KR100811111B1 - Exhaust hole processing apparatus for display panel - Google Patents

Abstract

An exhaust hole processing apparatus for a display panel is provided to decrease the amount of powders during an exhaust hole forming process by minimizing a frictional coefficient of a substrate. An exhaust hole processing apparatus for a display panel includes a substrate transfer unit, a process stage unit, a substrate aligning unit(300), and an exhaust hole processing unit(400). The substrate transfer unit transfers a substrate using a magnetic force in three speeds. The process stage unit minimizes a frictional coefficient of the substrate and firmly fixes the substrate during the process. The substrate aligning unit aligns the substrate at the center of a transfer direction on the process stage unit in consideration of a size difference of the substrate. The exhaust hole processing unit performs a non-contact drilling using laser on the substrate while changing a process position and an elevation of the laser.

Description

Exhaust hole processing apparatus for display panel {EXHAUST HOLE PROCESSING APPARATUS FOR DISPLAY PANEL}

1 is a front view showing an exhaust hole processing apparatus for a display panel of the present invention.

2 is a plan view of FIG.

3 is a left side view of FIG. 1;

Figure 4 is a block diagram showing a substrate transfer unit in the present invention.

Figure 5 is a block diagram showing a processing stage unit in the present invention.

Figure 6 is a block diagram showing a processing stage unit of the present invention.

7 is a view showing for explaining the basic configuration of the aligner and the stopper in the present invention.

8 is a block diagram showing an exhaust hole processing unit in the present invention.

9 is a block diagram showing the laser beam control relationship of the exhaust hole processing unit in the present invention.

Explanation of symbols on the main parts of the drawings

100: substrate transfer unit 110: conveyor body

111: loading part 112: machining part

113: outlet 120: shaft

121: first magnetic material 130: conveyor roller

140: power supply means 141: second magnetic material

200: processing stage unit 210: flatbed stage

220: substrate adsorption portion 230: blow pad

240: air pressure supply unit 250: suction unit

300: substrate sorting unit 310: first sorter

320: second sorter 330: stopper

400: exhaust hole processing unit 410: laser source

420: focus adjuster 431: X mirror

432: Y mirror 441: X galvanometer

442: Y galvanometer 450: focus lens

The present invention relates to an exhaust hole processing apparatus for a display panel, and more particularly to a non-contact processing using a laser to improve the processing efficiency according to the exhaust hole processing, as well as to improve the working environment of the substrate The present invention relates to an exhaust hole processing apparatus for a display panel that enables efficient transfer design and minimization of friction coefficient and facilitates substrate alignment.

In general, PDP (Plasma Display Panel), which is a flat panel display device, is a display part of a plasma display device. It encloses a gas such as neon in a narrow gap between two thin glass substrates and horizontally and vertically on an inner surface of the glass substrate. It consists of a configuration that is provided with an array of transparent electrodes.

The PDP includes a step of pre-processing the exhaust hole in any one of the glass substrates for the purpose of externally discharging the air remaining inside when the two glass substrates are bonded in the manufacturing process.

Mechanical drilling of the exhaust hole is conventionally performed using diamond, which is not only precisely processed by direct contact with the glass substrate, but also has a problem in that the glass substrate is damaged by vibration. (burr) is formed and the formation of such burrs has a problem that acts as a factor of cracks and breaks during the heat treatment performed during the manufacturing process of the PDP.

In addition, since mechanical drilling is performed when exhaust holes are formed, there is a problem that glass dust is generated, which is not only harmful to the work environment, but also a cleaning process must be performed. There was a problem that did not.

The present invention has been made in view of the above problems, and the object thereof is to perform a non-contact processing using a laser to improve the processing efficiency according to the exhaust hole processing as well as to improve the working environment. The present invention provides an exhaust hole processing apparatus for a display panel that enables efficient transfer design of substrates and minimizes friction coefficients and facilitates substrate alignment.

