CN106312336A - Carbon dioxide laser drilling apparatus capable of automatically feeding and blanking - Google Patents

Carbon dioxide laser drilling apparatus capable of automatically feeding and blanking Download PDF

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Publication number
CN106312336A
CN106312336A CN201611037933.3A CN201611037933A CN106312336A CN 106312336 A CN106312336 A CN 106312336A CN 201611037933 A CN201611037933 A CN 201611037933A CN 106312336 A CN106312336 A CN 106312336A
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CN
China
Prior art keywords
unit
workpiece
laser
delivery unit
carbon dioxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201611037933.3A
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Chinese (zh)
Inventor
叶芳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Foshan Zhida Sijia Electrical and Mechanical Technology Co Ltd
Original Assignee
Foshan Zhida Sijia Electrical and Mechanical Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Foshan Zhida Sijia Electrical and Mechanical Technology Co Ltd filed Critical Foshan Zhida Sijia Electrical and Mechanical Technology Co Ltd
Priority to CN201611037933.3A priority Critical patent/CN106312336A/en
Publication of CN106312336A publication Critical patent/CN106312336A/en
Pending legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/38Removing material by boring or cutting
    • B23K26/382Removing material by boring or cutting by boring
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03Observing, e.g. monitoring, the workpiece
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/142Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor for the removal of by-products
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)

Abstract

The invention discloses a carbon dioxide laser drilling apparatus capable of automatically feeding and blanking. The carbon dioxide laser drilling apparatus capable of automatically feeding and blanking comprises a drilling platform, a first conveying unit, a laser drilling unit, a second conveying unit, a visual inspection unit and a control unit. Two sides of the laser drilling unit are respectively provided with the first conveying unit and the second conveying unit. The workpiece is conveyed from the conveyor belt of the first conveying unit to the conveyor belt of the laser drilling unit. The workpiece is fixed by the adsorption plate in the laser drilling unit and the laser is opened to drill the workpiece. The drilled workpiece is conveyed to the conveyor belt of the second conveying unit by the conveyor belt. The workpiece is conveyed to the place of the next processing technology by the second conveying unit. The function of automatically feeding and blanking can be realized without the manual operation. The human cost is saved, the laser drilling apparatus can drill mass workpieces in large size continuously, the production efficiency is high, the matching speed is fast, and the production cost is low.

