KR100756776B1 - 질화 알루미늄 접합체 및 그의 제조 방법 - Google Patents

질화 알루미늄 접합체 및 그의 제조 방법 Download PDF

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KR100756776B1
KR100756776B1 KR1020067008295A KR20067008295A KR100756776B1 KR 100756776 B1 KR100756776 B1 KR 100756776B1 KR 1020067008295 A KR1020067008295 A KR 1020067008295A KR 20067008295 A KR20067008295 A KR 20067008295A KR 100756776 B1 KR100756776 B1 KR 100756776B1
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aluminum nitride
sintered
metal layer
sintered metal
aln
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KR20060120058A (ko
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다쯔오 에사끼
히데끼 사또
마사노부 아즈마
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가부시끼가이샤 도꾸야마
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    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/003—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts
    • C04B37/005—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts consisting of glass or ceramic material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B18/00—Layered products essentially comprising ceramics, e.g. refractory products
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    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride
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    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/62605—Treating the starting powders individually or as mixtures
    • C04B35/62645—Thermal treatment of powders or mixtures thereof other than sintering
    • C04B35/62655—Drying, e.g. freeze-drying, spray-drying, microwave or supercritical drying
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    • C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
    • C04B37/003—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2315/00—Other materials containing non-metallic inorganic compounds not provided for in groups B32B2311/00 - B32B2313/04
    • B32B2315/02—Ceramics
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    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/50—Constituents or additives of the starting mixture chosen for their shape or used because of their shape or their physical appearance
    • C04B2235/54—Particle size related information
    • C04B2235/5418—Particle size related information expressed by the size of the particles or aggregates thereof
    • C04B2235/5436—Particle size related information expressed by the size of the particles or aggregates thereof micrometer sized, i.e. from 1 to 100 micron
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    • C04B2235/65—Aspects relating to heat treatments of ceramic bodies such as green ceramics or pre-sintered ceramics, e.g. burning, sintering or melting processes
    • C04B2235/66—Specific sintering techniques, e.g. centrifugal sintering
    • C04B2235/661—Multi-step sintering
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    • C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
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    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/04—Ceramic interlayers
    • C04B2237/08—Non-oxidic interlayers
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    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
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    • C04B2237/04—Ceramic interlayers
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    • C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
    • C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
    • C04B2237/12—Metallic interlayers
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    • C04B2237/708—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the interlayers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12736—Al-base component

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  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Ceramic Products (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020067008295A 2003-10-31 2004-10-28 질화 알루미늄 접합체 및 그의 제조 방법 Expired - Lifetime KR100756776B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2003373074 2003-10-31
JPJP-P-2003-00373074 2003-10-31
PCT/JP2004/016352 WO2005042436A1 (ja) 2003-10-31 2004-10-28 窒化アルミニウム接合体及びその製造方法

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KR20060120058A KR20060120058A (ko) 2006-11-24
KR100756776B1 true KR100756776B1 (ko) 2007-09-07