In addition, the present invention prevents the breakage of the substrate by the non-contact substrate processing, to enable precision processing and to prevent the formation of burrs in the exhaust hole processing site to overcome the conventional problems that cracks or damage during heat treatment of the post-process To make it possible.

According to an aspect of the present invention, there is provided an apparatus for processing an exhaust hole in a display panel substrate, comprising: a substrate transfer unit configured to transfer the substrate to a rotational force by magnetic force and divide the substrate into three stages; A processing stage unit which minimizes the substrate friction coefficient when the substrate is aligned and enables stable substrate processing by tightly fixing the substrate; A substrate alignment unit for placing the substrate on a processing stage unit and aligning the substrate in a center of the advancing direction to cope with an error in the substrate size; The technical features include a configuration including an exhaust hole processing unit for processing the exhaust hole while adjusting the processing position and height of the laser while performing non-contact drilling by the laser on the substrate.

Hereinafter, with reference to the accompanying drawings, preferred embodiments of the present invention will be described in detail.

1 is a front view showing an exhaust hole processing apparatus for a display panel according to the present invention, Figure 2 is a plan view of Figure 1, Figure 3 is a left side view of Figure 1, Figure 4 shows a substrate transfer unit in the present invention 5 is a block diagram showing a processing stage unit in the present invention, Figure 6 is a block diagram showing a processing stage unit of the present invention, Figure 7 is a basic configuration of the aligner and the stopper in the present invention 8 is a block diagram showing an exhaust hole processing unit in the present invention, Figure 9 is a block diagram showing a laser beam control relationship of the exhaust hole processing unit in the present invention.

As shown in Figure 1 to Figure 9, the display panel exhaust hole processing apparatus according to the present invention transfers the substrate (G) to be a display panel material with a rotational force by magnetic, but divided into three stages transfer processing substrate The processing stage unit 200, which minimizes the substrate friction coefficient when the transfer unit 100 and the substrate G are aligned, and enables stable substrate processing by closely fixing the substrate, and processing the substrate G by the processing stage. A non-contact drilling by the laser to the substrate alignment unit 300 and the substrate (G) to align the center of the advancing direction on the unit 200 to correspond to the error of the size of the substrate (G), the processing position of the laser And an exhaust hole processing unit 400 for processing the exhaust hole while adjusting the height.

The substrate transfer unit 100 has each frame formed by the loading unit 111, the processing unit 112, and the discharge unit 113, and is horizontally arranged in a line, and the processing unit 112 is vertically vertically straight. A plurality of shafts 120 and the plurality of shafts 120 are connected to the conveyor main body 110 and the plurality of the first magnetic body 121 for rotational power are arranged in a row at a predetermined interval connected to each frame constituting the conveyor body 110, Conveyor roller 130 is rotatably coupled to each shaft 120 and provided with a plurality of spaced apart, and the second magnetic body 141 is disposed below the first magnetic body 121, but the motor 142 and the belt coupling It is coupled to the motor connecting shaft 144 connected to the pulley 143 is a power supply means for providing a rotary power by the magnet to the shaft 120 comprises a 140.

The processing unit 112 of the conveyor body 110 is configured to move up and down linearly by the operation of the cylinder (C).

The first magnetic body 121 and the second magnetic body 141 are arranged to be in a diagonal line, respectively, so that the same magnetic pole is disposed in the upper / lower positions so as to rotate by the repulsive force by the action of the mutual pushing force.

The processing stage unit 200 is fastened and fixed on the base to be disposed on the processing unit 112 of the conveyor body 110, the roller insertion opening 211 and the vacuum suction opening 212 and the alignment guide sphere 213 A plurality of plate stages 210 formed therein, a substrate adsorption unit 220 for fixing the substrate G on the plate stage 210 by vacuum adsorption through the vacuum suction ports 212, and the plate stage 210. A plurality of blow pads 230 which are internal to expose the surface of the upper surface of the blow pad 230 and a body having fine ventilation holes for air blow, and an air pressure supply unit 240 for supplying air pressure to the blow pads 230; Suction unit 250 for removing dust generated during the exhaust hole processing of the substrate (G) located on the flat plate stage 210 is included.

