KR100736003B1 - 차단밸브 - Google Patents

차단밸브 Download PDF

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Publication number
KR100736003B1
KR100736003B1 KR1020067007669A KR20067007669A KR100736003B1 KR 100736003 B1 KR100736003 B1 KR 100736003B1 KR 1020067007669 A KR1020067007669 A KR 1020067007669A KR 20067007669 A KR20067007669 A KR 20067007669A KR 100736003 B1 KR100736003 B1 KR 100736003B1
Authority
KR
South Korea
Prior art keywords
chamber
gate
valve
housing
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
KR1020067007669A
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English (en)
Korean (ko)
Other versions
KR20060039953A (ko
Inventor
개리 씨. 에팅거
존 엠. 화이트
Original Assignee
에이케이티 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by 에이케이티 가부시키가이샤 filed Critical 에이케이티 가부시키가이샤
Publication of KR20060039953A publication Critical patent/KR20060039953A/ko
Application granted granted Critical
Publication of KR100736003B1 publication Critical patent/KR100736003B1/ko
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/188—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of hydraulic forces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/04—Construction of housing; Use of materials therefor of sliding valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)
KR1020067007669A 1998-05-20 1999-05-13 차단밸브 Expired - Lifetime KR100736003B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/082,376 US6079693A (en) 1998-05-20 1998-05-20 Isolation valves
US09/082,376 1998-05-20
KR1020007013042A KR100672100B1 (ko) 1998-05-20 1999-05-13 차단밸브

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020007013042A Division KR100672100B1 (ko) 1998-05-20 1999-05-13 차단밸브

Publications (2)

Publication Number Publication Date
KR20060039953A KR20060039953A (ko) 2006-05-09
KR100736003B1 true KR100736003B1 (ko) 2007-07-06

Family

ID=22170814

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020007013042A Expired - Lifetime KR100672100B1 (ko) 1998-05-20 1999-05-13 차단밸브
KR1020067007669A Expired - Lifetime KR100736003B1 (ko) 1998-05-20 1999-05-13 차단밸브

Family Applications Before (1)

Application Number Title Priority Date Filing Date
KR1020007013042A Expired - Lifetime KR100672100B1 (ko) 1998-05-20 1999-05-13 차단밸브

Country Status (6)

Country Link
US (4) US6079693A (enExample)
EP (1) EP1078181A1 (enExample)
JP (1) JP4328020B2 (enExample)
KR (2) KR100672100B1 (enExample)
TW (1) TW430727B (enExample)
WO (1) WO1999061822A1 (enExample)

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US6518193B1 (en) * 2001-03-09 2003-02-11 Lsi Logic Corporation Substrate processing system
US7316966B2 (en) * 2001-09-21 2008-01-08 Applied Materials, Inc. Method for transferring substrates in a load lock chamber
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US20040060582A1 (en) * 2002-09-18 2004-04-01 Dainippon Screen Mfg.Co., Ltd. Substrate processing apparatus
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JP4304365B2 (ja) * 2002-12-16 2009-07-29 Ｓｍｃ株式会社 ゲートバルブ
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US20080279672A1 (en) * 2007-05-11 2008-11-13 Bachrach Robert Z Batch equipment robots and methods of stack to array work-piece transfer for photovoltaic factory
US20080279658A1 (en) * 2007-05-11 2008-11-13 Bachrach Robert Z Batch equipment robots and methods within equipment work-piece transfer for photovoltaic factory
US7496423B2 (en) * 2007-05-11 2009-02-24 Applied Materials, Inc. Method of achieving high productivity fault tolerant photovoltaic factory with batch array transfer robots
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US7731151B2 (en) * 2007-09-27 2010-06-08 Kenneth K L Lee Pendulum vacuum gate valve
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US8297591B2 (en) * 2008-08-29 2012-10-30 Applied Materials, Inc. Slit valve control
US20100127201A1 (en) * 2008-11-21 2010-05-27 Applied Materials, Inc. Interlocking valve chamber and lid
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US8641014B2 (en) 2010-09-10 2014-02-04 Applied Materials, Inc. Gate valve
EP2592314B1 (en) * 2011-11-10 2016-08-24 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Charged particle beam device, vacuum valve therefore and operation thereof
US9151408B2 (en) * 2012-02-07 2015-10-06 Lam Research Corporation Method of polishing a metal surface of a barrier door of a gate valve used in a semiconductor cluster tool architecture
JP6614971B2 (ja) * 2012-03-19 2019-12-04 ライコン コーポレイション 車椅子リフト装置、車両及び車椅子リフト装置
KR101800719B1 (ko) * 2012-11-30 2017-11-23 어플라이드 머티어리얼스, 인코포레이티드 프로세스 챔버 가스 유동 장치, 시스템들 및 방법들
US9490149B2 (en) * 2013-07-03 2016-11-08 Lam Research Corporation Chemical deposition apparatus having conductance control
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US9638335B2 (en) 2015-01-08 2017-05-02 King Lai Hygienic Materials Co., Ltd. Double sealing valve
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US10582667B2 (en) 2015-10-12 2020-03-10 Applied Quantum Energies, Llc Methods and apparatuses for treating agricultural matter
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JP6607428B1 (ja) * 2019-05-07 2019-11-20 入江工研株式会社 ゲートバルブ
DE102021114421A1 (de) * 2021-06-04 2022-12-08 Vat Holding Ag Ventilplatte zum Abdichten einer Ventilöffnung eines Vakuumventils
CN115435101B (zh) * 2022-11-03 2023-02-28 中国空气动力研究与发展中心设备设计与测试技术研究所 一种大型电驱动矩形真空闸板阀及运动控制方法

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Also Published As

Publication number Publication date
US6079693A (en) 2000-06-27
US20020050581A1 (en) 2002-05-02
US6517048B2 (en) 2003-02-11
US6308932B1 (en) 2001-10-30
JP4328020B2 (ja) 2009-09-09
TW430727B (en) 2001-04-21
KR20010025070A (ko) 2001-03-26
JP2002516968A (ja) 2002-06-11
KR20060039953A (ko) 2006-05-09
US20020050582A1 (en) 2002-05-02
KR100672100B1 (ko) 2007-01-19
EP1078181A1 (en) 2001-02-28
WO1999061822A1 (en) 1999-12-02

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