Description

A kind of carbon dioxide laser drilling equipment realizing automatic loading/unloading
Technical field:
The invention belongs to laser drilling processes field, be specifically related to a kind of carbon dioxide realizing automatic loading/unloading and swash Light drilling equipment.
Background technology:
In the industrial production, the predominantly organic tool of mode for Workpiece boring is holed and laser drill two ways.Machinery Hole predominantly organic tool brill, punch press etc., power auger and punch press processing hole size limited, crudy is poor.Laser drill Ultimate principle is at surface of the work to be processed laser focusing, in conjunction with the Gauss distribution of laser beam and laser and material phase The mechanism of interaction so that the groove formed after laser and workpiece effect presents positive vertebral body, laser drill overcomes processing in the past The unmanageable problem of of poor quality, smaller hole, receives and is widely applied.The processing of existing laser drill generally uses carbon dioxide Laser Processing, the processing of ultraviolet Solid State Laser, solid Nd: YVO3Laser, optical-fiber laser processing etc..
Prior art is applied most be use carbon dioxide laser equipment to process boring, carbon dioxide laser wavelength 9.4~10.6um, being a kind of Submillineter Wave Technology, most organic materials have the ultrared feature of strong absorption, organic Material is after absorbing high infrared very high energies, and fusing rapidly, vaporization are i.e. burnt, thus forms through hole on workpiece, but Being existing carbon dioxide laser drilling equipment typically uses manual operation, manual operation efficiency for feeding and the blanking of workpiece Low, error is big, it is impossible to meeting the continuous drilling work of laser drill equipment, and when workpiece is bigger, artificial loading and blanking are all Relatively difficult, need to expend substantial amounts of manpower, production efficiency is low, process velocity is slow, and production cost is high.
Summary of the invention:
To this end, the technical problem to be solved is that in prior art, carbon dioxide laser drilling equipment is for work The feeding of part and blanking typically use manual operation, and manual operation efficiency is low, error is big, it is impossible to meet the company of laser drill equipment Continuous boring work, and when workpiece is bigger, artificial loading and blanking are the most relatively difficult, need to expend substantial amounts of manpower, produce effect Rate is low, process velocity is slow, and production cost is high, thus proposes a kind of carbon dioxide laser boring dress realizing automatic loading/unloading Put.
For reaching above-mentioned purpose, technical scheme is as follows:
A kind of carbon dioxide laser drilling equipment realizing automatic loading/unloading, including:
Board, the first delivery unit, laser drill unit, the second delivery unit, visual detection unit, control unit, institute State the first delivery unit, described laser drill unit, described second delivery unit are successively set on the top of described board.
Described first delivery unit is identical with described second delivery unit structure, and described first delivery unit includes structure phase Same and symmetrically arranged two piece of first side plate, the side of two blocks of described first side plates is provided with the first conveyer belt.
Described laser drill unit includes that structure is identical and symmetrically arranged two piece of second side plate, two blocks of described second side plates Side be provided with the second conveyer belt, be provided with lowering or hoisting gear between two blocks of described second side plates, described lowering or hoisting gear upper End be fixed with adsorption plate, described adsorption plate is used for adsorbing workpiece, two blocks of described second side plates be provided above laser instrument and light System, the laser beam that described laser instrument sends is transmitted on described workpiece after described optical system.
Described visual detection unit includes the first imageing sensor, the second imageing sensor, the 3rd imageing sensor, described First imageing sensor is arranged on described first delivery unit and the junction of described laser drill unit, and described second image passes Sensor is arranged on the top of the lowering or hoisting gear in described laser drill unit, and described 3rd imageing sensor is arranged on described laser Units and the junction of described second delivery unit.
Described control unit respectively with described first delivery unit, laser drill unit, the second delivery unit, vision-based detection Unit electrically connects.
Preferred as technique scheme, described laser drill unit also includes that air jet system, described air jet system set Put between described optical system and described workpiece.
Preferred as technique scheme, described air jet system includes puff prot, connects pipeline, air pump, described jet Mouth connects described air pump by described connection pipeline.
Preferred as technique scheme, described lowering or hoisting gear is cylinder, and described lowering or hoisting gear includes cylinder body and piston Bar, described cylinder body is fixed on described board, and the upper end of described piston rod is fixing connects described adsorption plate.
Preferred as technique scheme, described adsorption plate is provided with multiple adsorption hole, and described adsorption hole is used for inhaling Attached described workpiece.
Preferred as technique scheme, described optical system includes beam expanding lens, mirror of turning back, focus lamp, described laser The laser beam that device sends sequentially pass through described beam expanding lens, described in turn back and be transmitted on described workpiece after mirror, described focus lamp.
Preferred as technique scheme, described first conveyer belt, described second conveyer structure are identical, and described first Conveyer belt includes belt, belt pulley, synchronous motor.
The beneficial effects of the present invention is: its by be respectively provided with in the both sides of laser drill unit the first delivery unit and Second delivery unit, is sent to workpiece from the conveyer belt of the first delivery unit on the conveyer belt of laser drill unit, passes through Workpiece is fixed and is opened laser instrument and holes workpiece by the adsorption plate in laser drill unit, and workpiece boring completed leads to Crossing conveyer belt to be sent on the conveyer belt of the second delivery unit, workpiece is sent to next processing technique by the second delivery unit Place, it is achieved that the function of the automatic loading/unloading of workpiece, it is not necessary to manual operation, saves human cost, can meet laser drill and set The standby continuous drilling to high-volume large-size workpiece works, and production efficiency is high, and process velocity is fast, and production cost is low.It passes through Air jet system is set between optical system and workpiece, utilizes puff prot that workpiece is carried out jet, by the smog of surface of the work, dust Blow down with process residues etc., make laser beam fully act on workpiece, improve the capacity usage ratio of laser, improve the matter of processing Amount and speed.This apparatus structure is simple and convenient to operate, stability high, reliability is high, be suitable for industrial environment uses.
Accompanying drawing illustrates:
The following drawings is only intended to, in schematically illustrating the present invention and explaining, not delimit the scope of the invention.Wherein:
Fig. 1 is a kind of carbon dioxide laser drilling equipment structure realizing automatic loading/unloading of one embodiment of the invention Schematic diagram;
Fig. 2 is a kind of conveyer structure schematic diagram of one embodiment of the invention;
Fig. 3 is a kind of laser drill cellular construction schematic diagram of one embodiment of the invention;