At this time, the blow pad 230 is produced by injection molding of polyethylene (PE), it forms a fine vent hole that can not be confirmed by the field of view.

The suction unit 250 is connected to the upper and lower sides of the flat plate stage 210 to suck in dust during the processing of the substrate, the upper side is connected to the exhaust hole processing unit 400.

The substrate aligning unit 300 is arranged in the rear of the flat plate stage 210 to form a cylinder 312 to enable vertical movement up / down and move the X-axis position by the operation control of the servo motor 311 A first sorter 310, a second sorter 320 disposed at both sides of the flat plate stage 210 and moved in a Y-axis direction by operation control of the servomotor 321, and the flat plate stage 210. The stopper 330 is disposed in front of the) and regulates the positional movement in the traveling direction of the substrate G to be transported while forming the cylinder 331 to enable vertical movement.

In this case, as shown in FIG. 7, the first sorter 310, the second sorter 320, and the stopper 330 are commonly located on an upper portion of the vertical support S so as to be rotatable. An alignment roller R is coupled to minimize the contact friction force when the substrate is aligned and to protect the substrate.

In addition, as shown in FIG. 3, any one side of the second aligner 320 is configured to apply a tension structure according to the fastening of the spring 322 to easily cope with an error in the size of the substrate provided in various dimensions. Although not shown, it is preferable to apply the tension structure according to the spring fastening to the first sorter.

The exhaust hole processing unit 400 is disposed on the flat plate stage 210, the laser source 410 for generating a laser for processing the exhaust hole on the substrate, and the focus of the laser generated from the laser source 410 ( a focus adjuster 420 for varying the height in the Z-axis direction by adjusting the focus), and X and Y mirrors 431 and 432 for reflecting the laser whose height is adjusted by the focus adjuster 420 to the substrate G side. ), X and Y galvanometers 441 and 442 for position adjustment of the X and Y mirrors, and a focus lens 450 for focusing a laser beam reflected through the X and Y mirrors on the substrate side; A driver 460 for precisely driving the X and Y galvanometers, a controller 470 for controlling the driver, and a cooling operation during the exhaust hole processing by the laser prevents solidification of the substrate G. It includes an air supply unit 480 to.

At this time, the exhaust hole processing unit 400 is installed by arranging a plurality of units in one or more or one unit is installed, but the position in the X-axis, Y-axis and Z-axis direction by a servo motor (not shown) The movement can be configured to be precisely controlled.

As the laser source 410, it is preferable to use an ultraviolet laser which improves spatial resolution by high energy photons which remove materials which do not cause thermal damage and short wavelengths that enable sharp focus, and in particular, very fast maximum power. The use of the Q-switching group's UV lasers, which can reach 10 W at 355 nm with high pulse energy, makes it possible to pursue the efficiency of exhaust hole processing, as well as to achieve precise machining.

In addition, the ultraviolet laser is the most preferred embodiment of the laser source, it is not particularly limited to this, any laser source that can facilitate the exhaust hole processing and precise processing will be applicable.

The focus extender (BET) 420 is an apparatus of a variable BET that adjusts the focus of the laser beam in the Z-axis direction (height), which has an advantage of enabling fast focusing movement.

Furthermore, in the present invention, the focus adjuster 420 may be removed, and the focus lens 450 may be moved up and down in the Z-axis direction by driving a motor (not shown) to adjust the focus height of the laser. have.

In the substrate G applied to the processing apparatus of the present invention, glass is the main material.

Referring to the operation and operation of the display panel exhaust hole processing apparatus according to the present invention having such a configuration as follows.

The loading unit 111 and the processing unit 112 and the discharge unit 113 of the conveyor body 110 is made horizontal and the power supply unit 140 is operated to rotate the conveyor roller 130.

