KR100756776B1 - 질화 알루미늄 접합체 및 그의 제조 방법 - Google Patents
질화 알루미늄 접합체 및 그의 제조 방법 Download PDFInfo
- Publication number
- KR100756776B1 KR100756776B1 KR1020067008295A KR20067008295A KR100756776B1 KR 100756776 B1 KR100756776 B1 KR 100756776B1 KR 1020067008295 A KR1020067008295 A KR 1020067008295A KR 20067008295 A KR20067008295 A KR 20067008295A KR 100756776 B1 KR100756776 B1 KR 100756776B1
- Authority
- KR
- South Korea
- Prior art keywords
- aluminum nitride
- sintered
- metal layer
- sintered metal
- aln
- Prior art date
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
- C04B37/003—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts
- C04B37/005—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts consisting of glass or ceramic material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B18/00—Layered products essentially comprising ceramics, e.g. refractory products
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/62605—Treating the starting powders individually or as mixtures
- C04B35/62645—Thermal treatment of powders or mixtures thereof other than sintering
- C04B35/62655—Drying, e.g. freeze-drying, spray-drying, microwave or supercritical drying
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/64—Burning or sintering processes
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/64—Burning or sintering processes
- C04B35/645—Pressure sintering
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
- C04B37/003—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2315/00—Other materials containing non-metallic inorganic compounds not provided for in groups B32B2311/00 - B32B2313/04
- B32B2315/02—Ceramics
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
- C04B2235/54—Particle size related information
- C04B2235/5418—Particle size related information expressed by the size of the particles or aggregates thereof
- C04B2235/5436—Particle size related information expressed by the size of the particles or aggregates thereof micrometer sized, i.e. from 1 to 100 micron
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
- C04B2235/54—Particle size related information
- C04B2235/5463—Particle size distributions
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
- C04B2235/66—Specific sintering techniques, e.g. centrifugal sintering
- C04B2235/661—Multi-step sintering
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/96—Properties of ceramic products, e.g. mechanical properties such as strength, toughness, wear resistance
- C04B2235/963—Surface properties, e.g. surface roughness
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
- C04B2237/04—Ceramic interlayers
- C04B2237/08—Non-oxidic interlayers
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
- C04B2237/04—Ceramic interlayers
- C04B2237/08—Non-oxidic interlayers
- C04B2237/083—Carbide interlayers, e.g. silicon carbide interlayers
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
- C04B2237/12—Metallic interlayers
- C04B2237/122—Metallic interlayers based on refractory metals
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/36—Non-oxidic
- C04B2237/366—Aluminium nitride
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/64—Forming laminates or joined articles comprising grooves or cuts
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/66—Forming laminates or joined articles showing high dimensional accuracy, e.g. indicated by the warpage
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
- C04B2237/708—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the interlayers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12736—Al-base component
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Ceramic Products (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (4)
- 서로 접합된 2장의 질화 알루미늄 소결체판과, 그 접합면에 형성되어 있는 두께 15 내지 100 ㎛의 텅스텐 또는 몰리브덴제의 소결 금속층을 포함하는 질화 알루미늄 접합체에 있어서,상기 소결 금속층의 시트 저항치가 1 Ω/□ 이하이고, 상기 소결 금속층의 휨은 100 ㎛/100 ㎜ 이하로 억제되면서, 상기 접합면에서의 상기 소결 금속층과 질화 알루미늄 기판 간의 전단 강도가 4 kg/mm2 이상인 것을 특징으로 하는 질화 알루미늄 접합체.
- 제1항에 있어서, 상기 접합면에서의 소결 금속층의 면적율이 50 내지 90%인 질화 알루미늄 접합체.
- 2장의 질화 알루미늄 소결체판을 준비하는 공정;한쪽 질화 알루미늄 소결체판의 표면에 오목부를 형성하는 공정;평균 입경(D50)이 3.5 ㎛ 이하인 텅스텐 분말 또는 몰리브덴 분말을 도체 성분으로서 함유하는 도전성 페이스트를 상기 오목부에 충전하는 공정;상기 도전성 페이스트가 충전되어 있는 질화 알루미늄 소결체판의 표면 전체에, 질화 알루미늄을 접착 성분으로서 함유하는 접착 페이스트를 도포하여 접착층 을 형성하는 공정;상기 도전성 페이스트 및 접착 페이스트의 탈지 처리를 수행하는 공정;다른 쪽 질화 알루미늄 소결판을 상기 질화 알루미늄 소결체의 접착층이 형성되어 있는 면에 0.5 내지 10 MPa의 압력으로 압접시키면서, 1600 내지 1700 ℃의 온도에서 0.5 내지 4 시간 가열하여 1차 소결을 수행하는 공정; 및상기 1차 소결에 이어서 1800 ℃ 내지 1900 ℃의 온도에서 2 내지 8 시간 가열하여 2차 소결을 수행하는 공정을 포함하는 것을 특징으로 하는 질화 알루미늄 접합체의 제조 방법.
