CN100403510C - 用于定位载体上器件的装置和方法 - Google Patents

用于定位载体上器件的装置和方法 Download PDF

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Publication number
CN100403510C
CN100403510C CNB2006100002356A CN200610000235A CN100403510C CN 100403510 C CN100403510 C CN 100403510C CN B2006100002356 A CNB2006100002356 A CN B2006100002356A CN 200610000235 A CN200610000235 A CN 200610000235A CN 100403510 C CN100403510 C CN 100403510C
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CN
China
Prior art keywords
positioning
carrier
semiconductor device
holder
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CNB2006100002356A
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English (en)
Chinese (zh)
Other versions
CN1819136A (zh
Inventor
郑志华
邓海旋
麦添伟
梁志恒
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASMPT Singapore Pte Ltd
Original Assignee
ASM Assembly Automation Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASM Assembly Automation Ltd filed Critical ASM Assembly Automation Ltd
Publication of CN1819136A publication Critical patent/CN1819136A/zh
Application granted granted Critical
Publication of CN100403510C publication Critical patent/CN100403510C/zh
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F9/00—Methods or devices for treatment of the eyes; Devices for putting in contact-lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
    • A61F9/02—Goggles
    • A61F9/025—Special attachment of screens, e.g. hinged, removable; Roll-up protective layers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/04—Housings; Supporting members; Arrangements of terminals
    • G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
    • G01R1/0433—Sockets for IC's or transistors
    • G01R1/0441—Details
    • G01R1/045—Sockets or component fixtures for RF or HF testing
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F9/00—Methods or devices for treatment of the eyes; Devices for putting in contact-lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
    • A61F9/02—Goggles
    • A61F9/027—Straps; Buckles; Attachment of headbands
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F9/00—Methods or devices for treatment of the eyes; Devices for putting in contact-lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
    • A61F9/02—Goggles
    • A61F9/029—Additional functions or features, e.g. protection for other parts of the face such as ears, nose or mouth; Screen wipers or cleaning devices
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F2250/00—Special features of prostheses classified in groups A61F2/00 - A61F2/26 or A61F2/82 or A61F9/00 or A61F11/00 or subgroups thereof
    • A61F2250/0058—Additional features; Implant or prostheses properties not otherwise provided for
    • A61F2250/0073—Force-limiting means
    • A61F2250/0074—Torque-limiting means

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  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Vascular Medicine (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Veterinary Medicine (AREA)
  • Ophthalmology & Optometry (AREA)
  • Public Health (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Otolaryngology (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
CNB2006100002356A 2005-01-07 2006-01-06 用于定位载体上器件的装置和方法 Expired - Lifetime CN100403510C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/031,024 2005-01-07
US11/031,024 US7258703B2 (en) 2005-01-07 2005-01-07 Apparatus and method for aligning devices on carriers

Publications (2)

Publication Number Publication Date
CN1819136A CN1819136A (zh) 2006-08-16
CN100403510C true CN100403510C (zh) 2008-07-16

Family

ID=36653765

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB2006100002356A Expired - Lifetime CN100403510C (zh) 2005-01-07 2006-01-06 用于定位载体上器件的装置和方法

Country Status (7)

Country Link
US (1) US7258703B2 (https=)
JP (1) JP4440219B2 (https=)
KR (1) KR100799896B1 (https=)
CN (1) CN100403510C (https=)
MY (1) MY136858A (https=)
SG (1) SG123786A1 (https=)
TW (1) TWI286813B (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
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CN103443641A (zh) * 2011-03-31 2013-12-11 电子科学工业有限公司 用于电子装置测试的对准系统