In this case, the processing unit 112 is UP in the DOWN state to be horizontal with the loading unit 111 and the discharge unit 113, by the rotational force of the second magnetic body 141 coupled on the motor connecting shaft 144. The first magnetic body 121 coupled to the shaft 120 forms a corresponding magnet to rotate to rotate the shaft 120 and the conveyor roller 130.

In addition, the first sorter 310 located at the rear of the flat plate stage 210 is operated in an initial DOWN operation so that the substrate is not caught for loading and transporting to the conveyor body 110 of the substrate G. The stopper 330 located in front of the stage 210 is protruded upward to regulate the progress of the substrate to be transferred.

The substrate G, which is in contact with this by the rotational force of the conveyor roller 130, is transferred to the processing unit 112 via the loading unit 111, enters onto the flat plate stage 210, and is placed on the stopper 330 that is UP-operated. Is stopped by.

When the progress of the substrate G is regulated by the stopper 330, the processing unit 112 in the UP operation state is DOWN to seat the substrate on the flat plate stage 210, and at the same time, the blow pad 230 is released from the air pressure supply unit 240. ) So that the air is supplied to the substrate so that the substrate located on the flat plate stage 210 rises due to the air pressure supplied onto the blow pad 230.

Using the floating of the substrate (G) can facilitate the position adjustment of the substrate during alignment of the substrate and provides the advantage of preventing scratches by minimizing the substrate friction coefficient according to the position adjustment of the substrate, and fine Since the air is supplied through the blow pad 230 having a vent hole, the noise is eliminated and the air pressure is easily controlled, thereby providing an advantage of preventing unnecessary air consumption.

The first sorter 310 is UP-operated while the substrate G is in a floating state and moves in the X-axis direction by the operation of the servomotor 311 to cooperate with the stopper while pushing the substrate in the direction of the stopper 330. Aligning the position in the X-axis direction, the second sorter 320 is moved in both directions in the Y-axis direction to push the substrate to the center of the travel direction to align the center.

At this time, any one of the first sorter 310 and the second sorter 320 has a tension structure so that the substrate is aligned to the center while corresponding to an error according to the size of the substrate.

When the center alignment of the substrate G is completed, the air is supplied to the blow pad 230 to block the substrate on the upper surface of the flat stage 210, but the substrate is vacuum-adsorbed by the substrate adsorption unit 220. The substrate is tightly fixed to the upper surface of the stage 210. At this time, the suction unit 250 is operated.

The exhaust hole processing unit 400 processes the exhaust hole on the plane of the substrate G while adjusting the processing position and height of the laser.

At this time, the laser processing position adjustment is performed by the X and Y galvanometers 441 and 442 connected to the X and Y mirrors 431 and 432, which are precisely controlled by the driver 460 and the control unit 470, The height adjustment of the laser is performed quickly by the focus controller 420 of the variable BET method so as to correspond to the processing depth of the substrate G during the exhaust hole processing.

Here, the two-dimensional plane of the substrate that the laser is in contact with the molecular structure is destroyed, the contact hole is drilled through the exhaust hole is processed, and the suction unit 250 is suctioned to remove the fine dust generated during the processing on the upper and lower sides of the substrate do.

When the exhaust hole processing is completed in the substrate G, the first sorter 310 and the second sorter 320 used in the substrate alignment are returned to their original positions, and the substrate adsorption part 220 and the suction part 250 are removed. OFF, the stopper 330 is DOWN, and the down processed part 112 of the conveyor body 110 is UP to discharge the substrate having the exhaust hole processed through the discharge part 113 of the conveyor body 110. .

Here, the power supply means 140 in the DOWN state of the processing unit 112 constituting the conveyor body 110 is turned off, and the power supply means 140 in the UP state of the processing unit 112 is turned on.

On the other hand, the exhaust panel processing apparatus for a display panel according to the present invention has been described with reference to the specific embodiments and the accompanying drawings as described above, but is not particularly limited to this, within the similar category of the technical spirit of the claims of the present invention Various modifications and alterations in the art that are made in the art will be attributed to the present invention.