Fig. 4 is a kind of lifting device structure schematic diagram of one embodiment of the invention;
Fig. 5 is a kind of optical system structure schematic diagram of one embodiment of the invention.
Symbol description in figure:
1-board, 2-the first delivery unit, 3-laser drill unit, 4-the second delivery unit, 7-workpiece, 201-the first side Plate, 202-the first conveyer belt, 301-the second side plate, 302-the second conveyer belt, 303-lowering or hoisting gear, 304-adsorption plate, 305-swashs Light device, 306-optical system, 307-air jet system, 501-the first imageing sensor, 502-the second imageing sensor, 503-the 3rd Imageing sensor, 2021-belt, 2022-belt pulley, 2023-synchronous motor, 3031-cylinder body, 3032-piston rod, 3061-expands Shu Jing, 3062-turn back mirror, and 3063-focus lamp, 3071-puff prot, 3072-connects pipeline, 3073-air pump.
Detailed description of the invention:
As it is shown in figure 1, the carbon dioxide laser drilling equipment of the realized automatic loading/unloading of the present invention, including: board 1, First delivery unit 2, laser drill unit the 3, second delivery unit 4, visual detection unit 5 (not shown), control unit 6 (not shown), described first delivery unit 2, described laser drill unit 3, described second delivery unit 4 are successively set on The top of described board 1.
Described first delivery unit 2 is identical with described second delivery unit 4 structure, and described first delivery unit 2 includes knot Structure is identical and symmetrically arranged two piece of first side plate 201, and the side of two blocks of described first side plates 201 is provided with the first conveyer belt 202.Described first conveyer belt 202, described second conveyer belt 302 structure are identical, as in figure 2 it is shown, described first conveyer belt 202 wraps Include belt 2021, belt pulley 2022, synchronous motor 2023.
As it is shown on figure 3, described laser drill unit 3 includes that structure is identical and symmetrically arranged two piece of second side plate 301, two The side of the second side plate 301 described in block is provided with the second conveyer belt 302, is provided with liter between two blocks of described second side plates 301 Falling unit 303, the upper end of described lowering or hoisting gear 303 is fixed with adsorption plate 304, and described adsorption plate 304 is used for adsorbing workpiece 7, this In embodiment, described lowering or hoisting gear 303 is cylinder, and as shown in Figure 4, described lowering or hoisting gear 303 includes cylinder body 3031 and piston rod 3032, described cylinder body 3031 is fixed on described board 1, and the upper end of described piston rod 3032 is fixing connects described adsorption plate 304. Being provided with multiple adsorption hole on described adsorption plate 304, described adsorption hole is used for adsorbing described workpiece 7.Two blocks of described second side plates 301 be provided above laser instrument 305 and optical system 306, the laser beam that described laser instrument 305 sends is through described optical system It is transmitted on described workpiece 7 after system 306.As it is shown in figure 5, described optical system 306 include beam expanding lens 3061, mirror 3062 of turning back, Focus lamp 3063, the laser beam that described laser instrument 305 sends sequentially pass through described beam expanding lens 3061, described in turn back mirror 3062, institute It is transmitted into after stating focus lamp 3063 on described workpiece 7.Described laser drill unit 3 also includes air jet system 307, and described jet fills Put 307 to be arranged between described optical system 306 and described workpiece 7.As it is shown in figure 5, described air jet system 307 includes puff prot 3071, connecting pipeline 3072, air pump 3073, described puff prot 3071 connects described air pump by described connection pipeline 3072 3073。
Described visual detection unit 5 includes first imageing sensor the 501, second imageing sensor the 502, the 3rd image sensing Device 503, described first imageing sensor 501 is arranged on described first delivery unit 2 and the connection of described laser drill unit 3 Place, described second imageing sensor 502 is arranged on the top of the lowering or hoisting gear 303 in described laser drill unit 3, and the described 3rd Imageing sensor 503 is arranged on described laser drill unit 3 and the junction of described second delivery unit 4.
Described control unit 6 respectively with described first delivery unit 1, laser drill unit the 3, second delivery unit 4, vision Detector unit 5 electrically connects.
Operation principle:
Control unit 6 controls the conveyer belt on described first delivery unit 1 and workpiece 7 is sent to described first delivery unit 1 and the junction of described laser drill unit 2, described first imageing sensor 501 obtains Work position information, and according to second Imageing sensor 502 judges whether have workpiece in laser drill unit 2, if not having, then control unit 6 controls described laser drill Conveyer belt on unit 3 starts running, and drives described workpiece 7 to shut down after arriving the top of described adsorption plate 304, described liter Falling unit 303 drives described adsorption plate 304 to move up, and described adsorption plate 304 adsorbs the workpiece on described second conveyer belt 302 7 and drive described workpiece 7 to be moved upwards up to certain position, meanwhile, control unit 6 opens laser instrument 305, described laser instrument 305 The laser beam sent sequentially pass through described beam expanding lens 3061, described in turn back be transmitted into after mirror 3062, described focus lamp 3063 described On workpiece 7, holing workpiece, after having holed, described lowering or hoisting gear 303 drives described workpiece 7 to drop to described second On conveyer belt 302, control unit 6 controls described second conveyer belt 302 and operates, and described workpiece 7 is sent to laser drill unit With the junction of the second delivery unit, the 3rd imageing sensor 503 obtains the positional information of workpiece and returns to control unit 6, Control unit 6 controls the conveyer belt on the second delivery unit 4 and carries out operating and moved to by workpiece 7 at next processing technique, from And achieve the automatic loading/unloading of carbon dioxide laser drilling equipment, repeat said process, continue the brill of next workpiece Hole works.
The carbon dioxide laser drilling equipment of the realized automatic loading/unloading described in the present embodiment, including board, the first biography Sending unit, laser drill unit, the second delivery unit, visual detection unit, control unit, it is by laser drill unit Both sides are respectively provided with the first delivery unit and the second delivery unit, are sent to swash from the conveyer belt of the first delivery unit by workpiece On the conveyer belt of light units, fix and open laser instrument workpiece is entered by workpiece by the adsorption plate in laser drill unit Row boring, workpiece boring completed is sent on the conveyer belt of the second delivery unit by conveyer belt, and the second delivery unit will Workpiece is sent at next processing technique, it is achieved that the function of the automatic loading/unloading of workpiece, it is not necessary to manual operation, saves people Power cost, can meet laser drill equipment and work the continuous drilling of high-volume large-size workpiece, and production efficiency is high, process velocity Hurry up, production cost is low.This apparatus structure is simple and convenient to operate, stability high, reliability is high, be suitable for industrial environment uses.
Obviously, above-described embodiment is only for clearly demonstrating example, and not restriction to embodiment.Right For those of ordinary skill in the field, can also make on the basis of the above description other multi-form change or Variation.Here without also cannot all of embodiment be given exhaustive.And the obvious change thus extended out or Change among still in the protection domain of the invention.

