KR100817597B1 - 시험할 대상물들을 접촉시키기 위한 장치 및 방법 - Google Patents

시험할 대상물들을 접촉시키기 위한 장치 및 방법 Download PDF

Info

Publication number
KR100817597B1
KR100817597B1 KR1020057008488A KR20057008488A KR100817597B1 KR 100817597 B1 KR100817597 B1 KR 100817597B1 KR 1020057008488 A KR1020057008488 A KR 1020057008488A KR 20057008488 A KR20057008488 A KR 20057008488A KR 100817597 B1 KR100817597 B1 KR 100817597B1
Authority
KR
South Korea
Prior art keywords
contact
test
substrate
unit
contact unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
KR1020057008488A
Other languages
English (en)
Korean (ko)
Other versions
KR20050075395A (ko
Inventor
마티아스 브루너
Original Assignee
어플라이드 머티어리얼즈 게엠베하
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 어플라이드 머티어리얼즈 게엠베하 filed Critical 어플라이드 머티어리얼즈 게엠베하
Publication of KR20050075395A publication Critical patent/KR20050075395A/ko
Application granted granted Critical
Publication of KR100817597B1 publication Critical patent/KR100817597B1/ko
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/305—Contactless testing using electron beams
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Theoretical Computer Science (AREA)
  • Tests Of Electronic Circuits (AREA)
KR1020057008488A 2002-11-18 2003-11-14 시험할 대상물들을 접촉시키기 위한 장치 및 방법 Expired - Lifetime KR100817597B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10253717.8 2002-11-18
DE10253717A DE10253717B4 (de) 2002-11-18 2002-11-18 Vorrichtung zum Kontaktieren für den Test mindestens eines Testobjekts, Testsystem und Verfahren zum Testen von Testobjekten

Publications (2)

Publication Number Publication Date
KR20050075395A KR20050075395A (ko) 2005-07-20
KR100817597B1 true KR100817597B1 (ko) 2008-03-31

Family

ID=32115567

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020057008488A Expired - Lifetime KR100817597B1 (ko) 2002-11-18 2003-11-14 시험할 대상물들을 접촉시키기 위한 장치 및 방법

Country Status (9)