As described above, according to the display panel exhaust hole processing apparatus according to the present invention, since the non-contact processing using a laser can be performed, the processing efficiency according to the exhaust hole processing can be greatly improved and the transport design for minimizing the friction coefficient of the substrate And aligning structure make it easy to transfer and align the substrate, and improve workability. It also improves working environment by minimizing and eliminating dust during exhaust hole processing. Compared with the present invention, it is useful to prevent burr formation at the exhaust hole processing part and to prevent a problem of cracking or breaking during heat treatment in a post process.

Claims (8)

A substrate transfer unit which transfers the exhaust hole processing substrate with a rotational force by magnetism and divides it into three stages; A processing stage unit which minimizes the substrate friction coefficient when the substrate is aligned and enables stable substrate processing by tightly fixing the substrate; Aligning the substrate in the center of the processing direction on the processing stage unit, but disposed to the rear of the processing stage unit to correspond to the error of the size of the substrate, the first aligner to move vertically and X-axis position, the processing A substrate alignment unit having a second alignment unit disposed at both sides of the stage unit and moving in the Y-axis direction, and a stopper disposed in front of the processing stage unit and vertically moving up and down; In the non-contact drilling by the laser to the substrate, but the exhaust hole processing apparatus for display panel comprising an exhaust hole processing unit for processing the exhaust hole while adjusting the processing position and height of the laser, The substrate transfer unit has a loading unit, each frame formed separately from the processing unit and the discharge unit is arranged horizontally in a row and the processing unit vertically moved up and down vertically; A plurality of shafts arranged in a row at a predetermined interval and connected to each frame constituting the conveyor body, and a plurality of shafts having a first magnetic body coupled thereto for rotational power; A conveyor roller rotatably coupled to each of the shafts and provided with a plurality of shafts; A second magnetic material disposed below the first magnetic material, the power supply means for providing rotational power by magnetism to the shaft by coupling on a motor connecting shaft connected to a pulley coupled to a belt by the motor; Exhaust hole processing equipment for panels. delete The method of claim 1, The processing stage unit is fixed to the center of the upper side of the substrate transfer unit and a flat plate stage formed with a plurality of roller insertion hole, vacuum suction port and alignment guide sphere; A substrate suction unit for tightly fixing the substrate onto the flat plate stage by vacuum suction through the vacuum suction port; A plurality of blow pads that are internally exposed to the upper surface of the flat plate stage and have a body having fine ventilation holes for air blow; An air pressure supply unit for supplying air pressure to the blow pad; And a suction part for removing dust generated during exhaust hole processing of the substrate located on the flat plate stage. delete The method of claim 1, The exhaust hole processing unit includes a laser source for generating a laser for exhaust hole processing on a substrate; A first focus lens for first adjusting a focus of the laser generated from the laser source; X and Y mirrors for reflecting the laser focused primarily by the first focus lens toward the substrate; X and Y galvanometer for adjusting the position of the X and Y mirror; A second focus lens for secondarily adjusting the focus of the laser reflected through the X and Y mirrors; A driver for precisely driving the X and Y galvanometers; A control unit for controlling the driver; Exhaust hole processing apparatus for a display panel, characterized in that it comprises an air supply for preventing the solidification of the substrate by the cooling action when processing the substrate by the laser. The method of claim 1, The first aligner, the second aligner, and the stopper are respectively positioned on top of the vertical support and are rotatably coupled to each other, and an alignment roller is provided to minimize the contact friction force and to protect the substrate when the substrate is aligned. Exhaust hole processing equipment for panels. The method of claim 1, Exhaust hole processing apparatus for a display panel, characterized in that the first sorter and the second sorter is configured to have a tension structure according to the spring fastening to cope with the error of the size of the substrate provided in various dimensions. The method of claim 5, The laser source is an exhaust hole processing apparatus for a display panel, characterized in that using an ultraviolet laser.

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