KR100678821B1 - 검사 장치 - Google Patents

검사 장치 Download PDF

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Publication number
KR100678821B1
KR100678821B1 KR1020050025807A KR20050025807A KR100678821B1 KR 100678821 B1 KR100678821 B1 KR 100678821B1 KR 1020050025807 A KR1020050025807 A KR 1020050025807A KR 20050025807 A KR20050025807 A KR 20050025807A KR 100678821 B1 KR100678821 B1 KR 100678821B1
Authority
KR
South Korea
Prior art keywords
light
conductive film
transparent conductive
lamp
optical filter
Prior art date
Application number
KR1020050025807A
Other languages
English (en)
Korean (ko)
Other versions
KR20060044892A (ko
Inventor
기요시 이요리
마사루 노가미
쇼고 고스게
Original Assignee
가부시키가이샤 히다치 고쿠사이 덴키
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2004097368A external-priority patent/JP4102325B2/ja
Application filed by 가부시키가이샤 히다치 고쿠사이 덴키 filed Critical 가부시키가이샤 히다치 고쿠사이 덴키
Publication of KR20060044892A publication Critical patent/KR20060044892A/ko
Application granted granted Critical
Publication of KR100678821B1 publication Critical patent/KR100678821B1/ko

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
    • B23D79/00—Methods, machines, or devices not covered elsewhere, for working metal by removal of material
    • B23D79/02—Machines or devices for scraping
    • B23D79/10—Accessories for holding scraping tools or work to be scraped
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Length Measuring Devices By Optical Means (AREA)
KR1020050025807A 2004-03-30 2005-03-29 검사 장치 KR100678821B1 (ko)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JPJP-P-2004-00097368 2004-03-30
JP2004097368A JP4102325B2 (ja) 2004-03-30 2004-03-30 検査装置
JP2004274092 2004-09-21
JPJP-P-2004-00274092 2004-09-21

Publications (2)

Publication Number Publication Date
KR20060044892A KR20060044892A (ko) 2006-05-16
KR100678821B1 true KR100678821B1 (ko) 2007-02-05

Family

ID=35049707

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020050025807A KR100678821B1 (ko) 2004-03-30 2005-03-29 검사 장치

Country Status (3)

Country Link
KR (1) KR100678821B1 (zh)
CN (1) CN1677051B (zh)
TW (1) TWI269862B (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108332659A (zh) * 2018-01-25 2018-07-27 深圳市华星光电半导体显示技术有限公司 一种检测氧化铟锡薄膜关键尺寸的装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10173873A (ja) 1996-12-13 1998-06-26 Ricoh Co Ltd 画像読み取り装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2879003B2 (ja) * 1995-11-16 1999-04-05 株式会社生体光情報研究所 画像計測装置
SG103865A1 (en) * 2001-06-01 2004-05-26 Toshiba Kk Film quality inspecting method and film quality inspecting apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10173873A (ja) 1996-12-13 1998-06-26 Ricoh Co Ltd 画像読み取り装置

Also Published As

Publication number Publication date
CN1677051A (zh) 2005-10-05
CN1677051B (zh) 2010-05-05
KR20060044892A (ko) 2006-05-16
TW200535396A (en) 2005-11-01
TWI269862B (en) 2007-01-01

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