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US7258703B2 (en) * 2005-01-07 2007-08-21 Asm Assembly Automation Ltd. Apparatus and method for aligning devices on carriers
US7726540B2 (en) * 2005-12-12 2010-06-01 Asm Assembly Automation Ltd. Apparatus and method for arranging devices for processing
JP2008003049A (ja) * 2006-06-26 2008-01-10 Micronics Japan Co Ltd プローブ組立体
US8011058B2 (en) * 2006-10-31 2011-09-06 Asm Assembly Automation Ltd Singulation handler system for electronic packages
US7965091B2 (en) * 2007-04-30 2011-06-21 Electro Scientific Industries, Inc. Test plate for electronic handler
KR100885492B1 (ko) * 2007-06-04 2009-02-24 (주)케이엔씨 반도체 소자 영상 검사용 클램핑 장치
KR100901523B1 (ko) * 2007-07-16 2009-06-08 (주)테크윙 테스트핸들러용 개방기 및 버퍼테이블
MY151802A (en) * 2008-02-15 2014-07-14 Multitest Elektronische Syst Device and method for aligning and holding a plurality of singulated semi-conductor components in receiving pockets of a terminal carrier
KR100981130B1 (ko) 2008-09-10 2010-09-14 주식회사 하나엔-텍 케리어소켓의 포켓교체장치
KR101029369B1 (ko) * 2009-01-23 2011-04-13 (주) 에스에스피 자동화 장비의 자재 정렬장치
DE102009018393B4 (de) * 2009-04-22 2017-05-24 Atotech Deutschland Gmbh Verfahren, Haltemittel, Vorrichtung und System zum Transportieren eines flächigen Behandlungsgutes und Be- oder Entladeeinrichtung
US8522754B2 (en) * 2009-07-01 2013-09-03 International Engine Intellectual Property Company, Llc. Fuel injector clamp
MY152429A (en) 2009-08-18 2014-09-30 Multitest Elektronische Syst Carrier for aligning electronic components with slidably arranged plates
EP2302399B1 (en) * 2009-08-18 2012-10-10 Multitest elektronische Systeme GmbH System for post-processing of electronic components
MY154258A (en) * 2009-08-18 2015-05-29 Multitest Elektronische Syst Elastic unit exerting two angled force components on an abutting section of an align fixture
MY160276A (en) 2009-08-18 2017-02-28 Multitest Elektronische Systeme Gmbh An elastic unit as a separate elastic member to be mounted at an elastic unit receiving section of an align fixture
MY152834A (en) 2009-08-18 2014-11-28 Multitest Elektronische Syst An elastic unit for clamping an electronic component and extending below an electronic component receiving volume of an align fixture
MY151553A (en) * 2009-08-18 2014-06-13 Multitest Elektronische Syst Two abutting sections of an align fixture together floatingly engaging an electronic component
US8683674B2 (en) * 2010-12-07 2014-04-01 Centipede Systems, Inc. Method for stacking microelectronic devices
CN102914951B (zh) * 2011-08-04 2014-11-12 上海微电子装备有限公司 用于光刻设备的预对准装置
CN102335972A (zh) * 2011-10-24 2012-02-01 无锡绿波新能源设备有限公司 真空吸盘
ITTO20120321A1 (it) * 2012-04-12 2013-10-13 Spea Spa Unita' di supporto e posizionamento di componenti a semiconduttore
KR101404979B1 (ko) * 2012-07-24 2014-06-10 (주)에이젯 반도체 디바이스 정렬 장치 및 정렬 방법
JP5986447B2 (ja) * 2012-07-25 2016-09-06 株式会社アルバック トレイ、基板の位置調整システム、及び露光装置
EP2765431B1 (en) 2013-02-11 2016-05-25 Rasco GmbH Carrier for electronic components
ITTO20130324A1 (it) * 2013-04-22 2014-10-23 St Microelectronics Srl Dispositivo vibrante per il posizionamento di un pezzo miniaturizzato in una sede di test, e metodo di posizionamento
US9857419B2 (en) * 2013-07-12 2018-01-02 Delta Design, Inc. Micro-vision alignment system with guiding rings for IC testing
US10041973B2 (en) * 2013-09-04 2018-08-07 Infineon Technologies Ag Method and apparatus for dynamic alignment of semiconductor devices
EP2884293A1 (en) 2013-12-12 2015-06-17 Rasco GmbH Semiconductor device carrier
US9772373B2 (en) * 2014-03-25 2017-09-26 Advantest Corporation Handler apparatus, device holder, and test apparatus
KR101748248B1 (ko) * 2014-03-25 2017-06-16 가부시키가이샤 어드밴티스트 핸들러 장치 및 시험 장치
CN104605599B (zh) * 2015-02-12 2016-04-13 京东方科技集团股份有限公司 一种ic盘盒
DE102016004592B4 (de) 2016-04-14 2017-11-02 Mühlbauer Gmbh & Co. Kg System und Verfahren zum Ausrichten elektronischer Bauteile
US10473714B2 (en) * 2017-03-06 2019-11-12 Asm Technology Singapore Pte Ltd Method and apparatus for aligning electronic components
CN111742232A (zh) * 2017-12-19 2020-10-02 波士顿半导体设备有限公司 无套件取放处理机
CN108922860B (zh) * 2018-08-27 2023-12-12 无锡中微高科电子有限公司 一种全阵列引脚陶瓷外壳的自动装片夹具
DE102020200817B3 (de) * 2020-01-23 2021-06-17 Lpkf Laser & Electronics Aktiengesellschaft Montageverfahren für eine integrierte Halbleiter-Waver-Vorrichtung und dafür verwendbare Montagevorrichtung
KR102291194B1 (ko) * 2020-03-09 2021-08-20 에이엠티 주식회사 미세 피치를 갖는 디바이스의 얼라인장치 및 그 방법
KR102295435B1 (ko) * 2020-03-12 2021-08-31 에이엠티 주식회사 미세 피치를 갖는 디바이스의 얼라인 및 테스트장치 그리고 디바이스의 얼라인방법
US12400993B2 (en) * 2020-08-19 2025-08-26 Shinkawa Ltd. Substrate holder and bonding system

