KR100615102B1 - 포트 도어에 포드 도어를 보유하기 위한 시스템 - Google Patents

포트 도어에 포드 도어를 보유하기 위한 시스템 Download PDF

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Publication number
KR100615102B1
KR100615102B1 KR1020017000511A KR20017000511A KR100615102B1 KR 100615102 B1 KR100615102 B1 KR 100615102B1 KR 1020017000511 A KR1020017000511 A KR 1020017000511A KR 20017000511 A KR20017000511 A KR 20017000511A KR 100615102 B1 KR100615102 B1 KR 100615102B1
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KR
South Korea
Prior art keywords
pod
door
latch key
port
port door
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
KR1020017000511A
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English (en)
Korean (ko)
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KR20010074703A (ko
Inventor
로센퀴스트프레데릭티.
엔지마이클
Original Assignee
어사이스트 테크놀로지스, 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 어사이스트 테크놀로지스, 인코포레이티드 filed Critical 어사이스트 테크놀로지스, 인코포레이티드
Publication of KR20010074703A publication Critical patent/KR20010074703A/ko
Application granted granted Critical
Publication of KR100615102B1 publication Critical patent/KR100615102B1/ko
Assigned to 크로씽 오토메이션, 인코포레이티드 reassignment 크로씽 오토메이션, 인코포레이티드 권리의 전부이전등록 Assignors: 어사이스트 테크놀로지스, 인코포레이티드
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • E—FIXED CONSTRUCTIONS
    • E05—LOCKS; KEYS; WINDOW OR DOOR FITTINGS; SAFES
    • E05C—BOLTS OR FASTENING DEVICES FOR WINGS, SPECIALLY FOR DOORS OR WINDOWS
    • E05C3/00—Fastening devices with bolts moving pivotally or rotatively
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T292/00—Closure fasteners
    • Y10T292/08—Bolts
    • Y10T292/0863—Sliding and rotary
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T292/00—Closure fasteners
    • Y10T292/08—Bolts
    • Y10T292/0863—Sliding and rotary
    • Y10T292/0866—Multiple head
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T292/00—Closure fasteners
    • Y10T292/08—Bolts
    • Y10T292/1043—Swinging
    • Y10T292/1075—Operating means
    • Y10T292/1083—Rigid

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR1020017000511A 1998-07-14 1999-07-12 포트 도어에 포드 도어를 보유하기 위한 시스템 Expired - Lifetime KR100615102B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US09/115,414 US6502869B1 (en) 1998-07-14 1998-07-14 Pod door to port door retention system
US09/115,414 1998-07-14

Publications (2)

Publication Number Publication Date
KR20010074703A KR20010074703A (ko) 2001-08-09
KR100615102B1 true KR100615102B1 (ko) 2006-08-25

Family

ID=22361242

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020017000511A Expired - Lifetime KR100615102B1 (ko) 1998-07-14 1999-07-12 포트 도어에 포드 도어를 보유하기 위한 시스템

Country Status (7)

Country Link
US (1) US6502869B1 (enExample)
EP (1) EP1105605B1 (enExample)
JP (1) JP4436973B2 (enExample)
KR (1) KR100615102B1 (enExample)
DE (1) DE69934014T2 (enExample)
TW (1) TW439167B (enExample)
WO (1) WO2000004263A1 (enExample)

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* Cited by examiner, † Cited by third party
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US6501070B1 (en) * 1998-07-13 2002-12-31 Newport Corporation Pod load interface equipment adapted for implementation in a fims system
JP4260298B2 (ja) * 1999-07-27 2009-04-30 株式会社ルネサステクノロジ 半導体部品の製造方法
US6652212B2 (en) * 2000-05-02 2003-11-25 Ckd Corporation Cylinder, load port using it, and production system
JP4691281B2 (ja) * 2001-09-03 2011-06-01 ローツェ株式会社 シリンダ及びそれを用いたロードポート並びに生産方式
US6581986B2 (en) * 2000-11-21 2003-06-24 Tri Teq Lock And Security, L.L.C. Bayonet locking system and method for vending machines and the like
US7100340B2 (en) * 2001-08-31 2006-09-05 Asyst Technologies, Inc. Unified frame for semiconductor material handling system
US6595075B1 (en) * 2002-05-06 2003-07-22 Taiwan Semiconductor Manufacturing Co., Ltd Method and apparatus for testing cassette pod door
US7621714B2 (en) * 2003-10-23 2009-11-24 Tdk Corporation Pod clamping unit in pod opener, pod corresponding to pod clamping unit, and clamping mechanism and clamping method using pod clamping unit
US7325685B2 (en) * 2003-11-25 2008-02-05 International Business Machines Corporation Secondary latchkey mechanism and method for reticle SMIF pods
EP1708256A4 (en) * 2003-12-24 2009-03-04 Right Mfg Co Ltd COVER INSTALLATION / DISCONNECTION DEVICE OF A PACKAGING PACK
JP4597708B2 (ja) * 2005-02-25 2010-12-15 平田機工株式会社 Ｆｏｕｐオープナ
US20080112784A1 (en) * 2006-11-13 2008-05-15 Rogers Theodore W Load port door with simplified FOUP door sensing and retaining mechanism
US7850260B2 (en) * 2007-06-22 2010-12-14 Oracle America, Inc. Injection/ejection mechanism
USD576019S1 (en) 2007-10-29 2008-09-02 Newfrey Llc Deadbolt interior
USD631727S1 (en) * 2010-05-14 2011-02-01 Be Aerospace, Inc. Door latch
US9890562B2 (en) * 2012-03-20 2018-02-13 Piotr Leonard Kowalczyk Locking arrangement
US8881297B2 (en) 2012-09-06 2014-11-04 Brooks Automation, Inc. Access arbitration module and system for semiconductor fabrication equipment and methods for using and operating the same
US8915368B2 (en) * 2012-09-20 2014-12-23 Shenzhen China Star Optoelectronics Technology Co., Ltd LCD glass substrate storage tray
CN203879127U (zh) * 2014-05-19 2014-10-15 南京东屋电气有限公司 用于锁具的安全锁死机构
CN108475651B (zh) * 2015-10-01 2022-10-11 恩特格里斯公司 具有改进衬底保持件及门闩锁协助机构的衬底容器
US10930535B2 (en) 2016-12-02 2021-02-23 Applied Materials, Inc. RFID part authentication and tracking of processing components
CN111613503B (zh) * 2020-05-18 2022-09-16 北京北方华创微电子装备有限公司 半导体工艺设备的上电极机构及半导体工艺设备
CN115662931B (zh) * 2022-12-27 2023-03-10 上海隐冠半导体技术有限公司 一种交接装置

