KR100755582B1 - 고정밀 거울 및 그 제조 방법 - Google Patents

고정밀 거울 및 그 제조 방법 Download PDF

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Publication number
KR100755582B1
KR100755582B1 KR1020057015523A KR20057015523A KR100755582B1 KR 100755582 B1 KR100755582 B1 KR 100755582B1 KR 1020057015523 A KR1020057015523 A KR 1020057015523A KR 20057015523 A KR20057015523 A KR 20057015523A KR 100755582 B1 KR100755582 B1 KR 100755582B1
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South Korea
Prior art keywords
layer
finish
substrate
mirror
thin film
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English (en)
Korean (ko)
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KR20050110638A (ko
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존 피. 쉐퍼
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레이던 컴퍼니
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0808—Mirrors having a single reflecting layer

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Physical Vapour Deposition (AREA)
  • Glass Compositions (AREA)
KR1020057015523A 2003-02-24 2004-02-24 고정밀 거울 및 그 제조 방법 Expired - Lifetime KR100755582B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/373,448 2003-02-24
US10/373,448 US6921177B2 (en) 2003-02-24 2003-02-24 High precision mirror, and a method of making it

Publications (2)

Publication Number Publication Date
KR20050110638A KR20050110638A (ko) 2005-11-23
KR100755582B1 true KR100755582B1 (ko) 2007-09-06

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Family Applications (1)

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KR1020057015523A Expired - Lifetime KR100755582B1 (ko) 2003-02-24 2004-02-24 고정밀 거울 및 그 제조 방법

Country Status (11)

Country Link
US (1) US6921177B2 (enExample)
EP (1) EP1597614B1 (enExample)
JP (1) JP4664277B2 (enExample)
KR (1) KR100755582B1 (enExample)
AT (1) ATE476676T1 (enExample)
AU (1) AU2004214919B2 (enExample)
CA (1) CA2500309C (enExample)
DE (1) DE602004028443D1 (enExample)
IL (1) IL167673A (enExample)
TW (1) TWI288247B (enExample)
WO (1) WO2004077114A1 (enExample)

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US20070121104A1 (en) * 2003-04-18 2007-05-31 Hendrix James L Techniques for reducing optical noise in metrology systems
US8062096B2 (en) * 2005-06-30 2011-11-22 Cabot Microelectronics Corporation Use of CMP for aluminum mirror and solar cell fabrication
US7641350B2 (en) * 2005-11-28 2010-01-05 Jds Uniphase Corporation Front surface mirror for providing white color uniformity for polarized systems with a large range of incidence angles
DE102006011973B4 (de) * 2006-03-15 2011-04-07 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Spiegel mit einer Silberschicht
WO2009024181A1 (en) * 2007-08-20 2009-02-26 Optosic Ag Method of manufacturing and processing silicon carbide scanning mirrors
DE102009039400A1 (de) * 2009-08-31 2011-03-03 Carl Zeiss Laser Optics Gmbh Reflektives optisches Element zur Verwendung in einem EUV-System
DE102009040785A1 (de) * 2009-09-09 2011-03-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Substrat aus einer Aluminium-Silizium-Legierung oder kristallinem Silizium, Metallspiegel, Verfahren zu dessen Herstellung sowie dessen Verwendung
US8398251B2 (en) * 2009-11-04 2013-03-19 Raytheon Canada Limited Method and apparatus for fabricating a precision optical surface
DE102010039927A1 (de) * 2010-08-30 2012-03-01 Carl Zeiss Smt Gmbh Substrat für Spiegel für die EUV-Lithographie
DE102011002953A1 (de) * 2011-01-21 2012-07-26 Carl Zeiss Smt Gmbh Substrat für Spiegel für die EUV-Lithographie
US9575223B2 (en) * 2011-05-13 2017-02-21 Raytheon Company Magnesium mirrors and methods of manufacture thereof
DE102011122329A1 (de) * 2011-12-28 2013-07-04 Qioptiq Photonics Gmbh & Co. Kg Reflektierendes optisches Bauteil
US9488760B2 (en) 2013-02-28 2016-11-08 Corning Incorporated Enhanced, durable silver coating stacks for highly reflective mirrors
US9971073B2 (en) * 2014-04-14 2018-05-15 Corning Incorporated Enhanced performance metallic based optical mirror substrates
US20160097885A1 (en) 2014-10-03 2016-04-07 Corning Incorporated Mirror substrates with highly finishable corrosion-resistant coating
KR20160061548A (ko) * 2014-11-21 2016-06-01 삼성디스플레이 주식회사 어레이 테스트 모듈레이터 및 이를 포함하는 박막트랜지스터 기판 검사 장치
DE102015218702A1 (de) * 2015-09-29 2017-03-30 Dr. Johannes Heidenhain Gmbh Optisches Schichtsystem
US10816702B2 (en) * 2016-03-18 2020-10-27 Corning Incorporated Reflective optical element with high stiffness substrate
US20170269265A1 (en) * 2016-03-18 2017-09-21 Corning Incorporated Graphite substrates for reflective optics
CN108468029B (zh) * 2018-02-12 2020-01-21 中国科学院国家天文台南京天文光学技术研究所 用于碳化硅光学镜面改性与面形提升的磁控溅射扫描方法
US11971605B2 (en) 2018-05-09 2024-04-30 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Mirror support for a composite optical mirror and method for its production
US20200009701A1 (en) * 2018-07-09 2020-01-09 Arizona Board Of Regents On Behalf Of The University Of Arizona Polishing protocol for zirconium diboride based ceramics to be implemented into optical systems
US20200132894A1 (en) * 2018-10-31 2020-04-30 Corning Incorporated Support for reflective optical element
US11385383B2 (en) 2018-11-13 2022-07-12 Raytheon Company Coating stress mitigation through front surface coating manipulation on ultra-high reflectors or other optical devices
US11619764B2 (en) 2020-03-27 2023-04-04 Raytheon Company High-performance optical surface
US12066591B2 (en) * 2020-07-15 2024-08-20 Raytheon Company Visible quality mirror finishing
US11698477B2 (en) * 2020-07-15 2023-07-11 Raytheon Company Visible quality additive manufactured aluminum mirror finishing

