KR100799896B1 - 캐리어 상에 디바이스를 정렬하기 위한 장치 및 방법 - Google Patents

캐리어 상에 디바이스를 정렬하기 위한 장치 및 방법 Download PDF

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Publication number
KR100799896B1
KR100799896B1 KR1020060001600A KR20060001600A KR100799896B1 KR 100799896 B1 KR100799896 B1 KR 100799896B1 KR 1020060001600 A KR1020060001600 A KR 1020060001600A KR 20060001600 A KR20060001600 A KR 20060001600A KR 100799896 B1 KR100799896 B1 KR 100799896B1
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KR
South Korea
Prior art keywords
carrier
semiconductor device
semiconductor devices
alignment
pocket
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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KR1020060001600A
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English (en)
Korean (ko)
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KR20060081356A (ko
Inventor
치 워 쳉
호이 슈엔 조셉 탕
팀 와이 토니 마크
치 항 렁
Original Assignee
에이에스엠 어쌤블리 오토메이션 리미티드
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Publication of KR20060081356A publication Critical patent/KR20060081356A/ko
Application granted granted Critical
Publication of KR100799896B1 publication Critical patent/KR100799896B1/ko
Assigned to 에이에스엠피티 싱가포르 피티이. 엘티디. reassignment 에이에스엠피티 싱가포르 피티이. 엘티디. 권리의 전부이전등록 Assignors: 에이에스엠 어쌤블리 오토메이션 리미티드
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/04Housings; Supporting members; Arrangements of terminals
    • G01R1/0408Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0433Sockets for IC's or transistors
    • G01R1/0441Details
    • G01R1/045Sockets or component fixtures for RF or HF testing
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61FFILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F9/00Methods or devices for treatment of the eyes; Devices for putting in contact-lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
    • A61F9/02Goggles
    • A61F9/025Special attachment of screens, e.g. hinged, removable; Roll-up protective layers
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61FFILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F9/00Methods or devices for treatment of the eyes; Devices for putting in contact-lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
    • A61F9/02Goggles
    • A61F9/027Straps; Buckles; Attachment of headbands
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61FFILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F9/00Methods or devices for treatment of the eyes; Devices for putting in contact-lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
    • A61F9/02Goggles
    • A61F9/029Additional functions or features, e.g. protection for other parts of the face such as ears, nose or mouth; Screen wipers or cleaning devices
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61FFILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F2250/00Special features of prostheses classified in groups A61F2/00 - A61F2/26 or A61F2/82 or A61F9/00 or A61F11/00 or subgroups thereof
    • A61F2250/0058Additional features; Implant or prostheses properties not otherwise provided for
    • A61F2250/0073Force-limiting means
    • A61F2250/0074Torque-limiting means

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  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Vascular Medicine (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Veterinary Medicine (AREA)
  • Ophthalmology & Optometry (AREA)
  • Public Health (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Otolaryngology (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020060001600A 2005-01-07 2006-01-06 캐리어 상에 디바이스를 정렬하기 위한 장치 및 방법 Expired - Lifetime KR100799896B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/031,024 2005-01-07
US11/031,024 US7258703B2 (en) 2005-01-07 2005-01-07 Apparatus and method for aligning devices on carriers

Publications (2)

Publication Number Publication Date
KR20060081356A KR20060081356A (ko) 2006-07-12
KR100799896B1 true KR100799896B1 (ko) 2008-01-31

Family

ID=36653765

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020060001600A Expired - Lifetime KR100799896B1 (ko) 2005-01-07 2006-01-06 캐리어 상에 디바이스를 정렬하기 위한 장치 및 방법

Country Status (7)

Country Link
US (1) US7258703B2 (https=)
JP (1) JP4440219B2 (https=)
KR (1) KR100799896B1 (https=)
CN (1) CN100403510C (https=)
MY (1) MY136858A (https=)
SG (1) SG123786A1 (https=)
TW (1) TWI286813B (https=)