Country Link
US (2) US7135875B2 (enExample)
EP (1) EP1420259A1 (enExample)
JP (1) JP2006506629A (enExample)
KR (1) KR100817597B1 (enExample)
CN (2) CN101625823B (enExample)
AU (1) AU2003292020A1 (enExample)
DE (1) DE10253717B4 (enExample)
TW (1) TWI267644B (enExample)
WO (1) WO2004046740A1 (enExample)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10253717B4 (de) 2002-11-18 2011-05-19 Applied Materials Gmbh Vorrichtung zum Kontaktieren für den Test mindestens eines Testobjekts, Testsystem und Verfahren zum Testen von Testobjekten
US7319335B2 (en) * 2004-02-12 2008-01-15 Applied Materials, Inc. Configurable prober for TFT LCD array testing
US6833717B1 (en) * 2004-02-12 2004-12-21 Applied Materials, Inc. Electron beam test system with integrated substrate transfer module
US7355418B2 (en) * 2004-02-12 2008-04-08 Applied Materials, Inc. Configurable prober for TFT LCD array test
US8083853B2 (en) * 2004-05-12 2011-12-27 Applied Materials, Inc. Plasma uniformity control by gas diffuser hole design
US8328939B2 (en) * 2004-05-12 2012-12-11 Applied Materials, Inc. Diffuser plate with slit valve compensation
US8074599B2 (en) 2004-05-12 2011-12-13 Applied Materials, Inc. Plasma uniformity control by gas diffuser curvature
US7429410B2 (en) * 2004-09-20 2008-09-30 Applied Materials, Inc. Diffuser gravity support
KR100780759B1 (ko) * 2005-01-24 2007-11-30 삼성전자주식회사 박막 트랜지스터 어레이 검사장치
US7535238B2 (en) * 2005-04-29 2009-05-19 Applied Materials, Inc. In-line electron beam test system
KR100643389B1 (ko) * 2005-07-04 2006-11-10 삼성전자주식회사 박막트랜지스터 기판의 검사장치와 박막트랜지스터 기판의검사방법
TWI323788B (en) * 2006-03-14 2010-04-21 Applied Materials Inc Method to reduce cross talk in a multi column e-beam test system
US7602199B2 (en) * 2006-05-31 2009-10-13 Applied Materials, Inc. Mini-prober for TFT-LCD testing
JP2009539112A (ja) * 2006-05-31 2009-11-12 アプライド マテリアルズ インコーポレイテッド Ｔｆｔ−ｌｃｄ検査のための小型プローバ
US7786742B2 (en) * 2006-05-31 2010-08-31 Applied Materials, Inc. Prober for electronic device testing on large area substrates
US20080317973A1 (en) * 2007-06-22 2008-12-25 White John M Diffuser support
WO2009004894A1 (ja) * 2007-07-04 2009-01-08 Sharp Kabushiki Kaisha 表示モジュール、液晶表示装置、及び表示モジュールの製造方法
TWI426286B (zh) * 2010-08-02 2014-02-11 財團法人工業技術研究院 基板電性的量測設備
JP6300553B2 (ja) * 2014-02-12 2018-03-28 株式会社日立ハイテクサイエンス 荷電粒子ビーム装置
TWI676033B (zh) * 2018-11-09 2019-11-01 京元電子股份有限公司 具浮動容置座之半導體元件測試載盤及其測試設備
CN111190087B (zh) * 2018-11-15 2022-03-15 京元电子股份有限公司 具浮动容置座的半导体元件测试载盘及其测试设备
CN109765479B (zh) * 2019-01-28 2021-10-01 合肥京东方视讯科技有限公司 一种电路板缺件检测装置和方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5365034A (en) 1992-09-29 1994-11-15 Matsushita Electric Industrial Co., Ltd. Defect detection and defect removal apparatus of thin film electronic device
US5521522A (en) 1992-11-13 1996-05-28 Tokyo Electron Limited Probe apparatus for testing multiple integrated circuit dies
US5691764A (en) * 1994-08-05 1997-11-25 Tokyo Electron Limited Apparatus for examining target objects such as LCD panels
US6075245A (en) * 1998-01-12 2000-06-13 Toro-Lira; Guillermo L. High speed electron beam based system for testing large area flat panel displays
JP2001318116A (ja) 2000-05-11 2001-11-16 Micronics Japan Co Ltd 表示用パネル基板の検査装置
EP1233274A2 (en) * 2001-02-08 2002-08-21 Three-Five Systems, Inc. System and method for testing a display device
US6798231B2 (en) 2001-03-05 2004-09-28 Ishiwawajima-Harima Heavy Industries Co., Ltd. & Sharp Kabushiki Kaisha Inspection device for liquid crystal driving substrate