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Country Link
US (1) US20070212567A1 (enExample)
EP (1) EP1690845A4 (enExample)
JP (1) JP4189373B2 (enExample)
KR (1) KR100756776B1 (enExample)
CN (1) CN100432024C (enExample)
TW (1) TW200517357A (enExample)
WO (1) WO2005042436A1 (enExample)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7488543B2 (en) * 2003-06-13 2009-02-10 Tokuyama Corporation Aluminum nitride conjugate body and method of producing the same
JP2010092976A (ja) * 2008-10-06 2010-04-22 Ulvac Japan Ltd 吸着力回復方法、吸着力低下防止方法
CN102265390B (zh) * 2008-12-25 2014-10-15 株式会社爱发科 静电卡盘用卡板的制造方法
JP5606063B2 (ja) * 2009-12-28 2014-10-15 東京エレクトロン株式会社 プラズマ処理装置
US9034199B2 (en) 2012-02-21 2015-05-19 Applied Materials, Inc. Ceramic article with reduced surface defect density and process for producing a ceramic article
US9212099B2 (en) 2012-02-22 2015-12-15 Applied Materials, Inc. Heat treated ceramic substrate having ceramic coating and heat treatment for coated ceramics
US9107308B2 (en) * 2012-02-27 2015-08-11 Pen Inc. Graphitic substrates with ceramic dielectric layers
US9090046B2 (en) 2012-04-16 2015-07-28 Applied Materials, Inc. Ceramic coated article and process for applying ceramic coating
US9604249B2 (en) 2012-07-26 2017-03-28 Applied Materials, Inc. Innovative top-coat approach for advanced device on-wafer particle performance
US9343289B2 (en) 2012-07-27 2016-05-17 Applied Materials, Inc. Chemistry compatible coating material for advanced device on-wafer particle performance
US9916998B2 (en) 2012-12-04 2018-03-13 Applied Materials, Inc. Substrate support assembly having a plasma resistant protective layer
US9685356B2 (en) 2012-12-11 2017-06-20 Applied Materials, Inc. Substrate support assembly having metal bonded protective layer
US8941969B2 (en) 2012-12-21 2015-01-27 Applied Materials, Inc. Single-body electrostatic chuck
US9358702B2 (en) 2013-01-18 2016-06-07 Applied Materials, Inc. Temperature management of aluminium nitride electrostatic chuck
US9669653B2 (en) 2013-03-14 2017-06-06 Applied Materials, Inc. Electrostatic chuck refurbishment
US9887121B2 (en) 2013-04-26 2018-02-06 Applied Materials, Inc. Protective cover for electrostatic chuck
US9666466B2 (en) 2013-05-07 2017-05-30 Applied Materials, Inc. Electrostatic chuck having thermally isolated zones with minimal crosstalk
US9865434B2 (en) 2013-06-05 2018-01-09 Applied Materials, Inc. Rare-earth oxide based erosion resistant coatings for semiconductor application
US9850568B2 (en) 2013-06-20 2017-12-26 Applied Materials, Inc. Plasma erosion resistant rare-earth oxide based thin film coatings
KR102276101B1 (ko) * 2013-12-27 2021-07-13 엔지케이 인슐레이터 엘티디 접합재 조성물, 질화알루미늄 접합체 및 그 제법
JP6819597B2 (ja) * 2015-09-07 2021-01-27 昭和電工マテリアルズ株式会社 接合体及び半導体装置
US10020218B2 (en) 2015-11-17 2018-07-10 Applied Materials, Inc. Substrate support assembly with deposited surface features
CN107527852B (zh) * 2016-06-20 2024-01-26 北京华卓精科科技股份有限公司 陶瓷静电卡盘装置及其制造工艺
US11047035B2 (en) 2018-02-23 2021-06-29 Applied Materials, Inc. Protective yttria coating for semiconductor equipment parts
CN111620701B (zh) 2020-03-27 2022-05-13 烟台睿瓷新材料技术有限公司 一种多层复合陶瓷盘及其制造方法
JP7388573B2 (ja) * 2020-10-21 2023-11-29 住友大阪セメント株式会社 セラミックス接合体、静電チャック装置、セラミックス接合体の製造方法
JP7718902B2 (ja) * 2021-08-06 2025-08-05 株式会社フェローテックマテリアルテクノロジーズ ウエハ支持体
JP7709872B2 (ja) * 2021-08-10 2025-07-17 日本特殊陶業株式会社 接合体、その製造方法、および電極埋設部材

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10273370A (ja) * 1997-01-30 1998-10-13 Ngk Insulators Ltd 窒化アルミニウム質セラミックス基材の接合体、窒化アルミニウム質セラミックス基材の接合体の製造方法及び接合剤
JP2000058631A (ja) * 1998-03-02 2000-02-25 Sumitomo Electric Ind Ltd 半導体製造用保持体およびその製造方法
JP2002176096A (ja) * 2000-06-30 2002-06-21 Toshiba Ceramics Co Ltd 半導体処理装置用セラミックス部材の製造方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5370907A (en) * 1990-06-15 1994-12-06 Sumitomo Electric Industries, Ltd. Forming a metallized layer on an AlN substrate by applying and heating a paste of a metal composed of W and Mo
EP0603282A1 (en) * 1991-09-12 1994-06-29 The Dow Chemical Company Method of making co-fired, multilayer substrates
JP3316167B2 (ja) * 1996-10-08 2002-08-19 日本碍子株式会社 窒化アルミニウム質基材の接合体の製造方法およびこれに使用する接合助剤
JP2002057207A (ja) * 2000-01-20 2002-02-22 Sumitomo Electric Ind Ltd 半導体製造装置用ウェハ保持体およびその製造方法ならびに半導体製造装置
WO2001062686A1 (en) * 2000-02-24 2001-08-30 Ibiden Co., Ltd. Aluminum nitride sintered compact, ceramic substrate, ceramic heater and electrostatic chuck
CA2398613C (en) * 2000-11-30 2006-09-12 Tokuyama Corporation Substrate and production method therefor
CN1460094A (zh) * 2001-04-12 2003-12-03 揖斐电株式会社 陶瓷接合体、其制造方法以及半导体晶片用陶瓷结构体
CN1484855A (zh) * 2001-08-10 2004-03-24 揖斐电株式会社 陶瓷接合体
JP3973872B2 (ja) * 2001-10-17 2007-09-12 住友大阪セメント株式会社 電極内蔵型サセプタ及びその製造方法
US6982125B2 (en) * 2002-12-23 2006-01-03 Saint-Gobain Ceramics & Plastics, Inc. ALN material and electrostatic chuck incorporating same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10273370A (ja) * 1997-01-30 1998-10-13 Ngk Insulators Ltd 窒化アルミニウム質セラミックス基材の接合体、窒化アルミニウム質セラミックス基材の接合体の製造方法及び接合剤
JP2000058631A (ja) * 1998-03-02 2000-02-25 Sumitomo Electric Ind Ltd 半導体製造用保持体およびその製造方法
JP2002176096A (ja) * 2000-06-30 2002-06-21 Toshiba Ceramics Co Ltd 半導体処理装置用セラミックス部材の製造方法

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WO2005042436A1 (ja) 2005-05-12
EP1690845A1 (en) 2006-08-16
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