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US7258703B2 (en) * 2005-01-07 2007-08-21 Asm Assembly Automation Ltd. Apparatus and method for aligning devices on carriers
US7726540B2 (en) * 2005-12-12 2010-06-01 Asm Assembly Automation Ltd. Apparatus and method for arranging devices for processing
JP2008003049A (ja) * 2006-06-26 2008-01-10 Micronics Japan Co Ltd プローブ組立体
US8011058B2 (en) * 2006-10-31 2011-09-06 Asm Assembly Automation Ltd Singulation handler system for electronic packages
US7965091B2 (en) * 2007-04-30 2011-06-21 Electro Scientific Industries, Inc. Test plate for electronic handler
KR100885492B1 (ko) * 2007-06-04 2009-02-24 (주)케이엔씨 반도체 소자 영상 검사용 클램핑 장치
KR100901523B1 (ko) * 2007-07-16 2009-06-08 (주)테크윙 테스트핸들러용 개방기 및 버퍼테이블
MY151802A (en) * 2008-02-15 2014-07-14 Multitest Elektronische Syst Device and method for aligning and holding a plurality of singulated semi-conductor components in receiving pockets of a terminal carrier
KR100981130B1 (ko) 2008-09-10 2010-09-14 주식회사 하나엔-텍 케리어소켓의 포켓교체장치
KR101029369B1 (ko) * 2009-01-23 2011-04-13 (주) 에스에스피 자동화 장비의 자재 정렬장치
DE102009018393B4 (de) * 2009-04-22 2017-05-24 Atotech Deutschland Gmbh Verfahren, Haltemittel, Vorrichtung und System zum Transportieren eines flächigen Behandlungsgutes und Be- oder Entladeeinrichtung
US8522754B2 (en) * 2009-07-01 2013-09-03 International Engine Intellectual Property Company, Llc. Fuel injector clamp
MY152429A (en) 2009-08-18 2014-09-30 Multitest Elektronische Syst Carrier for aligning electronic components with slidably arranged plates
EP2302399B1 (en) * 2009-08-18 2012-10-10 Multitest elektronische Systeme GmbH System for post-processing of electronic components
MY154258A (en) * 2009-08-18 2015-05-29 Multitest Elektronische Syst Elastic unit exerting two angled force components on an abutting section of an align fixture
MY160276A (en) 2009-08-18 2017-02-28 Multitest Elektronische Systeme Gmbh An elastic unit as a separate elastic member to be mounted at an elastic unit receiving section of an align fixture
MY152834A (en) 2009-08-18 2014-11-28 Multitest Elektronische Syst An elastic unit for clamping an electronic component and extending below an electronic component receiving volume of an align fixture
MY151553A (en) * 2009-08-18 2014-06-13 Multitest Elektronische Syst Two abutting sections of an align fixture together floatingly engaging an electronic component
US8683674B2 (en) * 2010-12-07 2014-04-01 Centipede Systems, Inc. Method for stacking microelectronic devices
US20120249172A1 (en) * 2011-03-31 2012-10-04 Electro Scientific Industries, Inc. Alignment system for electronic device testing
CN102914951B (zh) * 2011-08-04 2014-11-12 上海微电子装备有限公司 用于光刻设备的预对准装置
CN102335972A (zh) * 2011-10-24 2012-02-01 无锡绿波新能源设备有限公司 真空吸盘
ITTO20120321A1 (it) * 2012-04-12 2013-10-13 Spea Spa Unita' di supporto e posizionamento di componenti a semiconduttore
KR101404979B1 (ko) * 2012-07-24 2014-06-10 (주)에이젯 반도체 디바이스 정렬 장치 및 정렬 방법
JP5986447B2 (ja) * 2012-07-25 2016-09-06 株式会社アルバック トレイ、基板の位置調整システム、及び露光装置
EP2765431B1 (en) 2013-02-11 2016-05-25 Rasco GmbH Carrier for electronic components
ITTO20130324A1 (it) * 2013-04-22 2014-10-23 St Microelectronics Srl Dispositivo vibrante per il posizionamento di un pezzo miniaturizzato in una sede di test, e metodo di posizionamento
US9857419B2 (en) * 2013-07-12 2018-01-02 Delta Design, Inc. Micro-vision alignment system with guiding rings for IC testing
US10041973B2 (en) * 2013-09-04 2018-08-07 Infineon Technologies Ag Method and apparatus for dynamic alignment of semiconductor devices
EP2884293A1 (en) 2013-12-12 2015-06-17 Rasco GmbH Semiconductor device carrier
US9772373B2 (en) * 2014-03-25 2017-09-26 Advantest Corporation Handler apparatus, device holder, and test apparatus
KR101748248B1 (ko) * 2014-03-25 2017-06-16 가부시키가이샤 어드밴티스트 핸들러 장치 및 시험 장치
CN104605599B (zh) * 2015-02-12 2016-04-13 京东方科技集团股份有限公司 一种ic盘盒
DE102016004592B4 (de) 2016-04-14 2017-11-02 Mühlbauer Gmbh & Co. Kg System und Verfahren zum Ausrichten elektronischer Bauteile
US10473714B2 (en) * 2017-03-06 2019-11-12 Asm Technology Singapore Pte Ltd Method and apparatus for aligning electronic components
CN111742232A (zh) * 2017-12-19 2020-10-02 波士顿半导体设备有限公司 无套件取放处理机
CN108922860B (zh) * 2018-08-27 2023-12-12 无锡中微高科电子有限公司 一种全阵列引脚陶瓷外壳的自动装片夹具
DE102020200817B3 (de) * 2020-01-23 2021-06-17 Lpkf Laser & Electronics Aktiengesellschaft Montageverfahren für eine integrierte Halbleiter-Waver-Vorrichtung und dafür verwendbare Montagevorrichtung
KR102291194B1 (ko) * 2020-03-09 2021-08-20 에이엠티 주식회사 미세 피치를 갖는 디바이스의 얼라인장치 및 그 방법
KR102295435B1 (ko) * 2020-03-12 2021-08-31 에이엠티 주식회사 미세 피치를 갖는 디바이스의 얼라인 및 테스트장치 그리고 디바이스의 얼라인방법
US12400993B2 (en) * 2020-08-19 2025-08-26 Shinkawa Ltd. Substrate holder and bonding system