- 제3항에 있어서, 상기 도전성 페이스트를, 고형분 환산으로 상기 오목부 부피의 1.05 내지 1.5배의 양으로 상기 오목부에 충전하는 질화 알루미늄 접합체의 제조 방법.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003373074 | 2003-10-31 | ||
JPJP-P-2003-00373074 | 2003-10-31 | ||
PCT/JP2004/016352 WO2005042436A1 (ja) | 2003-10-31 | 2004-10-28 | 窒化アルミニウム接合体及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20060120058A KR20060120058A (ko) | 2006-11-24 |
KR100756776B1 true KR100756776B1 (ko) | 2007-09-07 |
Family
ID=34544070
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020067008295A KR100756776B1 (ko) | 2003-10-31 | 2004-10-28 | 질화 알루미늄 접합체 및 그의 제조 방법 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20070212567A1 (ko) |
EP (1) | EP1690845A4 (ko) |
JP (1) | JP4189373B2 (ko) |
KR (1) | KR100756776B1 (ko) |
CN (1) | CN100432024C (ko) |
TW (1) | TW200517357A (ko) |
WO (1) | WO2005042436A1 (ko) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100381401C (zh) * | 2003-06-13 | 2008-04-16 | 株式会社德山 | 氮化铝接合体及其制造方法 |
JP2010092976A (ja) * | 2008-10-06 | 2010-04-22 | Ulvac Japan Ltd | 吸着力回復方法、吸着力低下防止方法 |
CN102265390B (zh) * | 2008-12-25 | 2014-10-15 | 株式会社爱发科 | 静电卡盘用卡板的制造方法 |
JP5606063B2 (ja) * | 2009-12-28 | 2014-10-15 | 東京エレクトロン株式会社 | プラズマ処理装置 |
US9034199B2 (en) | 2012-02-21 | 2015-05-19 | Applied Materials, Inc. | Ceramic article with reduced surface defect density and process for producing a ceramic article |
US9212099B2 (en) | 2012-02-22 | 2015-12-15 | Applied Materials, Inc. | Heat treated ceramic substrate having ceramic coating and heat treatment for coated ceramics |
WO2013130418A1 (en) * | 2012-02-27 | 2013-09-06 | Applied Nanotech Holdings, Inc. | Graphitic substrates with ceramic dielectric layers |
US9090046B2 (en) | 2012-04-16 | 2015-07-28 | Applied Materials, Inc. | Ceramic coated article and process for applying ceramic coating |
US9604249B2 (en) | 2012-07-26 | 2017-03-28 | Applied Materials, Inc. | Innovative top-coat approach for advanced device on-wafer particle performance |
US9343289B2 (en) | 2012-07-27 | 2016-05-17 | Applied Materials, Inc. | Chemistry compatible coating material for advanced device on-wafer particle performance |
US9916998B2 (en) | 2012-12-04 | 2018-03-13 | Applied Materials, Inc. | Substrate support assembly having a plasma resistant protective layer |
US9685356B2 (en) | 2012-12-11 | 2017-06-20 | Applied Materials, Inc. | Substrate support assembly having metal bonded protective layer |
US8941969B2 (en) * | 2012-12-21 | 2015-01-27 | Applied Materials, Inc. | Single-body electrostatic chuck |
US9358702B2 (en) | 2013-01-18 | 2016-06-07 | Applied Materials, Inc. | Temperature management of aluminium nitride electrostatic chuck |
US9669653B2 (en) | 2013-03-14 | 2017-06-06 | Applied Materials, Inc. | Electrostatic chuck refurbishment |
US9887121B2 (en) | 2013-04-26 | 2018-02-06 | Applied Materials, Inc. | Protective cover for electrostatic chuck |
US9666466B2 (en) | 2013-05-07 | 2017-05-30 | Applied Materials, Inc. | Electrostatic chuck having thermally isolated zones with minimal crosstalk |