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US4814232A (en) * 1987-03-25 1989-03-21 United Technologies Corporation Method for depositing laser mirror coatings
US6495272B1 (en) * 2000-07-06 2002-12-17 B-Con Engineering Inc. High quality optical surface and method of producing same

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US4865451A (en) * 1986-12-22 1989-09-12 Ahonen Robert G Silicon substrate mirror assembly for lasers
ZA912915B (en) 1990-05-10 1992-04-29 Boc Group Inc Novel monolithic front surface mirror
JPH07191207A (ja) * 1993-11-17 1995-07-28 Asahi Optical Co Ltd 反射型複合光学素子
JPH07168008A (ja) * 1993-12-13 1995-07-04 Nikon Corp Ａｇ表面鏡
JPH0868897A (ja) * 1994-08-29 1996-03-12 Nikon Corp 反射鏡およびその製造方法
DE59707198D1 (de) * 1996-08-15 2002-06-13 Alcan Tech & Man Ag Reflektor mit resistenter Oberfläche
JPH10339799A (ja) * 1997-06-06 1998-12-22 Nikon Corp 反射鏡及びその製造方法
US5912777A (en) * 1997-06-26 1999-06-15 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration High temperature solar reflector, its preparation and use
US5933278A (en) * 1997-06-30 1999-08-03 Polaroid Corporation Monolithic multi-faceted mirror for combining multiple beams from different light sources by reflection
JP2000019312A (ja) * 1998-07-01 2000-01-21 Konica Corp 反射ミラー
JP2000241612A (ja) * 1999-02-23 2000-09-08 Nikon Corp 反射鏡
US6078425A (en) * 1999-06-09 2000-06-20 The Regents Of The University Of California Durable silver coating for mirrors
JP4482971B2 (ja) * 1999-09-08 2010-06-16 株式会社ニコン 反射鏡
US6587263B1 (en) * 2000-03-31 2003-07-01 Lockheed Martin Corporation Optical solar reflectors
DE10125554C2 (de) * 2001-05-23 2003-06-18 Astrium Gmbh Ultraleichter und ultrasteifer vollkeramischer Reflektor und Verfahren zur Herstellung sowie Verwendung eines solchen Reflektors
JP2002357709A (ja) * 2001-06-01 2002-12-13 Canon Inc 高反射性銀鏡及び反射型光学部品
US6598985B2 (en) * 2001-06-11 2003-07-29 Nanogear Optical mirror system with multi-axis rotational control
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US4814232A (en) * 1987-03-25 1989-03-21 United Technologies Corporation Method for depositing laser mirror coatings
US6495272B1 (en) * 2000-07-06 2002-12-17 B-Con Engineering Inc. High quality optical surface and method of producing same

Also Published As

Publication number Publication date
CA2500309C (en) 2010-08-24
US20040165296A1 (en) 2004-08-26
AU2004214919B2 (en) 2006-12-21
KR20050110638A (ko) 2005-11-23
WO2004077114A1 (en) 2004-09-10
EP1597614A1 (en) 2005-11-23
CA2500309A1 (en) 2004-09-10
JP2006518883A (ja) 2006-08-17
ATE476676T1 (de) 2010-08-15
DE602004028443D1 (de) 2010-09-16
EP1597614B1 (en) 2010-08-04
TW200428022A (en) 2004-12-16
JP4664277B2 (ja) 2011-04-06
IL167673A (en) 2009-12-24
US6921177B2 (en) 2005-07-26
TWI288247B (en) 2007-10-11
AU2004214919A1 (en) 2004-09-10

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