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JPS6461031A (en) * 1987-09-01 1989-03-08 Sumitomo Electric Industries Device for mounting chip
JPH10321654A (ja) * 1997-05-22 1998-12-04 Matsushita Electric Ind Co Ltd チップのボンディング装置
KR19990078329A (ko) * 1998-03-27 1999-10-25 플루오로웨어, 아이엔씨 어댑터 지그
KR200169340Y1 (ko) * 1999-08-28 2000-02-15 아남반도체주식회사 반도체패키지 제조용 범용 보트 캐리어
KR100296460B1 (ko) * 1993-06-29 2001-10-24 야마나카 가즈타카 Ic 캐리어
JP2002198380A (ja) * 2001-11-20 2002-07-12 Matsushita Electric Ind Co Ltd チップの実装方法
US20060154386A1 (en) * 2005-01-07 2006-07-13 Asm Assembly Automation Ltd. Apparatus and method for aligning devices on carriers

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JPS6461031A (en) * 1987-09-01 1989-03-08 Sumitomo Electric Industries Device for mounting chip
KR100296460B1 (ko) * 1993-06-29 2001-10-24 야마나카 가즈타카 Ic 캐리어
JPH10321654A (ja) * 1997-05-22 1998-12-04 Matsushita Electric Ind Co Ltd チップのボンディング装置
KR19990078329A (ko) * 1998-03-27 1999-10-25 플루오로웨어, 아이엔씨 어댑터 지그
KR200169340Y1 (ko) * 1999-08-28 2000-02-15 아남반도체주식회사 반도체패키지 제조용 범용 보트 캐리어
JP2002198380A (ja) * 2001-11-20 2002-07-12 Matsushita Electric Ind Co Ltd チップの実装方法
US20060154386A1 (en) * 2005-01-07 2006-07-13 Asm Assembly Automation Ltd. Apparatus and method for aligning devices on carriers

Also Published As

Publication number Publication date
SG123786A1 (en) 2006-07-26
JP2006191121A (ja) 2006-07-20
CN1819136A (zh) 2006-08-16
US20060154386A1 (en) 2006-07-13
US7258703B2 (en) 2007-08-21
KR20060081356A (ko) 2006-07-12
JP4440219B2 (ja) 2010-03-24
MY136858A (en) 2008-11-28
CN100403510C (zh) 2008-07-16
TWI286813B (en) 2007-09-11
TW200629465A (en) 2006-08-16

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