementes in einer mikrolithographischen Projektionsbelichtungsanlage
KR102390697B1 (ko) 2013-01-28 2022-04-26 에이에스엠엘 네델란즈 비.브이. 리소그래피 장치를 위한 방사선 소스, 거울 및 투영 시스템
JP6168957B2 (ja) 2013-09-30 2017-07-26 キヤノン株式会社 光学装置、投影光学系、露光装置および物品の製造方法
FR3011942B1 (fr) * 2013-10-11 2017-07-14 Thales Sa Telescope spatial actif a miroir suspendu
DE102014206686A1 (de) * 2014-04-07 2015-10-08 Carl Zeiss Smt Gmbh Verfahren sowie Anordnung zur Aktuierung eines Elementes
CN107015341B (zh) * 2016-01-27 2020-08-21 佳能株式会社 光学设备、投影光学系统、曝光装置及物品制造方法
JP6866131B2 (ja) * 2016-01-27 2021-04-28 キヤノン株式会社 光学装置、それを備えた露光装置、および物品の製造方法
JP2018040856A (ja) * 2016-09-05 2018-03-15 キヤノン株式会社 光学装置、投影光学系、露光装置、および物品の製造方法
JP6598827B2 (ja) 2017-08-01 2019-10-30 キヤノン株式会社 光学装置、これを用いた露光装置、および物品の製造方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990088659A (ko) * 1998-05-29 1999-12-27 헨켈 카르스텐 자기조절미러를갖는카타다이옵트릭투사렌즈시스템및투사노광방법
KR20020077338A (ko) * 2000-08-09 2002-10-11 에이에스엠엘 유에스, 인크. 미세가공 투영 시스템에서 변형가능한 미러를 형상화하기위한 공압식 조절 시스템 및 방법
JP2004064076A (ja) 2002-07-23 2004-02-26 Nikon Corp 変形ミラー構造体、変形ミラーの制御方法及び露光装置
WO2005091077A2 (de) * 2004-02-20 2005-09-29 Carl Zeiss Smt Ag Projektionsobjektiv einer mikrolithographischen projektionsbelichtungsanlage

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08334708A (ja) 1995-06-08 1996-12-17 Mitsubishi Heavy Ind Ltd 形状可変鏡
US6188502B1 (en) * 1998-03-26 2001-02-13 Nec Corporation Laser pointing apparatus and on-fulcrum drive apparatus
US7170665B2 (en) * 2002-07-24 2007-01-30 Olympus Corporation Optical unit provided with an actuator
US6464363B1 (en) * 1999-03-17 2002-10-15 Olympus Optical Co., Ltd. Variable mirror, optical apparatus and decentered optical system which include variable mirror, variable-optical characteristic optical element or combination thereof
JP2002243918A (ja) 2001-02-14 2002-08-28 Olympus Optical Co Ltd 可変焦点レンズ、光学特性可変光学素子及び光学装置
US6938920B2 (en) 2000-05-01 2005-09-06 Toyoda Gosei Co., Ltd. Occupant arresting device
EP1279572A4 (en) 2000-05-01 2008-06-18 Toyoda Gosei Kk STOPPING DEVICE FOR PROTECTING AN OCCUPANT
WO2001083271A1 (fr) 2000-05-01 2001-11-08 Toyoda Gosei Co., Ltd. Dispositif de retenue de passager
US6840638B2 (en) 2002-07-03 2005-01-11 Nikon Corporation Deformable mirror with passive and active actuators
US6906848B2 (en) * 2003-02-24 2005-06-14 Exajoule, Llc Micromirror systems with concealed multi-piece hinge structures
JP4574206B2 (ja) * 2003-04-25 2010-11-04 キヤノン株式会社 駆動装置、それを用いた露光装置、デバイスの製造方法
US7369216B2 (en) * 2004-10-15 2008-05-06 Asml Netherlands B.V. Lithographic system, method for adapting transmission characteristics of an optical pathway within a lithographic system, semiconductor device, method of manufacturing a reflective element for use in a lithographic system, and reflective element manufactured thereby

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990088659A (ko) * 1998-05-29 1999-12-27 헨켈 카르스텐 자기조절미러를갖는카타다이옵트릭투사렌즈시스템및투사노광방법
KR20020077338A (ko) * 2000-08-09 2002-10-11 에이에스엠엘 유에스, 인크. 미세가공 투영 시스템에서 변형가능한 미러를 형상화하기위한 공압식 조절 시스템 및 방법
JP2004064076A (ja) 2002-07-23 2004-02-26 Nikon Corp 変形ミラー構造体、変形ミラーの制御方法及び露光装置
WO2005091077A2 (de) * 2004-02-20 2005-09-29 Carl Zeiss Smt Ag Projektionsobjektiv einer mikrolithographischen projektionsbelichtungsanlage

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9557560B2 (en) 2013-04-16 2017-01-31 Canon Kabushiki Kaisha Mirror unit and exposure apparatus
KR20150075361A (ko) * 2013-12-25 2015-07-03 캐논 가부시끼가이샤 광학장치, 투영 광학계, 노광장치, 및 물품의 제조방법
KR101882190B1 (ko) * 2013-12-25 2018-07-26 캐논 가부시끼가이샤 광학장치, 투영 광학계, 노광장치, 및 물품의 제조방법
KR20170069146A (ko) * 2015-12-10 2017-06-20 캐논 가부시끼가이샤 광학 장치, 그것을 구비한 노광 장치 및 물품 제조 방법
KR102111070B1 (ko) * 2015-12-10 2020-05-15 캐논 가부시끼가이샤 광학 장치, 그것을 구비한 노광 장치 및 물품 제조 방법

Also Published As

Publication number Publication date
JP2007316132A (ja) 2007-12-06
US7907326B2 (en) 2011-03-15
US20070286035A1 (en) 2007-12-13
KR20070113115A (ko) 2007-11-28
TW200807170A (en) 2008-02-01

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