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US3870416A (en) * 1974-01-09 1975-03-11 Bell Telephone Labor Inc Wafer alignment apparatus
JPH03133784A (ja) * 1989-10-16 1991-06-06 Nec Kyushu Ltd 半導体装置用トレー
US20030017629A1 (en) * 2001-07-23 2003-01-23 Tsui Ching Man Stanley Apparatus and method for testing semiconductor devices
US20050072714A1 (en) * 2003-10-06 2005-04-07 Eleveld Martin J. Standard tray carrier for aligning trays

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Patent Citations (4)

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Publication number Priority date Publication date Assignee Title
US3870416A (en) * 1974-01-09 1975-03-11 Bell Telephone Labor Inc Wafer alignment apparatus
JPH03133784A (ja) * 1989-10-16 1991-06-06 Nec Kyushu Ltd 半導体装置用トレー
US20030017629A1 (en) * 2001-07-23 2003-01-23 Tsui Ching Man Stanley Apparatus and method for testing semiconductor devices
US20050072714A1 (en) * 2003-10-06 2005-04-07 Eleveld Martin J. Standard tray carrier for aligning trays

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103443641A (zh) * 2011-03-31 2013-12-11 电子科学工业有限公司 用于电子装置测试的对准系统

Also Published As

Publication number Publication date
SG123786A1 (en) 2006-07-26
JP2006191121A (ja) 2006-07-20
CN1819136A (zh) 2006-08-16
US20060154386A1 (en) 2006-07-13
US7258703B2 (en) 2007-08-21
KR20060081356A (ko) 2006-07-12
JP4440219B2 (ja) 2010-03-24
MY136858A (en) 2008-11-28
KR100799896B1 (ko) 2008-01-31
TWI286813B (en) 2007-09-11
TW200629465A (en) 2006-08-16

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C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20231204

Address after: Singapore Shun Shun Road 2, No. 7

Patentee after: ASM Technology Singapore Pte. Ltd.

Address before: 20 floor, Watsons centre, 16-22 Industrial Street, Kwai Chung, New Territories, Hongkong, PRC

Patentee before: ASM Assembly Automation Ltd.

CX01 Expiry of patent term
CX01 Expiry of patent term

Granted publication date: 20080716