KR100745428B1 - 음향 공진 장치 및 그 제조 방법과 격리 방법 - Google Patents

음향 공진 장치 및 그 제조 방법과 격리 방법 Download PDF

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Publication number
KR100745428B1
KR100745428B1 KR1020010005225A KR20010005225A KR100745428B1 KR 100745428 B1 KR100745428 B1 KR 100745428B1 KR 1020010005225 A KR1020010005225 A KR 1020010005225A KR 20010005225 A KR20010005225 A KR 20010005225A KR 100745428 B1 KR100745428 B1 KR 100745428B1
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South Korea
Prior art keywords
piezoelectric material
piezoelectric
substrate
acoustic
acoustic resonator
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Expired - Fee Related
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KR1020010005225A
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English (en)
Korean (ko)
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KR20010078314A (ko
Inventor
바버브래들리폴
페터리누스알버트
제르딧마이클죠오지
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루센트 테크놀러지스 인크
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Publication of KR20010078314A publication Critical patent/KR20010078314A/ko
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H03H9/02118—Means for compensation or elimination of undesirable effects of lateral leakage between adjacent resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
KR1020010005225A 2000-02-04 2001-02-03 음향 공진 장치 및 그 제조 방법과 격리 방법 Expired - Fee Related KR100745428B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/497,993 2000-02-04
US09/497,993 US7296329B1 (en) 2000-02-04 2000-02-04 Method of isolation for acoustic resonator device

Publications (2)

Publication Number Publication Date
KR20010078314A KR20010078314A (ko) 2001-08-20
KR100745428B1 true KR100745428B1 (ko) 2007-08-02

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Country Status (8)

Country Link
US (2) US7296329B1 (enExample)
EP (1) EP1126601A3 (enExample)
JP (2) JP2001223410A (enExample)
KR (1) KR100745428B1 (enExample)
CN (1) CN1203464C (enExample)
AU (1) AU1673901A (enExample)
BR (1) BR0100192A (enExample)
CA (2) CA2330019C (enExample)

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US7038559B2 (en) * 2004-02-23 2006-05-02 Ruby Richard C Vertically separated acoustic filters and resonators
JP4535841B2 (ja) 2004-10-28 2010-09-01 富士通メディアデバイス株式会社 圧電薄膜共振子及びこれを用いたフィルタ
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US8291559B2 (en) * 2009-02-24 2012-10-23 Epcos Ag Process for adapting resonance frequency of a BAW resonator
US8513863B2 (en) 2009-06-11 2013-08-20 Qualcomm Mems Technologies, Inc. Piezoelectric resonator with two layers
KR102717842B1 (ko) * 2015-08-18 2024-10-14 후지필름 소노사이트, 인크. 고주파 초음파용 막 수중청음기 및 제조 방법
US10135415B2 (en) * 2015-12-18 2018-11-20 Texas Instruments Incorporated Method to reduce frequency distribution of bulk acoustic wave resonators during manufacturing
US11579011B2 (en) 2016-02-19 2023-02-14 Fujifilm Sonosite, Inc. Membrane hydrophone for high frequency ultrasound and method of manufacture
US10178459B2 (en) 2016-03-09 2019-01-08 Mrspeakers, Llc Loudspeaker with acoustic impedance system
US10931262B2 (en) 2017-12-07 2021-02-23 Infineon Technologies Ag Tunable resonator element, filter circuit and method
CN108231995B (zh) * 2018-02-05 2024-04-19 武汉衍熙微器件有限公司 一种压电器件及其制备方法
CN110120793B (zh) * 2018-02-05 2024-11-12 武汉衍熙微器件有限公司 具有非c轴优选压电层的薄膜体声波谐振器
US11594668B2 (en) * 2018-12-28 2023-02-28 Tdk Corporation Thin film laminate, thin film device and multilayer substrate
US11563418B2 (en) 2019-03-25 2023-01-24 Skyworks Solutions, Inc. Methods of manufacturing acoustic wave resonators with isolation
US12501642B2 (en) 2020-10-07 2025-12-16 Hrl Laboratories, Llc Semiconductor materials and devices including iii-nitride layers integrated with scandium aluminum nitride
CN113054941B (zh) * 2021-02-09 2023-11-24 偲百创(深圳)科技有限公司 声波谐振器制作方法及声波谐振器
US20230246630A1 (en) * 2022-01-31 2023-08-03 Texas Instruments Incorporated Substrate top side roughening

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Also Published As

Publication number Publication date
CA2642731A1 (en) 2001-08-04
EP1126601A2 (en) 2001-08-22
US8631547B2 (en) 2014-01-21
JP2014017881A (ja) 2014-01-30
CN1203464C (zh) 2005-05-25
US7296329B1 (en) 2007-11-20
JP2001223410A (ja) 2001-08-17
KR20010078314A (ko) 2001-08-20
CN1319835A (zh) 2001-10-31
CA2330019C (en) 2008-12-30
AU1673901A (en) 2001-08-09
JP5559411B2 (ja) 2014-07-23
BR0100192A (pt) 2001-10-09
US20080028585A1 (en) 2008-02-07
CA2642731C (en) 2013-10-15
EP1126601A3 (en) 2006-03-22
CA2330019A1 (en) 2001-08-04

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