Claims (7)

1. the carbon dioxide laser drilling equipment that can realize automatic loading/unloading, it is characterised in that including:
Board (1), the first delivery unit (2), laser drill unit (3), the second delivery unit (4), visual detection unit (5), Control unit (6), described first delivery unit (2), described laser drill unit (3), described second delivery unit (4) set successively Put the top in described board (1);
Described first delivery unit (2) is identical with described second delivery unit (4) structure, and described first delivery unit (2) includes Structure is identical and symmetrically arranged two piece of first side plate (201), and the side of two pieces of described first side plates (201) is provided with first Conveyer belt (202);
Described laser drill unit (3) includes that structure is identical and symmetrically arranged two piece of second side plate (301), two pieces described second The side of side plate (301) is provided with the second conveyer belt (302), is provided with lifting dress between two pieces of described second side plates (301) Putting (303), the upper end of described lowering or hoisting gear (303) is fixed with adsorption plate (304), and described adsorption plate (304) is used for adsorbing workpiece (7), two pieces of described second side plates (301) be provided above laser instrument (305) and optical system (306), described laser instrument (305) laser beam sent is transmitted on described workpiece (7) after described optical system (306);
Described visual detection unit (5) includes that the first imageing sensor (501), the second imageing sensor (502), the 3rd image pass Sensor (503), described first imageing sensor (501) is arranged on described first delivery unit (2) and described laser drill unit (3) junction, described second imageing sensor (502) is arranged on the lowering or hoisting gear (303) in described laser drill unit (3) Top, described 3rd imageing sensor (503) is arranged on described laser drill unit (3) and described second delivery unit (4) Junction;
Described control unit (6) respectively with described first delivery unit (1), laser drill unit (3), the second delivery unit (4), Visual detection unit (5) electrically connects.
The carbon dioxide laser drilling equipment realizing automatic loading/unloading the most according to claim 1, it is characterised in that: institute State laser drill unit (3) and also include that air jet system (307), described air jet system (307) are arranged on described optical system (306) And between described workpiece (7).
The carbon dioxide laser drilling equipment realizing automatic loading/unloading the most according to claim 1, it is characterised in that: institute Stating air jet system (307) to include puff prot (3071), connect pipeline (3072), air pump (3073), described puff prot (3071) leads to Cross described connection pipeline (3072) and connect described air pump (3073).
The carbon dioxide laser drilling equipment realizing automatic loading/unloading the most according to claim 1, it is characterised in that: institute Stating lowering or hoisting gear (303) is cylinder, and described lowering or hoisting gear (303) includes cylinder body (3031) and piston rod (3032), described cylinder body (3031) being fixed on described board (1), the upper end of described piston rod (3032) is fixing connects described adsorption plate (304).
The carbon dioxide laser drilling equipment realizing automatic loading/unloading the most according to claim 1, it is characterised in that: institute Stating and be provided with multiple adsorption hole on adsorption plate (304), described adsorption hole is used for adsorbing described workpiece (7).
The carbon dioxide laser drilling equipment realizing automatic loading/unloading the most according to claim 1, it is characterised in that: institute Stating optical system (306) and include beam expanding lens (3061), mirror of turning back (3062), focus lamp (3063), described laser instrument (305) sends Laser beam sequentially pass through described beam expanding lens (3061), described in turn back mirror (3062), described focus lamp be transmitted into institute after (3063) State on workpiece (7).
The carbon dioxide laser drilling equipment realizing automatic loading/unloading the most according to claim 1, it is characterised in that: institute Stating the first conveyer belt (202), described second conveyer belt (302) structure identical, described first conveyer belt (202) includes belt (2021), belt pulley (2022), synchronous motor (2023).
CN201611037933.3A 2016-11-23 2016-11-23 Carbon dioxide laser drilling apparatus capable of automatically feeding and blanking Pending CN106312336A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201611037933.3A CN106312336A (en) 2016-11-23 2016-11-23 Carbon dioxide laser drilling apparatus capable of automatically feeding and blanking