Family Cites Families (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4471298A (en) 1981-12-11 1984-09-11 Cirdyne, Inc. Apparatus for automatically electrically testing printed circuit boards
JPS58210631A (ja) * 1982-05-31 1983-12-07 Toshiba Corp 電子ビ−ムを用いたｉｃテスタ
JPS5976439A (ja) * 1982-10-22 1984-05-01 Fujitsu Ltd 半導体装置の診断方法
JPS622552A (ja) * 1985-06-27 1987-01-08 Matsushita Electric Ind Co Ltd 半導体検査装置および半導体検査方法
JPS6298544A (ja) * 1985-10-25 1987-05-08 Hitachi Ltd 荷電粒子線装置
US4965515A (en) * 1986-10-15 1990-10-23 Tokyo Electron Limited Apparatus and method of testing a semiconductor wafer
US4772846A (en) * 1986-12-29 1988-09-20 Hughes Aircraft Company Wafer alignment and positioning apparatus for chip testing by voltage contrast electron microscopy
JPH0817196B2 (ja) * 1988-03-22 1996-02-21 東京エレクトロン株式会社 電子ビームプローブ装置
US6288561B1 (en) * 1988-05-16 2001-09-11 Elm Technology Corporation Method and apparatus for probing, testing, burn-in, repairing and programming of integrated circuits in a closed environment using a single apparatus
JP2694345B2 (ja) 1988-07-14 1997-12-24 東京エレクトロン株式会社 検査装置
JP2678178B2 (ja) * 1988-11-18 1997-11-17 東京エレクトロン株式会社 プロービング方法及びプローブ装置
US4985676A (en) * 1989-02-17 1991-01-15 Tokyo Electron Limited Method and apparatus of performing probing test for electrically and sequentially testing semiconductor device patterns
US4965676A (en) * 1989-02-28 1990-10-23 Ricoh Corporation And Ricoh Company, Ltd. Facsimile remote diagnostic system
EP0402499A1 (de) * 1989-06-13 1990-12-19 Siemens Aktiengesellschaft Verfahren zur Prüfung einer Leiterplatte mit einer Teilchensonde
US5268638A (en) * 1991-07-15 1993-12-07 Siemens Aktiengesellschaft Method for particle beam testing of substrates for liquid crystal displays "LCD"
JP2765427B2 (ja) * 1993-04-13 1998-06-18 日本電気株式会社 半導体集積回路内部相互配線の検査方法および装置
DE69326003T2 (de) * 1993-09-20 1999-11-25 Hewlett-Packard Gmbh Testapparat zum Testen und Handhaben einer Vielzahl von Vorrichtungen
US5644245A (en) * 1993-11-24 1997-07-01 Tokyo Electron Limited Probe apparatus for inspecting electrical characteristics of a microelectronic element
US5528158A (en) * 1994-04-11 1996-06-18 Xandex, Inc. Probe card changer system and method
WO1996029607A1 (en) * 1995-03-18 1996-09-26 Tokyo Electron Limited Method and apparatus for inspecting substrate
JPH08115954A (ja) * 1994-10-14 1996-05-07 Tokyo Electron Ltd 検査装置
US5621333A (en) * 1995-05-19 1997-04-15 Microconnect, Inc. Contact device for making connection to an electronic circuit device
TW301099B (enExample) * 1995-07-14 1997-03-21 Tokyo Electron Co Ltd
US6046599A (en) * 1996-05-20 2000-04-04 Microconnect, Inc. Method and device for making connection
US5923180A (en) * 1997-02-04 1999-07-13 Hewlett-Packard Company Compliant wafer prober docking adapter
US6268661B1 (en) * 1999-08-31 2001-07-31 Nec Corporation Semiconductor device and method of its fabrication
JP3423979B2 (ja) * 1997-07-11 2003-07-07 東京エレクトロン株式会社 プローブ方法及びプローブ装置
US5962190A (en) * 1997-08-27 1999-10-05 E. I. Du Pont De Nemours And Company Photopolymerizable compositions having improved sidewall geometry and development latitude
US5982190A (en) * 1998-02-04 1999-11-09 Toro-Lira; Guillermo L. Method to determine pixel condition on flat panel displays using an electron beam
US6246245B1 (en) 1998-02-23 2001-06-12 Micron Technology, Inc. Probe card, test method and test system for semiconductor wafers
JP3538696B2 (ja) * 1998-08-20 2004-06-14 ジェネシス・テクノロジー株式会社 プローブ装置の組立方法
US6198299B1 (en) * 1998-08-27 2001-03-06 The Micromanipulator Company, Inc. High Resolution analytical probe station
US6343369B1 (en) * 1998-09-15 2002-01-29 Microconnect, Inc. Methods for making contact device for making connection to an electronic circuit device and methods of using the same
JP2000311930A (ja) * 1999-04-28 2000-11-07 Agilent Technologies Japan Ltd 半導体検査装置と半導体検査装置におけるウエハ上の各ダイの属性を指定する方法
JP2001024038A (ja) * 1999-07-05 2001-01-26 Hitachi Ltd プローブの位置決め方法および装置およびこれを利用した部材の評価方法
JP4015352B2 (ja) * 2000-02-22 2007-11-28 株式会社日立製作所 荷電粒子ビームを用いた検査方法
DE10253717B4 (de) 2002-11-18 2011-05-19 Applied Materials Gmbh Vorrichtung zum Kontaktieren für den Test mindestens eines Testobjekts, Testsystem und Verfahren zum Testen von Testobjekten

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5365034A (en) 1992-09-29 1994-11-15 Matsushita Electric Industrial Co., Ltd. Defect detection and defect removal apparatus of thin film electronic device
US5521522A (en) 1992-11-13 1996-05-28 Tokyo Electron Limited Probe apparatus for testing multiple integrated circuit dies
US5691764A (en) * 1994-08-05 1997-11-25 Tokyo Electron Limited Apparatus for examining target objects such as LCD panels
US6075245A (en) * 1998-01-12 2000-06-13 Toro-Lira; Guillermo L. High speed electron beam based system for testing large area flat panel displays
JP2001318116A (ja) 2000-05-11 2001-11-16 Micronics Japan Co Ltd 表示用パネル基板の検査装置
EP1233274A2 (en) * 2001-02-08 2002-08-21 Three-Five Systems, Inc. System and method for testing a display device
US6798231B2 (en) 2001-03-05 2004-09-28 Ishiwawajima-Harima Heavy Industries Co., Ltd. & Sharp Kabushiki Kaisha Inspection device for liquid crystal driving substrate

