BR0100192A - Dispositivo ressoador acústico e método de produção do mesmo - Google Patents

Dispositivo ressoador acústico e método de produção do mesmo

Info

Publication number
BR0100192A
BR0100192A BR0100192-2A BR0100192A BR0100192A BR 0100192 A BR0100192 A BR 0100192A BR 0100192 A BR0100192 A BR 0100192A BR 0100192 A BR0100192 A BR 0100192A
Authority
BR
Brazil
Prior art keywords
piezoelectric
piezoelectric material
acoustic
acoustic resonator
regions
Prior art date
Application number
BR0100192-2A
Other languages
English (en)
Inventor
Bradley Paul Barber
Linus Albert Fetter
Michael George Zierdt
Original Assignee
Lucent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lucent Technologies Inc filed Critical Lucent Technologies Inc
Publication of BR0100192A publication Critical patent/BR0100192A/pt

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02086—Means for compensation or elimination of undesirable effects
    • H03H9/02118—Means for compensation or elimination of undesirable effects of lateral leakage between adjacent resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49005—Acoustic transducer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49155—Manufacturing circuit on or in base

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

<B>DISPOSITIVO RESSOADOR ACúSTICO E MéTODO DE PRODUçãO DO MESMO<D> Um método de isolamento de dispositivos ressoadores acústicos de filme fino piezoelétrico, para impedir que ondas que se propagam lateralmente, geradas pelo dispositivo, deixem o dispositivo e/ou interfiram em dispositivos ou sistemas adjacentes. Especificamente, esta técnica de isolamento envolve a manipulação ou o isolamento da camada de material piezoelétrico entre os dispositivos de ressoador acústico, em um esforço para limitar a quantidade de energia acústica que se propaga em uma direção lateral a partir do dispositivo. Em um aspecto, pelo menos uma porção do material piezoelétrico não envolvida em uma transmissão de sinal, por transdução entre energia de RF e acústica, é removida do dispositivo. Em outro aspecto, o crescimento de um material piezoelétrico é limitado a certas regiões, durante a fabricação do dispositivo. Em outro aspecto, a orientação de cristal do material piezoelétrico é interrompida ou alterada, durante a fabricação do dispositivo, de modo a formar regiões com excelentes propriedades piezoelétricas e regiões que apresentam características de piezoeletricidade ruins.
BR0100192-2A 2000-02-04 2001-01-29 Dispositivo ressoador acústico e método de produção do mesmo BR0100192A (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/497,993 US7296329B1 (en) 2000-02-04 2000-02-04 Method of isolation for acoustic resonator device

Publications (1)

Publication Number Publication Date
BR0100192A true BR0100192A (pt) 2001-10-09

Family

ID=23979175

Family Applications (1)

Application Number Title Priority Date Filing Date
BR0100192-2A BR0100192A (pt) 2000-02-04 2001-01-29 Dispositivo ressoador acústico e método de produção do mesmo

Country Status (8)

Country Link
US (2) US7296329B1 (pt)
EP (1) EP1126601A3 (pt)
JP (2) JP2001223410A (pt)
KR (1) KR100745428B1 (pt)
CN (1) CN1203464C (pt)
AU (1) AU1673901A (pt)
BR (1) BR0100192A (pt)
CA (2) CA2642731C (pt)

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US7038559B2 (en) * 2004-02-23 2006-05-02 Ruby Richard C Vertically separated acoustic filters and resonators
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CN107923788B (zh) * 2015-08-18 2021-10-08 富士胶片索诺声公司 用于高频超声的膜水下听音器及其制造方法
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CN110120793A (zh) * 2018-02-05 2019-08-13 武汉衍熙微器件有限公司 具有非c轴优选压电层的薄膜体声波谐振器
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Also Published As

Publication number Publication date
CN1319835A (zh) 2001-10-31
CA2642731C (en) 2013-10-15
US8631547B2 (en) 2014-01-21
KR100745428B1 (ko) 2007-08-02
CA2330019C (en) 2008-12-30
JP2014017881A (ja) 2014-01-30
US7296329B1 (en) 2007-11-20
CA2330019A1 (en) 2001-08-04
US20080028585A1 (en) 2008-02-07
CA2642731A1 (en) 2001-08-04
CN1203464C (zh) 2005-05-25
KR20010078314A (ko) 2001-08-20
EP1126601A3 (en) 2006-03-22
JP5559411B2 (ja) 2014-07-23
EP1126601A2 (en) 2001-08-22
AU1673901A (en) 2001-08-09
JP2001223410A (ja) 2001-08-17

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