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201611037933.3A CN106312336A (en) 2016-11-23 2016-11-23 Carbon dioxide laser drilling apparatus capable of automatically feeding and blanking

Publications (1)

Publication Number Publication Date
CN106312336A true CN106312336A (en) 2017-01-11

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CN201611037933.3A Pending CN106312336A (en) 2016-11-23 2016-11-23 Carbon dioxide laser drilling apparatus capable of automatically feeding and blanking

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110441157A (en) * 2019-08-08 2019-11-12 中国地质大学(武汉) A kind of rock confining pressure loading device for laser drilling experiment
CN112666256A (en) * 2020-12-18 2021-04-16 济南海马机械设计有限公司 Workpiece online scanning system and use method thereof

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CN102723302A (en) * 2012-04-23 2012-10-10 吴周令 Fully-automatic loading and unloading device used in processing semiconductor chips by laser and application method thereof
CN102717193A (en) * 2012-06-07 2012-10-10 江阴德力激光设备有限公司 Device and method for manufacturing silicon solar cell electrode printing screen through laser
CN202607073U (en) * 2012-04-23 2012-12-19 吴周令 Full-automatic semiconductor chip laser machining device
CN103551743A (en) * 2013-11-04 2014-02-05 苏州德龙激光股份有限公司 Glass drilling device for production line
CN104551418A (en) * 2015-02-12 2015-04-29 鞍山盛雄激光设备有限公司 High-speed laser drilling machine capable of charging and discharging automatically

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Publication number Priority date Publication date Assignee Title
JP2007176631A (en) * 2005-12-27 2007-07-12 Tokyo Electron Ltd Substrate conveying system
JP2008084847A (en) * 2006-09-28 2008-04-10 Poong San System Co Ltd Exhaust hole processing device for display panel
CN102723302A (en) * 2012-04-23 2012-10-10 吴周令 Fully-automatic loading and unloading device used in processing semiconductor chips by laser and application method thereof
CN202607073U (en) * 2012-04-23 2012-12-19 吴周令 Full-automatic semiconductor chip laser machining device
CN102717193A (en) * 2012-06-07 2012-10-10 江阴德力激光设备有限公司 Device and method for manufacturing silicon solar cell electrode printing screen through laser
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110441157A (en) * 2019-08-08 2019-11-12 中国地质大学(武汉) A kind of rock confining pressure loading device for laser drilling experiment
CN110441157B (en) * 2019-08-08 2024-01-30 中国地质大学(武汉) Rock confining pressure loading device for laser drilling experiment
CN112666256A (en) * 2020-12-18 2021-04-16 济南海马机械设计有限公司 Workpiece online scanning system and use method thereof
CN112666256B (en) * 2020-12-18 2022-12-23 嘉禾县宏盛制造有限公司 Workpiece online scanning system and use method thereof

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Application publication date: 20170111