Also Published As

Publication number Publication date
CN1714298A (zh) 2005-12-28
US7474108B2 (en) 2009-01-06
EP1420259A1 (en) 2004-05-19
DE10253717B4 (de) 2011-05-19
WO2004046740A1 (de) 2004-06-03
US7135875B2 (en) 2006-11-14
JP2006506629A (ja) 2006-02-23
US20040145383A1 (en) 2004-07-29
CN101625823B (zh) 2013-04-17
CN101625823A (zh) 2010-01-13
CN100526897C (zh) 2009-08-12
KR20050075395A (ko) 2005-07-20
US20060181290A1 (en) 2006-08-17
AU2003292020A1 (en) 2004-06-15
TWI267644B (en) 2006-12-01
DE10253717A1 (de) 2004-05-27
TW200417737A (en) 2004-09-16

Similar Documents

Publication Publication Date Title
KR100817597B1 (ko) 시험할 대상물들을 접촉시키기 위한 장치 및 방법
US8035082B2 (en) Projection electron beam apparatus and defect inspection system using the apparatus
KR100492158B1 (ko) 웨이퍼 검사 장치
US9136091B2 (en) Electron beam apparatus for inspecting a pattern on a sample using multiple electron beams
US20110133066A1 (en) Pattern inspection device and method
US5598002A (en) Electron beam apparatus
US5416592A (en) Probe apparatus for measuring electrical characteristics of objects
KR101671690B1 (ko) 롤 대 롤 테스터 및 가요성 기판들을 롤 대 롤로 테스팅하는 방법
KR20000022184A (ko) 전자 디스플레이 장치용 테스트와 정렬 시스템 및 그 테스트기구
US20100213370A1 (en) Electron Beam Apparatus
US20050253066A1 (en) Electron beam apparatus
US7514683B2 (en) Scanning electron microscope
US8817089B2 (en) Inspection system
JP2016189335A (ja) 試料観察方法及び試料観察装置
US7916277B2 (en) Exposing apparatus having substrate chuck of good flatness
KR20040091562A (ko) 기판 검사장치 및 기판 검사방법
JP2006244875A (ja) 写像投影型の電子線装置及び該装置を用いた欠陥検査システム
JP5362355B2 (ja) マイクロカラムを用いた微細パターンおよび形状検査装置
JP6214903B2 (ja) 検査装置
KR100756438B1 (ko) 엘씨디 셀 검사용 프로빙장치
JPH0949759A (ja) 赤外線カメラの対物レンズ交換機構
US6717157B2 (en) Mask inspecting apparatus
JP3911407B2 (ja) 荷電粒子線走査式装置
JPH04106853A (ja) 走査電子顕微鏡
JP2009135108A (ja) 写像投影型の電子線装置及び該装置を用いた欠陥検査システム

Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20050512

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
A201 Request for examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20060623

Comment text: Request for Examination of Application

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20070627

Patent event code: PE09021S01D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20071221

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20080321

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20080324

End annual number: 3

Start annual number: 1

PG1601 Publication of registration
PR1001 Payment of annual fee

Payment date: 20110225

Start annual number: 4

End annual number: 4

PR1001 Payment of annual fee

Payment date: 20120228

Start annual number: 5

End annual number: 5

FPAY Annual fee payment

Payment date: 20130227

Year of fee payment: 6

PR1001 Payment of annual fee

Payment date: 20130227

Start annual number: 6

End annual number: 6

FPAY Annual fee payment

Payment date: 20140227

Year of fee payment: 7

PR1001 Payment of annual fee

Payment date: 20140227

Start annual number: 7

End annual number: 7

FPAY Annual fee payment

Payment date: 20150227

Year of fee payment: 8

PR1001 Payment of annual fee

Payment date: 20150227

Start annual number: 8

End annual number: 8

FPAY Annual fee payment

Payment date: 20151230

Year of fee payment: 9

PR1001 Payment of annual fee

Payment date: 20151230

Start annual number: 9

End annual number: 9

FPAY Annual fee payment

Payment date: 20161229

Year of fee payment: 10

PR1001 Payment of annual fee

Payment date: 20161229

Start annual number: 10

End annual number: 10

PR1001 Payment of annual fee

Payment date: 20230223

Start annual number: 16

End annual number: 16

PC1801 Expiration of term

Termination date: 20240514

Termination category: Expiration of duration