US9865434B2 (en) | 2013-06-05 | 2018-01-09 | Applied Materials, Inc. | Rare-earth oxide based erosion resistant coatings for semiconductor application |
US9850568B2 (en) | 2013-06-20 | 2017-12-26 | Applied Materials, Inc. | Plasma erosion resistant rare-earth oxide based thin film coatings |
KR102276101B1 (ko) * | 2013-12-27 | 2021-07-13 | 엔지케이 인슐레이터 엘티디 | 접합재 조성물, 질화알루미늄 접합체 및 그 제법 |
JP6819597B2 (ja) * | 2015-09-07 | 2021-01-27 | 昭和電工マテリアルズ株式会社 | 接合体及び半導体装置 |
US10020218B2 (en) | 2015-11-17 | 2018-07-10 | Applied Materials, Inc. | Substrate support assembly with deposited surface features |
CN107527852B (zh) * | 2016-06-20 | 2024-01-26 | 北京华卓精科科技股份有限公司 | 陶瓷静电卡盘装置及其制造工艺 |
US11047035B2 (en) | 2018-02-23 | 2021-06-29 | Applied Materials, Inc. | Protective yttria coating for semiconductor equipment parts |
CN111620701B (zh) * | 2020-03-27 | 2022-05-13 | 烟台睿瓷新材料技术有限公司 | 一种多层复合陶瓷盘及其制造方法 |
CN116325476A (zh) * | 2020-10-21 | 2023-06-23 | 住友大阪水泥股份有限公司 | 陶瓷接合体、静电卡盘装置及陶瓷接合体的制造方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10273370A (ja) * | 1997-01-30 | 1998-10-13 | Ngk Insulators Ltd | 窒化アルミニウム質セラミックス基材の接合体、窒化アルミニウム質セラミックス基材の接合体の製造方法及び接合剤 |
JP2000058631A (ja) * | 1998-03-02 | 2000-02-25 | Sumitomo Electric Ind Ltd | 半導体製造用保持体およびその製造方法 |
JP2002176096A (ja) * | 2000-06-30 | 2002-06-21 | Toshiba Ceramics Co Ltd | 半導体処理装置用セラミックス部材の製造方法 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5370907A (en) * | 1990-06-15 | 1994-12-06 | Sumitomo Electric Industries, Ltd. | Forming a metallized layer on an AlN substrate by applying and heating a paste of a metal composed of W and Mo |
CA2113451A1 (en) * | 1991-09-12 | 1993-03-18 | Yi-Hung Chiao | Method of making co-fired, multilayer substrates |
JP3316167B2 (ja) * | 1996-10-08 | 2002-08-19 | 日本碍子株式会社 | 窒化アルミニウム質基材の接合体の製造方法およびこれに使用する接合助剤 |
JP2002057207A (ja) * | 2000-01-20 | 2002-02-22 | Sumitomo Electric Ind Ltd | 半導体製造装置用ウェハ保持体およびその製造方法ならびに半導体製造装置 |
US6861165B2 (en) * | 2000-02-24 | 2005-03-01 | Ibiden Co., Ltd. | Aluminum nitride sintered compact, ceramic substrate, ceramic heater and electrostatic chuck |
JP4498678B2 (ja) * | 2000-11-30 | 2010-07-07 | 株式会社トクヤマ | 基板およびその製造方法 |
WO2002083597A1 (fr) * | 2001-04-12 | 2002-10-24 | Ibiden Co., Ltd. | Corps soude en ceramique et son procede de fabrication, structure en ceramique destinee a une tranche a semi-conducteurs |
EP1422754A1 (en) * | 2001-08-10 | 2004-05-26 | Ibiden Co., Ltd. | Ceramic joint body |
JP3973872B2 (ja) * | 2001-10-17 | 2007-09-12 | 住友大阪セメント株式会社 | 電極内蔵型サセプタ及びその製造方法 |
US6982125B2 (en) * | 2002-12-23 | 2006-01-03 | Saint-Gobain Ceramics & Plastics, Inc. | ALN material and electrostatic chuck incorporating same |
-
2004
- 2004-10-28 EP EP04793332A patent/EP1690845A4/en not_active Withdrawn
- 2004-10-28 JP JP2004314217A patent/JP4189373B2/ja active Active
- 2004-10-28 CN CNB2004800389419A patent/CN100432024C/zh active Active
- 2004-10-28 US US10/577,309 patent/US20070212567A1/en not_active Abandoned
- 2004-10-28 WO PCT/JP2004/016352 patent/WO2005042436A1/ja active Application Filing