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US875087A (en) * 1906-11-01 1907-12-31 Henry B Mackintosh Seal-lock.
US1040963A (en) * 1912-02-15 1912-10-08 Harry J Strong Piano-lock.
GB191891A (en) * 1921-11-16 1923-01-25 Birmingham Small Arms Co Ltd Improvements in or relating to fastening devices
US2493882A (en) * 1945-12-05 1950-01-10 Heintz Mfg Co Door latch structure
US2480434A (en) * 1946-02-16 1949-08-30 Martin Askin Locking device for metal casting molds
US2670232A (en) * 1951-12-05 1954-02-23 Smith Corp A O Cover clamp
US3179457A (en) * 1962-02-05 1965-04-20 Camloc Fastener Corp Readily releasable fastener
US3891253A (en) * 1974-09-26 1975-06-24 American Air Filter Co Door handle and latch device
US4190272A (en) * 1978-07-20 1980-02-26 Beard Eugene R Screw lock for interlocking sliding door and windows
US4413848A (en) * 1981-01-09 1983-11-08 The Knapheide Mfg. Co. Latching mechanism for panels
US4532970A (en) * 1983-09-28 1985-08-06 Hewlett-Packard Company Particle-free dockable interface for integrated circuit processing
US4534389A (en) * 1984-03-29 1985-08-13 Hewlett-Packard Company Interlocking door latch for dockable interface for integrated circuit processing
US4688835A (en) 1984-11-21 1987-08-25 Rockwell International Corporation Adjustable latching apparatus and method of latchably pressing and holding together
DE3532151C1 (de) * 1985-09-10 1987-02-19 Daimler Benz Ag Schloss mit Schliesszylinder fuer eine Bodenklappe eines Kraftwagens
US4995430A (en) * 1989-05-19 1991-02-26 Asyst Technologies, Inc. Sealable transportable container having improved latch mechanism
US5165738A (en) 1991-12-17 1992-11-24 Southco Latch assembly
US5462249A (en) * 1994-01-25 1995-10-31 Calzone; Ronald J. Clamp for securing trailer ramp in transport position
US5584514A (en) * 1994-06-24 1996-12-17 Mascotte; Lawrence L. Window guard locking device
ES2229247T3 (es) * 1995-03-28 2005-04-16 Brooks Automation Gmbh Estacion de carga y descarga para instalaciones de tratamiento de semiconductores.
CA2147306A1 (en) * 1995-04-19 1996-10-20 Peter Anton Ruoss Security grill lock assembly
US5653565A (en) * 1995-07-05 1997-08-05 Asyst Technologies, Inc. SMIF port interface adaptor
US5788458A (en) * 1995-07-10 1998-08-04 Asyst Technologies, Inc. Method and apparatus for vertical transfer of a semiconductor wafer cassette
US5944475A (en) * 1996-10-11 1999-08-31 Asyst Technologies, Inc. Rotated, orthogonal load compatible front-opening interface
US6704998B1 (en) 1997-12-24 2004-03-16 Asyst Technologies, Inc. Port door removal and wafer handling robotic system
US6135698A (en) * 1999-04-30 2000-10-24 Asyst Technologies, Inc. Universal tool interface and/or workpiece transfer apparatus for SMIF and open pod applications

Also Published As

Publication number Publication date
EP1105605A4 (en) 2002-01-02
JP2002520528A (ja) 2002-07-09
WO2000004263A1 (en) 2000-01-27
EP1105605A1 (en) 2001-06-13
KR20010074703A (ko) 2001-08-09
JP4436973B2 (ja) 2010-03-24
EP1105605B1 (en) 2006-11-15
TW439167B (en) 2001-06-07
DE69934014D1 (de) 2006-12-28
US6502869B1 (en) 2003-01-07
DE69934014T2 (de) 2007-03-29

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