- 2004-10-28 KR KR1020067008295A patent/KR100756776B1/ko active IP Right Grant
- 2004-10-29 TW TW093132883A patent/TW200517357A/zh unknown
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10273370A (ja) * | 1997-01-30 | 1998-10-13 | Ngk Insulators Ltd | 窒化アルミニウム質セラミックス基材の接合体、窒化アルミニウム質セラミックス基材の接合体の製造方法及び接合剤 |
JP2000058631A (ja) * | 1998-03-02 | 2000-02-25 | Sumitomo Electric Ind Ltd | 半導体製造用保持体およびその製造方法 |
JP2002176096A (ja) * | 2000-06-30 | 2002-06-21 | Toshiba Ceramics Co Ltd | 半導体処理装置用セラミックス部材の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
TW200517357A (en) | 2005-06-01 |
EP1690845A1 (en) | 2006-08-16 |
JP4189373B2 (ja) | 2008-12-03 |
KR20060120058A (ko) | 2006-11-24 |
TWI312342B (ko) | 2009-07-21 |
CN1898183A (zh) | 2007-01-17 |
JP2005159334A (ja) | 2005-06-16 |
CN100432024C (zh) | 2008-11-12 |
US20070212567A1 (en) | 2007-09-13 |
WO2005042436A1 (ja) | 2005-05-12 |
EP1690845A4 (en) | 2009-04-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR100756776B1 (ko) | 질화 알루미늄 접합체 및 그의 제조 방법 | |
US6768079B2 (en) | Susceptor with built-in plasma generation electrode and manufacturing method therefor | |
KR100618530B1 (ko) | 정전 척과 그 제조 방법 및 알루미나 소결 부재와 그 제조방법 | |
JPH11163109A (ja) | ウエハ保持装置 | |
KR20040030803A (ko) | 세라믹 접합체 및 그 접합방법, 세라믹 구조체 | |
US7381673B2 (en) | Composite material, wafer holding member and method for manufacturing the same | |
TWI770438B (zh) | 保持裝置及保持裝置的製造方法 | |
KR100553444B1 (ko) | 서셉터 및 그 제조방법 | |
US6872908B2 (en) | Susceptor with built-in electrode and manufacturing method therefor | |
US6689984B2 (en) | Susceptor with built-in electrode and manufacturing method therefor | |
JP3966201B2 (ja) | 半導体製造装置用ウェハ保持体およびそれを搭載した半導体製造装置 | |
JP2007311399A (ja) | 静電チャック | |
JP3966376B2 (ja) | 被処理物保持体、処理装置および半導体製造装置用セラミックスサセプタ | |
JP2006044980A (ja) | 窒化アルミニウム焼結体 | |
TW201541572A (zh) | 陶瓷佈線基板及半導體裝置 | |
JP2004296579A (ja) | 静電チャック及びその製造方法 | |
JP2002110773A (ja) | 静電チャック | |
JP4831953B2 (ja) | 窒化アルミニウム焼結体 | |
JP2006191124A (ja) | 被処理物保持体、処理装置および半導体製造装置用セラミックスサセプタ | |
JP2005247662A (ja) | 接合体とこれを用いたウェハ保持部材及びその製造方法 | |
JP5857476B2 (ja) | 窒化アルミニウム焼結体及びそれを用いた半導体製造装置用又は検査装置用のウエハ保持体 | |
JP2004289137A (ja) | 半導体製造装置用ウェハ保持体及びそれを搭載した半導体製造装置 | |
TW200418123A (en) | Wafer holder for semiconductor manufacturing device and semiconductor manufacturing device in which it is installed | |
JP2006210696A (ja) | セラミック製静電チャック | |
JP2023138085A (ja) | 静電チャック部材、および静電チャック装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20120821 Year of fee payment: 6 |
|
FPAY | Annual fee payment |
Payment date: 20130822 Year of fee payment: 7 |
|
FPAY | Annual fee payment |
Payment date: 20140825 Year of fee payment: 8 |
|
FPAY | Annual fee payment |
Payment date: 20150730 Year of fee payment: 9 |
|
FPAY | Annual fee payment |
Payment date: 20160727 Year of fee payment: 10 |
|
FPAY | Annual fee payment |
Payment date: 20170804 Year of fee payment: 11 |
|
FPAY | Annual fee payment |
Payment date: 20180816 Year of fee payment: 12 |
|
FPAY | Annual fee payment |
Payment date: 20190819 Year of fee payment: 13 |